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Technological Developments of NexGen Micro-Shutter Array (NGMSA) for the Future Habitable Worlds Observatory (HWO) Flagship Mission

We present the most up to date advancements in production, design, and performance of the NexGen Micro-Shutter Array (NGMSA) for Multi-object Spectroscopy (MOS), intended for the future Habitable Worlds Observatory (HWO) Flagship. A microshutter array functions as a programmable slit mask, to generate slits corresponding to sparsely distributed sources in the field of view of a telescope. In contrast to the magnetic/electrostatic microshutter arrays used in the James Webb Space Telescope (JWST), the NGMSA is fully operated by electrostatics, simplifying overall system. Our small pilot array proved its capability from FORTIS sounding rocket mission in 2019. As we are switching to a larger HWO flight size array process, we encounter multiple processing related issues. Also, there has been individual shutter level issue that impairs operation and performance. We will discuss those problems and strategies to overcome the challenges to achieve an on/off contrast of >1e5 with near 100% shutter operability.

Microshutter↗

The Development of Microshutters for the Near Infrared Spectrograph on the James Webb Space Telescope

One of the James Webb Space Telescope's (JWST) primary science goals is to characterize the epoch of galaxy formation in the universe and observe the first galaxies and clusters of galaxies. This goal requires multi-band imaging and spectroscopic data in the near infrared portion of the spectrum for large numbers of very faint galaxies. Because such objects are sparse on the sky at the JWST resolution, a multi-object spectrograph is necessary to efficiently carry out the required observations. We have developed a fully programmable microshutter array that will be used as the field selector for the Near Infrared Spectrograph (NIRSpec) on JWST. This device allows slits to be opened at the locations of selected galaxies in the field of view while blocking other unwanted light from the sky background and bright sources. In practice, greater than 100 objects within the field of view will be observed simultaneously. In this paper, we describe the microshutter arrays, their development, fabrication, testing, and progress toward delivery of flight qualified devices to the NIRSpec instrument team in 2008.

Silverberg, Robert F.↗

A Microshutter-Based Field Selector for JWST's Near Infared Spectrograph

One of the James Webb Space Telescope's (JWST) primary science goals is to characterize the epoch of galaxy formation in the universe and observe the first galaxies and clusters of galaxies. This goal requires multi-band imaging and spectroscopic data in the near infrared portion of the spectrum for large numbers of very faint galaxies. Because such objects are sparse on the sky at the JWST resolution, a multi-object spectrograph is necessary to efficiently carry out the required observations. We have developed a fully programmable microshutter array that will be used as the field selector for the Near Infrared Spectrograph (NIRSpec) on JWST. This device allows slits to be opened at the locations of selected galaxies in the field of view while blocking other unwanted light from the sky background and bright sources. In practice, greater than 100 objects within the field of view will be observed simultaneously. In this paper, we describe the microshutter arrays, their development, fabrication, testing, and progress toward delivery of flight qualified devices to the NIRSpec instrument team in 2008.

Silvergerg, Rorbert F.↗

Mechanical Behavior of Microelectromechanical Microshutters

A custom micro-mechanical test system was constructed using off-the-shelf components to characterize the mechanical properties of microshutters. Microshutters are rectangular microelectromechanical apertures which open and close about a narrow torsion bar hinge. Displacement measurements were verified using both capacitive and digital image correlation techniques. Repeatable experiments on Si3N4 cantilever beams verified that the test system operates consistently. Using beam theory, the modulus of elasticity of the low stress Si3N4 was approximately 150 GPa, though significant uncertainty exists for this measurement due primarily to imprecise knowledge of the cantilever thickness. Tests conducted on microshutter arrays concluded that reducing the Si3N4 thickness from 250 nm to 500 nm reduces the torsional stiffness by a factor of approximately four. This is in good agreement with analytical and finite element models of the microshutters.

silicon nitride↗

NASA Tech Briefs, May 2012

Topics covered include: An "Inefficient Fin" Non-Dimensional Parameter to Measure Gas Temperatures Efficiently; On-Wafer Measurement of a Multi-Stage MMIC Amplifier with 10 dB of Gain at 475 GHz; Software to Control and Monitor Gas Streams; Miniaturized Laser Heterodyne Radiometer (LHR) for Measurements of Greenhouse Gases in the Atmospheric Column; Anomaly Detection in Test Equipment via Sliding Mode Observers; Absolute Position of Targets Measured Through a Chamber Window Using Lidar Metrology Systems; Goldstone Solar System Radar Waveform Generator; Fast and Adaptive Lossless Onboard Hyperspectral Data Compression System; Iridium Interfacial Stack - IrIS; Downsampling Photodetector Array with Windowing; Optical Phase Recovery and Locking in a PPM Laser Communication Link; High-Speed Edge-Detecting Line Scan Smart Camera; Optical Communications Channel Combiner; Development of Thermal Infrared Sensor to Supplement Operational Land Imager; Amplitude-Stabilized Oscillator for a Capacitance-Probe Electrometer; Automated Performance Characterization of DSN System Frequency Stability Using Spacecraft Tracking Data; Histogrammatic Method for Determining Relative Abundance of Input Gas Pulse; Predictive Sea State Estimation for Automated Ride Control and Handling - PSSEARCH; LEGION: Lightweight Expandable Group of Independently Operating Nodes; Real-Time Projection to Verify Plan Success During Execution; Automated Performance Characterization of DSN System Frequency Stability Using Spacecraft Tracking Data; Web-Based Customizable Viewer for Mars Network Overflight Opportunities; Fabrication of a Cryogenic Terahertz Emitter for Bolometer Focal Plane Calibrations; Fabrication of an Absorber-Coupled MKID Detector; Graphene Transparent Conductive Electrodes for Next- Generation Microshutter Arrays; Method of Bonding Optical Elements with Near-Zero Displacement; Free-Mass and Interface Configurations of Hammering Mechanisms; Wavefront Compensation Segmented Mirror Sensing and Control; Long-Life, Lightweight, Multi-Roller Traction Drives for Planetary Vehicle Surface Exploration; Reliable Optical Pump Architecture for Highly Coherent Lasers Used in Space Metrology Applications; Electrochemical Ultracapacitors Using Graphitic Nanostacks; Improved Whole-Blood-Staining Device; Monitoring Location and Angular Orientation of a Pill; Molecular Technique to Reduce PCR Bias for Deeper Understanding of Microbial Diversity; Laser Ablation Electrodynamic Ion Funnel for In Situ Mass Spectrometry on Mars; High-Altitude MMIC Sounding Radiometer for the Global Hawk Unmanned Aerial Vehicle; PRTs and Their Bonding for Long-Duration, Extreme-Temperature Environments; Mid- and Long-IR Broadband Quantum Well Photodetector; 3D Display Using Conjugated Multiband Bandpass Filters; Real-Time, Non-Intrusive Detection of Liquid Nitrogen in Liquid Oxygen at High Pressure and High Flow; Method to Enhance the Operation of an Optical Inspection Instrument Using Spatial Light Modulators; Dual-Compartment Inflatable Suitlock; Large-Strain Transparent Magnetoactive Polymer Nanocomposites; Thermodynamic Vent System for an On-Orbit Cryogenic Reaction Control Engine; Time Distribution Using SpaceWire in the SCaN Testbed on ISS; and Techniques for Solution- Assisted Optical Contacting.

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Engineered Edge Effect Stress Redistribution in Suspended Thin Film Stacks for Flatness Control

This paper presents the systematic study of edge effect stresses and interaction between thin film stacks to achieve flat suspended thin film structures. Finite element modeling (FEM) was used for rapid analysis of support structures on microshutter array (MSA) shutter blades. The design application aims to flatten the blades to provide ultra-high contrast to optical detectors using MSAs as field masks. This is the first comprehensive study of microscopic surface feature edge effect and film-to-film stress interaction in micro electromechanical systems (MEMS). This study demonstrates flattening of thin film stacks by stress redistribution by induced shear force at the edge of strategically designed reinforcement structures.

Thin Film MEMS↗

Stress Control of Multilayer Suspended MEMS Structures In High Contrast Microshutters

The microshutter array (MSA) is a programmable field mask (Fig. 1) that enables large-format multi-object spectroscopy at extremely high contrast ratios of over 105 in space [1]. Assessment of the first generation MSAs used on the James Webb Space Telescope (JWST) revealed light leakage and stuck shutters due to warping (Fig. 2) [2]. Such leakage is partially reduced with appropriate light shields and mitigation strategies. Anticipation of stricter performance requirements for the upcoming Habitable Worlds Observatory Flagship [3] motivates the study. In this paper, we present the systematic study of film stress effects using finite element modeling (FEM) and analysis of newly fabricated MSAs. We present structural designs to mitigate stress effects and improve flatness of suspended structures in micro-electromechanical systems (MEMS). Our study aims to provide a comprehensive view of film-to-film interaction, mechanical, and structural considerations in design and process definition that goes beyond NGMSA devices. The presented findings can be of value to the stress and morphology control in any suspended MEMS membranes.

Microshutters↗

HST/STIS results on circumstellar disks and jets, future coronography and technology for IR multi-object spectroscopy

Results of studies of circumstellar disks and jets obtained by HST/STIS visible coronagraphy and UV spectroscopy, and by ground-based Fabry-Perot coronagraphy will be presented. Future improvements in coronagraphy will be discussed. The development of microshutter arrays as programmable multi-object selectors for the NGST near IR spectrograph will be described.

Woodgate, Bruce E.↗

NASA Tech Briefs, October 2011

Topics covered include: Laser Truss Sensor for Segmented Telescope Phasing; Qualifications of Bonding Process of Temperature Sensors to Deep-Space Missions; Optical Sensors for Monitoring Gamma and Neutron Radiation; Compliant Tactile Sensors; Cytometer on a Chip; Measuring Input Thresholds on an Existing Board; Scanning and Defocusing Properties of Microstrip Reflectarray Antennas; Cable Tester Box; Programmable Oscillator; Fault-Tolerant, Radiation-Hard DSP; Sub-Shot Noise Power Source for Microelectronics; Asynchronous Message Service Reference Implementation; Zero-Copy Objects System; Delay and Disruption Tolerant Networking MACHETE Model; Contact Graph Routing; Parallel Eclipse Project Checkout; Technique for Configuring an Actively Cooled Thermal Shield in a Flight System; Use of Additives to Improve Performance of Methyl Butyrate-Based Lithium-Ion Electrolytes; Li-Ion Cells Employing Electrolytes with Methyl Propionate and Ethyl Butyrate Co-Solvents; Improved Devices for Collecting Sweat for Chemical Analysis; Tissue Photolithography; Method for Impeding Degradation of Porous Silicon Structures; External Cooling Coupled to Reduced Extremity Pressure Device; A Zero-Gravity Cup for Drinking Beverages in Microgravity; Co-Flow Hollow Cathode Technology; Programmable Aperture with MEMS Microshutter Arrays; Polished Panel Optical Receiver for Simultaneous RF/Optical Telemetry with Large DSN Antennas; Adaptive System Modeling for Spacecraft Simulation; Lidar-Based Navigation Algorithm for Safe Lunar Landing; Tracking Object Existence From an Autonomous Patrol Vehicle; Rad-Hard, Miniaturized, Scalable, High-Voltage Switching Module for Power Applications; and Architecture for a 1-GHz Digital RADAR.

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NASA Tech Briefs, June 2012

Topics covered include: iGlobe Interactive Visualization and Analysis of Spatial Data; Broad-Bandwidth FPGA-Based Digital Polyphase Spectrometer; Small Aircraft Data Distribution System; Earth Science Datacasting v2.0; Algorithm for Compressing Time-Series Data; Onboard Science and Applications Algorithm for Hyperspectral Data Reduction; Sampling Technique for Robust Odorant Detection Based on MIT RealNose Data; Security Data Warehouse Application; Integrated Laser Characterization, Data Acquisition, and Command and Control Test System; Radiation-Hard SpaceWire/Gigabit Ethernet-Compatible Transponder; Hardware Implementation of Lossless Adaptive Compression of Data From a Hyperspectral Imager; High-Voltage, Low-Power BNC Feedthrough Terminator; SpaceCube Mini; Dichroic Filter for Separating W-Band and Ka-Band; Active Mirror Predictive and Requirement Verification Software (AMP-ReVS); Navigation/Prop Software Suite; Personal Computer Transport Analysis Program; Pressure Ratio to Thermal Environments; Probabilistic Fatigue Damage Program (FATIG); ASCENT Program; JPL Genesis and Rapid Intensification Processes (GRIP) Portal; Data::Downloader; Fault Tolerance Middleware for a Multi-Core System; DspaceOgreTerrain 3D Terrain Visualization Tool; Trick Simulation Environment 07; Geometric Reasoning for Automated Planning; Water Detection Based on Color Variation; Single-Layer, All-Metal Patch Antenna Element with Wide Bandwidth; Scanning Laser Infrared Molecular Spectrometer (SLIMS); Next-Generation Microshutter Arrays for Large-Format Imaging and Spectroscopy; Detection of Carbon Monoxide Using Polymer-Composite Films with a Porphyrin-Functionalized Polypyrrole; Enhanced-Adhesion Multiwalled Carbon Nanotubes on Titanium Substrates for Stray Light Control; Three-Dimensional Porous Particles Composed of Curved, Two-Dimensional, Nano-Sized Layers for Li-Ion Batteries 23 Ultra-Lightweight; and Ultra-Lightweight Nanocomposite Foams and Sandwich Structures for Space Structure Applications.

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Fabrication and Calibration of FORTIS

The Johns Hopkins University sounding rocket group is entering the final fabrication phase of the Far-ultraviolet Off Rowland-circle Telescope for Imaging and Spectroscopy (FORTIS); a sounding rocket borne multi-object spectro-telescope designed to provide spectral coverage of 43 separate targets in the 900 - 1800 Angstrom bandpass over a 30' x 30' field-of-view. Using "on-the-fly" target acquisition and spectral multiplexing enabled by a GSFC microshutter array, FORTIS will be capable of observing the brightest regions in the far-UV of nearby low redshift (z approximately 0.002 - 0.02) star forming galaxies to search for Lyman alpha escape, and to measure the local gas-to-dust ratio. A large area (approximately 45 mm x 170 mm) microchannel plate detector built by Sensor Sciences provides an imaging channel for targeting flanked by two redundant spectral outrigger channels. The grating is ruled directly onto the secondary mirror to increase efficiency. In this paper, we discuss the recent progress made in the development and fabrication of FORTIS, as well as the results of early calibration and characterization of our hardware, including mirror/grating measurements, detector performance, and early operational tests of the micro shutter arrays.

Fleming, Brian T.↗

GESE: A Small UV Space Telescope to Conduct a Large Spectroscopic Survey of Z-1 Galaxies

One of the key goals of NASA's astrophysics program is to answer the question: How did galaxies evolve into the spirals and elliptical galaxies that we see today? We describe a space mission concept called Galaxy Evolution Spectroscopic Explorer (GESE) to address this question by making a large spectroscopic survey of galaxies at a redshift, z is approximately 1 (look-back time of approximately 8 billion years). GESE is a 1.5-meter space telescope with an ultraviolet (UV) multi-object slit spectrograph that can obtain spectra of hundreds of galaxies per exposure. The spectrograph covers the spectral range, 0.2-0.4 micrometers at a spectral resolving power, R approximately 500. This observed spectral range corresponds to 0.1-0.2 micrometers as emitted by a galaxy at a redshift, z=1. The mission concept takes advantage of two new technological advances: (1) light-weighted, wide-field telescope mirrors, and (2) the Next- Generation MicroShutter Array (NG-MSA) to be used as a slit generator in the multi-object slit spectrograph.

galaxy evolution↗

Optical Evaluation of Digital Micromirror Devices (DMDs) with UV-Grade Fused Silica, Sapphire, and Magnesium Fluoride Windows and Longterm Reflectance of Bare Devices

Digital micromirror devices (DMDs) are commercial micro-electromechanical systems, consisting of millions of mirrors which can be individually addressed and tilted into one of two states (+/-12deg). These devices were developed to create binary patterns in video projectors, in the visible range. Commercially available DMDs are hermetically sealed and extremely reliable. Recently, DMDs have been identified as an alternative to microshutter arrays for space-based multi-object spectrometers (MOS). Specifically, the MOS at the heart of the proposed Galactic Evolution Spectroscopic Explorer (GESE) uses the DMD as a reprogrammable slit mask. Unfortunately, the protective borosilicate windows limit the use of DMDs in the UV and IR regimes, where the glass has insufficient throughput. In this work, we present our efforts to replace standard DMD windows with custom windows made from UV-grade fused silica, low-absorption optical sapphire (LAOS) and magnesium fluoride (MgF2). We present transmission measurements of the antireflection coated windows and the reflectance of bare (window removed) DMDs. Furthermore, we investigated the long-term stability of the DMD reflectance and experiments for coating DMD active area with a layer of pure aluminum (Al) to boost reflectance performance in the UV spectral range (200−400 nm).

reflectance↗

Optical Evaluation of DMDs with UV-Grade FS, Sapphire, MgF2 Windows and Reflectance of Bare Devices

Digital Micro-mirror Devices (DMDs) have been identified as an alternative to microshutter arrays for space-based multi-object spectrometers (MOS). Specifically, the MOS at the heart of a proposed Galactic Evolution Spectroscopic Explorer (GESE) that uses the DMD as a reprogrammable slit mask. Unfortunately, the protective borosilicate windows limit the use of DMDs in the UV and IR regimes, where the glass has insufficient throughput. In this work, we present our efforts to replace standard DMD windows with custom windows made from UV-grade fused silica, Low Absorption Optical Sapphire (LAOS) and magnesium fluoride. We present reflectance measurements of the antireflection coated windows and a reflectance study of the DMDs active area (window removed). Furthermore, we investigated the long-term stability of the DMD reflectance and recoating device with fresh Al coatings.

Quijada, Manuel A.↗

Transforming any Facility for Meeting Strict Cleanliness Requirements

Over the life of the James Webb Space Telescope (JWST), Integration & Test (I&T) has taken place in areas that needed considerable work to make the facility itself and/or the protocols used while working in the rooms suitable to meet JWST percent area coverage (PAC) and molecular accumulation requirements. In addition to normal particulate matter, JWST had a uniquely significant challenge: fibers! Fibers not only cause much higher PAC levels, but they also risk damaging the angstrom sized Near Infrared Spectrometer (NIRSpec) microshutter array (MSA), which is critical to NIRSpec instrument performance. The primary emphasis of this paper is to address particulate and fiber contamination. The success of the JWST mission required effective cleanrooms, protocols, and mitigations in non-cleanroom areas that were pressed into service to house contamination-sensitive optics and scientific instruments. Some presented profound challenges. These included: NASA’s 60-year-old Johnson Space Center (JSC) Chamber A, which had never been used for anything contamination-sensitive, and the European tropical launch facilities, which were designed to meet International Standard Organization (ISO) Class 8 processing for communication satellites. The final challenge for JWST, as if to stare us in the face and say, “I dare you to try and make me clean enough,” was preparing the 4 areas in the Centre Spatial Guyanais (CSG) Final Assembly Building (BAF) located in French Guiana, a building in which one entire side opens for Ariane 5 rocket ingress and egress. This paper will describe our initial evaluation processes and the actual work undertaken to transform even the most challenging areas into first class cleanrooms that met JWST particulate and fiber requirements.

James Webb Space Telescope↗

Programmable 2-D Addressable Cryogenic Aperture Masks

We are developing a two-dimensional array of square microshutters (programmable aperture mask) for a multi-object spectrometer for the James Webb Space Telescope (JWST). This device will provide random access selection of the areas in the field to be studied. The device is in essence a close packed array of square slits, each of which can be opened independently to select areas of the sky for detailed study.The device is produced using a 100-micron thick silicon wafer as a substrate with 0.5-micron thick silicon nitride shutters on top of it. Silicon nitride has been selected as the blade and flexure material because its stiffness allows thinner and lighter structures than single crystal Si, the chief alternative, and because of its ease of manufacture. The 100 micron silicon wafer is backetched in a high aspect ratio Deep Reactive Ion Etching (Deep RIE) to leave only a support grid for the shutters and the address electronics. The shutter actuation is done magnetically whereas addressing is electrostatic. 128x128 format microshutter arrays have been produced. Their operation has been demostarted on 32x32 subarrays. Good reliability of the fabrication process and good quality of the microshutters has been achieved. The mechanical behavior and optical performance of the fabricated arrays at cryogenic temperature are being studied.

Kutyrev, A. S.↗

NASA Tech Briefs, September 2009

opics covered include: Filtering Water by Use of Ultrasonically Vibrated Nanotubes; Computer Code for Nanostructure Simulation; Functionalizing CNTs for Making Epoxy/CNT Composites; Improvements in Production of Single-Walled Carbon Nanotubes; Progress Toward Sequestering Carbon Nanotubes in PmPV; Two-Stage Variable Sample-Rate Conversion System; Estimating Transmitted-Signal Phase Variations for Uplink Array Antennas; Board Saver for Use with Developmental FPGAs; Circuit for Driving Piezoelectric Transducers; Digital Synchronizer without Metastability; Compact, Low-Overhead, MIL-STD-1553B Controller; Parallel-Processing CMOS Circuitry for M-QAM and 8PSK TCM; Differential InP HEMT MMIC Amplifiers Embedded in Waveguides; Improved Aerogel Vacuum Thermal Insulation; Fluoroester Co-Solvents for Low-Temperature Li+ Cells; Using Volcanic Ash to Remove Dissolved Uranium and Lead; High-Efficiency Artificial Photosynthesis Using a Novel Alkaline Membrane Cell; Silicon Wafer-Scale Substrate for Microshutters and Detector Arrays; Micro-Horn Arrays for Ultrasonic Impedance Matching; Improved Controller for a Three-Axis Piezoelectric Stage; Nano-Pervaporation Membrane with Heat Exchanger Generates Medical-Grade Water; Micro-Organ Devices; Nonlinear Thermal Compensators for WGM Resonators; Dynamic Self-Locking of an OEO Containing a VCSEL; Internal Water Vapor Photoacoustic Calibration; Mid-Infrared Reflectance Imaging of Thermal-Barrier Coatings; Improving the Visible and Infrared Contrast Ratio of Microshutter Arrays; Improved Scanners for Microscopic Hyperspectral Imaging; Rate-Compatible LDPC Codes with Linear Minimum Distance; PrimeSupplier Cross-Program Impact Analysis and Supplier Stability Indicator Simulation Model; Integrated Planning for Telepresence With Time Delays; Minimizing Input-to-Output Latency in Virtual Environment; Battery Cell Voltage Sensing and Balancing Using Addressable Transformers; Gaussian and Lognormal Models of Hurricane Gust Factors; Simulation of Attitude and Trajectory Dynamics and Control of Multiple Spacecraft; Integrated Modeling of Spacecraft Touch-and-Go Sampling; Spacecraft Station-Keeping Trajectory and Mission Design Tools; Efficient Model-Based Diagnosis Engine; and DSN Simulator.

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FPGA Control System for the Automated Test of Microshutters

The James Webb Space Telescope, scheduled to replace the Hubble in 2013, must simultaneously observe hundreds of faint galaxies. This requirement has led to the development of a programmable transmission mask which can be adapted to admit light with arbitrary pattern of galaxies into its spectrograph. This programmable mask will contain a large array of micro-electromechanical (MEMs) devices called MicroShutters. These microscopic shutters physically open and close like the shutter on a camera, except each shutter is microscopic in size and an array 365 by 171 is used to select the objects under spectroscopic observation at a given time, and to block the unwanted background light from other areas. NASA developed and is currently refining the exceptionally difficult process of manufacturing these shutters. This paper describes how the authors used LabVIEW FPGA and a reconfigurable I/O board to control the shutters in a test chamber and how the flexibility of the system allows us to continue to modify the control algorithms as NASA optimizes the performance of the MicroShutter arrays.

Lyness, Eric↗