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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 55 records · Page 3
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Anticathode effect on electron kinetics in electron beam generated E × B plasma

Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic (E x B) fields are promising for low damage processing of materials with applications to microelectronics and quantum information systems. In cylindrical e-beam E x B plasmas, radial confinement of electrons and ions is achieved by an axial magnetic field and radial electric field, respectively. To control the axial confinement of electrons, such e-beam generated plasma sources may incorporate a conducting boundary known as an anticathode, which is placed on the axially opposite side of the plasma from the cathode. In this work, it is shown that varying the anticathode voltage bias can control the degree to which the anticathode collects or repels incident electrons, allowing control of warm electron (electron energies in 10–30 eV range) and beam electron population confinement. It is suggested that the effect of the anticathode bias on the formation of these distinct electron populations is also associated with the transition between weak turbulence and strong Langmuir turbulence.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2025

Anticathode effect on multimodal azimuthal oscillations in electron beam generated E×B plasma

Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic (⁠E x B⁠) fields are promising for low-damage (gentle) material processing. However, these plasmas can be subject to the formation of plasma non-uniformities propagating in the ⁠E x B direction. These rotating plasma structures (or “spokes”) enhance the transport of charged species across the magnetic field, which can harm the gentle processing capability of the plasma. In this work, we investigate the role of electrostatically active boundaries on the spoke formation by incorporating a variable bias conducting boundary (known as an anticathode) placed on the axially opposite side of the cathode. Our findings indicate azimuthal mode suppression occurs when the anticathode is electron collecting. Furthermore, we show selective azimuthal mode suppression by biasing the anticathode to an intermediate potential between the cathode and anode potentials. In conclusion, these findings suggest a link between the axial electron confinement in the e-beam generated plasma and azimuthally propagating plasma structure formation.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2020

Absolute atomic hydrogen density measurements in an atmospheric pressure plasma jet: generation, transport and recombination from the active discharge region to the effluent

Atomic hydrogen (H) generated by atmospheric pressure radio frequency (RF) plasma jet is investigated by two-photon absorption laser induced fluorescence in a He-H 2 mixture. The reported time and spatially resolved H density profiles enable a detailed analysis of the species generation, transport and decay along the axis of symmetry of the jet. Here, the H density distribution for a continuous RF plasma jet corresponds well with the outcome of a Pseudo-1D plug flow model. In addition, RF power modulation has a strong effect on the H density in the active discharge region but has a negligible effect on the H density in the far effluent.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2025

Multimodal azimuthal oscillations in electron beam generated E×B plasma

Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic (E×B) fields are promising for low-damage material processing. However, these plasmas can be subject to the formation of azimuthally propagating structures that enhance the radial transport of energetic charged species, which can harm the gentle processing capability of the plasma. In this work, we investigate the azimuthal structure formation in an e-beam generated E×B plasma using experimental diagnostics and 2D3V particle-in-cell simulations. Our findings demonstrate the formation of multiple simultaneously occurring azimuthally propagating modes that exhibit nontrivial radial dependence. It is suggested that the multimodal azimuthal spectrum is caused in part by the radial outflow of ions in the plasma.

electron beams↗
DOE OSTI2024

Research and Development to Reduce Impurity Production and Transport of the Impurities to the Target in Linear Plasma Devices Using Helicon Plasma Sources

Linear plasma devices used to test plasma facing materials (PFMs) and components for fusion reactors are often suffering under the production of intrinsic impurities from the plasma source system. Most linear plasma devices use internal electrodes (hollow cathodes, reflex arc, or cascading arc), which typically are the source of the main impurities. The next-generation plasma generators use radio frequency (RF) plasma sources like helicons to avoid internal electrodes. However, high power operation of helicons has proven to result in impurity production due to the high rectified sheath voltages created. Depending on the plasma parameters and magnetic configuration, these impurities can be transported to the target and deposited there to unacceptable high levels. Here, in this contribution, the experimental results from Proto-MPEX are summarized, and the conclusions of the impurity source physics are given. Methods to reduce the impurity production, the impurity transport, and the net deposition on the target are presented. These methods to reduce the impurity production include Faraday screens to reduce the sheath voltage drop, high-Z refractory coatings to reduce the erosion yield, and wall conditioning methods. Methods to reduce the impurity transport include changes in the magnetic configuration as well as electron heating to change axial and radial temperature profiles. Preliminary results on the effectiveness of some of these methods are presented.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2021

Temporal characterization of fundamental plasma parameters in pulsed liquid electrode plasma (LEP) optical emission spectrometry

The fundamental characteristics of liquid electrode plasma (LEP), a pulsed plasma source for optical emission spectrometry, were investigated. Two distinct phases were observed during the process of pulsed plasma generation, namely bubble generation and active plasma discharge. Additionally the ionization efficiency of the LEP, with Mg as a representative analyte, was gauged from the ratio of Mg II 279.553 nm to Mg I 285.213 nm emission and was found to increase from about 5% to 20% in a close-to-linear fashion with the discharge voltage from 800 V to 1200 V. The Mg II/Mg I ratio of the LEP was 2.5 to 3 orders of magnitude less than that typically offered by an inductively coupled plasma (ICP) but was comparable to other solution-based glow discharges. It was found that an off-time interval of more than 150 ms between successive discharge pulses was required to obtain a stable pulse-to-pulse discharge current. Temporally resolved emissions of Mg II 279.6 nm, Mg I 285.2 nm, Fe I 373.5 nm, OH band head at 306 nm, and Hα line at 656.3 nm showed that the background species (OH band and Hα line) reached their maximum emission intensities at around 0.5 ms to 0.7 ms with respect to the onset of the discharge pulse whereas the maximum emissions were observed between 0.7 ms to 0.9 ms for analyte species (Mg and Fe lines). The electron density observed in the present work was in the range from 5.7 × 10 15 cm -3 to 8.2 × 10 15 cm -3 , which was similar to those found in an analytical ICP. The temporal averaged OH rotational temperature was 3300 K, which was comparable to the values of an analytical ICP and solution-based glow discharges. By contrast, the temporally averaged Fe I excitation temperature was around 8900 K, which was even higher than that of an analytical ICP and roughly triple the values obtained by techniques based on glow discharge of liquid samples.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2022

A sustained high-temperature fusion plasma regime facilitated by fast ions

Nuclear fusion is one of the most attractive alternatives to carbon-dependent energy sources. Harnessing energy from nuclear fusion in a large reactor scale, however, still presents many scientific challenges despite the many years of research and steady advances in magnetic confinement approaches. State-of-the-art magnetic fusion devices cannot yet achieve a sustainable fusion performance, which requires a high temperature above 100 million kelvin and sufficient control of instabilities to ensure steady-state operation on the order of tens of seconds. Here, in this study, we report experiments at the Korea Superconducting Tokamak Advanced Research device producing a plasma fusion regime that satisfies most of the above requirements: thanks to abundant fast ions stabilizing the core plasma turbulence, we generate plasmas at a temperature of 100 million kelvin lasting up to 20 seconds without plasma edge instabilities or impurity accumulation. A low plasma density combined with a moderate input power for operation is key to establishing this regime by preserving a high fraction of fast ions. This regime is rarely subject to disruption and can be sustained reliably even without a sophisticated control, and thus represents a promising path towards commercial fusion reactors.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

Estimation of mean electron energy in helium surface ionization waves on dielectric substrates

Abstract The determination of basic plasma parameters in atmospheric pressure discharges is critical to advancing their use in applications. Atmospheric pressure plasma jets have found use in the fields of medicine, agriculture, material modification and others. Atmospheric pressure plasma jets often generate plasma surface ionization waves (SIW) which interact with and propagate over surfaces. Electrical diagnostics are challenging in SIW due to high collision frequencies and small scale of the plasma discharge. This work employs a passive optical emission line ratio technique to estimate the mean electron energy in SIW over planar dielectric substrates. The method uses an intensity ratio of two helium triplet lines: He( 3 3 S ) at 706.5 nm and He( 3 3 D ) at 587.56 nm. A collisional-radiative model is used to correlate line ratio to mean electron energy and determine dependencies on electron density and He/air gas mixture. Mean electron energies ranging from 3–8 eV are determined in He/air mixtures and are found to remain constant as the surface wave propagates radially. This work provides a 2D, time-resolved, mean electron energy diagnostic for surface ionization wave propagation and validation of numerical modeling in atmospheric pressure systems with spatially varying He/air gas mixtures. The model in question is designed for use with any He line ratio in the n = 3 excitation level.

Morsell, Joshua (ORCID:0000000331073002)↗
DOE OSTI2023

Investigation of the significance of excited species in wave-heated dense non-ideal microplasmas using particle-in-cell Monte Carlo-collision modeling

A computational model for the interaction of a high-pressure microplasma with an electromagnetic wave is presented. A one-dimensional particle-in-cell Monte Carlo collision model is used to investigate the plasma non-ideality effects in a second-stage laser-heated xenon plasma with a comprehensive chemistry mechanism, including excited species. A xenon microplasma at a temperature of 300 K and pressure of 10 bar becomes non-ideal after the laser heating stage with lower ionization and electronic excitation barriers, which makes the presence of excited species important to the plasma generation process. For these conditions, two-step ionization via excited species becomes a major contributor to plasma ionization. We find that full ionization of the plasma is obtained in ~2 ps when excited species are included in the chemistry model, as opposed to ~2.5 ps for a chemistry mechanism that does not consider their effect. With excited species, the ionization mode transitions from direct ionization via electron-neutral collisions to direct and stepwise ionization as the plasma generation progresses.

36 MATERIALS SCIENCE↗
DOE OSTI2021

Scenario adaptive disruption prediction study for next generation burning-plasma tokamaks

Next generation High Performance (HP) tokamaks risk damage from unmitigated disruptions at high current and power. Achieving reliable disruption prediction for a device's HP operation based on its Low Performance (LP) data is a key to its success. In this letter, through explorative data analysis and dedicated numerical experiments on multiple existing tokamaks, we demonstrate how the operational regimes of tokamaks can affect the power of a trained disruption predictor. First, our results suggest data-driven disruption predictors trained on abundant LP discharges work poorly on the HP regime of the same tokamak, which is a consequence of the distinct distributions of the tightly correlated signals related to disruptions in these two regimes. Second, we find that matching operational parameters among tokamaks strongly improves cross-machine accuracy which implies our model learns from the underlying scalings of dimensionless physics parameters like q 95 , β p and confirms the importance of these parameters in disruption physics and cross machine domain matching from the data-driven perspective. Finally, our results show in the absence of HP data from the target devices, the best predictivity of the HP regime for the target machine can be achieved by combining LP data from the target with HP data from other machines. Furthermore, these results provide a possible disruption predictor development strategy for next generation tokamaks, such as ITER and SPARC, and highlight the importance of developing baseline scenario discharges of future tokamaks on existing machines to collect more relevant disruptive data.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

Collaborative Research Proposal: Time Resolved Optical Emissions Spectroscopy and Laser Induced Fluorescence Spectroscopy of Nanosecond Pulsed Discharges in a Gas-Liquid Water Film Reactor

Electrical discharge plasma formed in contact with liquid water is of interest for a wide range of applications in chemical, biomedical, agricultural, electrical, and materials science and engineering. Such plasma reactors are of very timely importance since they also have significant disinfection capability by inactivating bacteria, viruses and other pathogens. Many types of plasma sources including those driven by AC, DC, RF, microwave, and pulsed electrical power supplies coupled to a wide range of different electrode configurations and reactor designs have been developed and explored which contact the plasma with liquid water. Recent roadmaps have recommended that further work is needed to develop our understanding of the fundamental chemical and physical process which occur at the interface of non-thermal plasma with liquid water solutions in order to advance this large diversity of applications which ultimately depend upon efficient production of key reactive chemical species. There is a wide range of interacting factors that affect the chemical reactions that occur in the plasma, in the liquid phase, and at the interface. These factors ultimately govern the key reactive chemical species formed and used in the various applications and they include a) the reactor design and input parameters, b) the discharge and transport processes, c) the plasma properties, and d) the resulting chemical reactions. For pulsed discharges, the power supply design and output parameters control the applied voltage, frequency, rise time, and width (duration) of the applied pulses. The reactor design involves specification of the gas-liquid contacting methods, electrode gap distance, reactor volume and shape, and gas and liquid flow rates achievable. The gas and liquid compositions as well as the liquid properties such as pH and conductivity are also of key importance in determination of the resulting chemical reactions. In addition, the important plasma properties include plasma gas temperature, electron density, electron energy (distribution), and size of the plasma channels which are all affected by the discharge and transport properties. Many studies have focused on specific aspects of these various processes. Of particular important and relevance to the proposed work is the utilization of nanosecond pulses to generate plasma in gas-liquid systems, liquid bubbles, underwater, and in gases. Recent advances in nanosecond pulses provide significant advantages in utilization with liquid water. For example, fast rise time and short pulses are less sensitive to water conductivity, such short pulses may provide advantages in fast temporal quenching of the plasma, and fundamental analysis of pulse properties, including pulse shape and width, may be facilitated by investigation of single filamentary fast pulses. Many studies have also dealt with the role of the gas composition on formation of reactive oxygen species (ROS) (i.e., hydroxyl radicals – ·OH, hydrogen peroxide – H 2 O 2 , various atomic oxygen species, ozone-O 3 , hydroperoxyl radicals HO 2 ·) and reactive nitrogen species (RNS) (i.e., nitrogen oxides – NO, NO 2 , N 2 O - collectively termed NO X , nitrite-NO 2 - , nitrate-NO 3 - , peroxynitrite-ONOO - ). The hydroxyl radical is the critical species in many chemical oxidation reactions for chemical degradation of toxic compounds in water and gases and for synthesis of some compounds. The mixture of various nitrogen oxide species is important for many biochemical and biological processes involved in biomedical and agricultural applications including disinfection and fertilizer production. The present proposal focuses on determination of the effects of time resolved electron density and hydroxyl radicals on plasma chemical reactions through collaboration with the Princeton Collaborative Low Temperature Plasma Research Facility (PCRF) at the Princeton Plasma Physics Laboratory (PPPL). In order to further investigate the role of the plasma generated electrons and hydroxyl radicals on the overall formation of the key species including hydrogen peroxide, hydroxyl radicals, and nitrogen oxides, the proposed work, thus seeks to determine high resolution time resolved electron density by optical emissions spectroscopy and time resolved hydroxyl radicals using laser induced fluorescence in the nanosecond discharge reactor. The combination of data on electron density and hydroxyl radical concentration will be utilized in the present work to more fully characterize the chemical reaction processes in this system and to advance the design, development, and operation of such chemical reactors for a wide range of applications.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2020

Laser Plasma Interaction in the MG Magnetic Field (Final Report)

Strong magnetic fields change properties of plasma. Employment of the magnetic fields can improve conditions for inertial confinement fusion. Compression and heating of the magnetized plasma is a base of the MagLIF pulsed power approach to the controlled fusion. Study of expansion and heating of plasma in the external magnetic fields, development of plasma instabilities, parametric and other effects are important for basic physics and applications. The main goal of the research for the grant was experimental investigation of laser produced plasma in the well characterized and controlled MG magnetic fields. We developed a platform for investigation of high intensity laser-plasma interaction (LPI) in the MG fields using a university-scale pulsed power machine. A Zebra machine at UNR generated transverse magnetic fields of 3 MG on the surface of the rod load and longitudinal fields of 1.4 MG in the coil loads. The magnetic fields were characterized with two-color Faraday rotation diagnostics. The pulsed power machine provided almost static magnetic fields for LPI compared to the much faster laser driven magnetic fields. We found that eddy currents in the rising magnetic field generate plasma on the metal targets. Eddy currents did not impact Si and CH dielectric targets. A Leopard laser with intensity in the focus up to 10 19 W/cm 2 produced plasma in the MG magnetic fields. The modified reflected Faraday diagnostics was used to study laser driven B-field at the MTW laser at Laboratory for Laser Energetics, UR. We demonstrated a slow dependence of the magnetic field in the coil on the applied laser intensity. The magnetic field increased by a factor of 2 if laser intensity increased by a factor of 30. This scaling is important for comparison of experiments at different laser facilities. Expansion of the plasma in the 2-3 MG external B-field was studied. Laser-produced plasma in the azimuthal magnetic field took the unique form of a thin disc expanding radially with a velocity of 250 km/s and confined in the vertical direction. A HYDRA MHD program at the University of Rochester was applied for simulations of LPI in the magnetic field B >3 MG. Simulations for the plasma disc parameters and the expansion dynamics were in a good agreement with experiments. Generation of narrow dense plasma jets in the longitudinal magnetic field of 0.6-0.8 MG was studied. Narrow plasma jets reached a length of 3-4 mm with the electron plasma density of (0.2-1.2)x10 20 cm -3 . A jet tip propagated with the velocity of 160-200 km/s. MHD simulations showed a good agreement of the dynamics of the formation of plasma jets with experiments. These jets are relevant to astrophysical jets. Simulations of K-shell spectra of Si plasma was performed for LPI in the B-field. The laser prepulse generated plasma near the laser target. A PrismSPECT model with a MeV electron beam produced by the laser was used. The spectral modelling showed the increased plasma density by a factor by 2-3 in the magnetic field. This was in agreement with the observed dynamics of the plasma plume confined by the axial magnetic field. The two-plasmon decay was studied in the 2.5-3 MG transversal magnetic fields. Strong 2-3.5 nm spectral widening and a 2-4 nm shifts of “red” and “blue” 3/2ω 0 spectral components were observed. The large shift and widening exceed the expected temperature and magnetic shift. PIC simulations are performing to clarify physics of this effect. The experimental research program for the grant is completed. New plasma effects in the MG fields were studied at the university-scale pulsed power generator. Two graduate and two undergraduate UNR and UR students carried experiments at the Zebra generator, supported and developed plasma diagnostics, provided data processing, and performed MHD simulations of LPI in the strong magnetic field. Research results are published in 9 referred papers and presented in 12 conferences. Program manager: Kramer U. Akli; Collaborators: R. C. Mancini and H. Sawada, University of Nevada, Reno (UNR); R. Betti and A. V. Maximov, University of Rochester (UR).

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2020

Unraveling Spatio-Temporal Chemistry Evolution in Laser Ablation Plumes and Its Relation to Initial Plasma Conditions

The chemistry evolution in a laser ablation plume depends strongly on its initial physical conditions. In this article, we investigate the impact of plasma generation conditions on the interrelated phenomena of expansion dynamics, plasma chemistry, and physical conditions. Plasmas are produced from a uranium metal target in air using nanosecond, femtosecond, and femtosecond filament-assisted laser ablation. Time-resolved two-dimensional spectral imaging was performed for evaluating the spatio-temporal evolu-tion of atoms, diatoms, polyatomic molecules, and nanoparticles in situ. Emission spectral features reveal that molecular formation occurs at early times in both femtosecond and filament ablation plumes, although with different temporal decay. In contrast, mo-lecular formation is found to occur at much later times in nanosecond plasma evolution. Spectral modeling is used to infer tem-poral behavior of plasma excitation temperature, and results highlighted that nanosecond plume temperatures decay rapidly while plumes generated by filament ablation show slowest decay. In this work, we find U atoms and UO molecules co-exist in ultrafast laser produced plasmas even at early times after plasma onset owing to favorable temperatures for molecular formation. Regardless of irradiation conditions, plume emission features showed presence of higher oxides (i.e. UxOy), although with different temporal histories. Our study provides insight into the impact of plasma generation conditions on chemistry evolution in plasmas produced from traditional focused femtosecond, nanosecond, and filament-assisted laser ablation.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2026

First field test of a novel optical gas analyser in the exhaust of Wendelstein 7-X

A novel optical gas analyser, designed for isotope-resolved exhaust composition measurement, was field-tested at Wendelstein 7-X (W7-X) to validate its laboratory-proven concept under operational fusion experiment conditions. The system, Optix, comprises a cold cathode remote plasma generator and a high-resolution Fabry–Perot spectrometer and was deployed in the exhaust line of W7-X during the OP2.3 campaign. The injection of 3 He and 4 He for minority ion-cyclotron heating provided a test case for helium isotope discrimination. Despite limitations due to background gas and low partial pressures of the target species, isotope-resolved spectral signatures were successfully observed, demonstrating the fundamental viability of the Optix approach. Additionally, the spectrometer was evaluated for plasma emission measurements from both core and edge sightlines. While helium line emission was detectable, interpretation was hindered by complex background signals, highlighting the benefits of controlled remote plasma generators for spectroscopy. This first deployment provides critical insight into pressure requirements, spectral resolution, and operational constraints, informing future applications of optical exhaust diagnostics in fusion devices.

magnetic confinement fusion↗
DOE OSTI2022

Portable diagnostic package for Thomson scattering and optical emission spectroscopy on Princeton field-reversed configuration 2 (PFRC 2)

An Advanced Research Projects Agency-Energy funded diagnostic system has been deployed to the Princeton field-reversed configuration 2 (PFRC-2) device, located at Princeton Plasma Physics Laboratory. The Portable Diagnostic Package (PDP), designed at Oak Ridge National Laboratory, allows for the measurement of Thomson Scattering (TS) for electron density and temperature and Optical Emission Spectroscopy (OES) for ion temperature, impurity density, and ion velocity. A tunable spectrometer on the PDP with three gratings provides the flexibility to measure low (1 eV) and high (1000 eV) electron temperature ranges from TS. Additionally, using a second spectrometer, the OES diagnostic can survey light emission from various ion excitation levels for wide wavelength ranges. The electron density (<2 × 10 19 m –3 ) of plasmas generated in PFRC-2 has been below the PDP TS discrimination threshold, which has made TS signal detection challenging against a high-background of laser stray light. The laser stray light was iteratively reduced by making modifications to the entrance and exit geometry on PFRC-2. Rayleigh scattering experiments on PFRC have yielded the TS discrimination sensitivity to be >1 × 10 20 m –3 for the PDP. A recently implemented narrow-band notch spectral filter that masks the second harmonic 532 nm Nd:YAG laser wavelength has increased the system’s TS light discrimination sensitivity 65 times compared to the instance when the notch filter was not implemented. The hardware implementation including design changes to the flight tubes and Brewster windows will be discussed, along with results from Rayleigh and rotational Raman scattering sensitivity analyses, which were used to establish a quantitative figure of merit on the system performance. Further, the Raman scattering calibration with the notch filter has improved the PDP electron density threshold to 1 ± 0.5 × 10 18 m –3 .

47 OTHER INSTRUMENTATION↗
DOE OSTI2022

Plasma-Assisted Epitaxy of Piezoelectric Sc x Al 1-x N Films on Sapphire for Use in Harsh-Environment Microwave Acoustic Sensors

The Sc x Al 1-x N wurtzite structure has been shown theoretically and experimentally to exhibit significantly higher piezoelectric coupling compared to pure AlN. In this work, a plasma-assisted epitaxial growth method has been used to synthesize epitaxial (0002) Sc x Al 1-x N films on c-sapphire substrates from x = 0.07 to 0.30 by co-evaporating high-purity Sc and Al sources in the presence of a nitrogen plasma generated by an RF plasma source. Epitaxial Sc x Al 1-x N films with highly oriented (0002) grains and in-plane registry were produced on c-sapphire substrates that were pre-exposed to the nitrogen plasma to form an oxynitride seed layer. Growth of Sc x Al 1-x N films was carried out at 930°C under both metal-rich and N-rich conditions using precisely controlled Sc, Al, and N-plasma fluxes. Metal-rich depositions yielded non-(0002)-oriented Sc x Al 1-x N grains and intermetallic ScAl grains. Nitrogen-rich growth with a Sc/Al flux ratio of 1/3 produced the best (0002) epitaxy as determined by x-ray diffraction analysis. Surface acoustic wave resonator (SAWR) devices were fabricated from 500-nm-thick Sc x Al 1-x N and AlN films to extract their electromechanical coupling coefficients, k 2 . As the Sc concentration in the films increases, the degree of (0002) epitaxy is reduced, yet the value of k 2 increases becasue there is more Sc in the wurzite lattice despite the decreased level of (0002) grain alignment. As a result, the use of a 10-nm-thick Si x N y capping layer on top of the Sc x Al 1-x N films aids in preventing etching during SAWR device photolithography and also helps hinder film oxidation up to 800°C.

36 MATERIALS SCIENCE↗
DOE OSTI2024

High Throughput Source-less Plasma Deposition of Structured Silicon Anodes for Lithium-Ion Batteries

Amprius developed a manufacturing solution for silicon nanowire anode that relies on an inexpensive, high throughput, and high gas precursor utilization plasma deposition method that uses the anode foils as electrodes for plasma generation. The capacitively couple plasma (CCP) method is used in semiconductor and photovoltaic industry and Amprius modified existing high throughput equipment to use anode foils and to deposit amorphous silicon. The equipment was installed ahead of the program at Amprius site. The rest of the tasks included foil handling and process development. The equipment passed site acceptance tests (SAT) and the process parameter mapping was completed, indicating that the target process window limits produce output materials at the rate and with yield and specifications that meet the manufacturing target criteria. Amprius has hired supporting personnel to optimize processes and run the equipment. A parallel task verified the baseline performance of the silicon anode material, to be used as reference for the new manufacturing method.

25 ENERGY STORAGE↗