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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 577 records · Page 32
All sourcesNASA NTRSDOE OSTI
DOE OSTI2023

Quantum Emitter Formation Dynamics and Probing of Radiation-Induced Atomic Disorder in Silicon

Near-infrared color centers in silicon are emerging candidates for on-chip integrated quantum emitters, optical-access quantum memories, and sensing. We access ensemble G-color-center formation dynamics and radiation-induced atomic disorder in silicon for a series of megaelectronvolt proton-flux conditions. The photoluminescence results reveal that the G centers are formed more efficiently by pulsed-proton irradiation than by continuous-wave proton irradiation. The enhanced transient excitations and dynamic annealing within nanoseconds allows optimization of the ratio of G-center formation to nonradiative defect accumulation. The G centers preserve narrow line widths of about 0.1 nm when they are generated by moderate pulsed-proton fluences, while the line width broadens significantly as the pulsed-proton fluence increases. This implies vacancy or interstitial clustering by overlapping collision cascades. The tracking of G-center properties for a series of irradiation conditions enables sensitive probing of atomic disorder, serving as a complementary analytical method for sensing damage accumulation. Aided by ab initio electronic structure calculations, we provide insight into the atomic disorder induced inhomogeneous broadening by introducing vacancies, silicon interstitials, and oriented strain fields in the vicinity of a G center. A vacancy leads to a tensile strain and can result in either a red shift or a blue shift of the G-center emission, depending on its position relative to the G center. Meanwhile, Si interstitials lead to compressive strain, which results in a monotonic red shift. In conclusion, high-flux and tunable ion pulses enable the exploration of the fundamental dynamics of radiation-induced defects as well as methods for the optimization of G-center formation and qubit synthesis for quantum information processing.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2024

Light-induced microwave noise in superconducting microwave-optical transducers

Microwave-to-optical transducers are integral to the future of superconducting quantum computing, as they would enable scaling and long-distance communication of superconducting quantum processors through optical-fiber links. However, optically induced microwave noise poses a significant challenge in achieving quantum transduction between microwave and optical frequencies. In this work, we study light-induced microwave noise in an integrated electro-optical transducer harnessing the Pockels effect of thin-film lithium niobate. We reveal three sources of added noise with distinctive time constants ranging from sub-100 ns to milliseconds. Furthermore, our results provide insights into the mechanisms and corresponding mitigation strategies for light-induced microwave noise in superconducting microwave-optical transducers and pave the way toward realizing the ultimate goal of quantum transduction.

42 ENGINEERING↗
DOE OSTI2020

Indications for Lifshitz transitions in the nodal-line semimetal ZrSiTe induced by interlayer interaction

The layered material ZrSiTe is currently extensively investigated as a nodal-line semimetal with Dirac-like band crossings protected by nonsymmorphic symmetry close to the Fermi energy. A recent infrared spectroscopy study on ZrSiTe under external pressure found anomalies in the optical response, providing hints for pressure-induced phase transitions at ≈4.1 and ≈ 6.5GPa. By pressure-dependent Raman spectroscopy and x-ray diffraction measurements combined with electronic band structure calculations we find indications for two pressure-induced Lifshitz transitions with major changes in the Fermi surface topology in the absence of lattice symmetry changes. These electronic phase transitions can be attributed to the enhanced interlayer interaction induced by external pressure. Overall, our findings demonstrate the crucial role of the interlayer distance for the electronic properties of layered van der Waals topological materials.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2021

Expansive open Fermi arcs and connectivity changes induced by infrared phonons in ZrTe 5

Expansive open Fermi arcs covering most of the surface Brillouin zone (SBZ) are desirable for detection and control of many topological phenomena, but they have generally been reported for Kramers-Weyl points, or unconventional chiral fermions, pinned at time-reversal invariant momentum in chiral materials. Here using first-principles band structure calculations, we show that for conventional Weyl points in ZrTe 5 with the chirality of +1/–1 near the BZ center at general momentum induced by one of the infrared phonons—the second lowest $B_{1u}$ mode for breaking inversion symmetry—they can also form expansive open Fermi arcs across the SBZ boundary to occupy most of the SBZ when projected on the (001) surface. In this work, we reveal that such expansive open Fermi arcs are evolved from the topological surface states that connect multiple surface Dirac points on the (001) surface of the topological insulator phases without lattice distortion in ZrTe 5 . Furthermore, we find that the connectivity of the induced open Fermi arcs can be changed by the magnitude of the lattice distortion of this infrared phonon mode. Thus, we propose that using coherent optical phonons to modulate lattice parameters can offer ways to induce unique topological features including expansive open Fermi arcs and to dynamically control Fermi arc connectivity in ZrTe 5 .

36 MATERIALS SCIENCE↗
DOE OSTI2023

Impacts of irradiation-induced nanostructure on phonon linewidths and thermal conductivity in U-Zr alloy

Ion irradiation can significantly change material properties. Thermal conductivity degradation of reactor fuel is detrimental to safety and efficiency—driving research on how irradiation impacts heat-carrying phonons. Here, we report the measurements of phonon dispersion and lifetimes (inverse linewidths) in freestanding irradiated crystals and reveal the relationship between thermal conductivity and proton irradiation induced nanostructures in UZr 2.6 using inelastic x-ray scattering, electron microscopy, modulated thermoreflectance, and first-principles calculations. Irradiation results in more significant increases in phonon linewidths and decreased thermal conductivity in the basal plane than that along the c axis, decreasing thermal conductivity anisotropy. Furthermore, microscopy reveals that this results from irradiation induced nanoprecipitates and metastable phase separation. Surprisingly, irradiation leads to smaller phonon linewidths near some zone boundaries, which we attribute to irradiation induced short-range order.

36 MATERIALS SCIENCE↗
DOE OSTI2024

Laser-induced quenching of metastability at the Mott insulator to metal transition

There is growing interest in strongly correlated insulator thin films because the intricate interplay of their intrinsic and extrinsic state variables causes memristive behavior that might be used for biomimetic devices in the emerging field of neuromorphic computing. Here, in this study, we find that laser irradiation tends to drive V 2 ⁢O 3 from supercooled/superheated metastable states toward thermodynamic equilibrium, most likely in a nonthermal way. We study thin films of the prototypical Mott-insulator V2⁢O3, which show spontaneous phase separation into metal-insulator herringbone domains during the Mott transition. Here, we use low-temperature microscopy to investigate how these metal-insulator domains can be modified by scanning a focused laser beam across the thin film surface. We find that the response depends on the thermal history: When the thin film is heated from below the Mott transition temperature, the laser beam predominantly induces metallic domains. On the contrary, when the thin film is cooled from a temperature above the transition, the laser beam predominantly induces insulating domains. Very likely, the V 2 ⁢O 3 thin film is in a superheated or supercooled state, respectively, during the first-order phase transition, and the perturbation by a laser beam drives these metastable states into stable ones. This way, the thermal history is locally erased. Our findings are supported by a phenomenological model with a laser-induced lowering of the energy barrier between the metastable and equilibrium states.

Materials Science↗
DOE OSTI2025

Light-induced anomalous Hall conductivity in the massive three-dimensional Dirac semimetal Co 3 ⁢Sn 2 ⁢S 2

Weyl semimetals can emerge from Dirac semimetals when the time-reversal or spatial-inversion symmetries are broken. Recently, it has been proposed based on Floquet theory that Dirac semimetals can be converted into Weyl semimetals even by shining circularly polarized light (CPL). Here we have investigated the possibility of such a Dirac-Weyl conversion by measuring the CPL-induced anomalous Hall conductivity (AHC) in a massive 3D Dirac semimetal Co 3 ⁢Sn 2 ⁢S 2 in the paramagnetic phase using ultrafast midinfrared pump-terahertz Faraday rotation probe spectroscopy. We find that the field-strength and driving frequency dependence of the observed AHC is well accounted for by CPL-induced nonzero Berry curvature associated with the splitting of the Dirac bands as predicted by the Floquet theory. As a result, the estimated splitting of the Dirac bands reaches about 60% of the mass gap and the calculated CPL-induced AHC quantitatively reproduces the experimental observation, demonstrating a promising route toward the realization of Floquet-Weyl states from massive Dirac semimetals.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2023

Cross sections for neutron-induced reactions from surrogate data: Reexamining the Weisskopf-Ewing approximation for ( n , n ' ) and ( n , 2 n ) reactions

Background: Modeling nuclear reaction networks for nuclear science applications and for simulations of astrophysical environments relies on cross section data for a vast number of reactions, many of which have never been measured. Cross sections for neutron-induced reactions on unstable nuclei are particularly scarce, since they are the most difficult to measure. Consequently, we must rely on theoretical predictions or indirect measurements to obtain the requisite reaction data. For compound nuclear reactions, the surrogate reaction method can be used to determine many cross sections of interest. Purpose: Earlier work has demonstrated that cross sections for neutron-induced fission and radiative neutron capture can be determined from a combination of surrogate reaction data and theory. For the fission case, it was shown that the Weisskopf-Ewing approximation, which significantly simplifies the implementation of the surrogate method, can be employed. Capture cross sections cannot be obtained, and require a detailed description of the surrogate reaction process. Here, we examine the validity of the Weisskopf-Ewing approximation for determining unknown (n, n') and (n, 2n) cross sections from surrogate data. Methods: Using statistical reaction calculations with realistic parametrizations, we investigate first whether the assumptions underlying the Weisskopf-Ewing approximation are valid for (n, n') and (n, 2n) reactions on representative target nuclei. We then produce simulated surrogate reaction data and assess the impact of applying the Weisskopf-Ewing approximation when extracting (n, n') and (n, 2n) cross sections in situations where the approximation is not strictly justified. Results: We find that peak cross sections can be estimated using the Weisskopf-Ewing approximation, but the shape of the (n, n') and (n, 2n) cross sections, especially for low neutron energies, cannot be reliably determined without accounting for the angular-momentum differences between the neutron-induced and surrogate reaction. Conclusions: To obtain reliable (n, n') and (n, 2n) cross sections from surrogate reaction data, a detailed description of the surrogate reaction mechanisms is required. To do so for the compound-nucleus energies and decay channels relevant to these reactions, it becomes necessary to extend current modeling capabilities.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2024

Electrical control of magnetism by electric field and current-induced torques

The remanent magnetization of ferromagnets has long been studied and used to store binary information. While early magnetic memory designs relied on magnetization switching by locally generated magnetic fields, key insights in condensed matter physics later suggested the possibility of doing it by electrical means instead. In the 1990s, Slonczewski and Berger formulated the concept of current-induced spin torques in magnetic multilayers through which a spin-polarized current generated by a first ferromagnet may be used to switch the magnetization of a second one. This discovery drove the development of spin-transfer-torque magnetic random-access memories (MRAMs). More recent fundamental research revealed other types of current-induced torques named spin-orbit torques (SOTs) and will lead to a new generation of devices including SOT MRAMs and skyrmion-based devices. Parallel to these advances, multiferroics and their magnetoelectric coupling, first investigated experimentally in the 1960s, experienced a renaissance. Dozens of multiferroic compounds with new magnetoelectric coupling mechanisms were discovered and high-quality multiferroic films were synthesized (notably of BiFeO 3 ), also leading to novel device concepts for information and communication technology such as the magnetoelectric spin-orbit (MESO) transistor. The story of the electrical switching of magnetization, which is discussed in this review, is that of a dance between fundamental research (in spintronics, condensed matter physics, and materials science) and technology (MRAMs, MESO transistors, microwave emitters, spin diodes, skyrmion-based devices, components for neuromorphics, etc.). This pas de deux has led to major scientific and technological breakthroughs in recent decades (such as the conceptualization of pure spin currents, the observation of magnetic skyrmions, and the discovery of spin-charge interconversion effects). As a result, this field has not only propelled MRAMs into consumer electronics products but also fueled discoveries in adjacent research areas such as ferroelectrics or magnonics. Here, in this review, recent advances in the control of magnetism by electric fields and by current-induced torques are covered. Fundamental concepts in these two directions are reviewed first, their combination is then discussed, and finally current various families of devices harnessing the electrical control of magnetic properties for various application fields are addressed. The review concludes by giving perspectives in terms of both emerging fundamental physics concepts and new directions in materials science.

36 MATERIALS SCIENCE↗
DOE OSTI2025

Offset Charge Dependence of Measurement-Induced Transitions in Transmons

A key challenge in achieving scalable fault tolerance in superconducting quantum processors is readout fidelity, which lags behind one- and two-qubit gate fidelity. A major limitation in improving qubit readout is measurement-induced transitions, also referred to as qubit ionization, caused by multiphoton qubit-resonator excitation occurring at specific photon numbers. Since ionization can involve highly excited states, it has been predicted that in transmons—the most widely used superconducting qubit—the photon number at which measurement-induced transitions occur is gate-charge dependent. This dependence is expected to persist deep in the transmon regime where the qubit frequency is gate-charge insensitive. We experimentally confirm this prediction by characterizing measurement-induced transitions with increasing resonator photon population while actively calibrating the transmon’s gate charge. Furthermore, because highly excited states are involved, achieving quantitative agreement between theory and experiment requires accounting for higher-order harmonics in the transmon Hamiltonian.

Quantum circuits↗
DOE OSTI2025

Suppressing Screening-Current-Induced Strain in a 72-mm-Bore REBCO Insert for a 20-T Magnet: A Numerical Study

Rare-earth barium copper oxide (REBCO) high-temperature superconducting (HTS) magnets are considered a game changer for the capability of generating magnetic fields exceeding 20 T at or above liquid helium temperature, combined with the potential for substantially reduced manufacturing and operational costs. Princeton Plasma Physics Laboratory is dedicated to developing large-bore high-field superconducting magnet systems to support forefront physics research. Here, our current project focuses on a φ72-mm cold-bore REBCO insert comprising 21 dry-wound double-pancake coils, designed to generate at least 8 T when nested within a 12-T outsert magnet. A significant challenge for high-field REBCO magnets is the time-varying-magnetic-field-induced screening currents (SC) in the REBCO conductors, which can cause localized strain and stress concentrations. This paper presents a numerical study of the SC-induced strain in the REBCO insert magnet, confirming that the SC-induced strain can be substantially suppressed by energizing the REBCO insert before the outsert magnets. We discuss and reveal the mechanism behind this reduction. By applying this strategy, we expect to unleash the potential of the REBCO insert magnet to generate up to 12 T in a 12-T background field.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2021

Development of dual‐inducible duet‐expression vectors for tunable gene expression control and CRISPR interference‐based gene repression in Pseudomonas putida KT2440

Summary The development of P. putida as an industrial host requires a sophisticated molecular toolbox for strain improvement, including vectors for gene expression and repression. To augment existing expression plasmids for metabolic engineering, we developed a series of dual‐inducible duet‐expression vectors for P. putida KT2440. A number of inducible promoters (P lac , P tac , P tetR/tetA and P bad ) were used in different combinations to differentially regulate the expression of individual genes. Protein expression was evaluated by measuring the fluorescence of reporter proteins (GFP and RFP). Our experiments demonstrated the use of compatible plasmids, a useful approach to coexpress multiple genes in P. putida KT2440. These duet vectors were modified to generate a fully inducible CRISPR interference system using two catalytically inactive Cas9 variants from S. pasteurianus (dCas9) and S. pyogenes (spdCas9). The utility of developed CRISPRi system(s) was demonstrated by repressing the expression of nine conditionally essential genes, resulting in growth impairment and prolonged lag phase for P. putida KT2440 growth on glucose. Furthermore, the system was shown to be tightly regulated, tunable and to provide a simple way to identify essential genes with an observable phenotype.

59 BASIC BIOLOGICAL SCIENCES↗
DOE OSTI2022

The effect of blood viscosity on shear‐induced hemolysis using a magnetically levitated shearing device

Abstract Introduction Blood contacting medical devices, including rotary blood pumps, can cause shear‐induced blood damage that may lead to adverse effects in patients. Due in part to an inadequate understanding of how cell‐scale fluid mechanics impact red blood cell membrane deformation and damage, there is currently not a uniformly accepted engineering model for predicting blood damage caused by complex flow fields within ventricular assist devices (VADs). Methods We empirically investigated hemolysis in a magnetically levitated axial Couette flow device typical of a rotary VAD. The device is able to accurately control the shear rate and exposure time experienced by blood and to minimize the effects of other uncharacterized stresses. Using this device, we explored the effects of both hematocrit and plasma viscosity on shear‐induced hemolysis to characterize blood damage based on the viscosity‐independent shear rate, rather than on shear stress. Results Over a shear rate range of 20 000 – 80 000 1/s, the Index of Hemolysis (IH) was found to be dependent upon and well‐predicted by the shear rate alone. IH was independent of hematocrit, bulk viscosity, or the suspension media viscosity and less correlated to shear stress (MSE = 0.46–0.75) than to shear rate (MSE = 0.06–0.09). Conclusion This study recommends that future investigations of shear‐induced blood damage report findings with respect to the viscosity‐neutral term of shear rate, in addition to the bulk whole blood viscosity measured at an appropriate shear rate relevant to the flow conditions of the device.

Krisher, James A.↗
DOE OSTI2024

Rev1 overexpression accelerates N -methyl- N -nitrosourea (MNU)-induced thymic lymphoma by increasing mutagenesis

Rev1 has two important functions in the translesion synthesis pathway, including dCMP transferase activity, and acts as a scaffolding protein for other polymerases involved in translesion synthesis. However, the role of Rev1 in mutagenesis and tumorigenesis in vivo remains unclear. We previously generated Rev1-overexpressing (Rev1-Tg) mice and reported that they exhibited a significantly increased incidence of intestinal adenoma and thymic lymphoma (TL) after N-methyl-N-nitrosourea (MNU) treatment. In this study, we investigated mutagenesis of MNU-induced TL tumorigenesis in wild-type (WT) and Rev1-Tg mice using diverse approaches, including whole-exome sequencing (WES). In Rev1-Tg TLs, the mutation frequency was higher than that in WT TL in most cases. However, no difference in the number of nonsynonymous mutations in the Catalogue of Somatic Mutations in Cancer (COSMIC) genes was observed, and mutations involved in Notch1 and MAPK signaling were similarly detected in both TLs. Mutational signature analysis of WT and Rev1-Tg TLs revealed cosine similarity with COSMIC mutational SBS5 (aging-related) and SBS11 (alkylation-related). Interestingly, the total number of mutations, but not the genotypes of WT and Rev1-Tg, was positively correlated with the relative contribution of SBS5 in individual TLs, suggesting that genetic instability could be accelerated in Rev1-Tg TLs. Finally, we demonstrated that preleukemic cells could be detected earlier in Rev1-Tg mice than in WT mice, following MNU treatment. In conclusion, Rev1 overexpression accelerates mutagenesis and increases the incidence of MNU-induced TL by shortening the latency period, which may be associated with more frequent DNA damage-induced genetic instability.

60 APPLIED LIFE SCIENCES↗
DOE OSTI2024

Salinity-Induced Photorespiration in Populus Vascular Tissues Facilitate Nitrogen Reallocation

Adaptation to abiotic stress is critical for the survival of perennial tree species. Salinity affects plant growth and productivity by interfering with major biosynthetic processes. Detrimental effects of salinity may vary between different plant tissues and cell types. However, spatial molecular mechanisms controlling plant responses to salinity stress are not yet thoroughly understood in perennial trees. Here, we used laser capture microdissection in clones of Populus tremula x alba to isolate palisade and vascular cells of intermediary leaf from plants exposed to 150 mM NaCl for 10 days, followed by a recovery period. Cell-specific changes in proteins and metabolites were determined. Salinity induced a vascular-specific accumulation of proteins associated with photorespiration, and the accumulation of serine, 3-phosphoglycerate and NH 4 + suggesting changes in N metabolism. Accumulation of the GLUTAMINE SYNTHETASE 2 protein, and increased GS1.1 gene expression, indicated that NH 4 + produced in photorespiration was assimilated to glutamine, the main amino acid translocated in Populus trees. Further analysis of total soluble proteins in stems and roots showed the accumulation of bark storage proteins induced by the salinity treatments. Collectively, our results suggest that the salt-induced photorespiration in vascular cells mediates N-reallocation in Populus, an essential process for the adaptation of trees to adverse conditions.

59 BASIC BIOLOGICAL SCIENCES↗
DOE OSTI2021

Hydrokinetic Energy Conversion by Flow-Induced Oscillation of Two Tandem Cylinders of Different Stiffness

Abstract The vortex-induced vibration for aquatic clean energy (VIVACE) converter harnesses hydrokinetic energy by enhancing flow-induced oscillations (FIOs) of elastically supported rigid cylinders in a river, tide, or ocean current. The harnessing power depends on the intensity of the oscillation, which is a consequence of the flow–structure interaction. The inflow condition for the downstream (second) cylinder is slowed down and perturbed by the upstream (first) cylinder, due to the shielding effect. Therefore, the optimal structural parameters, i.e., stiffness and damping ratio, for the second cylinder may be different from the first cylinder, in terms of energy harnessing. To improve the performance of the VIVACE converter, a series of experiments are conducted in a recirculating water channel, with various stiffness combinations of two cylinders in tandem. Results show that the stiffness of the second cylinder, K2, does not affect the energy harnessing power in vortex-induced vibration (VIV) occurring at low speeds, because the oscillation of the downstream cylinder in this velocity range is completely dominated by the wake of the upstream cylinder. K2 has a great influence on the harnessing power at higher velocities in the transition region from VIV to galloping and in galloping. Changing K2 onsets and enhances galloping at lower flow velocity and harnesses up to 110% more energy than the case of K1 = K2.

Engineering↗
DOE OSTI2022

X-Ray Induced Chemical Reaction Revealed by In Situ X-Ray Diffraction and Scanning X-Ray Microscopy in 15 nm Resolution

The detection sensitivity of synchrotron-based X-ray techniques has been largely improved due to the ever-increasing source brightness, which has significantly advanced ex situ and in situ research for energy materials such as lithium-ion batteries. However, the strong beam–material interaction arising from the high beam flux can substantially modify the material structure. The beam-induced parasitic effect inevitably interferes with the intrinsic material property, making the interpretation of the experimental results difficult and requiring comprehensive assessments. Here, we present a quantitative study of the beam effect on an electrode material Ag 2 VO 2 PO 4 using four different X-ray characterization methods with different radiation dose rates. The material system exhibits interesting and reversible radiation-induced thermal and chemical reactions, further evaluated under electron microscopy to illustrate the underlying mechanism. Further, the work will provide a guideline for using synchrotron X-rays to distinguish the intrinsic behavior from extrinsic structure change of materials induced by X-rays.

36 MATERIALS SCIENCE↗
DOE OSTI2020

Etching of Si 3 N 4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

An etching system based on the interaction of electrons extracted from a direct current (DC) hollow-cathode (HC) Ar plasma and injected towards a Si3N4 covered silicon substrate located in the downstream reactive environment created by an additional remote CF 4 /O 2 plasma source was developed and evaluated. By controlling the properties of the injected beam electrons, this approach allows to deliver energy to a surface functionalized by exposure to reactive species, and initiate surface etching. The energy of the primary beam electrons is controlled by the acceleration voltage relative to the HC discharge. Ar atoms flow from the high-pressure HC discharge into the low pressure downstream reactive environment in the process chamber. For an acceleration voltage greater than the ionization potential of Ar and/or process gas species, the energetic primary beam electrons produce a secondary plasma in the process chamber, and can also cause additional dissociation. We have characterized the properties of the secondary plasma and also surface etching of Si 3 N 4 as a function of process parameters, including acceleration voltage (0-80 V), discharge current of the HC discharge (1-2 A), pressure (3.5-20 mTorr), source to substrate distance (1.5 to 5 cm), and feed gas composition (20% and 80% O2 in CF 4 /O 2 ). The electron energy probability function (EEPF) measured with a Langmuir probe about 2.5 cm below the extraction ring suggests several major groups of electrons for this situation, including high energy primary beam electrons with an energy that varies as the acceleration voltage is changed and low energy electrons produced by beam electron-induced ionization of the Ar gas in the process chamber. When a remote CF 4 /O 2 plasma is additionally coupled to the process chamber, Si 3 N 4 surfaces can be functionalized, and by varying the energy of the beam electrons, Si 3 N 4 etching can be induced by electron-neutral synergy effect with plasma-surface interaction. For conditions without beam electron injection, the remote plasma etching rate (ER) of Si 3 N 4 depends strongly on the O 2 concentration in the CF 4 /O 2 processing gas mixture and can be suppressed for O 2 -rich process conditions by the formation of a SiONF passivation layer on the Si 3 N 4 surface. The combination of the HC electron beam source with the remote plasma source (HCEB-RP) makes it possible to induce Si 3 N 4 etching for O 2 -rich remote plasma conditions where remote plasma by itself produces negligible Si 3 N 4 etching. The electron enhanced etching of Si 3 N 4 depends strongly on O 2 /CF 4 mixing ratio reflecting changing arrival rates of O and F species at the surface. Optical emission spectroscopy was used to estimate the ratio of gas phase F and O densities and found to be controlled by the gas mixing ratio and independent of HC EB operating conditions. At this time the detailed sequence of events operative in the etching mechanism is unclear. While the increase of the electron energy is ultimately responsible for initiating surface etching, at present we cannot rule out a role of ions from the simultaneously produced secondary plasma in plasma surface interaction mechanisms.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗