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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 595 records · Page 33
All sourcesNASA NTRSDOE OSTI
DOE OSTI2019

Dynamic Self-Assembly of Polyelectrolyte Composite Nanomaterial Film

The aim of this study is not only to investigate the feasibility of using PAH (polyallylamine hydrochloride) and PSS (poly styrene-4-sulfonic acid sodium salt) to prepare a film via a layer by layer self-assembly process entrained with silver nanoparticles, but also to show that the silver nanoparticles crystalline structure can be defined and deposited on the surface of the substrate in the desired alignment structure and manner, which is of great help to research on the LBL method in the cellulose field. The effect of outermost layer variation, assembly layers, and composition of multilayers on the formation of the LBL structure on a nanofibrillated cellulose (NFC)/polyvinyl alcohol (PVA) substrate was investigated. The deposition of PAH and PSS was monitored by Fourier-transform infrared spectroscopy (FT-IR). The morphology of the LBL film layers was observed by scanning electron microscope (SEM) and atomic force microscope (AFM). Furthermore, thermal degradation properties were investigated by thermogravimetric analysis (TGA), and physical properties of multilayer films were tested by a universal mechanical tester. The results reveal that PAH and PSS can be readily deposited on a NFC/PVA substrate by using LBL methodology to prepare self-assembled polyelectrolyte multilayer films. The surface morphology of the LBL composite changed from negative to positive charged depending on the final LBL treatment. Also, according to SEM and AFM analysis, silver nanoparticles were well dispersed in the (PAH/PSS) film, which significantly improved the thermal stability of the composite films.

36 MATERIALS SCIENCE↗
DOE OSTI2022

Transition Metal Carbo-Chalcogenide “TMCC:” A New Family of 2D Materials

A new family of 2D transition metal carbo-chalcogenides (TMCCs) is reported, which can be considered a combination of two well-known families, TM carbides (MXenes) and TM dichalcogenides (TMDCs), at the atomic level. Single sheets are successfully obtained from multilayered Nb 2 S 2 C and Ta 2 S 2 C using electrochemical lithiation followed by sonication in water. The parent multilayered TMCCs are synthesized using a simple, scalable solid-state synthesis followed by a topochemical reaction. Superconductivity transition is observed at 7.55 K for Nb 2 S 2 C. The delaminated Nb 2 S 2 C outperforms both multilayered Nb 2 S 2 C and delaminated NbS 2 as an electrode material for Li-ion batteries. Ab initio calculations predict the elastic constant of TMCC to be over 50% higher than that of TMDC.

superconductors↗
DOE OSTI2019

Competing Interface and Bulk Effect–Driven Magnetoelectric Coupling in Vertically Aligned Nanocomposites

Abstract Room‐temperature magnetoelectric (ME) coupling is developed in artificial multilayers and nanocomposites composed of magnetostrictive and electrostrictive materials. While the coupling mechanisms and strengths in multilayers are widely studied, they are largely unexplored in vertically aligned nanocomposites (VANs), even though theory has predicted that VANs exhibit much larger ME coupling coefficients than multilayer structures. Here, strong transverse and longitudinal ME coupling in epitaxial BaTiO 3 :CoFe 2 O 4 VANs measured by both optical second harmonic generation and piezoresponse force microscopy under magnetic fields is reported. Phase field simulations have shown that the ME coupling strength strongly depends on the vertical interfacial area which is ultimately controlled by pillar size. The ME coupling in VANs is determined by the competition between the vertical interface coupling effect and the bulk volume conservation effect. The revealed mechanisms shed light on the physical insights of vertical interface coupling in VANs in general, which can be applied to a variety of nanocomposites with different functionalities beyond the studied ME coupling effect.

36 MATERIALS SCIENCE↗
DOE OSTI2021

Synthesis of new two-dimensional titanium carbonitride Ti 2 C 0.5 N 0.5 T x MXene and its performance as an electrode material for sodium-ion battery

Two-dimensional (2D) layered transition metal carbides/nitrides, called MXenes, are attractive alternative electrode materials for electrochemical energy storage. Owing to their metallic electrical conductivity and low ion diffusion barrier, MXenes are promising anode materials for sodium-ion batteries (SIBs). Herein, we report on a new 2D carbonitride MXene, viz ., Ti 2 C 0.5 N 0.5 T x (T x stands for surface terminations), and the only second carbonitride after Ti 3 CNT x so far. A new type of in situ HF (HCl/KF) etching condition was employed to synthesize multilayer Ti 2 C 0.5 N 0.5 T x powders from Ti 2 AlC 0.5 N 0.5 . Spontaneous intercalation of tetramethylammonium followed by sonication in water allowed for large-scale delamination of this new titanium carbonitride into 2D sheets. Multilayer Ti 2 C 0.5 N 0.5 T x powders showed higher specific capacities and larger electroactive surface area than those of Ti 2 CT x powders. Multilayer Ti 2 C 0.5 N 0.5 T x powders show a specific capacity of 182 mAh g -1 at 20 mA g -1 , the highest among all reported MXene electrodes as SIBs with excellent cycling stability.

25 ENERGY STORAGE↗
DOE OSTI2018

Effects of proton irradiation on the microstructure and shape recovery characteristics of a NiTi alloy

Highlights: • The complex multilayer structure can be induced by irradiation. • Phase constitution with increased fluence evolved as follows: B19’ → (B19’ + B2 + Ti{sub 2}Ni) → (B2 + Ti{sub 2}Ni + TiH{sub 2}). • The transformation temperature decreases remarkablly with the increasing of irradiation fluence. • The strain recovery characteristics deteriorated significantly with the irradiation fluence increasing. - Abstract: Herein, we investigate the effects of proton irradiation on the structure and shape recovery characteristics of a NiTi alloy and provide a mechanistic explanation of the observed phenomena. Detailed analysis revealed that bombardment with 3 MeV protons induced the formation of a complex multilayer structure comprising TiH{sub 2}, Ti{sub 2}Ni, austenite and austenite-martensite layers along the irradiation direction with increasing distance and the origin of the above structure was shown to be closely related to the preferential sputtering effect and irradiation-induced segregation. Finally, the shape recovery characteristics significantly deteriorated with increasing irradiation fluence, since the multilayer structure hindered the martensitic transformation.

36 MATERIALS SCIENCE↗
DOE OSTI2018

Interfacial bonding mechanism and mechanical properties of micro friction stir blind riveting for multiple Cu/Al ultra-thin layers

Highlights: • Micro Friction Stir Blind Riveting is developed for joining multilayer ultra-thin dissimilar materials. • Interfacial bonding mechanism for different interfaces is identified. • Proposed technique offers better mechanical performance than conventional micro riveting process. • The relationship between each interfacial bonding mechanism and improved mechanical property is elucidated. - Abstract: In this research, bonding mechanisms and mechanical properties were investigated for a newly developed multilayer dissimilar material joining technique, micro friction stir blind riveting (viz. μFSBR), where the multilayer micro joint was made consisting of one Cu layer and three Al layers (each layer having 0.203 mm thickness) connected through Al rivet. Different microscopy techniques were employed (i.e. scanning electron microscopy and transmission electron microscopy) to unearth the bonding mechanisms of the three interfaces (i.e. Al rivet and Cu sheet interface, Cu sheet and Al sheet interface, and Al rivet and Al sheet interface) which revealed intricate yet distinct bonding phenomenon for each interface. A nano-scale diffusion layer in addition to two-way material flow consequential heterogeneous lamellar structures and mechanical interlocking was formed at the Al rivet and Cu sheet interface; Cu particles diffused into a non-uniform thickness thin oxide layer at the Cu sheet and Al sheet interface; and Al sheet experienced grain refinement near the interface close to Al rivet with a nano-scale gap. These observations revealed that both mechanical and metallurgical bonding occurred simultaneously in μFSBR. The formation of different bonding mechanisms resulted in superior bonding strength and absorbed energy compared to conventional micro blind riveting joints, which was further confirmed through layer by layer tensile tests.

36 MATERIALS SCIENCE↗
DOE OSTI2018

Novel hole selective CrOx contact for dopant-free back contact silicon solar cells

Highlights: • The dopant-free back contact solar cells are demonstrated based on hole selective contact material, chromium trioxide (CrO{sub x}, x • CrO{sub x} is first applied in silicon based solar cell as the emitter. • The back contact solar cell which demonstrated an efficiency of 15.8% and high stability was fabricated, by implementing the multilayer films of CrO{sub x} (5 nm)/Au (4 nm)/ CrO{sub x} (5 nm) capped by Ag (500 nm) as the emitter. - Abstract: The dopant-free back contact solar cells are demonstrated based on hole selective contact material, chromium trioxide (CrO{sub x}, x x is first applied in silicon based solar cell as the emitter. Integrating 5 nm CrO{sub x} and 2 nm LiF{sub x} into solar cell as the emitter and the back surface filed, resulted in a device efficiency of 13.6%. For further improvement, the back contact solar cell reaching an efficiency of 15.8% was fabricated, by implementing the multilayer films of CrO{sub x} (5 nm)/Au (4 nm)/ CrO{sub x} (5 nm) as the emitter. The formation of Cr(OH){sub 3} in ambient condition, resulted in a lower work function (4.8 eV) of the CrO{sub x} film. Furthermore, the multilayer back contact solar cell demonstrated a high stability due to CrO{sub x} covered with 500 nm Ag, when stored in ambient air longer than 170 days.

14 SOLAR ENERGY↗
DOE OSTI2023

Pulsed laser ejection of single-crystalline III-V solar cells from GaAs substrates

The best III-V solar cells start out as single-crystalline multilayers on GaAs substrates. Separating these multilayers from their growth substrate enables higher performance and wafer reuse, which are both critical for terrestrial III-V solar cell viability. Here, we remove rigidly bonded, 16 mm 2 x 3.5μm thick devices from a GaAs substrate using an unfocused Nd:YAG laser pulse. The pulse is absorbed by a low-bandgap, lattice-matched layer below the device, driving an ablation event that ejected the crystalline multilayer from the substrate. Minutes of selective wet-chemical etching and device finishing yield a 0.1 cm 2 device with a 17.4% power conversion efficiency and open-circuit voltage of 1.07 V, using AM1.5 direct with no anti-reflection coating. We show that the performance is comparable to similar cells produced via conventional processes. We discuss unique process characteristics, such as the potential to separate wafer-sized solar cells per laser pulse.

14 SOLAR ENERGY↗
DOE OSTI2019

Desorption Kinetics of Carbon Dioxide from a Graphene Covered Pt(111) Surface

The interaction of carbon dioxide (CO2) with a graphene covered Pt(111) surface was investigated using temperature programmed desorption (TPD) and reflection absorption infrared spectroscopy (RAIRS). The TPD spectra show monolayer and multilayer desorption peaks, however, the multilayer peak is not well-separated from the monolayer peak. The TPD spectra for submonolayer and multilayer coverages align on separate common leading edges. This alignment is a signature of zero-order desorption kinetics. The RAIRS spectra for submonolayer coverages have a relatively sharp peak at ~2350 cm-1 which is assigned to the n 3 asymmetric stretch. The peak is observed at the onset of CO2 adsorption and the area of the peak increases linearly with coverage. This suggests that CO2 does not lie flat on the surface but instead has a component of its bond axis perpendicular to the graphene surface.

Smith, Ronald S.↗
DOE OSTI2024

Adsorption Thermodynamics for Process Simulation

Adsorption has rapidly evolved in recent decades and is an established separation technology extensively practiced in gas separation industries and others. However, rigorous thermodynamic modeling of multicomponent adsorption equilibrium remains elusive, and industrial practitioners rely heavily on expensive and time-consuming trial-and-error pilot studies to develop adsorption units. Here, this article highlights the need for rigorous adsorption thermodynamic models and the limitations and deficiencies of existing models such as the extended Langmuir isotherm, dual-process Langmuir isotherm, and adsorbed solution theory. It further presents a series of recent advances in the generalization of the classical Langmuir isotherm of single-component adsorption by deriving an activity coefficient model to account for the adsorbed phase adsorbate–adsorbent interactions, substituting adsorbed phase adsorbate and vacant site concentrations with activities, and extending to multicomponent competitive adsorption equilibrium, both monolayer and multilayer. Requiring a minimum set of physically meaningful model parameters, the generalized Langmuir isotherm for monolayer adsorption and the generalized Brunauer–Emmett–Teller isotherm for multilayer adsorption address various thermodynamic modeling challenges including adsorbent surface heterogeneity, isosteric enthalpies of adsorption, BET surface areas, adsorbed phase nonideality, adsorption azeotrope formation, and multilayer adsorption. Also discussed is the importance of quality adsorption data that cover sufficient temperature, pressure, and composition ranges for reliable determination of the model parameters to support adsorption process simulation, design, and optimization.

09 BIOMASS FUELS↗
DOE OSTI2025

Two-Dimensional Tantalum Carbo-Selenide for Hydrogen Evolution

Herein, we report the synthesis of two-dimensional Ta 2 Se 2 C (2D-Ta 2 Se 2 C) nanosheets using electrochemical lithiation in multilayer Ta 2 Se 2 C followed by sonication in deionized water. Multilayer Ta 2 Se 2 C was obtained via solid-state synthesis of Fe x Ta 2 Se 2 C followed by chemical etching of Fe. 2D-Ta 2 Se 2 C exhibited promising electrocatalytic activity for the hydrogen evolution reaction from water compared to multilayer Ta 2 Se 2 C and 2D-TaSe 2 . 2D-Ta 2 Se 2 C showed an overpotential at 10 mA·cm -2 (η 10 ) of 264 mV, a Tafel slope of 91 mV·dec -1 , and an electrochemically active surface area of 17.61 m ECSA 2 ·g catalyst -1 . The high performance could be attributed to the large surface area of single sheets which hence maximizes the number of exposed catalytic sites and increased density of vacancies, observed with transmission electron microscopy, during synthesis and processing.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2025

Long-Range Charge Transport Facilitated by Electron Delocalization in MoS 2 and Carbon Nanotube Heterostructures

Controlling charge transport at the interfaces of nanostructures is crucial for their successful use in optoelectronic and solar energy applications. Mixed-dimensional heterostructures based on single-walled carbon nanotubes (SWCNTs) and transition metal dichalcogenides (TMDCs) have demonstrated exceptionally long-lived charge-separated states. However, the factors that control the charge transport at these interfaces remain unclear. In this study, we directly image charge transport at the interfaces of single- and multilayered MoS 2 and (6,5) SWCNT heterostructures using transient absorption microscopy. We find that charge recombination becomes slower as the layer thickness of MoS 2 increases. This behavior can be explained by electron delocalization in multilayers and reduced orbital overlap with the SWCNTs, as suggested by nonadiabatic (NA) molecular dynamics (MD) simulations. Dipolar repulsion of interfacial excitons results in rapid density-dependent transport within the first 100 ps. Stronger repulsion and longer-range charge transport are observed in heterostructures with thicker MoS 2 layers, driven by electron delocalization and larger interfacial dipole moments. These findings are consistent with the results from NAMD simulations. Our results suggest that heterostructures with multilayer MoS 2 can facilitate long-lived charge separation and transport, which is promising for applications in photovoltaics and photocatalysis.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2026

Substrate-Directed Dimensional and Phase Control of Peptide Assemblies on Two-Dimensional van der Waals Materials

Understanding and controlling biomolecular self-assembly on van der Waals (vdW) materials has the potential to advance hybrid bioelectronic devices by enabling precise tuning of the interface and modulation of the resulting electronic properties of the biomolecule-vdW heterostructure. However, how surface properties of vdW materials direct biomolecule assembly remains poorly understood. To fill this knowledge gap, we investigated the assembly of a peptide known to assemble into two-dimensional (2D) crystalline films on MoS 2 on three representative vdW surfaces: WS 2 , MoS 2 , and highly oriented pyrolytic graphite (HOPG). Using in situ atomic force microscopy (AFM), we find that assembly is substrate-dependent, resulting in multilayers on WS 2 , monolayers on MoS 2 , and multiple coexisting phases on HOPG. WS 2 exhibits a higher negative charge, strong long-range electrostatic interactions, and extensive hydration layering that may promote multilayer stacking. In contrast, MoS 2 has stronger short-range interactions with the peptides but much weaker long-range interactions and hydration structure, which may favor monolayer formation. Molecular dynamics simulations predict a corresponding switch from monolayer to multilayer aggregates of the adsorbed monomers, reflected in their relative mobilities. On hydrophobic HOPG, the peptides bind most strongly and remain as monomers with high surface mobility. The peptide dimers comprising the basic unit of the crystals are more compact on HOPG, which has a smaller lattice constant than WS 2 or MoS 2 , suggesting strain contributes to stabilizing multiple phases. Our results provide mechanistic insights into how surface charge and hydration structure, and the lattice structure of the substrates governs peptide assembly on vdW materials, offering a framework to rationally control the 2D peptide-vdW heterostructures.

Molecular dynamics simulations↗
DOE OSTI2020

Tuning the Chern number in quantum anomalous Hall insulators

A quantum anomalous Hall (QAH) state is a two-dimensional topological insulating state that has a quantized Hall resistance of h/(Ce 2 ) and vanishing longitudinal resistance under zero magnetic field (where h is the Planck constant, e is the elementary charge, and the Chern number C is an integer). The QAH effect has been realized in magnetic topological insulators and magic-angle twisted bilayer graphene. However, the QAH effect at zero magnetic field has so far been realized only for C = 1. Here we realize a well quantized QAH effect with tunable Chern number (up to C = 5) in multilayer structures consisting of alternating magnetic and undoped topological insulator layers, fabricated using molecular beam epitaxy. The Chern number of these QAH insulators is determined by the number of undoped topological insulator layers in the multilayer structure. Moreover, we demonstrate that the Chern number of a given multilayer structure can be tuned by varying either the magnetic doping concentration in the magnetic topological insulator layers or the thickness of the interior magnetic topological insulator layer. We develop a theoretical model to explain our experimental observations and establish phase diagrams for QAH insulators with high, tunable Chern number. Furthermore, the realization of such insulators facilitates the application of dissipationless chiral edge currents in energy-efficient electronic devices, and opens up opportunities for developing multi-channel quantum computing and higher-capacity chiral circuit interconnects.

36 MATERIALS SCIENCE↗
DOE OSTI2018

Heating rate dependent ignition of Al/Pt nanolaminates through pulsed laser irradiation

Direct laser irradiation of sputter deposited Al/Pt nanolaminate multilayers results in rapid local heating and exothermic mixing of reactant layers. Milli- and microsecond pulsed laser irradiation under certain test conditions leads to single-point ignition of rapid, self-propagating, formation reactions. Multilayers having bilayer thicknesses of 328 nm, 164 nm, and 65 nm are characterized by their ignition onset times and temperatures. Smaller bilayer thickness multilayers require less laser intensity for ignition compared with larger bilayer designs (when utilizing a particular pulse duration). The relationship between laser intensity and ignition onset time is used to calibrate an activation energy for ignition within a finite element reactive heat transport model. The local heating rate is varied from 10 4 K/s to 10 6 K/s by selecting a laser intensity. Kissinger analysis was performed on the heating rate-dependent ignition temperatures measured with high speed pyrometry to experimentally determine an activation energy in the foils of (6.2 ± 1.6 × 10 4 J/mole atoms). Furthermore, this value is then compared to an activation energy produced from model fits to an ignition onset time of 7.2 × 10 4 J/mole atoms.

36 MATERIALS SCIENCE↗
DOE OSTI2018

A nonlinear interface integrated lever mechanism for piezoelectric footstep energy harvesting

Harnessing footstep energy allows for a unique method of power generation from a largely untapped resource, with applications such as instantly charging mobile and wearable electronic devices. This letter presents an easily integrated heel charger to efficiently convert kinematic walking energy into electricity. The heel charger uses a multilayered levered piezoelectric (L-Pie) mechanism associated with a nonlinear mechanical-synchronized switching on inductor circuit (M-SSHI) interface. It tactfully switches on when the foot contacts the ground, and switches off when the foot is lifted. This design takes full advantage of the user's weight, and amplifies footstep displacement by utilizing the lever mechanism to gain maximum deformation of multilayer piezoelectric patches. The experimental results show that the fabricated two-level multilayer L-pie has a top performance of 13.60 mW of AC RMS, a mechanical to AC power conversion efficiency of 7.87%, and a DC RMS power of 6.13 mW, an AC to DC power conversion efficiency of 45.07%, under a harmonic excitation of 2.3 Hz (mimicking fast walking speed: 6.2 km/h for men, 5.55 km/h for women). With an optimal load of 210 kΩ, the two-level L-pie using the M-SSHI has an improvement of 206.45% in DC RMS power compared to a standard 4-diode bridge energy harvesting circuit. Finally, the L-pie design works more efficiently under large force excitation, even with small displacement, which makes this technology optimal for footstep energy harvesting.

42 ENGINEERING↗
DOE OSTI2024

Dissecting neurofilament tail sequence-phosphorylation-structure relationships with multicomponent reconstituted protein brushes

Neurofilaments (NFs) are multisubunit, bottlebrush-shaped intermediate filaments abundant in the axonal cytoskeleton. Each NF subunit contains a long intrinsically disordered tail domain, which protrudes from the NF core to form a “brush” surrounding each NF. Precisely how the tails’ variable charge patterns and repetitive phosphorylation sites mediate their conformation within the brush remains an open question in axonal biology. We address this problem by grafting recombinant NF tail protein constructs NF-Light, -Medium, and -Heavy (NFL, NFM, and NFH) to surfaces, yielding protein brushes of defined stoichiometry that can be phosphorylated in vitro. Atomic force microscopy measurements reveal that brush height depends on composition monotonically but not always linearly for binary NFL:NFM or NFL:NFH systems, and that NFM-based brushes are highly extended, while brushes incorporating the much larger NFH are surprisingly compact even after multisite phosphorylation. Complementary self-consistent field theory (SCFT) predicts multilayer brush morphologies for NFM and phosphorylated NFH brushes. Further experiments and SCFT analysis with designed mutants reveal that N-terminal negative charges in the NFH tail repel phosphorylated residues to generate the multilayer morphology, while the C-terminal charge-neutral region contributes to multilayer brush morphology but not total brush height. Charge-shuffled NFM variants show that charge segregation promotes brush collapse near physiological ionic strengths. Collectively, this study supports a role for NFM in establishing a dynamic range for NF brush conformation, lending insight into previous in vitro and in vivo findings. More broadly, this work establishes a platform for dissecting contributions of disordered protein sequence to conformation at interfaces.

Science & Technology - Other Topics↗
DOE OSTI2019

Preparing for the Next Generation of EUV Lithography at the Center for X-ray Optics

The introduction of EUV lithography into high-volume semiconductor manufacturing this year represents a monumental milestone for EUV technology. After nearly 30 years of development, the EUV research community has overcome many of the key obstacles required to enable the long-awaited integration of EUV lithography into the lab. These obstacles have included: the development of a stable, high-powered EUV source to ensure adequate exposure tool reliability; controlling EUV mask defects and mask contamination; and the development of EUV resists with adequate sensitivity, resolution, and line width roughness to meet the tolerances required for high-volume manufacturing. As EUV moves into its second generation, there will be new challenges facing the community as it works to push EUV technology into the future. Smaller feature sizes will be achieved using higher numerical aperture optics, which are planned to have an anamorphic geometry (asymmetric magnification and numerical aperture between horizontal and vertical axes) to overcome 3D effects at the mask. This new geometry and its larger angle ranges make understanding mask absorber and multilayer effects all the more important. New methods for high-NA wavefront metrology need to be tested to ensure that these optical systems can be aligned to operate with minimal aberrations. Mask defects need to continue to be studied, and the inclusion of EUV pellicles in the roadmap requires that mask inspection and review systems adapt accordingly. Finally, new resists must be developed to support the increased resolution of feature sizes below 8 nm half pitch. The Center for X-ray Optics (CXRO) at Berkeley Lab has been a leader in EUV research for the past 25 years. Leveraging 13.5 nm EUV light from the Advanced Light Source synchrotron facility, CXRO is home to several EUV and soft X-ray (SXR) research tools that have provided important insights into EUV resists, masks, and coatings. The 0.3 NA Microfield exposure tool (MET) and Dose Calibration Tool (DCT) have played an instrumental role in the development of the current generation of high-resolution EUV resists. The Actinic Inspection Tool (AIT) and its successor, SHARP, have enabled aerial image analysis, providing key insights into mask defects, 3D mask effects, illumination, and aberrations. And the CXRO Reflectometer continues to be the industry standard in multilayer coating and EUV mask scattering metrology. To address the new challenges facing the next generation of EUV lithography, CXRO has upgraded its suite of EUV research tools. The 0.5 NA MET5 is a newly commissioned projection lithography tool that is capable of printing feature sizes down to 8 nm half pitch. A new radiation chemistry program is deploying several techniques aimed at dissecting the role of primary photoelectrons and secondary electrons in EUV resists. The SHARP microscope has been outfitted with anamorphic zone plate lenses that can emulate the geometry of next-generation EUV scanners, and the reflectometer has been applied to new scattering experiments for the purpose of understanding the 3D effects of EUV mask multilayers, as well as determining mask properties using scattering profiles. In parallel with these tools, the CXRO High-NA Wavefront Sensing Program is developing high-resolution wavefront sensors suitable for measuring aberrations at high NA. This article presents an overview of these programs and describes how they will address the primary challenges that face the EUV community as it moves to the next generation of EUV lithography.

47 OTHER INSTRUMENTATION↗