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At least 595 records · Page 33

Feature Profile Evolution of SiO2 Trenches In Fluorocarbon Plasmas

Etching of silicon microstructures for semiconductor manufacturing in chlorine plasmas has been well characterized. The etching proceeds in a two-part process, where the chlorine neutrals passivate the Si surface and then the ions etch away SiClx. However, etching in more complicated gas mixtures and materials, such as etching of SiO2 in Ar/C4F8, requires knowledge of the ion and neutral distribution functions as a function of angle and velocity, in addition to modeling the gas surface reactions. In order to address these needs, we have developed and integrated a suite of models to simulate the etching process from the plasma reactor level to the feature profile evolution level. This arrangement allows for a better understanding, control, and prediction of the influence of equipment level process parameters on feature profile evolution. We are currently using the HPEM (Hybrid Plasma Equipment Model) and PCMCM (Plasma Chemistry Monte Carlo Model) to generate plasma properties and ion and neutral distribution functions for argon/fluorocarbon discharges in a GEC Reference Cell. These quantities are then input to the feature scale model, Simulation of Profile Evolution by Level Sets (SPELS). A surface chemistry model is used to determine the interaction of the incoming species with the substrate material and simulate the evolution of the trench profile. The impact of change of gas pressure and inductive power on the relative flux of CFx and F to the wafer, the etch and polymerization rates, and feature profiles will be examined. Comparisons to experimental profiles will also be presented.

Hwang, Helen↗

Cross-Scale Coupling in the Inner Magnetosphere

Magnetosphere-ionosphere (MI) coupling has interested scientists for decades and, in spite of experimental and theoretical research efforts, is still one of the least well-known dynamic processes in space plasma. The reason for this is that the numerous physical processes associated with MI coupling occur over multiple spatial lengths and temporal scales. One typical example of MI coupling is small- and large-scale ring current (RC) electrodynamic coupling. In this talk, we will address the two primary issues of RC electrodynamic coupling: (1) RC self-consistent coupling with electromagnetic ion cyclotron (EMIC) waves (small-scale electrodynamic coupling) and (2) RC self-consistent MI coupling that includes calculation of the magnetospheric electric field (large-scale electrodynamic coupling). We also will emphasize the role of the heavy ions in the number of wave-particle interaction magnetospheric processes. In particular, we will discuss some of the experimental and theoretical studies that have investigated the role of the heavy ions (mainly He(+) and O(+)) in generation and propagation of electromagnetic ion cyclotron waves and their contribution to the heating of magnetospheric electrons and ions. The more recent studies have also shown that the heavy ions can greatly contribute to a generation of lower hybrid waves, ring current precipitation phenomena, and the overall energy redistribution in the inner magnetosphere. Using newly developed 2.5-dimensional particle-in-cell simulations, we study the energization and nonlinear coupling of different plasma waves in the presence of the heavy ions. We have shown that the high frequency wave modes critically depend on the heavy ion density and irrespective of the driven wave modes, both the light and heavy ions undergo significant transverse acceleration. But for the large heavy-ion densities, even the electrons are significantly accelerated in the parallel direction by the waves below the LH frequency.

Khazanov, G. V.↗

Helium plasma operations on ASDEX Upgrade and JET in support of the non-nuclear phases of ITER

For its initial operational phase, ITER has until recently considered using non-nuclear hydrogen (H) or helium (He) plasmas to keep nuclear activation at low levels. To this end, the Tokamak Exploitation Task Force of the EUROfusion Consortium carried out dedicated experimental campaigns in He on the ASDEX Upgrade (AUG) and JET tokamaks in 2022, with particular emphasis put on the ELMy H-mode operation and plasma-wall interaction processes as well as comparison to H or deuterium (D) plasmas. Both in pure He and mixed He + H plasmas, H-mode operation could be reached but more effort was needed to obtain a stable plasma scenario than in H or D. Even if the power threshold for the LH transition was lower in He, entering the type-I ELMy regime appeared to require equally much or even more heating power than in H. Suppression of ELMs by resonant magnetic perturbations was studied on AUG but was only possible in plasmas with a He content below 19%; the reason for this unexpected behaviour remains still unclear and various theoretical approaches are being pursued to properly understand the physics behind ELM suppression. The erosion rates of tungsten (W) plasma-facing components were an order of magnitude larger than what has been reported in hydrogenic plasmas, which can be attributed to the prominent role of He 2+ ions in the plasma. For the first time, the formation of nanoscale structures (W fuzz) was unambiguously demonstrated in H-mode He plasmas on AUG. However, no direct evidence of fuzz creation on JET was obtained despite the main conditions for its occurrence being met. The reason could be a delicate balance between W erosion by ELMs, competition between the growth and annealing of the fuzz, and coverage of the surface with co-deposits.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Optical fiber characteristics and standards; Proceedings of the Meeting, Cannes, France, November 25-27, 1985

Papers are presented on outside vapor deposition, the plasma activated CVD process for large scale production of telecommunication fibers, axial lateral plasma deposition technology from plastic clad silica, coatings for optical fibers, primary coating characterization, and radiation-induced time dependent attenuation in a fiber. Topics discussed include fibers with high tensile strength, the characteristics and specifications of airborne fiber optic components, the baseband frequency response of multimode fibers, and fibers for local and broadband networks. Consideration is given to industrial measurements for single mode and multimode fibers, the characterization of source power distribution in a multimode fiber by a splice offset technique, the measurement of chromatic dispersion in a single mode optical, and the effect of temperature on the refracted near-field optical fiber profiling technique.

Bouillie, Remy↗

Global Geospace Science Programme

The Global Geospace Science (GGS) Program, an element of the international Solar Terrestrial Physics Program dedicated to the study of the global plasma dynamics of the solar-terrestrial environment, is discussed. Past research on the injection of solar wind ions into the magnetosphere and on the detection of ions in the terrestrial ring current of both solar wind and ionospheric origins is reviewed, showing its relevance for the GGS program. Research on the interplanetary magnetic field, the auroral electrojet, the outer magnetosphere, the geomagnetic tail, the ionospheric electric field and the related electron precipitation is also addressed. The results demonstrate that the solar wind and the ionsophere both contribute to the magnetospheric particle population. Unanswered questions regarding hot plasma sources, transport processes, energy storage in the magnetic field, and energization of plasmas are discussed. The relevant mission strategy, instrumentation, theory and modeling, and data collection are addressed.

Parks, George↗

Advances and directions of ion nitriding/carburizing

Ion nitriding and carburizing are plasma activated thermodynamic processes for the production of case hardened surface layers not only for ferrous materials, but also for an increasing number of nonferrous metals. When the treatment variables are properly controlled, the use of nitrogenous or carbonaceous glow discharge medium offers great flexibility in tailoring surface/near-surface properties independently of the bulk properties. The ion nitriding process has reached a high level of maturity and has gained wide industrial acceptance, while the more recently introduced ion carburizing process is rapidly gaining industrial acceptance. The current status of plasma mass transfer mechanisms into the surface regarding the formation of compound and diffusion layers in ion nitriding and carbon build-up ion carburizing is reviewed. In addition, the recent developments in design and construction of advanced equipment for obtaining optimized and controlled case/core properties is summarized. Also, new developments and trends such as duplex plasma treatments and alternatives to dc diode nitriding are highlighted.

Spalvins, Talivaldis↗

Particle simulations in magnetospheric plasmas

In view of the recent remarkable advancement of computer technology and simulation software, simulation studies are one of the most powerful academic tools for establishment of quantitative space physics and modelling of our space environment. The complex nature encountered in space plasma physics has motivated considerable development in computer simulations, which have played an essential role in the development of space plasma theory. This report describes research undertaken to understand physical processes involved in plasma waves observed in the magnetospheric plasmas, and associated nonlinear phenomena such as heating, diffusion, and acceleration of particles due to excited waves. The research explains and clarifies the observational data both qualitatively and quantitatively.

Nishikawa, Ken-Ichi↗

Measurements of electric fields in the solar wind: Interpretation difficulties

The traditionally measured electric fields in the solar wind plasma (about 1-10 mV/m) are not the natural, primordial ones but are the result of plasma-vehicle interaction. The theory of this interaction is not complete now and current interpretation of the measurements can fail. The state of fully ionized plasma depends on the entropy of the creating source and on the process in which plasma is involved. The increasing twofold of a moving volume in the solar wind (with energy transfer across its surface which is comparable with its whole internal energy) is a more rapid process than the relaxation for the pressure. The presumptive source of the solar wind creation - the induction electric field of the solar origin - has very low entropy. The state of plasma must be very far from the state of thermodynamic equilibrium. The internal energy of plasma can be contained mainly in plasma waves, resonant plasma oscillations, and electric currents. The primordial microscopic oscillating electric fields could be about 1 V/m. It can be checked by special measurements, not ruining the natural plasma state. The tool should be a dielectrical microelectroscope outside the distortion zone of the spacecraft, having been observed from the latter.

Chertkov, A. D.↗

Effect of Plasma Sheaths on Earth Re-entry MHD Processes

The first study of the full coupling between the aerothermodynamics, the magnetohydrodynamics, and the plasma sheaths within earth entry flows is here per-formed. The problem tackled herein is representative of a force-generating MHD patch located between the plenum and the frustum of a capsule entering the earth’s atmosphere at Mach 34. The reactions are obtained from a modified 11-species Park chemical solver. The physical model fully couples the drift-diffusion model for the sheaths to the multispecies Navier-Stokes equations for the plasma flow. The Hall and ion slip effects are taken into consideration within the plasma flow and within the sheaths. The effect of the electrode material on the MHD process is studied. Using thoriated tungsten instead of graphite leads to a four-fold increase in the Lorentz forces and also leads to significantly reduced heat fluxes on the cathode. This is attributed to the much higher electrical conductivity of the thoriated tungsten sheath reducing by orders of magnitude the plasma electrical resistance near the surfaces.

Bernard Parent↗

Impulsive plasma transport through the magnetopause

The considered investigation is concerned with a study of the process of localized plasma entry on the basis of first principles. Since the magnetopause often moves at high velocities, an induction electric field must be involved. Attention is given to the case in which the adjacent magnetopause is at rest. Occasionally, a frame moving with the magnetopause in the interaction region is also considered. The employed model is based on the observations provided by ISEE. The considered plasma irregularity, which is denominated a 'cloud', may not have to be a large enhancement in number density or velocity. An examination of the involved physical relations shows that the plasma will create its own electric field, via a polarization current, to make possible a penetration through the magnetopause by the cloud. At the magnetopause the polarization current creates a charge separation electric field which promotes (rather than inhibits) continued flow through the moving magnetopause.

Heikkila, W. J.↗

Langmuir Probe Measurements in an Inductively Coupled Ar/CF4 Plasmas

Technological advancement in the microelectronics industry requires an understanding of the physical and chemical processes occurring in plasmas of fluorocarbon gases, such as carbon tetrafluoride (CF4) which is commonly used as an etchant, and their mixtures to optimize various operating parameters. In this paper we report data on electron number density (ne), electron temperature'(Te), electron energy distribution function (EEDF), mean electron energy, ion number density (ni), and plasma potential (Vp) measured by using Langmuir probe in an inductively coupled 13.56 MHz radio frequency plasmas generated in 50%Ar:50%CF4 mixture in the GEC cell. The probe data were recorded at various radial positions providing radial profiles of these plasma parameters at 10-50 mTorr pressures and 200 W and 300 W of RF power. Present measurements indicate that the electron and ion number densities increase with increase in pressure and power. Whereas the plasma potential and electron temperature decrease with increase in pressure, and they weakly depend on RF power. The radial profiles exhibit that the electron and ion number densities and the plasma potential peak at the center of the plasma with an exponential fall away from it, while the electron temperature has a minimum at the center and it increases steadily towards the electrode edge. The EEDFs have a characteristic drop near the low energy end at all pressures and pressures and their shapes represent non-Maxwellian plasma and exhibit more like Druyvesteyn energy distribution.v

Rao, M. V. V. S.↗

Effects of Kinetic Processes in Shaping Io's Global Plasma Environment: A 3D Hybrid Model

The global dynamics of the ionized and neutral components in the environment of Io plays an important role in the interaction of Jupiter's corotating magnetospheric plasma with Io. The stationary simulation of this problem was done in the MHD and the electrodynamics approaches. One of the main significant results from the simplified two-fluid model simulations was a production of the structure of the double-peak in the magnetic field signature of the I0 flyby that could not be explained by standard MHD models. In this paper, we develop a method of kinetic ion simulation. This method employs the fluid description for electrons and neutrals whereas for ions multilevel, drift-kinetic and particle, approaches are used. We also take into account charge-exchange and photoionization processes. Our model provides much more accurate description for ion dynamics and allows us to take into account the realistic anisotropic ion distribution that cannot be done in fluid simulations. The first results of such simulation of the dynamics of ions in the Io's environment are discussed in this paper.

Lipatov, Alexander S.↗

Effects of Kinetic Processes in Shaping Io's Global Plasma Environment: A 3D Hybrid Model

The global dynamics of the ionized and neutral gases in the environment of Io plays an important role in the interaction of Jupiter s corotating magnetospheric plasma with Io. Stationary simulations of this problem have already been done using the magnetohydrodynamics (MHD) and the electrodynamics approaches. One of the major results of recent simplified two-fluid model simulations [Saur, J., Neubauer, F.M., Strobel, D.F., Summers, M.E., 2002. J. Geophys. Res. 107 (SMP5), 1-18] was the production of the structure of the double-peak in the magnetic field signature of the Io flyby. These could not be explained before by standard MHD models. In this paper, we present a hybrid simulation for Io with kinetic ions and fluid electrons. This method employs a fluid description for electrons and neutrals, whereas for ions a particle approach is used. We also take into account charge-exchange and photoionization processes and solve self-consistently for electric and magnetic fields. Our model may provide a much more accurate description for the ion dynamics than previous approaches and allows us to account for the realistic anisotropic ion velocity distribution that cannot be done in fluid simulations with isotropic temperatures. The first results of such a simulation of the dynamics of ions in Io s environment are discussed in this paper. Comparison with the Galileo IO flyby results shows that this approach provides an accurate physical basis for the interaction and can therefore naturally reproduce all the observed salient features.

Lipatov, Alexander S.↗

Expansion-Driven Self-Magnetization of High-Energy-Density Plasmas

Understanding plasma self-magnetization is one of the fundamental challenges in both laboratory and astrophysical plasmas. Self-magnetization can modify plasma transport properties, altering the dynamical evolution of plasmas. Multiple high-energy-density (HED) experiments have observed the formation of ion-scale magnetic filaments of megagauss strength, though their origin remains debated. Here, in this study, we conduct 2D collisional particle-in-cell (PIC) simulations with a laser ray-tracing module for a fully self-consistent simulation of the plasma ablation, expansion, and magnetization. The simulations use a planar geometry, effectively suppressing the Biermann magnetic fields, to focus on anisotropy-driven instabilities. The laser intensity is varied between 10 13 and 10 14 W/cm 2 , which is relevant to HED and inertial fusion experiments where collisions must be considered. We find that, above a critical intensity, the plasma rapidly self-magnetizes via an expansion-driven Weibel process, producing a plasma beta of 100 (𝛽 = 8⁢𝜋⁢𝑘 𝐵 ⁢𝑛 𝑒 ⁢𝑇 𝑒 /𝐵 2 ) and Hall parameter 𝜔 ce ⁢𝜏 𝑒 >1 within the first few hundred picoseconds. The magnetic field is sufficiently strong to modify plasma heat transport, and simulations with an artificially suppressed magnetic field show noticeably different temperature profiles.

Lezhnin, K. V. [Princeton Plasma Physics Laborator↗

Kinetic Space Weather: Toward a Global Hybrid Model of the Polar Ionosphere-Lower Magnetosphere Plasma Transport

During the indicated period of performance, we had a number of publications concerned with kinetic polar ionosphere-lower magnetosphere plasma transport. For the IUGG 1991-4 Quadrennial Report, we reviewed aspects of U.S. accomplishments concerned with polar plasma transport, among other issues. In another review, we examined the computer simulations of multiple-scale processes in space plasmas, including polar plasma outflow and transport. We also examined specifically multiscale processes in ionospheric outflows. We developed a Generalized Semi-Kinetic(GSK) model for the topside-lower magnetosphere which explored the synergistic action of wave heating and electric potentials in the formation of auroral Ion conics, in particular the "pressure cooker" mechanism. We extended the GSK model all the way down to 120 km and applied this code to illustrate the response of the ionosphere- magnetosphere to soft-electron precipitation and convection-driven frictional ion heating, respectively. Later, the convection-driven heating work was extended to a paper for the Journal of Geophysical Research. In addition to the above full published papers, we also presented the first developments of the coupled fluid-semikinetic model for polar plasma transport during this period. The results from a steady-state treatment were presented, with the second presentation being concerned with the effects of photo-electrons on the polar wind, and the first garnering an outstanding student paper award from the American Geophysical Union. We presented the first results from a time-dependent version of this coupled fluid-semikinetic model.

Horwitz, James L.↗

A deficiency of O III in the Io plasma torus

Evidence for a deficiency of O III ions in the Io plasma torus is reported and implications of this deficiency for the physical processes controlling the plasma are considered. Observations of the O III 5007-A as well as Cl III and S III emissions from the Io plasma torus were made by a ground-based echelle spectrograph and intensified Reticon detector in February and May, 1981. The O III observations allow an upper limit of 4/cu cm to be placed on torus O III abundance, which is inconsistent with expectations for a low density plasma controlled by electron collisions. The inclusion of ion-ion and ion-atom charge exchange reactions and a depleted high energy electron component in the model is found to suppress O III levels, however observed limiting values are only achieved if it is assumed that the O III is kinetically hot. In addition, the charge-exchange model developed is inconsistent with previous observations of the kinetics of the S II-S III system. The present observations also establish upper limits of 2 R on 5518-A and 5538-A Cl III emission, and an emission rate of 58 + or - 40 R for the S III 6312-A line in the hot torus.

Brown, R. A.↗

Global simulation of the solar wind-magnetosphere interaction - The importance of its numerical validity

This paper examines the global interaction of the solar wind with the geomagnetic field, using a newly developed three-dimensional high-precision MHD simulation code which employs the fourth-order Runge-Kutta-Gill scheme in time and the direct finite-difference method in space, and which allows much less numerical error than the conventional code. The simulation reveals in detail the formation processes of the magnetosphere and the bow shock, as well as the plasma sheet formation process. It is shown that, contrary to the conventional understanding, no Kelvin-Helmholtz instability occurs along the magnetopause in an ideal MHD.

Watanabe, K.↗