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At least 595 records · Page 33

Functionalizing magnet additive manufacturing with in-situ magnetic field source

Additive manufacturing via 3-D printing technologies have become a frontier in materials research, including its application in the development and recycling of permanent magnets. This work addresses the opportunity to integrate magnetic field sources into 3-D printing process in order to enable printing, alignment of anisotropic permanent magnets or magnetizing of magnetic filler materials, without requiring further processing. Specifically, a nonaxisymmetric electromagnet-type field source architecture was designed, modelled, constructed, installed to a fused filament commercial 3-D printer, and tested. The testing was performed by applying magnetic field while printing composite anisotropic Nd-Fe-B + Sm-Fe-N powders bonded in Nylon12 (65 vol.%) and recycled Sm-Co powder bonded in PLA (15 vol.%). Magnetic characterization indicated that the degree-of-alignment of the magnet powders increased both with alignment field strength (controlled by the electric current applied to the magnetizing system) and the printing temperature. Both coercivity and remanence were found to be strongly dependent on the degree-of-alignment, except for printing performed below but near the Curie temperature of Nd-Fe-B (310 ° C). At applied field of 0.15 kOe, Sm-Co and hybrid Nd-Fe-B/Sm-Fe-N printed samples showed degrees-of-alignment of 83 % and 65 %, respectively. The variations in coercivity were consistent with previous observations in bonded magnet materials. This work verifies that integration of magnetic field sources into 3-D printing processes will result in magnetic alignment of particles while ensuring that other advantages of 3-D printing are retained.

3-D printing↗

Source attribution of near-surface ozone pollution in Jiangsu Province of China over 2013–2019

Near-surface ozone (O3) is one of the most severe air pollutants in China, particularly over densely populated Jiangsu Province in the Yangtze River Delta. In this study, an O3 source tagging technique is utilized in a chemistry-climate model to quantify the source contributions of various emission sectors and regions for nitrogen oxides (NOx) and volatile organic compounds (VOCs) to O3 concentrations in Jiangsu Province during 2013–2019. The results show that the near-surface O3 in Jiangsu Province is mainly contributed by surrounding and remote anthropogenic NOx emissions through long-range transport. Local anthropogenic NOx emissions account for only 13 % and 18 % of the annual and summertime mean near-surface O3 in Jiangsu Province, respectively. Anthropogenic NOx emissions from the surface transportation, industry, and energy sectors account for 21 %, 22 % and 20 % of the annual mean near-surface O3 concentration in Jiangsu Province, respectively. Biogenic and anthropogenic VOCs emissions each explains one-third of the annual mean near-surface O3 concentration in Jiangsu, while methane and stratospheric chemical production contribute 21 % and 6 %, respectively. The sources from stratospheric production, aircraft, lightning, and foreign emissions are the primary contributors to O3 in the mid- and high troposphere. During high pollution days in Jiangsu Province, the near-surface O3 concentrations increase with the maximum exceeding 20 ppb, which is attributed to both the enhanced photochemical production and regional transport in favorable meteorological conditions.

ozone pollution↗

Techno-economic analysis of carbon dioxide capture from low concentration sources using membranes

Rising carbon dioxide (CO 2 ) levels in the atmosphere lead to global warming, causing climate change. As such, carbon capture has become necessary to slow the increase and reduce CO 2 levels in the atmosphere. Point source emissions have a wide range of CO 2 concentrations, but emissions below 3% CO 2 have mostly been ignored because Carbon capture from these sources has been viewed as costly and economically unsustainable. Membrane technologies are considered the most viable solution by virtue of more energy-efficient operation. Our group at Idaho National Laboratory (INL) has developed poly[bis((2-methoxyethoxy)ethoxy)phosphazene] (MEEP)-based carbon dioxide selective membranes with CO 2 /N 2 selectivity greater than 40 and CO 2 permeability greater than 450 Barrer. To understand the economics of carbon capture, a spreadsheet-based techno-economic analysis (TEA) model was developed to consider multiple parameters, including selectivity and permeability of the membranes, performance conditions such as the number of stages, module material, electricity price, membrane price, and capital financing. The cost of carbon capture in US $\$$/metric ton was calculated at various purities and compared with other membrane processes, cryogenic capture, solvent-based capture, and pressure swing adsorption-based capture. It was determined that a MEEP-based three-stage process had a capture cost of US $\$$ 50.1/metric ton for 99.8% purity CO 2 from a 1% CO 2 feed source in nitrogen (N 2 ). In conclusion, the capture cost using the best performing Pebax-based membrane was 464% higher, cryogenic capture was 60%–140% higher, pressure swing adsorption was 55%–165% higher, and chemical absorption was -10%–110% higher than MEEP-based membrane capture, respectively.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

Geocatalytically generated methane from low-maturity coal and shale source rocks at low temperatures (80–120 °C) over 52 months

Geocatalytic methanogenesis has been proposed to contribute to methane generation from low-maturity coal and shale source rocks. This study contributes further evidence for geocatalytic methanogenesis from low-maturity source rocks based on long-term experiments lasting up to 52 months. Samples from the Upper Devonian New Albany Shale (R o 0.54 %) and Springfield Coal No. 2 (Pennsylvanian; R o 0.54 %) were heated in glass tubes at 80, 100, and 120 °C for 52 months. Sample aliquots from the Upper Cretaceous Second White Specks Formation (R o 0.42 %) were heated in gold tubes at 80 and 100 °C for 42 months at elevated hydrostatic pressures of 100 to 300 MPa. The product gases — methane (CH 4 ) and carbon dioxide (CO 2 ) — were collected and quantified, and gas yields were corrected for leakage from imperfectly closed pores in samples during heating. The results show that longer heating produced more CH 4 . The average CH 4 yields from New Albany Shale and Springfield Coal No. 2 are 0.47 and 3.0 μmol CH 4 per gram of total organic carbon (TOC) over 52 months of heating. Elevated hydrostatic pressure caused lower CH 4 yields from the Second White Specks Formation (3.82 to 1.20 μmol g –1 TOC), suggesting that pressure can retard methanogenesis. Maceral type critically controls the methanogenesis potential of low-maturity coal and shale source rocks. Finally, results of this study provide important insights to the origin of natural gas in low-maturity sedimentary basins.

01 COAL, LIGNITE, AND PEAT↗

Machine learning-assisted identification of potential sources of bias in measurements of prompt-fission neutron spectra

Unrecognized sources of uncertainty (USU) can bias the reported mean and/or covariance of experimental nuclear data. These biases, in turn, can propagate through evaluated nuclear data to application simulations or may poorly inform nuclear theory that is fitted to the experimental data. Such unknown sources of bias must be tied to the inherent physical constituents of the measurements such as the characteristics of a detector response or a background reduction technique. Here, in this article, a sparse Bayesian learning model is used to support experts in their efforts to identify and characterize USU in experimental prompt fission neutron spectra (PFNS) for spontaneous fissioning of 252 Cf by linking observed biases to features of the measurement system. Three different bias components were found. The first acts as a verification case for the algorithm as it identifies a bias coming from a well-known source related to the use of 6 Li in the neutron detection system. The second two cases demonstrate how this method can benefit the evaluation of experimental nuclear data by identifying, quantifying, and relating unknown biases to potential causes.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Chitin extracted from various biomass sources: It's not the same

Here this study demonstrates the use of ionic liquids to successfully extract chitin from different biomass sources and the utilization of the resulting chitins to prepare monofilament fibers. Chitin was extracted from five different biomass sources (processed and raw shrimp shell, crab and lobster shell, and fly larvae) using the ionic liquid (IL) 1-ethyl-3-methylimidazolium acetate ([C 2 mim][OAc]). While processed and raw shrimp shell yielded chitin of high purity in quantitative yield, crab and lobster shell resulted in lower yields of chitin. Fly larva provided chitin severely contaminated with proteins. Each extracted chitin was re-dissolved in the same IL and dry wet jet spun into monofilament fibers to determine any trends in mechanical properties vs. biomass source. The concentration needed to spin fibers was not consistent and had to be adjusted individually for each type of chitin obtained. Chitin from raw shrimp shell produced the strongest fibers, while the chitin from the crab and lobster produced weaker fibers, although, the latter were twice as elastic. The use of fly larvae led to the weakest and least elastic fibers.

60 APPLIED LIFE SCIENCES↗

CG-Kit: Code Generation Toolkit for performant and maintainable variants of source code applied to Flash-X hydrodynamics simulations

CG-Kit is a new Code Generation tool-Kit that we have developed as a part of the solution for portability and maintainability for multiphysics computing applications. The development of CG-Kit is rooted in the urgent need created by the shifting landscape of high-performance computing platforms and the algorithmic complexities of a particular large-scale multiphysics application: Flash-X. To efficiently use computing resources on a heterogeneous node, an application must have a map of computation to resources and a mechanism to move the data and computation to the resources according to the map. Most existing performance portability solutions are focussed on abstracting the expression of computations so that a unified source code can be specialized to run on different resources. However, such an approach is insufficient for a code like Flash-X, which has a multitude of code components that can be assembled in various permutations and combinations to form different instances of applications. Similar challenges apply to any code that has composability, where a single specified way of apportioning work among devices may not be optimal. Additionally, use cases arise where the optimal control flow of computation may differ for different devices while the underlying numerics remain identical. This combination leads to unique challenges including handling an existing large code base in Fortran and/or C/C++, subdivision of code into a great variety of units supporting a wide range of physics and numerical methods, different parallelization techniques for distributed and shared memory systems and accelerator devices, and heterogeneity of computing platforms requiring coexisting variants of parallel algorithms. All of these challenges demand that scientific software developers apply existing knowledge about domain applications, algorithms, and computing platforms to determine custom abstractions and granularity for code generation. There is a critical lack of tools to tackle those problems. CG-Kit is designed to fill this gap by providing a user with the ability to express their desired control flow and computation-to-resource map in the form a pseudocode-like recipe. It consists of standalone tools that can be combined into highly specific and, we argue, highly effective portability and maintainability toolchains. Here we present the design of our new tools: parametrized source trees, control flow graphs, and recipes. The tools are implemented in Python. They are agnostic to the programming language of the source code targeted for code generation. In conclusion, we demonstrate the capabilities of the toolkit with two examples, first, multithreaded variants of the basic AXPY operation, and second, variants of parallel algorithms within a hydrodynamics solver, called Spark, from Flash-X that operates on block-structured adaptive meshes.

Algorithmic portability↗

MITgcm-AD v2: Open source tangent linear and adjoint modeling framework for the oceans and atmosphere enabled by the Automatic Differentiation tool Tapenade

The Massachusetts Institute of Technology General Circulation Model (MITgcm) is widely used by the climate science community to simulate planetary atmosphere and ocean circulations. A defining feature of the MITgcm is that it has been developed to be compatible with an algorithmic differentiation (AD) tool, TAF, enabling the generation of tangent-linear and adjoint models. These provide gradient information which enables dynamics-based sensitivity and attribution studies, state and parameter estimation, and rigorous uncertainty quantification. Importantly, gradient information is essential for computing comprehensive sensitivities and performing efficient large-scale data assimilation, ensuring that observations collected from satellites and in-situ measuring instruments can be effectively used to optimize a large uncertain control space. As a result, the MITgcm forms the dynamical core of a key data assimilation product employed by the physical oceanography research community: Estimating the Circulation and Climate of the Ocean (ECCO) state estimate. Although MITgcm and ECCO are used extensively within the research community, the AD tool TAF is proprietary and hence inaccessible to a large proportion of these users. The new version 2 (MITgcm-AD v2) framework introduced here is based on the source-to-source AD tool Tapenade, which has recently been open-sourced. Another feature of Tapenade is that it stores required variables by default (instead of recomputing them) which simplifies the implementation of efficient, AD-compatible code. The framework has been integrated with the MITgcm model’s main branch and is now freely available.

Adjoints↗

Mitigation and characterization of crosstalk between laser-driven radiography sources

Radiography with multiple probe species offers the potential to extract additional information about a given object as compared to radiography with a single probe species. Notably, the flexibility for high-power, short-pulse lasers to accelerate a variety of particle species makes laser-driven sources an attractive option to achieve multi-probe radiography. However, crosstalk produced by each of laser-driven source may be responsible for substantial backgrounds on detectors, becoming a significant barrier to achieving simultaneous radiography. In this work, we describe measurements of and mitigation strategies against crosstalk between laser-driven radiography sources in experiments at the OMEGA EP laser.

47 OTHER INSTRUMENTATION↗

Development, validation, and verification of multi-pass thermo-mechanical welding simulations using the open-source MOOSE framework: NeT TG4 benchmark weldment

This study develops and validates a sequentially coupled thermo-mechanical welding simulation for the three-pass 316L stainless steel NeT TG4 benchmark weldment using the open-source Multiphysics Object-Oriented Simulation Environment (MOOSE) and the Nuclear Engineering Material model Library (NEML). A diffused ellipsoidal heat source was calibrated against thermocouple data and weld macrographs to accurately model the fusion zone geometry and transient thermal fields. Material hardening is represented using the Lemaitre-Chaboche mixed isotropic-kinematic hardening model, while four annealing models - no annealing, single-stage at 1050 °C and 1300 °C, and two-stage at 800 °C/1300 °C - were implemented to assess the impact of annealing models on the accuracy of the predicted welding-induced plasticity, distortions, and residual stresses. The predictions were validated against experimental measurements and benchmarked against results from commercial software, demonstrating that thermo-mechanical MOOSE welding simulations achieve comparable accuracy with enhanced computational efficiency. This work highlights the potential of using open-source finite element frameworks like MOOSE for advanced manufacturing simulations.

Ji, Wendy [Australian Nuclear Science and Technolo↗

A systematic analytical framework for multi-source municipal solid waste characterization for energy recovery

Advancing municipal solid waste (MSW) management from disposal-oriented practices toward circular, value-driven systems requires standardized methodologies capable of identifying material composition and resource recoverable potential at the point of generation. Despite extensive research, MSW characterization remains fragmented due to inconsistences in sampling methodologies, waste sorting categories, and temporal coverage across previous studies which limit cross-site comparability, reproducibility, and constrain the reliable evaluation of potential resource recovery pathways. This lack of consistency has hindered the development of a unified framework for MSW characterization and resource assessment. This study introduces a standardized, field-validated protocol for MSW sampling and composition analysis that ensures consistent, traceable data across diverse waste sources. The protocol integrates randomized spatial sampling, systematic material sorting, and controlled subsampling for multi-site and multi-season field campaigns. Validation included MSW collection from residential, grocery, restaurant, and school MSW streams across five U.S. states, including Maryland, Idaho, Virginia, Ohio, and Mississippi, to demonstrate the protocol’s ability to identify source-based composition patterns relevant to resource recovery applications. Grocery and restaurant streams were dominated by food waste and high-moisture organics, while school waste contained higher paper content and residential waste showed greater heterogeneity. Aggregation into energy-relevant fractions highlighted practical recovery pathways via anaerobic digestion or gasification, supporting data-driven planning, policy, and circular economy strategies for sustainable waste management across waste sources.

09 BIOMASS FUELS↗

Unrecognized Sources of Uncertainties ( USU ) in Experimental Nuclear Data

Evaluated nuclear data uncertainties reported in the literature or archived in data libraries are often perceived as unrealistic, most often because they are thought to be too small. The impact of this issue in applied nuclear science has been discussed widely in recent years. Commonly suggested causes are: poor estimates of specific error components, neglect of uncertainty correlations, and overlooked known error sources. However, instances have been reported where very careful, objective assessments of all known error sources have been made with realistic error magnitudes and correlations provided, yet the resulting evaluated uncertainties still appear to be inconsistent with observed scatter of predicted mean values. These discrepancies might be attributed to significant unrecognized sources of uncertainty ( USU ) that limit the accuracy to which these physical quantities can be determined. The objective of our work reported herein has been to develop qualitative and quantitative procedures for revealing and including USU estimates in nuclear data evaluations involving experimental input data. This paper identifies several specific clues that can be explored by evaluators in identifying the existence of USU . It then describes numerical procedures we have introduced to generate quantitative estimates of USU magnitudes. Key requirements for these procedures to be viable are that sufficient numbers of data points be available, for statistical reasons, and that additional supporting information about the measurements be provided by the experimenters. Several realistic examples are described here to illustrate these procedures and demonstrate their outcomes and limitations. Our work strongly supports the view that USU is an important issue in nuclear data evaluation, with significant consequences for applications, and that this topic warrants further investigation by the nuclear science community.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Development of 17 N as a time-tagged neutron source for calibration of large antineutrino detectors

Large antineutrino detectors hold the potential for remote nuclear reactor monitoring and discovery, which is of great interest for nonproliferation and treaty verification applications. Correlated-particle calibration sources are especially useful for large-volume designs based on detection of inverse beta-decay events, as the timing information of the coincident particles improves background rejection and event reconstruction. 17 N is a promising calibration source since it emits beta-correlated delayed neutrons and can be produced relatively easily using high-energy neutrons. In this work, we examine the feasibility of 17 N as a time-tagged calibration source for large antineutrino detectors. 17 N was produced using a DT neutron generator from a water sample enriched in 17 O, and the observed production rates were found to be consistent with previous measurements of the 17 O(n,p) 17 N reaction cross-section. As a result, time-tagging of 17 N delayed neutrons is demonstrated via beta-neutron coincidence measurements conducted using a specialized beta detector.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Neutron calorimeter development at fission and fusion pulsed neutron sources

A neutron calorimeter fielded in pulsed neutron irradiation experiments at the National Ignition Facility (NIF) and White Sands Missile Range Fast Burst Reactor (WSMR FBR) is described, and results are provided and discussed. The calorimeter is modular in design to allow fielding of various neutron absorber materials and thicknesses, as well as use at both fission and fusion sources, all of which has been done. Neutron calorimeters designed for fission sources have been fielded at fusion sources as well, but these instances are not documented in available literature—making this work novel. The functional calorimeter consists of a neutron absorber and two sheathed, grounded thermocouples secured within a subassembly made of thermally insulating materials. This subassembly is placed into a sealed vessel for material and facility safety considerations. The device was fielded at NIF in four polar-direct-drive exploding pusher shots and eleven WSMR FBR pulses. Calorimeter data from NIF experiments show a discernable thermal response accredited to neutron heating within the first 10 s, but the data are dominated by noise from ambient X-ray heating after time = 10 s post-pulse. This response is highly consistent between shots and linearly related to incident neutron fluence and neutron absorber thickness. A temperature rise of 1.1E-2 K/(10 13 neutrons/cm 2 ) per millimeter of absorber thickness was determined for both 0.4 mm and 1 mm thick depleted uranium absorbers with linear best fit R 2 of 0.97 and 0.98 for each thickness and y-axis offsets of 8.8E-3 and 1.3E-2, respectively. WSMR FBR experiment data show a temperature rise of 6.2E-2 K/(10 13 neutrons/cm 2 ) with linear best fit R 2 of 0.14 and y-axis offset of 7.6E-3 for a calorimeter with a 1 mm thick enriched boron carbide ( 10 B 4 C) absorber, though it must be noted that device-to-device variability is significant at both facilities. So these data are also affected by noise on a similar timescale as at NIF, though the noise is significantly lesser in magnitude but oscillatory.

42 ENGINEERING↗

Investigating the effect of B T direction on W source-to-core pathways during the SAS-VW campaign on DIII-D

Experiments using the V-shaped closed slot tungsten (W) coated SAS-VW divertor in DIII-D studied the effects of the BT direction on core contamination of eroded tungsten from a closed slot divertor configuration. Core W content is inferred using soft-X ray tomography (SXR) and vacuum ultraviolet spectroscopy (SPRED), while W divertor erosion is inferred from visible spectroscopy of W emission (400.9 nm) measured by in-slot filterscopes (filtered photo-multipliers). Post-mortem analysis from the campaign discovered tile misalignment leading to suspected pronounced leading-edge erosion in the unfavorable BT direction (ion B ⃗×∇B ⃗ drift away from divertor) likely not captured by diagnostics. However, empirical findings show up to ~2-3x larger core contamination in the favorable BT direction even considering no additional W erosion from leading edges. A “source-to-core efficiency factor” is derived to estimate the effects of leading-edge erosion and compare W contamination for two pairs of H-mode discharges in opposite BT directions. While having differing absolute parameters, similar core impurity density gradients suggest comparable core impurity transport. These results show that favorable BT may have stronger source-to-core pathways for W impurities sourced from the outer divertor region. Possible explanations could include the effects of E ⃗×B ⃗ drifts on W transport in the scrape-off-layer (SOL) as well as previously determined fast SOL inner target directed flows in favorable BT.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Development of an accelerator-based neutron source to prototype Mo-99 production, Part II: A liquid LBE loop under a high vacuum

To provide US domestic supply of Mo-99 without using high-enriched uranium (HEU), a subcritical uranium target assembly (UTA) is irradiated by an accelerator-based neutron source to create Mo-99 through fission. Part I of this work discusses the design of a liquid lead–bismuth eutectic (LBE) windowless target for an accelerator-based neutron source development. Part II discusses how to couple this windowless target to an accelerator operating at an ultra-high vacuum and the subcritical UTA cooled by water at room temperature. Due to the windowless design of the target, the liquid LBE flow shares an ultra-high vacuum (<1.3 × 10 -7 Pa or 10 -9 Torr) space with the accelerator. As a result of this shared vacuum space, the LBE system must operate at a high vacuum (10 -3 ~10 -6 Pa or 10 -5 ~10 -8 Torr). A magnetic rotary motion feedthrough unit utilizes magnetic fluid to allow rotation of the pump while maintaining a high vacuum environment. Prior to testing the LBE system under vacuum, a pump curve measurement is performed to estimate flowrate in the system. This measurement also generates data on orifice loss coefficients, which are compared to correlations in literature. The second experiment investigates vacuum level in the LBE system during operation. High vacuum is maintained (10 -3 ~10 -5 Pa or 10 -5 ~10 -7 Torr) during system operation, and a residual gas analyzer (RGA) scan shows that partial pressures of residual gases in the LBE system lower over the duration of LBE system operations. The third experiment investigates the gravity driven liquid LBE flowing out of the target chamber in the return line, which is partially full. If the liquid LBE is not drained quickly enough, flooding in the target chamber could occur. The coefficient n in the Manning equation is found to be around 0.008 s/m 1/3 . The last experiment performed is a demonstration that a vacuum jacket could provide sufficient thermal insulation to allow coupling between 300 °C LBE loop and a water tank at room temperature. In conclusion, the results from these experiments have influenced the development of the neutron source for the future commercial scale Mo-99 production system.

43 PARTICLE ACCELERATORS↗

Impact of natural organic matter on plutonium vadose zone migration from an NH4Pu(V)O2CO3(s) source

Large amounts of plutonium produced at the Savannah River Site (SRS) in the latter half of the last century led to the release of plutonium to the subsurface. Low-level waste containing plutonium has also been disposed of in the SRS vadose zone. The mobility and risk posed by these plutonium sources is not well understood, in part, because of unknown interactions of the various mobile plutonium species with natural organic matter (NOM). This study investigated the influence of NOM on the behavior of plutonium(V) in the vadose zone through a combination of field lysimeter and laboratory studies. Well-defined solid sources of NH4PuVO2CO3(s) placed in 5-L lysimeters containing vadose zone soils NOM-amended or unamended were exposed to natural SRS meteorological conditions for three years. These lysimeters were removed from the field and analyzed using wet chemistry methods and X-ray absorption spectroscopy (XAS). Plutonium desorption from soils recovered from the lysimeters and laboratory batch sorption experiments using Pu-free soils both indicated that surface mediated reduction of Pu(V) to Pu(IV) was influencing Pu sorption behavior. For both lysimeters (amended and unamended with NOM), Pu migrated slowly through the lysimeter core, with > 95% of the Pu remaining within 2 cm of the source. However, without the NOM amendments, Pu was transported significantly farther than in the presence of NOM. Thus, the presence of NOM appeared to decrease the mobility. Working hypotheses to explain this behavior are that 1) formation of ternary surface-NOM-Pu complexes enhanced Pu sorption affinity causing less mobility and/or 2) formation of these ternary surface-NOM-Pu complexes prevented reoxidaiton of Pu(IV) to more mobile Pu(V) in the pore water.

plutonium, organic matter↗

Adapting the Electron Beam from SEM as a Quantitative Heating Source for Nanoscale Thermal Metrology

The electron beam (e-beam) in the scanning electron microscopy (SEM) provides an appealing mobile heating source for thermal metrology with spatial resolution of ~1 nm, but the lack of systematic quantification of the e-beam heating power limits such application development. Here, we systemically study e-beam heating in LPCVD silicon nitride (SiN x ) thin-films with thickness ranging from 200 to 500 nm from both experiments and complementary Monte Carlo simulations using the CASINO software package. There is good agreement about the thickness-dependent e-beam energy absorption of thin-film between modeling predictions and experiments. Using the absorption results, we then demonstrate adapting the e-beam as a quantitative heating source by measuring the thickness-dependent thermal conductivity of SiN x thin-films, with the results validated to within 7% by a separate Joule heating experiment. The results described here will open a new avenue for using SEM e-beams as a mobile heating source for advanced nanoscale thermal metrology development.

42 ENGINEERING↗