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All sourcesNASA NTRSDOE OSTI
DOE OSTI2022

Nanotubes from the Misfit Layered Compound (SmS) 1.19 TaS 2 : Atomic Structure, Charge Transfer, and Electrical Properties

Misfit layered compounds (MLCs) MX-TX 2 , where M, T = metal atoms and X = S, Se, or Te, and their nanotubes are of significant interest due to their rich chemistry and unique quasi-1D structure. In particular, LnX-TX 2 (Ln = rare-earth atom) constitute a relatively large family of MLCs, from which nanotubes have been synthesized. The properties of MLCs can be tuned by the chemical and structural interplay between LnX and TX 2 sublayers and alloying of each of the Ln, T, and X elements. In order to engineer them to gain desirable performance, a detailed understanding of their complex structure is indispensable. MLC nanotubes are a relative newcomer and offer new opportunities. In particular, like WS 2 nanotubes before, the confinement of the free carriers in these quasi-1D nanostructures and their chiral nature offer intriguing physical behavior. High-resolution transmission electron microscopy in conjunction with a focused ion beam are engaged to study SmS-TaS 2 nanotubes and their cross-sections at the atomic scale. The atomic resolution images distinctly reveal that Ta is in trigonal prismatic coordination with S atoms in a hexagonal structure. Furthermore, the position of the sulfur atoms in both the SmS and the TaS 2 sublattices is revealed. X-ray photoelectron spectroscopy, electron energy loss spectroscopy, and X-ray absorption spectroscopy are carried out. These analyses conclude that charge transfer from the Sm to the Ta atoms leads to filling of the Ta 5d z 2 level, which is confirmed by density functional theory (DFT) calculations. Transport measurements show that the nanotubes are semimetallic with resistivities in the range of 10 –4 Ω·cm at room temperature, and magnetic susceptibility measurements show a superconducting transition at 4 K.

36 MATERIALS SCIENCE↗
DOE OSTI2024

Coherent diffractive imaging with twisted X-rays: Principles, applications, and outlook

Recent technological breakthroughs in synchrotron and x-ray free electron laser facilities have revolutionized nanoscale structural and dynamic analyses in condensed matter systems. This review provides a comprehensive overview of the advancements in coherent scattering and diffractive imaging techniques, which are now at the forefront of exploring materials science complexities. These techniques, notably Bragg coherent diffractive imaging and x-ray photon correlation spectroscopy, x-ray magnetic dichroism, and x-ray correlation analysis leverage beam coherence to achieve volumetric three-dimensional imaging at unprecedented sub-nanometer resolutions and explore dynamic phenomena within sub-millisecond timeframes. Such capabilities are critical in understanding and developing advanced materials and technologies. Simultaneously, the emergence of chiral crystals—characterized by their unique absence of standard inversion, mirror, or other roto-inversion symmetries—presents both challenges and opportunities. These materials exhibit distinctive interactions with light, leading to phenomena such as molecular optical activity, chiral photonic waveguides, and valley-specific light emissions, which are pivotal in the burgeoning fields of photonic and spintronic devices. This review elucidates how novel x-ray probes can be leveraged to unravel these properties and their implications for future technological applications. A significant focus of this review is the exploration of new avenues in research, particularly the shift from conventional methods to more innovative approaches in studying these chiral materials. Inspired by structured optical beams, the potential of coherent scattering techniques utilizing twisted x-ray beams is examined. This promising direction not only offers higher spatial resolution but also opens the door to previously unattainable insights in materials science. By contextualizing these advancements within the broader scientific landscape and highlighting their practical applications, this review aims to chart a course for future research in this rapidly evolving field.

Physics↗
DOE OSTI2011

Fast IMRT with narrow high energy scanned photon beams

Purpose: Since the first publications on intensity modulated radiation therapy (IMRT) in the early 1980s almost all efforts have been focused on fairly time consuming dynamic or segmental multileaf collimation. With narrow fast scanned photon beams, the flexibility and accuracy in beam shaping increases, not least in combination with fast penumbra trimming multileaf collimators. Previously, experiments have been performed with full range targets, generating a broad bremsstrahlung beam, in combination with multileaf collimators or material compensators. In the present publication, the first measurements with fast narrow high energy (50 MV) scanned photon beams are presented indicating an interesting performance increase even though some of the hardware used were suboptimal. Methods: Inverse therapy planning was used to calculate optimal scanning patterns to generate dose distributions with interesting properties for fast IMRT. To fully utilize the dose distributional advantages with scanned beams, it is necessary to use narrow high energy beams from a thin bremsstrahlung target and a powerful purging magnet capable of deflecting the transmitted electron beam away from the generated photons onto a dedicated electron collector. During the present measurements the scanning system, purging magnet, and electron collimator in the treatment head of the MM50 racetrack accelerator was used with 3-6 mm thick bremsstrahlung targets of beryllium. The dose distributions were measured with diodes in water and with EDR2 film in PMMA. Monte Carlo simulations with geant4 were used to study the influence of the electrons transmitted through the target on the photon pencil beam kernel. Results: The full width at half-maximum (FWHM) of the scanned photon beam was 34 mm measured at isocenter, below 9.5 cm of water, 1 m from the 3 mm Be bremsstrahlung target. To generate a homogeneous dose distribution in a 10 x 10 cm{sup 2} field, the authors used a spot matrix of 100 equal intensity beam spots resulting in a uniformity of collimated 80%-20% penumbra of 9 mm at a primary electron energy of 50 MeV. For the more complex cardioid shaped dose distribution, they used 270 spots, which at a pulse repetition frequency of 200 Hz is completed every 1.36 s. Conclusions: The present measurements indicate that the use of narrow scanned photon beams is a flexible and fast method to deliver advanced intensity modulated beams. Fast scanned photon IMRT should, therefore, be a very interesting modality in the delivery of biologically optimized radiation therapy with the possibility for in vivo treatment verification with PET-CT imaging.

62 RADIOLOGY AND NUCLEAR MEDICINE↗
DOE OSTI2014

SU-E-J-181: Magnetic Resonance Image-Guided Radiation Therapy Workflow: Initial Clinical Experience

Purpose: The aims of this work are to describe the workflow and initial clinical experience treating patients with an MRI-guided radiotherapy (MRIGRT) system. Methods: Patient treatments with a novel MR-IGRT system started at our institution in mid-January. The system consists of an on-board 0.35-T MRI, with IMRT-capable delivery via doubly-focused MLCs on three {sup 60} Co heads. In addition to volumetric MR-imaging, real-time planar imaging is performed during treatment. So far, eleven patients started treatment (six finished), ranging from bladder to lung SBRT. While the system is capable of online adaptive radiotherapy and gating, a conventional workflow was used to start, consisting of volumetric imaging for patient setup using visible tumor, evaluation of tumor motion outside of PTV on cine images, and real-time imaging. Workflow times were collected and evaluated to increase efficiency and evaluate feasibility of adding the adaptive and gating features while maintaining a reasonable patient throughput. Results: For the first month, physicians attended every fraction to provide guidance on identifying the tumor and an acceptable level of positioning and anatomical deviation. Average total treatment times (including setup) were reduced from 55 to 45 min after physician presence was no longer required and the therapists had learned to align patients based on soft-tissue imaging. Presently, the source strengths were at half maximum (7.7K Ci each), therefore beam-on times will be reduced after source replacement. Current patient load is 10 per day, with increase to 25 anticipated in the near future. Conclusion: On-board, real-time MRI-guided RT has been incorporated into clinical use. Treatment times were kept to reasonable lengths while including volumetric imaging, previews of tumor movement, and physician evaluation. Workflow and timing is being continuously evaluated to increase efficiency. In near future, adaptive and gating capabilities of the system will be implemented.

60 APPLIED LIFE SCIENCES↗
DOE OSTI2021

Lasergate: A windowless gas target for enhanced laser preheat in magnetized liner inertial fusion

At the Z Facility at Sandia National Laboratories, the magnetized liner inertial fusion (MagLIF) program aims to study the inertial confinement fusion in deuterium-filled gas cells by implementing a three-step process on the fuel: premagnetization, laser preheat, and Z-pinch compression. In the laser preheat stage, the Z-Beamlet laser focuses through a thin polyimide window to enter the gas cell and heat the fusion fuel. However, it is known that the presence of the few μm thick window reduces the amount of laser energy that enters the gas and causes window material to mix into the fuel. These effects are detrimental to achieving fusion; therefore, a windowless target is desired. The Lasergate concept is designed to accomplish this by “cutting” the window and allowing the interior gas pressure to push the window material out of the beam path just before the heating laser arrives. In this work, we present the proof-of-principle experiments to evaluate a laser-cutting approach to Lasergate and explore the subsequent window and gas dynamics. Further, an experimental comparison of gas preheat with and without Lasergate gives clear indications of an energy deposition advantage using the Lasergate concept, as well as other observed and hypothesized benefits. While Lasergate was conceived with MagLIF in mind, the method is applicable to any laser or diagnostic application requiring direct line of sight to the interior of gas cell targets.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

A new class of single-phase multiferroics: Bismuth-based layered supercell oxide thin films—Current progress and future perspectives

Multiferroic materials, where ferroelectric and magnetic orders coexist, have ignited substantial research interest due to the achievable manipulation of magnetic orders using external electric fields, a feature that has garnered serious interest for memory storage applications. Nonetheless, naturally occurring single-phase multiferroic materials are scarce, thus constraining options for practical use. Over the last decade, bismuth-based layered supercell (LSC) oxides have emerged as novel candidates for multiferroics, catalyzing extensive investigations in this domain. Additionally, these LSC systems are known for their anisotropic structures and optical properties, making them promising for application in optics such as polarizers, beam splitters, and modulators. This thorough review explores the development and current advancements in multiferroic bismuth-based LSC materials. It covers the diverse nature of LSCs, detailing their microstructure, properties, and the mechanics of self-assembly formation. It also highlights the remarkable multifunctional characteristics of LSC-based nanocomposites, with a particular focus on their applications in electronics and optics. Moreover, this review examines the significant potential of LSCs in practical applications, particularly through their integration onto silicon and flexible substrates via heteroepitaxy and film transfer techniques. Finally, it offers insights into potential future research avenues and the broader implications of these versatile LSC materials.

Materials Science↗
DOE OSTI2024

Physics Design of Proton/Ion SRF Accelerators

Superconducting Radio Frequency (SRF) technology has become foundation of the modern high energy particle accelerators. The technology enables a higher accelerating field with minimal power dissipation and a stronger compact magnetic field. These advancements have broadened the operational horizon of the particle accelerators making a higher duty factor and Continuous Wave (CW) beam operations both feasible and economically viable. The intensity frontier research founded on generation of intense beam of exotic particles including but not limited to neutrinos, muons, kaons and neutrons as well as practical applications involving transmutation of nuclear reactor waste, rare isotopes generation, sub-critical nuclear power generation etc. could be accomplished efficiently only by using superconducting proton/ions particle accelerators. As a result, many newly constructed or under construction high energy accelerator facilities around the world such as Proton Improvement Plan-II (PIP-II) at Fermilab, FRIB at MSU, ESS at Sweden are utilizing SRF accelerators. This talk presents the design philosophy of SRF proton/ion particle accelerator, with a focus on optimizing its performance while addressing physics and operational challenges including the fault scenarios, machine availability and preservation of crucial beam parameters.

Saini, Arun↗
DOE OSTI2026

Understanding NBI heating and fueling in LTX-β tokamak

My work on the contract DE-SC=0023274 (July, 2022 - July, 2025) was focused on understanding the plasma fueling by NBI. On Dec. 1998 with Sergei Krasheninnikov (UCSD, San Diego, CA) we initiated the Li Wall Fusion (LiWFusion) as a new concept of magnetic fusion [1]. The new 1 2 plasma 3 4 5 6 2.1 Overview of rate coefficients, mean-free paths λH0 , and diffusions coefficients 6 2. GSV code for ⟨σv⟩ analysis of NBI fueling concept was a reaction of the lack of luck of tokamak fusion with QDT = 1 on TFTR and JET. We recognized the edge plasma cooling by recycling to be the route reason of the tokamak problems on the way to burning plasma. LiWFusion relies on plasma pumping by a lithium layer on the inner walls of the plasma chamber, combined with the plasma heating and fueling by the Neutral Beam Injection (NBI). These two innovations eliminate the route problem of the tokmak fusion. The concept became theoretically mature in 2006. In 2012, the technology of continuously Flowing Liquid Lithium (24/7-FLiLi) was invented by me for the future implementations of the LWFusion concept. At the same time, my every presentation on LiWFusion to International Symposium on Lithium Applications since 2010 was objected by some person with words “Everybody since the 1970s knows that plasma fueling by NBI is impossible”. I dropped the name of the author of this objection and ignored his views. My work on the current grant on NBI fueling of LTX-β not only clarified the issue but resolved it in an astonishing way. The NBI fueling was fully understood (thus humiliating the current dogmatic fusion community). The new future of LTX-β dedicated for decades to Li in tokamaks, as well as of the entire magnetic fusion program was envisioned, in sharp contrast with the fallure of OFES in the post-TFTR era of 21st century.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

Lepton-flavor-violating ALP signals with TeV-scale muon beams

We explore the feasibility of using TeV-energy muons to probe lepton-flavor-violating (LFV) processes mediated by an axion-like particle (ALP) a with mass O(10 GeV). We focus on µτ LFV interactions and assume that the ALP is coupled to a dark state χ, which can be either less or more massive than a. Such a setup is demonstrated to be consistent with χ being a candidate for dark matter, in the experimentally relevant regime of parameters. We consider the currently operating NA64-µ experiment and proposed FASERν2 detector as both the target and the detector for the process µA → τA a, where A is the target nucleus. We also show that a possible future active muon fixed-target experiment operating at a 3 TeV muon collider or in its preparatory phase can provide an impressive reach for the LFV process considered, with future FASERν2 data providing a pilot study towards that goal. The implications of the muon anomalous magnetic moment (g - 2) µ measurements for the underlying model, in case of a positive signal, are also examined, and a sample UV completion is outlined.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
DOE OSTI2011

Terahertz Light Source and User Area at FACET

FACET at SLAC provides high charge, high peak current, low emittance electron beam that is bunched at THz wavelength scale during its normal operation. A THz light source based coherent transition radiation (CTR) from this beam would potentially be the brightest short-pulse THz source ever constructed. Efforts have been put into building this photon source together with a user area, to provide a platform to utilize this unique THz radiation for novel nonlinear and ultrafast phenomena researches and experiments. Being a long-time underutilized portion of the electromagnetic spectrum, terahertz (100 GHz {approx} 10 THz) spectral range is experiencing a renaissance in recent years, with broad interests from chemical and biological imaging, material science, telecommunication, semiconductor and superconductor research, etc. Nevertheless, the paucity of THz sources especially strong THz radiation hinders both its commercial applications and nonlinear processes research. FACET - Facilities for Accelerator science and Experimental Test beams at SLAC - provides 23 GeV electron beam with peak currents of {approx} 20 kA that can be focused down to 100 {mu}m{sup 2} transversely. Such an intense electron beam, when compressed to sub-picosecond longitudinal bunch length, coherently radiates high intensity EM fields well within THz frequency range that are orders of magnitude stronger than those available from laboratory tabletop THz sources, which will enable a wide variety of THz related research opportunities. Together with a description of the FACET beamline and electron beam parameters, this paper will report FACET THz radiation generation via coherent transition radiation and calculated photon yield and power spectrum. A user table is being set up along the THz radiation extraction sites, and equipped with various signal diagnostics including THz power detector, Michelson interferometer, sample stages, and sets of motorized optical components. This setup will also be presented. Potential THz research areas including studies of magnetism, ferroelectric switching dynamics, semiconductor devices and chemical reaction controls have already been proposed for the FACET THz area.

43 PARTICLE ACCELERATORS↗
DOE OSTI2012

Final Focus Test Facility ATF2 Status

ATF2 is a final-focus test beam line which aims to focus the low emittance beam from the ATF damping ring to a vertical size of about 37 nm and to demonstrate nanometre level beam stability. Several advanced beam diagnostics and feedback tools are used. In December 2008, construction and installation were completed and beam commissioning started, supported by an international team of Asian, European and American scientists. In this paper, the present status and performance of the recently deployed ATF2 systems are briefly described, based on the first experience with beam measurements and tuning during winter, spring and early autumn of 2009. The near and longer term plans are outlined as well. The ATF collaboration has completed the construction of ATF2 and has started its commissioning. Important experience operating the new cavity BPM and BSM instrumentation in real conditions has been gained and first beam measurements have been performed in a magnetic configuration with reduced optical demagnification. Both horizontal and vertical emittances were successfully tuned and measured in the extraction line, with values approaching the design values of 2 nm and 12 pm, respectively. First checks of the first order optics along the beam line and at the IP were also done. Hardware developments for the second ATF2 goal are being pursued in parallel with the present commissioning work for the first goal. The collaboration is also preparing several near and long terms plans for ATF2. In the next few years, information very valuable for any future collider with local chromaticity correction and tuning of very low emittance beams can be expected. In the previous experience at the FFTB, the smallest vertical beam sizes which were achieved were about 70 nanometers. The work described here continues to address this largely unexplored regime in a systematic way.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2011

The E166 experiment: Development of an Undulator-Based Polarized Positron Source for the International Linear Collider

A longitudinal polarized positron beam is foreseen for the international linear collider (ILC). A proof-of-principle experiment has been performed in the final focus test beam at SLAC to demonstrate the production of polarized positrons for implementation at the ILC. The E166 experiment uses a 1 m long helical undulator in a 46.6 GeV electron beam to produce a few MeV photons with a high degree of circular polarization. These photons are then converted in a thin target to generate longitudinally polarized e{sup +} and e{sup -}. The positron polarization is measured using a Compton transmission polarimeter. The data analysis has shown asymmetries in the expected vicinity of 3.4% and {approx}1% for photons and positrons respectively and the expected positron longitudinal polarization is covering a range from 50% to 90%. The full exploitation of the physics potential of an international linear collider (ILC) will require the development of polarized positron beams. Having both e{sup +} and e{sup -} beams polarized will provide new insight into structures of couplings and thus give access to physics beyond the standard model [1]. The concept for a polarized positron source is based on circularly polarized photon sources. These photons are then converted to longitudinally polarized e{sup +} and e{sup -} pairs. While in an experiment at KEK [1a], Compton backscattering is used [2], the E166 experiment uses a helical undulator to produce polarized photons. An undulator-based positron source for the ILC has been proposed in [3,4]. The proposed scheme for an ILC positron source is illustrated in figure 1. In this scheme, a 150 GeV electron beam passes through a 120 m long helical undulator to produce an intense photon beam with a high degree of circular polarization. These photons are converted in a thin target to e{sup +} e{sup -} pairs. The polarized positrons are then collected, pre-accelerated to the damping ring and injected to the main linac. The E166 experiment is dedicated to test this concept of a helical-undulator-based polarized positron source for the ILC. The experiment was carried out at SLAC where it benefitted from the high quality electron beam in the final focus test beam (FFTB).

43 PARTICLE ACCELERATORS↗
DOE OSTI2018

Comparative study of active plasma lenses in high-quality electron accelerator transport lines

Electrically discharged active plasma lenses (APLs) are actively pursued in compact high-brightness plasma-based accelerators due to their high-gradient, tunable, and radially symmetric focusing properties. In this paper, the APL is experimentally compared with a conventional quadrupole triplet, highlighting the favorable reduction in the energy dependence (chromaticity) in the transport line. Through transport simulations, it is explored how the non-uniform radial discharge current distribution leads to beam-integrated emittance degradation and a charge density reduction at focus. However, positioning an aperture at the APL entrance will significantly reduce emittance degradation without additional loss of charge in the high-quality core of the beam. An analytical model is presented that estimates the emittance degradation from a short beam driving a longitudinally varying wakefield in the APL. Finally, optimizing laser plasma accelerator operation is discussed where emittance degradation from the non-uniform discharge current (favoring small beams inside the APL) and wakefield effects (favoring larger beam sizes) is minimized.

43 PARTICLE ACCELERATORS↗
DOE OSTI2014

Getting a grip on the transverse motion in a Zeeman decelerator

Zeeman deceleration is an experimental technique in which inhomogeneous, time-dependent magnetic fields generated inside an array of solenoid coils are used to manipulate the velocity of a supersonic beam. A 12-stage Zeeman decelerator has been built and characterized using hydrogen atoms as a test system. The instrument has several original features including the possibility to replace each deceleration coil individually. In this article, we give a detailed description of the experimental setup, and illustrate its performance. We demonstrate that the overall acceptance in a Zeeman decelerator can be significantly increased with only minor changes to the setup itself. This is achieved by applying a rather low, anti-parallel magnetic field in one of the solenoid coils that forms a temporally varying quadrupole field, and improves particle confinement in the transverse direction. The results are reproduced by three-dimensional numerical particle trajectory simulations thus allowing for a rigorous analysis of the experimental data. The findings suggest the use of a modified coil configuration to improve transverse focusing during the deceleration process.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2016

Design of a portable optical emission tomography system for microwave induced compact plasma for visible to near-infrared emission lines

A new non-invasive diagnostic system is developed for Microwave Induced Plasma (MIP) to reconstruct tomographic images of a 2D emission profile. A compact MIP system has wide application in industry as well as research application such as thrusters for space propulsion, high current ion beams, and creation of negative ions for heating of fusion plasma. Emission profile depends on two crucial parameters, namely, the electron temperature and density (over the entire spatial extent) of the plasma system. Emission tomography provides basic understanding of plasmas and it is very useful to monitor internal structure of plasma phenomena without disturbing its actual processes. This paper presents development of a compact, modular, and versatile Optical Emission Tomography (OET) tool for a cylindrical, magnetically confined MIP system. It has eight slit-hole cameras and each consisting of a complementary metal–oxide–semiconductor linear image sensor for light detection. The optical noise is reduced by using aspheric lens and interference band-pass filters in each camera. The entire cylindrical plasma can be scanned with automated sliding ring mechanism arranged in fan-beam data collection geometry. The design of the camera includes a unique possibility to incorporate different filters to get the particular wavelength light from the plasma. This OET system includes selected band-pass filters for particular argon emission 750 nm, 772 nm, and 811 nm lines and hydrogen emission H{sub α} (656 nm) and H{sub β} (486 nm) lines. Convolution back projection algorithm is used to obtain the tomographic images of plasma emission line. The paper mainly focuses on (a) design of OET system in detail and (b) study of emission profile for 750 nm argon emission lines to validate the system design.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
DOE OSTI2011

The VEPP-2000 electron-positron collider: First experiments

In 2007, at the Institute of Nuclear Physics (Novosibirsk), the construction of the VEPP-2000 electron-positron collider was completed. The first electron beam was injected into the accelerator structure with turned-off solenoids of the final focus. This mode was used to tune all subsystems of the facility and to train the vacuum chamber using synchrotron radiation at electron currents of up to 150 mA. The VEPP-2000 structure with small beta functions and partially turned-on solenoids was used for the first testing of the 'round beams' scheme at an energy of 508 MeV. Beam-beam effects were studied in strong-weak and strong-strong modes. Measurements of the beam sizes in both cases showed a dependence corresponding to model predictions for round colliding beams. Using a modernized SND (spherical neutral detector), the first energy calibration of the VEPP-2000 collider was performed by measuring the excitation curve of the phimeson resonance; the phi-meson mass is known with high accuracy from previous experiments at VEEP-2M. In October 2009, a KMD-3 (cryogenic magnetic detector) was installed at the VEPP-2000 facility, and the physics program with both the SND and LMD-3 particle detectors was started in the energy range of 1-1.9 GeV. This first experimental season was completed in summer 2010 with precision energy calibration by resonant depolarization.

43 PARTICLE ACCELERATORS↗
DOE OSTI2014

Ga lithography in sputtered niobium for superconductive micro and nanowires

This work demonstrates the use of focused ion beam (FIB) implanted Ga as a lithographic mask for plasma etching of Nb films. Using a highly collimated Ga beam of a FIB, Nb is implanted 12 nm deep with a 14 nm thick Ga layer providing etch selectivity better than 15:1 with fluorine based etch chemistry. Implanted square test patterns, both 10 μm by 10 μm and 100 μm by 100 μm, demonstrate that doses above than 7.5 × 10{sup 15 }cm{sup −2} at 30 kV provide adequate mask protection for a 205 nm thick, sputtered Nb film. The resolution of this dry lithographic technique is demonstrated by fabrication of nanowires 75 nm wide by 10 μm long connected to 50 μm wide contact pads. The residual resistance ratio of patterned Nb films was 3. The superconducting transition temperature (T{sub c}) = 7.7 K was measured using a magnetic properties measurement system. This nanoscale, dry lithographic technique was extended to sputtered TiN and Ta here and could be used on other fluorine etched superconductors such as NbN, NbSi, and NbTi.

77 NANOSCIENCE AND NANOTECHNOLOGY↗