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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 73 records · Page 4
All sourcesNASA NTRSDOE OSTI
DOE OSTI2026

Observations of Nocturnal Sulfuric Acid Formation in Pittsburgh, PA

Measurements of sulfuric acid (H 2 SO 4 ) and sulfur trioxide (SO 3 ) were conducted in Pittsburgh, Pennsylvania, during field campaigns in Fall 2023 and Fall 2024. These measurements identified nocturnal concentrations of H 2 SO 4 comparable to those of daytime values. Nocturnal H 2 SO 4 concentrations were observed to increase by 5 × 10 5 to 5 × 10 7 molecules cm –3 above background on 16 of the 31 measurement nights. The median peak concentration during events was 6.5 × 10 6 molecules cm –3 , with a maximum of 1.0 × 10 8 molecules cm –3 , exceeding previously reported nighttime concentrations. Increases in H 2 SO 4 concentrations were positively correlated with the anomalously high SO 3 concentrations and condensation sink rates, indicating that the formation of H 2 SO 4 increased to overcome the loss rates to particles. Increases in particulate mass and the mass fraction of metals commonly emitted from coal combustion and steel production were also observed. The air masses were traced back to the southeast of Pittsburgh, a region home to a steel mill, coke plant, and a steel processing plant. The observations indicate a previously unrecognized nighttime formation pathway for H 2 SO 4 , potentially from heterogeneous catalysis with metal or black carbon, originating from steel and coke plant emissions. Further measurements are needed to identify key compounds and chemical processes driving these increases in nocturnal H 2 SO 4 concentrations.

aerosols↗
DOE OSTI2023

Constraining the Reaction Rate of Criegee Intermediates with Carboxylic Acids during the Multiphase Ozonolysis of Aerosolized Alkenes

Criegee intermediates (CIs) are central to the ozonolysis of unsaturated organic compounds, controlling the formation of small fragmentation reaction products and higher molecular weight oligomeric compounds through competing unimolecular and bimolecular pathways. In particular, the reaction of thermalized CI with carboxylic acids (RCOOH) to produce oligomeric α-acyloxyalkyl hydroperoxides (AAHPs) is of interest to the chemical transformation of organic compounds in the atmosphere. In the gas phase, the CI + RCOOH reaction proceeds at supercollisional rates, consistent with a barrierless reaction mechanism. However, the rate of this reaction in condensed phases remains uncertain. Here, we report the results of aerosol flow tube studies of the ozonolysis of submicron organic aerosol containing mixtures of an internal n-alkene (Z-9-tricosene, tri) and a saturated acid (2-hexyldecanoic acid, HDA). The decay of the reactants and formation of reaction products are monitored using atmospheric pressure chemical ionization mass spectrometry (APCI–MS). A 6-fold decrease in the reactive uptake of ozone is observed with increasing acid concentration, consistent with a previous study using alcohol additives. The decay of HDA with ozone exposure shows that HDA scavenges CIs at rates comparable to competing unimolecular pathways involving CIs. The decay kinetics of HDA are analyzed using a simple kinetic model in order to constrain the ratio of the CI + RCOOH and unimolecular CI rate constants. Empirical fitting to this model, combined with theoretical estimates of the unimolecular loss rate, yields a CI + RCOOH rate constant of 1.85 ± 0.27 × 10 –19 cm 3 molec –1 s –1 , which is six orders of magnitude slower than the expected diffusion limit in a liquid organic matrix. Stochastic kinetic simulations are conducted with different values of the CI + RCOOH rate constant to validate this result and show that the diffusion-limited rate is indeed much too rapid to reproduce the experimental results.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2024

A Contextually Supervised Optimization-Based HVAC Load Disaggregation Methodology

This paper presents a novel contextually supervised optimization-based approach for disaggregating heating, ventilation, and air-conditioning (HVAC) loads using smart meter or Supervisory Control and Data Acquisition data. To disaggregate the load into HVAC loads, large and infrequently used loads (LIUL), and base loads, we formulate an optimization problem to minimize a set of five loss terms, consisting of the reconstruction errors of the overall load profile, the ramp rate losses, and three distinct loss functions linked with the HVAC load, base load, and LIUL, respectively. To enhance accuracy, we incorporate two forms of contextual information into the problem formulation. First, we utilize mutual information to estimate HVAC energy consumption. Second, we employ a base load dictionary to constrain HVAC load estimation errors. The obtained HVAC load profiles are fine-tuned by abnormal ramp detection followed by binary hypothesis testing. Here, the proposed method is developed and tested using sub-metered residential and commercial building data. Simulation results show that the proposed method outperforms existing methods across various data resolutions and load aggregation levels, showing excellent transferability and generalizability.

24 POWER TRANSMISSION AND DISTRIBUTION↗
DOE OSTI2026

Hot Hydrogen Exposure of U x Zr 1-x C y Nuclear Fuel: The Influence of Composition and Density

Refractory carbide nuclear fuel has been one of the most promising fuel candidates for space nuclear propulsion due to its high melting point, temperature stability, and compatibility in a hot hydrogen environment. In this study, U x Zr 1-x C y fuel was produced by means of a carbothermic reduction process in different UC compositions including 5,10, 20, and 30 at.% UC in the fuel compound. The powder feedstock was consolidated via direct current sintering with densities up to 97% of the theoretical density. The samples with different U x Zr 1-x C y compositions were exposed to hot hydrogen at 2600 K for a cumulative time of 300 min. The samples were characterized by SEM, XRD, density, and measured for mass losses. The high-density samples displayed improved performance in hot hydrogen by minimizing porous sites and reducing areas of direct contact with hydrogen gas, leading to reduced mass losses. Variations in sample density proved to induce large changes in mass loss rates, increasing them up to 90%. The compositions with higher UC content reported the largest mass losses in the study. The loss of uranium occurred primarily at the surfaces exposed to the hot hydrogen where changes in the lattice constant confirmed losses exceeding 50% of the initial UC content in higher compositions, specifically to U 0.3 Zr 0.7 C y . XRD analyses revealed the presence of UH 3 in U 0.3 Zr 0.7 C y suggesting that metallic uranium formed inside the sample as a product of carbon losses. High-density U x Zr x-1 C y fuel with UC concentrations at or below 20 at.% UC exhibited stability and negligible density changes in a high temperature hydrogen environment.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2023

Magnetized rotating isothermal winds

ABSTRACT We consider the general problem of a Parker-type non-relativistic isothermal wind from a rotating and magnetic star. Using the magnetohydrodynamics code athena++, we construct an array of simulations in the stellar rotation rate Ω* and the isothermal sound speed cT, and calculate the mass, angular momentum, and energy loss rates across this parameter space. We also briefly consider the 3D case, with misaligned magnetic and rotation axes. We discuss applications of our results to the spin-down of normal stars, highly irradiated exoplanets, and to nascent highly magnetic and rapidly rotating neutron stars born in massive star core-collapse.

Astronomy & Astrophysics↗
DOE OSTI2020

Nondetection of Helium in the Upper Atmospheres of Three Sub-Neptune Exoplanets

We present a search for helium in the upper atmospheres of three sub-Neptune-sized planets to investigate the origins of these ubiquitous objects. The detection of helium for a low-density planet would be strong evidence for the presence of a primary atmosphere accreted from the protoplanetary nebula because large amounts of helium are not expected in the secondary atmospheres of rocky planets. We used Keck+NIRSPEC to obtain high-resolution transit spectroscopy of the planets GJ 1214b, GJ 9827d, and HD 97658b around the 10833 Å He triplet feature. We did not detect helium absorption for any of the planets despite achieving a high level of sensitivity. We used the nondetections to set limits on the planets’ thermosphere temperatures and atmospheric loss rates by comparing grids of 1D models to the data. We also performed coupled interior structure and atmospheric loss calculations, which suggest that the bulk atmospheres (winds) of the planets would be at most modestly enhanced (depleted) in helium relative to their primordial composition. Our lack of detections of the helium triplet for GJ 1214b and GJ 9827d is highly inconsistent with the predictions of models for the present-day mass loss on these planets. Higher signal-to-noise data would be needed to detect the helium feature predicted for HD 97658b. We identify uncertainties in the extreme-ultraviolet fluxes of the host stars and the lack of detailed mass-loss models specifically for cool and metal-enhanced atmospheres as the main limitations to the interpretation of our results. Ultimately, our results suggest that the upper atmospheres of sub-Neptune planets are fundamentally different from those of gas giant planets.

79 ASTRONOMY AND ASTROPHYSICS↗
DOE OSTI2022

Biomass char gasification kinetic rates compared to data, including ash effects

This investigation provides both experimental and theoretical analyses of biomass char gasification kinetics over 1150–1350 °C in the environment of CO 2 , H 2 O and combinations of these reactants. The experimental data include continuous measurements of particle mass, external and internal temperatures, shape, and size with periodic but not continuous measurements of char porosity, pore size distribution, and pore surface area. The model describes heterogeneous char gasification for poplar wood, corn stover and switchgrass in different shapes and industrially relevant sizes (12.5 mm and smaller). Nonlinear least-squares regression produces optimized power-law model parameters for global kinetics that describe biomass char gasification with respect to both CO 2 and H 2 O separately and in combination. A single set of kinetic parameters describes reaction rates for all three fuels. Model simulations agree with measured data at all stages of char conversion even though the observed mass loss rates change significantly with conversion. In conclusion, the change in rate with conversion depends strongly on ash content, and this investigation provides a simple and theoretically based reaction rate expression that includes the effect of inert ash occupying an increasing portion of the reactive surface with increased conversion.

09 BIOMASS FUELS↗
DOE OSTI2022

Photovoltaic module antireflection coating degradation survey using color microscopy and spectral reflectance

Abstract Commercial antireflective coatings (ARCs) on photovoltaic (PV) module glass can improve module power by 2.5%–3.0%, but their long‐term field performance requires additional study. In this paper, we investigate ARC performance on fielded modules using two nondestructive techniques: reflectance spectroscopy and RGB microscopy, finding a large variation in coating durability and performance. For new coatings, the fleet average nominal power enhancement is 2.8%. This power enhancement is observed to degrade at approximately −0.05%/year absolute over the first 8 years of fielding in arrays that are not regularly cleaned. Interferometry and imaging results imply that coating loss for these modules is due to slow chemical thinning of the initial 125 nm thick coating by 1.4 to 5.0 nm/year. Due to the physics of interference coatings, the performance loss is projected to accelerate as the coating is further thinned, resulting in a coating lifetime (time to 80% of initial performance) of 7.5 to 25 years. At the higher 5.0 nm/year coating loss rates, we estimate that −0.14%/year power degradation of the module can be attributed solely to ARC degradation over the first 20 years. Extreme coating loss is observed on some modules where after 8 years fielding, the coating can be completely removed with a single wet wipe with a lens tissue. A case study is also presented comparing ARC and noncoated modules installed at a single site in 2013. We find that the ARC modules have a 2.6% higher soiling power loss than the noncoated modules; this exceeds the ARC power enhancement of 2.4% and leads to the surprising conclusion that the ARC lowers production for modules in this location due to increased soiling. These results demonstrate that RGB microscopy is a powerful, field‐capable, and quantitative characterization technique for assessing degradation of PV module ARCs.

Karin, Todd↗
DOE OSTI2021

Suggestions on the Vapor Pressure Determination of Molten Salts

The knowledge of the thermophysical properties of coolant and fuel in molten salts nuclear reactors (MSRs), such as thermal stability and vapor pressure, are of remarkable interest, particularly for simulating safe reactor operations. Molten salt reactorsMSRs use molten salt mixtures as the primary coolant and/or fuel and are expected to operate up to 800 °C. With the revival of interest in deploying MSRs, complete thermophysical and thermochemical characterization of these materials is of interest to industry, regulators, and researchers. Vapor pressure data for molten salts are scarce in the literature, both for pure salts but especially for eutectic mixtures. This report describes the effusion method, which consist of measuring the rate of escape of vapor molecules through a small orifice for the determination of the vapor pressure of compounds and may be useful on compounds such as molten salts. Thermogravimetric analysis records the mass loss as a function of time and temperature. There are two equations that can be used to relate the mass loss rate with the vapor pressure: (1) the Knudsen equation and (2) the Langmuir equation. To apply these equations, the system needs to reach a pseudo (or near) equilibrium condition. Therefore, the experimental conditions must be such that allow the condensed and the vapor/gas phases to be in equilibrium. In order to accomplish equilibrium like conditions, the sample must be in an almost-sealed cell except for a small orifice, from where the vapor escapes. In the Knudsen method vacuum is applied to eliminate the effect that the presence of other gas molecules could have on the evaporation rate of the sample. However, Langmuir alleged that in certain conditions, such as at low temperatures and/or when the vapor pressure is low, the rate of evaporation of a substance is independent of the presence of vapor around it. For that reason, some researchers, when measuring the mass loss of a substance with a predictable low vapor pressure, do not apply vacuum when using the Langmuir equation. However, they use a standard substance to parameterize the experimental setup. The use of one equation or the other will depend on the characteristics of the sample and the availability of an appropriate standard. Some important aspects related to the nature of the samples and vapor pressure measurements are described for future consideration.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2024

Simulated Start-Stop and the Impact of Catalyst Layer Redox on Degradation and Performance Loss in Low-Temperature Electrolysis

Stress tests are developed that focus on anode catalyst layer degradation in proton exchange membrane electrolysis due to simulated start-stop operation. Ex situ testing indicates that repeated redox cycling accelerates catalyst dissolution, due to near-surface reduction and the higher dissolution kinetics of metals when cycling to high potentials. Similar results occur in situ, where a large decrease in cell kinetics (>70%) is found along with iridium migrating from the anode catalyst layer into the membrane. Additional processes are observed, however, including changes in iridium oxidation, the formation of thinner and denser catalyst layers, and platinum migration from the transport layer. Increased interfacial weakening is also found, adding to both ohmic and kinetic loss by adding contact resistances and isolating portions of the catalyst layer. Repeated shutoffs of the water flow further accelerate performance loss and increase the frequency of tearing and delamination at interfaces and within catalyst layers. These tests were applied to several commercial catalysts, where higher loss rates were observed for catalysts that contained ruthenium or high metal content. These results demonstrate the need to understand how operational stops occur, to identify how loss mechanisms are accelerated, and to develop strategies to limit performance loss.

08 HYDROGEN↗
DOE OSTI2022

Degradation of Edge-Defined Film-Fed Silicon Glass–Glass Modules on Florida Rooftop After 22 Years

Thin silicon (< 100 μm) adoption can provide significantly lower cost. Kerfless technologies provide thin wafers while preventing material from being wasted. Understanding how this family of processing influences module reliability is important. A set of four edge-defined film-fed growth (EFG) silicon modules from a ten-module system in Florida is measured after 22 years of exposure. Power loss rates of 0.58–0.78% year -1 are measured for three modules, while a rate of 1.32% is measured for a module with severe delamination and corrosion. Short-circuit current degrades between 10.7% and 13.1% for all modules. Further, the losses are primarily optical and recombination based; however, series and shunt resistance effects play a non-negligible role. Pre-existing recombination losses exist but are exacerbated via degradation. Optical losses in short-circuit current are due in part to encapsulant yellowing. Electroluminescence (EL) images display the effects of processing on bulk quality by clearly showing lines of alternating brightness along the wafer length. To the authors’ knowledge, this is the first article displaying suns–V OC data, effective lifetime versus excess carrier density data, and module EL images for EFG silicon-based modules.

36 MATERIALS SCIENCE↗
DOE OSTI2021

Levenberg–Marquardt multi-classification using hinge loss function

Incorporating higher-order optimization functions, such as Levenberg-Marquardt (LM) have revealed better generalizable solutions for deep learning problems. However, these higher-order optimization functions suffer from very large processing time and training complexity especially as training datasets become large, such as in multi-view classification problems, where finding global optima is a very costly problem. To solve this issue, we develop a solution for LM-enabled classification with, to the best of knowledge first-time implementation of hinge loss, for multiview classification. Hinge loss allows the neural network to converge faster and perform better than other loss functions such as logistic or square loss rates. Here we prove our method by experimenting with various multiclass classification challenges of varying complexity and training data size. The empirical results show the training time and accuracy rates achieved, highlighting how our method outperforms in all cases, especially when training time is limited. Our paper presents important results in the relationship between optimization and loss functions and how these can impact deep learning problems.

97 MATHEMATICS AND COMPUTING↗
DOE OSTI2022

Photovoltaic fleet degradation insights

Abstract In the PV Fleet Performance Data Initiative, high‐frequency data from commercial and utility‐scale photovoltaic (PV) systems have been collected to examine performance loss rates (PLRs) at a fleet scale. To date, performance data from more than 7.2‐gigawatt (GW) capacity, 1700 sites and 19,000 inverters—approximately equivalent to 6% to 7% of the entire US PV market—have been collected. An overall PLR of −0.75%/year was found, which is in line with historical and recent findings. Tracked silicon (Si) and cadmium telluride (CdTe) performed comparably with all fixed‐tilt systems. Higher PLRs were found for hotter temperature zones; cooler climates exhibit a median −0.48%/year loss, which increases to −0.88%/year in hotter climates. High‐efficiency module technologies showed median PLRs in line with conventional Si technologies but demonstrated markedly different PLR behavior when filtered only for low‐light conditions <600 W/m 2 . Causes for this technology‐dependent behavior are under investigation.

14 SOLAR ENERGY↗
DOE OSTI2022

Measurements of Electron Beam-Induced Spin-Relaxation in Frozen-Spin Hydrogen-Deuteride (HD)

Targets of solid hydrogen-deuteride (HD) can be prepared in a frozen-spin state with spin relaxation times (T1) in excess of a year. The present work has studied their potential use in experiments with electron beams. Polarization relaxation rates have been measured during exposure to sub-nanoAmp currents of 9.7 MeV electron beams from the recently commissioned Upgraded Injector Test Facility (UITF) at Jefferson Lab (JLab). These UITF measurements can be used to anticipate the expected performance at the GeV energies typical of JLab experiments, since the energy deposition in a target is almost independent of beam energy. An in-beam dilution refrigerator equipped with superconducting solenoids has been used to maintain solid HD samples at ?0.1 K and ?1 tesla, and internal NMR coils have been used to monitor hydrogen polarization. Spin-relaxation in two frozen-spin targets, with initial H-polarizations of 40% and 34%, have been tracked while exposed to beams under varying conditions of current, dose, beam duty factor and temperature. At a fixed accumulated dose, the spin-relaxation rates drop with current, suggesting depolarization by the charge cloud of the beam. Imposing a duty factor on the otherwise continuous UITF beam, with forced millisecond scale gaps, has shown no obvious correlation to polarization loss rates. After an accumulated dose of ?2 ?C/cm2, beam-off spin-relaxation rates drop from their immeasurably long pre-irradiation values to the order of weeks (with beam-on T1 values typically an order of magnitude shorter), reflecting a buildup of paramagnetic charge centers within the HD lattice. The accumulated polarization loss was approximately proportional to dose in both targets, dropping to 1/e of their initial values after ?6 ?C/cm2. Thermal equilibrium polarizations of targets not in the frozen-spin state (with intentionally short T1) have been used to deduce the in situ temperature of solid HD while under electron bombardment. A model for depolarization by beam-associated paramagnetic impurities largely accounts for the data, and suggests that improvements in heat removal could lead to significant increases in the in-beam T1.

O'Connell, Thomas↗
DOE OSTI2020

High temperature oxidation behaviors of bulk SiC with low partial pressures of air and water vapor in argon

Oxidation behaviors of bulk SiC at 1000–1400 °C in Ar-20 vol% H 2 O-10 vol% air were investigated. The thickness of the passivation oxide layer showed a parabolic increase with time. Dense and uniform layers formed below 1200 °C, whereas pores and cracks were observed at higher temperatures. An analytical model was proposed to estimate the oxide layer growth and SiC mass loss rate. The SiC layer should be effective in retaining the fission products after oxidation by excessive water and air. This work is the first detailed study of SiC layer oxidation during loss of coolant accidents (LOCA) for HTGRs.

36 MATERIALS SCIENCE↗
DOE OSTI2023

Effect of resonant magnetic perturbations including toroidal sidebands on magnetic footprints and fast ion losses in HL-2M

Externally applied resonant magnetic perturbations (RMPs), generated by magnetic coils located outside the plasma (referred to as RMP coils), provide an effective way to control the edge localized mode (ELM) in tokamak devices. Due to the discrete nature of the toroidal distribution of these window-frame coils, toroidal sidebands always exist together with the fundamental harmonics designed for ELM control. In this work, the MARS-F code (Liu et al 2000 Phys. Plasmas7 3681) is applied to investigate the detailed features of the RMP spectra considering both the dominant harmonic (n = 2) and the associated sideband (n = 6), and the impact of the combined fields on magnetic footprints as well as on the fast ion losses for a reference double-null scenario in the HL-2M device. It is found that the sum of the n = 2 and n = 6 RMP fields splits the footprint and widens the footprint area, as compared to the single-n (n = 2) harmonic case. The resistive plasma response breaks the up–down symmetry of the footprint pattern on the outer divertor plates, which is otherwise symmetric assuming vacuum RMP fields. Considering fast ion losses, a threshold value exists for the initially launched radial position of test particles, as well as for the RMP coil current, before the loss occurs. When the threshold criterion is satisfied, the combined n = 2 and n = 6 RMP fields enhance the fast ion loss rate by , as compared to that of the n = 2 component alone. These results illustrate the important role of the sideband of RMP fields on the magnetic footprints and fast ion losses in tokamak plasmas.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

Multiple Peaks and a Long Precursor in the Type IIn Supernova 2021qqp: An Energetic Explosion in a Complex Circumstellar Environment

Abstract We present optical photometry and spectroscopy of the Type IIn supernova (SN) 2021qqp. Its unusual light curve is marked by a long precursor for ≈300 days, a rapid increase in brightness for ≈60 days, and then a sharp increase of ≈1.6 mag in only a few days to a first peak ofM r ≈ −19.5 mag. The light curve then declines rapidly until it rebrightens to a second distinct peak ofM r ≈ −17.3 mag centered at ≈335 days after the first peak. The spectra are dominated by Balmer lines with a complex morphology, including a narrow component with a width of ≈1300 km s −1 (first peak) and ≈2500 km s −1 (second peak) that we associate with the circumstellar medium (CSM) and a P Cygni component with an absorption velocity of ≈8500 km s −1 (first peak) and ≈5600 km s −1 (second peak) that we associate with the SN–CSM interaction shell. Using the luminosity and velocity evolution, we construct a flexible analytical model, finding two significant mass-loss episodes with peak mass loss rates of ≈10 and ≈5M ⊙ yr −1 about 0.8 and 2 yr before explosion, respectively, with a total CSM mass of ≈2–4M ⊙ . We show that the most recent mass-loss episode could explain the precursor for the year preceding the explosion. The SN ejecta mass is constrained to be ≈5–30M ⊙ for an explosion energy of ≈(3–10) × 10 51 erg. We discuss eruptive massive stars (luminous blue variable, pulsational pair instability) and an extreme stellar merger with a compact object as possible progenitor channels.

Astronomy & Astrophysics↗
DOE OSTI2020

Evidence for anti-synergism between ion-assisted etching and in-plasma photoassisted etching of silicon in a high-density chlorine plasma

Etching of p-Si in 60 mTorr 10%Cl2/90%Ar Faraday-shielded inductively coupled high density plasmas was investigated under both ionassisted etching (IAE) and photoassisted etching (PAE) conditions. Real-time etching rates and after-etching Si surface chemical compositions were obtained by laser interferometry and vacuum-transfer x-ray photoelectron spectroscopy (XPS), respectively. Precisely controlled ion energy distributions (IEDs) were generated by applying pulsed negative DC bias on the conductive sample stage. Above a 36 eV threshold at a total flow rate of 250 SCCM, the IAE rate increased with the square root of the ion energy. In contrast to the DC bias, etching under RF bias did not exhibit a threshold ion energy because of the wide IED. XPS spectra revealed that the surface layer under PAE conditions had a significantly lower chlorine content, composed of only SiCl. Under IAE conditions, however, silicon dangling bonds (Si•), SiCl 2 , and SiCl 3 were found on the surface, in addition to SiCl, with a relative abundance of SiCl > SiCl 2 , and SiCl 3 . The absence of higher chlorides and Si• under PAE conditions suggested that vacuum ultraviolet photons and above threshold-energy ions interact with the surface very differently. By varying the duty cycle of the pulsed DC bias, it was found that the IAE rate scaled with the energetic ion dose, but only for low duty cycles. For higher duty cycles, the apparent IAE yield fell off with an increasing Cl coverage on the surface, as the duty cycle went up, which pointed to a negative synergy (antisynergism) between PAE and IAE as the explanation. This antisynergism was further supported by the observed decrease of the total etching rate with an increasing period of the pulsed DC bias. A plausible mechanism is that increasing the pulsing period causes more near-surface damage, creating more recombination centers that lead to a higher loss rate of electron-hole pairs through recombination, thereby reducing the PAE rate.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗