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At least 73 records · Page 4

Ion Chromatography-on-a-chip for Water Quality Analysis

We report progress towards developing a Micro-Electro-Mechanical Systems (MEMS)- based ion chromatograph (IC) for crewed spacecraft water analysis. This IC-chip is an offshoot of a NASA-funded effort to produce a high performance liquid chromatograph (HPLC)-chip. This HPLC-chip system would require a desalting (i.e. ion chromatography) step. The complete HPLC instrument consists of the Jet Propulsion Labortory's (JPL's) quadrupole ion trap mass spectrometer integrated with a state-of-the-art MEMS liquid chromatograph (LC) system developed by the California Institute of Technology's (Caltech's) Micromachining Laboratory. The IC version of the chip consist of an electrolysis-based injector, a separation column, two electrolysis pumps for gradient generation, mixer, and a built-in conductivity detector. The HPLC version of the chip also includes a nanospray tip. The low instrument mass, coupled with its high analytical capabilities, makes the LC chip ideally suitable for wide range of applications such as trace contaminant, inorganic analytical science and, when coupled to a mass spectrometer, a macromolecular detection system for either crewed space exploration vehicles or robotic planetary missions.

Kidd, R. D.↗

Development of a Detailed Surface Chemistry Framework in DSMC

Many of the current direct simulation Monte Carlo (DSMC) codes still employ only simple surface catalysis models. These include only basic mechanisms such as dissociation, recombination, and exchange reactions, without any provision for adsorption and finite rate kinetics. Incorporating finite rate chemistry at the surface is increasingly becoming a necessity for various applications such as high speed re-entry flows over thermal protection systems (TPS), micro-electro-mechanical systems (MEMS), surface catalysis, etc. In the recent years, relatively few works have examined finite-rate surface reaction modeling using the DSMC method.In this work, a generalized finite-rate surface chemistry framework incorporating a comprehensive list of reaction mechanisms is developed and implemented into the DSMC solver SPARTA. The various mechanisms include adsorption, desorption, Langmuir-Hinshelwood (LH), Eley-Rideal (ER), Collision Induced (CI), condensation, sublimation, etc. The approach is to stochastically model the various competing reactions occurring on a set of active sites. Both gas-surface (e.g., ER, CI) and pure-surface (e.g., LH, desorption) reaction mechanisms are incorporated. The reaction mechanisms could also be catalytic or surface altering based on the participation of the bulk-phase species (e.g., bulk carbon atoms). Marschall and MacLean developed a general formulation in which multiple phases and surface sites are used and we adopt a similar convention in the current work. Microscopic parameters of reaction probabilities (for gas-surface reactions) and frequencies (for pure-surface reactions) that are require for DSMC are computed from the surface properties and macroscopic parameters such as rate constants, sticking coefficients, etc. The energy and angular distributions of the products are decided based on the reaction type and input parameters. Thus, the user has the capability to model various surface reactions via user-specified reaction rate constants, surface properties and parameters.

Gas↗

Tunable mid-wave infrared spectral filters based on GexSbyTez for multispectral imaging

The mid-wave infrared (MWIR) spectrum contains a wealth of invaluable information including the spectral ‘fingerprint’ of many chemical species and has applications in remote sensing and astronomical imaging. Traditionally, filtering for the MWIR is achieved by means of passive multilayer interference (dichroic) filters, Fabry-Perot-based micro-electro-mechanical system (MEMS) filters, liquid crystal tunable filters, and focal plane array (FPA) filters. For accurate multispectral imaging applications, these approaches suffer from various limitations such as: having moving parts; exhibiting slow response times, and; having limited spectral bandwidth / resolution. Recently, there has been significant interest toward ‘active’ spectral imaging technologies, whereby the ability to provide electrically tunable narrowband filtering—spanning the entire MWIR—is highly desirable. In this work we introduce a new spectral imaging technology, namely actively tunable optical transmission filters using the phase-change material (PCM) GexSbyTez (GST). The GST exhibits a large, reversible change in its refractive index across the MWIR upon a phase transition (from amorphous to crystalline). This refractive index modulation governs the filter’s optical characteristics. Through an optical stimulus or applied voltage—which changes the GST state from amorphous to crystalline—one can actively tune the filter with MHz speed. We incorporate GST into optimized guided mode resonance (GMR) and plasmonic nanohole array (PNA) device architectures, enabling <10nm spectral resolution and tunable operation across 3~5µm. Our proposed PCM-MWIR filter will be able to extract the maximum amount of ‘useful’ information within the atmosphere for remote Earth sensing measurements at operational speeds orders of magnitude faster than current airborne-based sensors. Moreover, it may enable affordable SmallSat-based MWIR instrumentation which is complimentary to other observation systems. The MISSE (Materials International Space Station Experiment-Flight Facility) experiment has been proposed as a testbed for a PCM-based tunable MWIR filter module to allow exposure of the module to the low Earth orbit space environment. This will provide valuable data regarding the robustness of the filter to withstand the radiation and atomic oxygen environment and allow assessment of the technology for use in space applications.

Kim, Hyun Jung↗

Integration, Testing and Performance of the Infrared Multi-Object Spectrometer

The Infrared Multi-Object Spectrometer (IRMOS) is a principle investigator-class instrument for the Kitt Peak National Observatory 2.1 m and Mayall 3.8 m telescopes. IRMOS is a near-IR (0.8 - 2.5 micron) spectrometer with low-to mid-resolving power (R = lambda/delta lambda = 300 - 3000). On the 3.8 m telescope, IRMOS produces simultaneous spectra of approximately 100 objects in its approximately 3 x 2 arcmin field of view using a commercial micro electro-mechanical systems (MEMS) digital micro-mirror device (DMD) from Texas Instruments. The multi-mirror array DMD operates as a real-time programmable slit mask. The all-reflective optical design consists of two imaging subsystems. The focal reducer images the focal plane of the telescope onto the DMD field stop, and the spectrograph images the DMD onto a large-format detector. The instrument operates at approximately 80 K, cooled by a single electro-mechanical cryocooler. The bench and all components are made from aluminum 6061-T651. There are three cryogenic mechanisms. We describe laboratory integration and test of IRMOS before shipment to Kitt Peak. We give an overview of the optical alignment technique and integration of optical, mechanical, electrical and cryogenic subsystems. We compare optical test results to model predictions of point spread function size and morphology, contrast, and stray light. We discuss some lessons learned and conclude with a prediction for performance on the telescope.

Ohl, Raymond G.↗

Ambient and Cryogenic Alignment Verification and Performance of the Infrared Multi-Object Spectrometer

The Infrared Multi-Object Spectrometer (IRMOS) is a facility instrument for the Kitt Peak National Observatory 4 and 2.1 meter telescopes. IRMOS is a near-IR (0.8 - 2.5 micron) spectrometer with low- to mid-resolving power (R = 300 - 3000). IRMOS produces simultaneous spectra of approximately 100 objects in its 2.8 x 2.0 arc-min field of view using a commercial Micro Electro-Mechanical Systems (MEMS) Digital Micro-mirror Device (DMD) from Texas Instruments. The IRMOS optical design consists of two imaging subsystems. The focal reducer images the focal plane of the telescope onto the DMD field stop, and the spectrograph images the DMD onto the detector. We describe ambient breadboard subsystem alignment and imaging performance of each stage independently, and the ambient and cryogenic imaging performance of the fully assembled instrument. Interferometric measurements of subsystem wavefront error serve to venfy alignment, and are accomplished using a commercial, modified Twyman-Green laser unequal path interferometer. Image testing provides further verification of the optomechanical alignment method and a measurement of near-angle scattered light due to mirror small-scale surface error. Image testing is performed at multiple field points. A mercury-argon pencil lamp provides spectral lines at 546.1 nm and 1550 nm, and a CCD camera and IR camera are used as detectors. We use commercial optical modeling software to predict the point-spread function and its effect on instrument slit transmission and resolution. Our breadboard test results validate this prediction. We conclude with an instrument performance prediction for first light.

Connelly, Joseph A.↗

Light-Driven Polymeric Bimorph Actuators

Light-driven polymeric bimorph actuators are being developed as alternatives to prior electrically and optically driven actuators in advanced, highly miniaturized devices and systems exemplified by microelectromechanical systems (MEMS), micro-electro-optical-mechanical systems (MEOMS), and sensor and actuator arrays in smart structures. These light-driven polymeric bimorph actuators are intended to satisfy a need for actuators that (1) in comparison with the prior actuators, are simpler and less power-hungry; (2) can be driven by low-power visible or mid-infrared light delivered through conventional optic fibers; and (3) are suitable for integration with optical sensors and multiple actuators of the same or different type. The immediate predecessors of the present light-driven polymeric bimorph actuators are bimorph actuators that exploit a photorestrictive effect in lead lanthanum zirconate titanate (PLZT) ceramics. The disadvantages of the PLZT-based actuators are that (1) it is difficult to shape the PLZT ceramics, which are hard and brittle; (2) for actuation, it is necessary to use ultraviolet light (wavelengths < 380 nm), which must be generated by use of high-power, high-pressure arc lamps or lasers; (3) it is difficult to deliver sufficient ultraviolet light through conventional optical fibers because of significant losses in the fibers; (4) the response times of the PLZT actuators are of the order of several seconds unacceptably long for typical applications; and (5) the maximum mechanical displacements of the PLZT-based actuators are limited to those characterized by low strains beyond which PLZT ceramics disintegrate because of their brittleness. The basic element of a light-driven bimorph actuator of the present developmental type is a cantilever beam comprising two layers, at least one of which is a polymer that exhibits a photomechanical effect (see figure). The dominant mechanism of the photomechanical effect is a photothermal one: absorption of light energy causes heating, which, in turn, causes thermal expansion.

Adamovsky, Gregory↗

Assessment of Operation of EMK21 MEMS Silicon Oscillator Over Wide Temperature Range

Electronic control systems, data-acquisition instrumentation, and microprocessors require accurate timing signals for proper operation. Traditionally, ceramic resonators and crystal oscillators provided this clock function for the majority of these systems. Over the last few years, MEMS (Micro-Electro-Mechanical Systems) resonator-based oscillators began to surface as commercial-off-the-shelf (COTS) parts by a few companies. These quartz-free, miniature silicon devices could easily replace the traditional crystal oscillators in providing the timing/clock function for many digital and analog circuits. They are reported to provide stable output frequency, offer great tolerance to shock and vibration, and are immune to electro-static discharge [ 1-2]. In addition, they are encapsulated in compact lead-free packages and cover a wide frequency range (1 MHz to 125 MHz). The small size of the MEMS oscillators along with their thermal stability make them ideal candidates for use in space exploration missions. Limited data, however, exist on the performance and reliability of these devices under operation in applications where extreme temperatures or thermal cycling swings, which are typical of space missions, are encountered. This report presents the results of the work obtained on the evaluation of an Ecliptek Corporation MEMS silicon oscillator chip under extreme temperatures.

Patterson, Richard L.↗

MEMS device for spacecraft thermal control applications

A micro-electromechanical device that comprises miniaturized mechanical louvers, referred to as Micro Electro-Mechanical Systems (MEMS) louvers are employed to achieve a thermal control function for spacecraft and instruments. The MEMS louvers are another form of a variable emittance control coating and employ micro-electromechanical technology. In a function similar to traditional, macroscopic thermal louvers, the MEMS louvers of the present invention change the emissivity of a surface. With the MEMS louvers, as with the traditional macroscopic louvers, a mechanical vane or window is opened and closed to allow an alterable radiative view to space.

Swanson, Theordore D.↗

High-Performance electronics at ultra-low power consumption for space applications: From superconductor to nanoscale semiconductor technology

A detailed review of Sandia's work in ultralow power dissipation electronics for space flight applications, including superconductive electronics, new advances in quantum well structures, and ultra-high purity 3-5 materials, and recent advances in micro-electro-optical-mechanical systems (MEMS) is presented. The superconductive electronics and micromechanical devices are well suited for application in micro-robotics, micro-rocket engines, and advanced sensors.

Duncan, Robert V.↗

Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon

The MEMS (Micro-Electro-Mechanical-Systems) technology is quickly evolving as a viable means to combine micro-mechanical and micro-optical elements on the same chip. One MEMS technology that has recently gained attention by the research community is the micro-mechanical Fabry-Perot optical filter. A MEMS based Fabry-Perot consists of a vertically integrated structure composed of two mirrors separated by an air gap. Wavelength tuning is achieved by applying a bias between the two mirrors resulting in an attractive electrostatic force which pulls the mirrors closer. In this work, we present a new micro-mechanical Fabry-Perot structure which is simple to fabricate and is integratable with low cost silicon photodetectors and transistors. The structure consists of a movable gold coated oxide cantilever for the top mirror and a stationary Au/Ni plated silicon bottom mirror. The fabrication process is single mask level, self aligned, and requires only one grown or deposited layer. Undercutting of the oxide cantilever is carried out by a combination of RIE and anisotropic KOH etching of the (111) silicon substrate. Metallization of the mirrors is provided by thermal evaporation and electroplating. The optical and electrical characteristics of the fabricated devices were studied and show promissing results. A wavelength shift of 120nm with 53V applied bias was demonstrated by one device geometry using 6.27 micrometer air gap. The finesse of the structure was 2.4. Modulation bandwidths ranging from 91KHz to greater than 920KHz were also observed. Theoretical calculations show that if mirror reflectivity, smoothness, and parallelism are improved, a finesse of 30 is attainable. The predictions also suggest that a reduction of the air gap to 1 micrometer results in an increased wavelength tuning range of 175 nm with a CMOS compatible 4.75V.

Patterson, James D.↗

Evaluation of a Programmable Voltage-Controlled MEMS Oscillator, Type SiT3701, Over a Wide Temperature Range

Semiconductor chips based on MEMS (Micro-Electro-Mechanical Systems) technology, such as sensors, transducers, and actuators, are becoming widely used in today s electronics due to their high performance, low power consumption, tolerance to shock and vibration, and immunity to electro-static discharge. In addition, the MEMS fabrication process allows for the miniaturization of individual chips as well as the integration of various electronic circuits into one module, such as system-on-a-chip. These measures would simplify overall system design, reduce parts count and interface, improve reliability, and reduce cost; and they would meet requirements of systems destined for use in space exploration missions. In this work, the performance of a recently-developed MEMS voltage-controlled oscillator was evaluated under a wide temperature range. Operation of this new commercial-off-the-shelf (COTS) device was also assessed under thermal cycling to address some operational conditions of the space environment

Patterson, Richard↗

MEMS RF accelerators for nuclear energy and advanced manufacturing

Energetic ions are widely used to develop radiation hard structural materials and fuels for advanced nuclear energy. Ion beams are also used to generate neutrons for nuclear materials testing, as well as in a series of high impact, high value adding manufacturing processes (ranging from doping of semiconductors to hardening of materials against wear and to increase bio-compatibility of materials). But to date, high power beams of high energy ions are simply too expensive because they are delivered from large single beam accelerators. We have recently demonstrated that MEMS technology enables massively parallel, low cost batch fabrication of ion beams. We propose to scale intense ion accelerators based on MEMS (micro-electro mechanical systems) to high beam power (>10 kW). With our approach, hundreds to thousands of ion beamlets will be densely packed on silicon wafers. Ions are injected and accelerated across gaps formed in stacks of wafers, leading to uniquely high current densities for intense ion accelerators with variable kinetic energy (0.1 to 10 MeV) and variable ion species. Our team brings together experts in high power ion accelerators from Lawrence Berkeley National Laboratory and leading experts in MEMS technology from Cornell University. We will deliver a disruptive technology of low cost, flexible and massively scalable ion accelerators that will enable the rapid development of radiation hard nuclear materials for advanced nuclear energy and enable new applications in manufacturing.

43 PARTICLE ACCELERATORS↗

A Hardware Platform for Tuning of MEMS Devices Using Closed-Loop Frequency Response

We report on the development of a hardware platform for integrated tuning and closed-loop operation of MEMS gyroscopes. The platform was developed and tested for the second generation JPL/Boeing Post-Resonator MEMS gyroscope. The control of this device is implemented through a digital design on a Field Programmable Gate Array (FPGA). A software interface allows the user to configure, calibrate, and tune the bias voltages on the micro-gyro. The interface easily transitions to an embedded solution that allows for the miniaturization of the system to a single chip.

gyroscope controls↗

Performance of MEMS Silicon Oscillator, ASFLM1, under Wide Operating Temperature Range

Over the last few years, MEMS (Micro-Electro-Mechanical Systems) resonator-based oscillators began to be offered as commercial-off-the-shelf (COTS) parts by a few companies [1-2]. These quartz-free, miniature silicon devices could compete with the traditional crystal oscillators in providing the timing (clock function) for many digital and analog electronic circuits. They provide stable output frequency, offer great tolerance to shock and vibration, and are immune to electro-static discharge [1-2]. In addition, they are encapsulated in compact lead-free packages, cover a wide frequency range (1 MHz to 125 MHz), and are specified, depending on the grade, for extended temperature operation from -40 C to +85 C. The small size of the MEMS oscillators along with their reliability and thermal stability make them candidates for use in space exploration missions. Limited data, however, exist on the performance and reliability of these devices under operation in applications where extreme temperatures or thermal cycling swings, which are typical of space missions, are encountered. This report presents the results of the work obtained on the evaluation of an ABRACON Corporation MEMS silicon oscillator chip, type ASFLM1, under extreme temperatures.

Patterson, Richard L.↗

Eccentric loading of microtensile specimens

Ceramic materials have a lower density than most metals and are capable of performing at extremely high temperatures. The utility of these materials is obvious; however, the fracture strength of brittle materials is not easily predicted and often varies greatly. Characteristically, brittle materials lack ductility and do not yield as other materials. Ceramics materials are naturally populated with microscopic cracks due to fabrication techniques. Upon application of a load, stress concentration occurs at the root of these cracks and fracture will eventually occur at some not easily predicted strength. In order to use ceramics in any application some design methodology must exist from which a component can be placed into service. This design methodology is CARES/LIFE (Ceramics Analysis and Reliability Evaluation of Structures) which has been developed and refined at NASA over the last several decades. The CARES/LIFE computer program predicts the probability of failure of a ceramic component over its service life. CARES combines finite element results from a commercial FE (finite element) package such as ANSYS and experimental results to compute the abovementioned probability of failure. Over the course of several tests CARES has had great success in predicting the life of various ceramic components and has been used throughout industry. The latest challenge is to verify that CARES is valid for MEMS (Micro-Electro Mechanical Systems). To investigate a series of microtensile specimens were fractured in the laboratory. From this data, material parameters were determined and used to predict a distribution of strength for other specimens that exhibit a known stress concentration. If the prediction matches the experimental results then these parameters can be applied to a desired component outside of the laboratory. During testing nearly half of the tensile Specimens fractured at a location that was not expected and hence not captured in the FE model. It has been my duty to investigate the nature of this phenomenon in hopes of finding a better correlation between theory and empirical results. To investigate I built complete FE models of all of the tensile specimens using ANSYS. It is suspected that some misalignment naturally occurs during testing and thus additional bending stresses are present in the specimens. I modeled this eccentric loading and ran several FE trials using ANSYS/PDS (a probabilistic design system in ANSYS). My objective this summer has been familiarize myself with the CARES/LIFE program in hopes of using it in conjunction with ANSYS to help verify that CARES is applicable to MEMS-scale (greater that 1 micron, less than 1 millimeter) components.

Trapp, Mark A.↗

A Wafer Transfer Technology for MEMS Adaptive Optics

Adaptive optics systems require the combination of several advanced technologies such as precision optics, wavefront sensors, deformable mirrors, and lasers with high-speed control systems. The deformable mirror with a continuous membrane is a key component of these systems. This paper describes a new technique for transferring an entire wafer-level silicon membrane from one substrate to another. This technology is developed for the fabrication of a compact deformable mirror with a continuous facet. A 1 (mu)m thick silicon membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers (i.e. wax, epoxy, or photoresist). Smaller or larger diameter membranes can also be transferred using this technique. The fabricated actuator membrane with an electrode gap of 1.5 (mu)m shows a vertical deflection of 0.37 (mu)m at 55 V.

Micro Electro Mechanical Systems (MEMS)↗

MEMS-Based Spinning Nozzle

A nozzle body and assembly for delivering atomized fuel to a combustion chamber. The nozzle body is rotatably mounted onto a substrate. One or more curvilinear fuel delivery channels are in flow communication with an internal fuel distribution cavity formed in the nozzle body. Passage of pressurized fuel through the nozzle body causes the nozzle body to rotate. Components of the nozzle assembly are formed of silicon carbide having surfaces etched by deep reactive ion etching utilizing MEMS (micro-electro-mechanical systems) technology. A fuel premix chamber is carried on the substrate in flow communication with a supply passage in the nozzle body.

Robert S Okojie↗

Active Control of Jets in Cross-Flow for Film Cooling Applications

Jets in cross-flow have applications in film cooling of gas turbine vanes, blades and combustor liners. Their cooling effectiveness depends on the extent to which the cool jet-fluid adheres to the cooled component surface. Lift-off of the cooling jet flow or other mechanisms promoting mixing, cause loss of cooling effectiveness as they allow the hot "free-stream" fluid to come in contact with the component surface. The premise of this project is that cooling effectiveness can be improved by actively controlling (e.9. forcing, pulsing) the jet flow. Active control can be applied to prevent/delay lift-off and suppress mixing. Furthermore, an actively controlled film-cooling system coupled with appropriate sensory input (e.g. temperature or heat flux) can adapt to spatial and temporal variations of the hot-gas path. Thus, it is conceivable that the efficiency of film-cooling systems can be improved, resulting in coolant fluid economy. It is envisioned that Micro Electro-Mechanical Systems (MEMS) will play a role in the realization of such systems. As a first step, a feasibility study will be conducted to evaluate the concept, identify actuation and sensory elements and develop a control strategy. Part of this study will be the design of a proof-of-concept experiment and collection of necessary data.

Nikitopoulos, Dimitris E.↗