In-Situ, Large-Area, Conformal, Superconductive RF Coatings & Surface Cleaning Via IMPULSE HiPIMS & Positive Voltage Reversal
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43 PARTICLE ACCELERATORS↗
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Ion-beam assisted sputtering of titanium nitride thin films
Abstract Titanium nitride is a material of interest for many superconducting devices such as nanowire microwave resonators and photon detectors. Thus, controlling the growth of TiN thin films with desirable properties is of high importance. This work aims to explore effects in ion beam-assisted sputtering (IBAS), were an observed increase in nominal critical temperature and upper critical fields are in tandem with previous work on Niobium nitride (NbN). We grow thin films of titanium nitride by both, the conventional method of DC reactive magnetron sputtering and the IBAS method, to compare their superconducting critical temperatures $$T_{c}$$ T c as functions of thickness, sheet resistance, and nitrogen flow rate. We perform electrical and structural characterizations by electric transport and x-ray diffraction measurements. Compared to the conventional method of reactive sputtering, the IBAS technique has demonstrated a 10% increase in nominal critical temperature without noticeable variation in the lattice structure. Additionally, we explore the behavior of superconducting $$T_c$$ T c in ultra-thin films. Trends in films grown at high nitrogen concentrations follow predictions of mean-field theory in disordered films and show suppression of superconducting $$T_c$$ T c due to geometric effects, while nitride films grown at low nitrogen concentrations strongly deviate from the theoretical models.
36 MATERIALS SCIENCE↗
Experimental observation of short-range magnetic correlations in amorphous Nb 2 O 5 and Ta 2 O 5 thin films
We use muon spin rotation/relaxation/resonance ( μ SR ) to investigate the magnetic properties of niobium pentoxide ( Nb 2 O 5 ) and tantalum pentoxide ( Ta 2 O 5 ) thin films. In both oxides, we observe a magnetic response at the lowest available temperature of 2.8 K. This response appears to be structurally dependent: thermally oxidized Ta 2 O 5 with low crystallinity demonstrates suppressed magnetism, while fully amorphous Ta 2 O 5 demonstrates local static magnetism. In contrast, amorphous Nb 2 O 5 is dominated by magnetic fluctuations and is strongly magnetically disordered compared to Ta 2 O 5 . Our results suggest that these fundamental differences in the magnetism of Ta and Nb oxides could explain the performance limitations in superconducting qubits and resonators.
Krasnikova, Y. V. [Fermilab] (ORCID:00000002893659↗
Stability, metallicity, and magnetism in niobium silicide nanofilms
Modern superconducting qubits based on two-dimensional (2D) transmons typically involve the growth of Nb thin films on high-resistivity Si substrates. Since imperfections at the Nb-Si heterointerface have been implicated as a source of two-level systems that limit quantum coherence times, detailed characterization and understanding of niobium silicide interfacial layers are critical to improving superconducting qubit technology. While bulk binary intermetallic niobium silicide phases are well understood, the thermodynamic phase stability and properties of ultrathin niobium silicides, such as those found at the Nb-Si heterointerface in 2D transmons, have not yet been explored. Here, we report finite-sized effects for ultrathin niobium silicide films using density functional theory calculations and predict nanoscale stabilization of Nb 6 Si 5 over the bulk α-Nb 5 Si 3 phase. This result is consistent with our experimental observations of a niobium silicide interfacial layer between a sputtered Nb thin film and the underlying Si substrate. Furthermore, our calculations show that Nb 6 Si 5 nanofilms are nonmagnetic, making them superior to nanofilms of α-Nb 5 Si 3 that exhibit antiferromagnetic correlations detrimental to long coherence times in superconducting qubits. Furthermore, by providing atomic-scale insight into niobium silicide nanofilms, this paper can help guide ongoing efforts to optimize Nb-Si heterointerfaces for long coherence times in superconducting qubits.
36 MATERIALS SCIENCE↗
Recent advances in metallographic polishing for SRF application
This paper is an overview of the metallographic polishing R\&D program covering Niobium and Copper substrates treatment for thin film coating as an alternative fabrication pathway for 1.3 GHz elliptical cavities. The presented research is the result of a collaborative effort between IJCLab, CEA/Irfu, HZB, and KEK in order to develop innovative surface processing and cavity fabrication protocols capable of meeting stringent requirements for SRF surfaces, including the reduction of safety risks and ecological footprint, enhancing reliability, improving the surface roughness, and potentially allowing cost reduction. The research findings will be disclosed.
Hryhorenko, O.↗
Recent advances in metallographic polishing for SRF application
This paper is an overview of the metallographic polishing R\&D program covering Niobium and Copper substrates treatment for thin film coating as an alternative fabrication pathway for 1.3 GHz elliptical cavities. The presented research is the result of a collaborative effort between IJCLab, CEA/Irfu, HZB, and KEK in order to develop innovative surface processing and cavity fabrication protocols capable of meeting stringent requirements for SRF surfaces, including the reduction of safety risks and ecological footprint, enhancing reliability, improving the surface roughness, and potentially allowing cost reduction. The research findings will be disclosed.
Hryhorenko, O.↗
Superconducting phase transitions in disordered NbTiN films
Suppression of superconductivity in disordered systems is a fundamental problem of condensed matter physics. Here we investigate superconducting niobium-titanium-nitride (Nb 1-x Ti x N) thin films grown by the atomic layer deposition (ALD) with slightly different growth process parameters. We observe a smooth crossover from the disorder-driven superconductor-normal metal transition (SMT) to the superconductor-insulator transition (SIT) via the intermediate Bose metal state detected by the low-temperature saturation of the temperature dependence of the sheet resistance. We demonstrate that the SIT via the intervening Bose metal state occurs if the sheet resistance of the film in the maximum, R max prior to the superconducting drop of R(T), exceeds R q = h/4e 2 .
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
Effect of substrate temperature on the growth of Nb 3 Sn film on Nb by multilayer sputtering
Here, we report on the fabrication of niobium tin (Nb 3 Sn) films by multilayer sequential sputtering on niobium at substrate temperatures ranging from room temperature to 250 °C. The multilayers were then annealed inside a separate vacuum furnace at 950 °C for 3 h. The material properties of the films were characterized by X-ray diffraction, scanning electron microscopy, energy-dispersive X-ray spectroscopy, atomic force microscopy, and transmission electron microscopy. The superconducting properties of the films were studied by four-point probe resistivity measurements from room temperature to below the superconducting critical temperature T c . The highest film T c was 17.76 K, obtained when the multilayers were deposited at room temperature. When the deposition temperature was raised to 250 °C, a significant reduction in voids was achieved while the film's T c was 17.58 K.
36 MATERIALS SCIENCE↗
3rd harmonic magnetometry assessment of NbTiN-based SIS structures
In the quest for alternative superconducting materials to bring accelerator cavity performance beyond the bulk niobium (Nb) intrinsic limits, a promising concept proposes that superconductor-insulator-superconductor (SIS) thin film structures can delay magnetic flux penetration in accelerator cavities to higher fields [1]. NbTiN is a candidate superconductor for such structures. We have demonstrated high quality NbTiN and AlN deposited by reactive direct current magnetron sputtering (DCMS), both for individual layers and multilayers. Interface quality has been assessed for bi-layer stacks with various NbTiN and AlN thicknesses from 500 and 30 nm down to 3 and 1 nm. These SIS structures show continued sharp interfaces. The Hfp enhancement of the films was examined with 3rd harmonic magnetometry. The system was designed and built in an ongoing collaboration with CEA Saclay. It can measure 1? to 2? samples on a temperature controlled stage. This contribution presents the assessment of the first penetration field enhancement with 3rd harmonic magnetometry for standalone films and multilayer nanostructures.
Valente, Anne-Marie↗
Integrated millimeter-wave cavity electro-optic transduction
Emerging communications and computing technologies will rely ever-more on expanding the useful radio frequency spectrum into the millimeter-wave and terahertz frequency range. Both classical and quantum applications would benefit from advancing integration and incorporation of millimeter-wave and electro-optic technologies into common devices, such as modulators. Here we demonstrate an integrated triply-resonant, superconducting electro-optic transducer. Our design incorporates an on-chip 107 GHz niobium titanium nitride superconducting resonator, modulating a thin-film lithium niobate optical racetrack resonator operating at telecom wavelengths. We observe a maximum photon transduction efficiency of η OE ≈ 0.82 × 10 −6 and an average single-photon electro-optic interaction rate of g 0 /2π ≈ 0.7 kHz. We also present a study and analysis of the challenges associated with the design of integrated millimeter-wave resonators and propose possible solutions to these challenges. Our work paves the way for further advancements in resonant electro-optic technologies operating at millimeter-wave frequencies.
47 OTHER INSTRUMENTATION↗
Copper alloys for interconnectors and methods for making the same
Metallic alloy interconnects (which can comprise copper) with low electrical resistivity and methods for making the same are disclosed. The electrical resistivity of thin film copper alloys was reduced by 36% with niobium solute and by 51% with iron solute compared to pure copper counterpart in dilute solute regimes (0-1.5 atomic %). The fabrication method is operated at room temperature, and does not require a high temperature annealing step.
Gianola, Daniel S.↗
Direct current magnetic Hall probe technique for measurement of field penetration in thin film superconductors for superconducting radio frequency resonators
Superconducting Radio Frequency (SRF) cavities used in particle accelerators are typically formed from or coated with superconducting materials. Currently, high purity niobium is the material of choice for SRF cavities that have been optimized to operate near their theoretical field limits. This brings about the need for significant R & D efforts to develop next generation superconducting materials that could outperform Nb and keep up with the demands of new accelerator facilities. To achieve high quality factors and accelerating gradients, the cavity material should be able to remain in the superconducting Meissner state under a high RF magnetic field without penetration of quantized magnetic vortices through the cavity wall. Therefore, the magnetic field at which vortices penetrate a superconductor is one of the key parameters of merit of SRF cavities. Techniques to measure the onset of magnetic field penetration on thin film samples need to be developed to mitigate the issues with the conventional magnetometry measurements that are strongly influenced by the film orientation and shape and edge effects. In this work, we report the development of an experimental setup to measure the field of full flux penetration through films and multi-layered superconductors. Our system combines a small superconducting solenoid that can generate a magnetic field of up to 500 mT at the sample surface and three Hall probes to detect the full flux penetration through the superconductor. We report this setup can be used to study alternative materials that could potentially outperform niobium, as well as superconductor–insulator–superconductor (SIS) multilayer coatings on niobium.
47 OTHER INSTRUMENTATION↗
Three-Dimensional Reconstruction of Nb 3 Sn Films by Focused Ion Beam Cross Sectional Microscopy
Niobium has been the material of choice for SRF cavities for several decades due to its formability and superconducting properties. The accelerating gradient of niobium cavities is, however, rapidly approaching a theoretical limit. To achieve higher accelerating gradients a new material is needed that can sustain high fields. Nb 3 Sn is a promising competitor with a higher superconducting transition temperature and a higher critical field than pure niobium. However, Nb 3 Sn is very brittle and cannot be formed readily into a cavity. The main method for creating Nb 3 Sn cavities is to form a Nb 3 Sn film into a niobium surface using a tin vapor-diffusion method. This technique creates a microcrystalline Nb 3 Sn thin film on the inner surface of the cavity. Tin depleted regions are known to form in the film during this process. Previous studies have analyzed these regions using transmission electron microscopy on cross-sectional lamellae prepared by focused ion beam/scanning electron microscope (FIB/SEM). This method does not provide any three-dimensional (3-D) information about the distribution of tin-deficient regions. In this study we employ a focused ion beam tomographic technique to analyze the 3-D structure of the film. Electron dispersive X-ray spectroscopy is used to image the tin concentration of the film in 3-D. Tin-deficient regions are discovered close to the surface of the Nb 3 Sn film.
Viklund, E.↗
Wide-Band, High-Quantum-Efficiency Photodetector
A design has been proposed for a photodetector that would exhibit a high quantum efficiency (as much as 90 percent) over a wide wavelength band, which would typically be centered at a wavelength of 1.55 m. This and similar photodetectors would afford a capability for detecting single photons - a capability that is needed for research in quantum optics as well as for the practical development of secure optical communication systems for distribution of quantum cryptographic keys. The proposed photodetector would be of the hot-electron, phonon-cooled, thin-film superconductor type. The superconducting film in this device would be a meandering strip of niobium nitride. In the proposed photodetector, the quantum efficiency would be increased through incorporation of optiA design has been proposed for a photodetector that would exhibit a high quantum efficiency (as much as 90 percent) over a wide wavelength band, which would typically be centered at a wavelength of 1.55 m. This and similar photodetectors would afford a capability for detecting single photons - a capability that is needed for research in quantum optics as well as for the practical development of secure optical communication systems for distribution of quantum cryptographic keys. The proposed photodetector would be of the hot-electron, phonon-cooled, thin-film superconductor type. The superconducting film in this device would be a meandering strip of niobium nitride. In the proposed photodetector, the quantum efficiency would be increased through incorporation of opti-
Jackson, Deborah↗
INVESTIGATION OF THE MULTILAYER SHIELDING EFFECT THROUGH NbTiN-AlN COATED BULK NIOBIUM
Superconducting radio frequency (SRF) cavities, composed of bulk niobium (Nb), are extensively utilized in particle accelerators. To optimize their performance and extend their operational range, thin films of superconducting materials are applied to the Nb surfaces. This study focuses on investigating the magnetic field penetration characteristics of NbTiN-AlN coating on bulk niobium. The experimental setup involves measuring the magnetic field penetration across flat superconducting samples at cryogenic temperatures. One key parameter of interest is the field just before the first flux penetration, Bp which enables the observation of the multilayer shielding effect on bulk niobium under high magnetic fields. The study reveals a significant enhancement in Bp of the NbTiN-AlN coated Nb samples compared to bare Nb samples. This property holds critical importance for achieving high field performance in SRF cavities. Furthermore, the study explores the relationship between coating thickness and Bp corroborating the theoretical predictions.
Senevirathne, I. H.↗
Edge geometry superconducting tunnel junctions utilizing an NbN/MgO/NbN thin film structure
An edge defined geometry is used to produce very small area tunnel junctions in a structure with niobium nitride superconducting electrodes and a magnesium oxide tunnel barrier. The incorporation of an MgO tunnel barrier with two NbN electrodes results in improved current-voltage characteristics, and may lead to better junction noise characteristics. The NbN electrodes are preferably sputter-deposited, with the first NbN electrode deposited on an insulating substrate maintained at about 250 to 500 C for improved quality of the electrode.
Hunt, Brian D.↗
Edge geometry superconducting tunnel junctions utilizing an NbN/MgO/NbN thin film structure
An edge defined geometry is used to produce very small area tunnel junctions in a structure with niobium nitride superconducting electrodes and a magnesium oxide tunnel barrier. The incorporation of an MgO tunnel barrier with two NbN electrodes results in improved current-voltage characteristics, and may lead to better junction noise characteristics. The NbN electrodes are preferably sputter-deposited, with the first NbN electrode deposited on an insulating substrate maintained at about 250 C to 500 C for improved quality of the electrode.
Hunt, Brian D.↗
TOF-SIMS analysis of decoherence sources in superconducting qubits
Superconducting qubits have emerged as a potentially foundational platform technology for addressing complex computational problems deemed intractable with classical computing. Despite recent advances enabling multiqubit designs that exhibit coherence lifetimes on the order of hundreds of μs, material quality and interfacial structures continue to curb device performance. Two-level system defects in the thin superconducting film and adjacent dielectric regions introduce stochastic noise and dissipate electromagnetic energy at the cryogenic operating temperatures. In this study, we utilize time-of-flight secondary ion mass spectrometry to understand the role specific fabrication procedures play in introducing such dissipation mechanisms in these complex systems. We interrogated Nb thin films and transmon qubit structures fabricated through slight modifications in the processing and vacuum conditions. We find that when the Nb film is sputtered onto the Si substrate, oxide and silicide regions are generated at various interfaces. We also observe that impurity species, such as niobium hydrides and carbides, are incorporated within the niobium layer during the subsequent lithographic patterning steps. The formation of these resistive compounds likely impacts the superconducting properties of the Nb thin film. Additionally, we observe the presence of halogen species distributed throughout the patterned thin films. We conclude by hypothesizing the source of such impurities in these structures in an effort to intelligently fabricate superconducting qubits and extend coherence times moving forward.
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗