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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 73 records · Page 4

Multi-diagnostic characterization of laser-produced tin plasmas for EUV lithography

We present a comprehensive characterization of laser-produced tin (Sn) plasmas relevant to extreme ultraviolet (EUV) lithography using a multi-diagnostic suite integrated into the new experimental platform, “SparkLight.” Tin plasmas are generated by irradiating a continuously moving tin-coated wire with laser pulses (1064 nm, 10 ns, up to 5.7 × 10 10 W/cm 2 ) and probed via coherent Thomson scattering, laser interferometry, and EUV emission spectroscopy. Thomson scattering measurements reveal electron temperatures and densities that decay with distance from the target. Densities derived from Thomson scattering are cross-validated against laser interferometry, showing excellent agreement. Correlating the results of these laser diagnostics with spatially resolved EUV spectroscopy suggests that the bulk of useful EUV emission originates within 150 μm of the target and is generated under suboptimal plasma conditions. This work demonstrates a practical integrated approach for plasma characterization in EUV source development.

Musikhin, S. [Princeton Plasma Physics Laboratory ↗

Electron density and gas density measurements in a millimeter-wave discharge

Electron density and neutral gas density have been measured in a non-equilibrium air breakdown plasma using optical emission spectroscopy and two-dimensional laser interferometry, respectively. A plasma was created with a focused high frequency microwave beam in air. Experiments were run with 110 GHz and 124.5 GHz microwaves at powers up to 1.2 MW. Microwave pulses were 3 μs long at 110 GHz and 2.2 μs long at 124.5 GHz. Electron density was measured over a pressure range of 25 to 700 Torr as the input microwave power was varied. Electron density was found to be close to the critical density, where the collisional plasma frequency is equal to the microwave frequency, over the pressure range studied and to vary weakly with input power. Neutral gas density was measured over a pressure range from 150 to 750 Torr at power levels high above the threshold for initiating breakdown. The two-dimensional structure of the neutral gas density was resolved. Intense, localized heating was found to occur hundreds of nanoseconds after visible plasma formed. This heating led to neutral gas density reductions of greater than 80% where peak plasma densities occurred. Spatial structure and temporal dynamics of gas heating at atmospheric pressure were found to agree well with published numerical simulations.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE SCGSR Final Report - Project Accomplishments and Additional Materials

The major accomplishments of my project were successfully developing and testing the laser interferometry diagnostic on the Plasma Liner Experiment (PLX) at Los Alamos National Laboratory (LANL). This diagnostic helped advance my research by providing a simpler way to obtain electron density measurements of magnetized plasmas compared to other electron density diagnostics such as triple Langmuir probes. The laser used was a 561 nm continuous wave (CW) diode-pumped solid state (DPSS) laser. The PLX laser interferometry diagnostic consists of two parts. These include the launching and receiving sides of the laser diagnostic. The launching side consists of the main laser beam from the DPSS laser being split into five chords(probe beams) and a reference beam which are then directed with fiber optic couplers into fiber optic cables which transmit the probe beamsto the PLX vacuum chamber. The probe beams then pass through the plasma in the chamber and into the receiving side optics where they are again directed through fiber optic cables to be combined with the reference beam. The combined beams are transmitted via multi-mode fiber optic cables to photodiodes to convert the light signals into electrical signals. Before the electrical signals get digitized, they pass through bandpass and low pass filters to eliminate electromagnetic noise and unwanted frequencies. The electrical signals are then processed by IQ demodulators to determine phase angle difference between the probe and reference beams for each chord in order to calculate line-integrated electron density.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Optical Response of Soda-Lime Glass Shocked to 14 GPa

To investigate the potential use of soda-lime glass (SLG) as an optical window in shock wave experiments, laser interferometry (VISAR) was used to determine the window correction and the refractive index in SLG samples subjected to plane shock wave compression. Symmetric plate impact experiments were conducted at peak stresses varying between 4 and 14 GPa and laser interferometry ($λ_0$ = 532$\textit {nm}$ wavelength) measurements were used to monitor the particle velocity histories at the impact surface. The higher stress experiments displayed a constant state prior to stress unloading. In contrast, the lower stress experiments (4.3 and 7.8 GPa) displayed an initial constant state followed by weakly time-dependent response prior to stress unloading. Because the actual particle velocities were independently known from the projectile velocity measurements, the window correction factor and the refractive index changes were determined over the stress range examined. Above 7.5 GPa, our window correction and refractive index results show significant differences with previously published data for the same material. Potential reasons for these differences are indicated.

36 MATERIALS SCIENCE↗

Photoionized plasmas induced in neon with extreme ultraviolet and soft X-ray pulses produced using low and high energy laser systems

A comparative study of photoionized plasmas created by two soft X-ray and extreme ultraviolet (SXR/EUV) laser plasma sources with different parameters is presented. The two sources are based on double-stream Xe/He gas-puff targets irradiated with high (500 J/0.3 ns) and low energy (10 J/1 ns) laser pulses. In both cases, the SXR/EUV beam irradiated the gas stream, injected into a vacuum chamber synchronously with the radiation pulse. Irradiation of gases resulted in formation of photoionized plasmas emitting radiation in the SXR/EUV range. The measured Ne plasma radiation spectra are dominated by emission lines corresponding to radiative transitions in singly charged ions. A significant difference concerns origin of the lines: K-shell or L-shell emissions occur in case of the high and low energy irradiating system, respectively. In high energy system, the electron density measurements were also performed by laser interferometry, employing a femtosecond laser system. A maximum electron density for Ne plasma reached the value of 2·10{sup 18 }cm{sup −3}. For the low energy system, a detection limit was too high for the interferometric measurements, thus only an upper estimation for electron density could be made.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Electron temperature and electron number density measurements in laser ablation Z-pinch experiments of Al2O3

Aluminum oxide (Al2O3) plasma was generated using the Ti:Sapphire/Nd:glass laser and Z-pinch pulse-power generator at the University of Nevada, Reno, Nevada Terawatt Facility. To determine the electron temperature, we use the Boltzmann plot method for the transitions (Al III 4d 2D3/2 → 4p 2P1/2) at 451.2564 nm, (Al III 4d 2D5/2 → 4p 2P3/2) at 452.9194 nm, (Al III 4p 2P3/2 → 4s 2S1/2) at 569.6603, and (Al III 4p 2P1/2 → 4s 2S1/2) at 572.2728 nm. Simultaneously, Mach–Zehnder laser interferometry was used to measure the electron number density. We compared simulated spectra obtained from PrismSPECT with electron number density and temperature measurements, and the electron temperature was found to range from 1.8 to 2.8 eV, while the electron number density was found to range from 2.3 × 1017 to 6.9 × 1017 cm−3 early in the pinched plasma formation.

Dutra, E. C.↗

A Fiber Interferometer for the Magnetized Shock Experiment

The Magnetized Shock Experiment (MSX) at Los Alamos National Laboratory requires remote diagnostics of plasma density. Laser interferometry can be used to determine the line-integrated density of the plasma. A multi-chord heterodyne fiber optic Mach-Zehnder interferometer is being assembled and integrated into the experiment. The advantage of the fiber coupling is that many different view chords can be easily obtained by simply moving transmit and receive fiber couplers. Several such fiber sets will be implemented to provide a time history of line-averaged density for several chords at once. The multiple chord data can then be Abel inverted to provide radially resolved spatial profiles of density. We describe the design and execution of this multiple fiber interferometer.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Fast Laser Holographic Interferometry For Wind Tunnels

Proposed system makes holographic interferograms quickly in wind tunnels. Holograms reveal two-dimensional flows around airfoils and provide information on distributions of pressure, structures of wake and boundary layers, and density contours of flow fields. Holograms form quickly in thermoplastic plates in wind tunnel. Plates rigid and left in place so neither vibrations nor photgraphic-development process degrades accuracy of holograms. System processes and analyzes images quickly. Semiautomatic micro-computer-based desktop image-processing unit now undergoing development moves easily to wind tunnel, and its speed and memory adequate for flows about airfoils.

Lee, George↗

Radius of Curvature Measurement of Large Optics Using Interferometry and Laser Tracker

The determination of radius of curvature (ROC) of optics typically uses either a phase measuring interferometer on an adjustable stage to determine the position of the ROC and the optics surface under test. Alternatively, a spherometer or a profilometer are used for this measurement. The difficulty of this approach is that for large optics, translation of the interferometer or optic under test is problematic because of the distance of translation required and the mass of the optic. Profilometry and spherometry are alternative techniques that can work, but require a profilometer or a measurement of subapertures of the optic. The proposed approach allows a measurement of the optic figure simultaneous with the full aperture radius of curvature.

Hagopian, John↗

Hugoniot states and optical response of soda lime glass shock compressed to 120 GPa

In contrast to relatively pure silica glass (fused silica-FS), commercial silica-rich glasses contain significant fractions of additional oxide components. In particular, soda-lime glass (SLG) consists of approximately 71% SiO 2 by weight, which raises the question: what is the effect of additional cations on the shock compression response of silica-rich glasses? To address this concern, plate impact experiments were conducted to determine the high-pressure Hugoniot states for shocked SLG (37 to 120 GPa) and compared with recently reported results on FS. Using laser interferometry, particle velocity profiles were measured at the impact surface and the SLG/LiF window interface. In all experiments, the transmitted profiles show a single shock wave, with no features indicative of a phase transformation. The Hugoniot states determined from the wave profiles are described well using a linear shock velocity–particle velocity relation. Interferometry measurements (using 1550-nm wavelength laser) at the impact surface show that SLG is transparent when shocked to 55 GPa, transparent for tens of nanoseconds after impact between 55 and 81 GPa, and opaque beyond 81 GPa. From impact surface measurements, a linear relationship between the apparent and true particle velocity was observed, resulting in a linear relationship between the refractive index (at 1550 nm) and density. At 120 GPa, the SLG density is nearly twice its ambient value, indicating that SLG can achieve highly dense amorphous states. When compared to FS, shocked SLG is much less compressible and likely does not transform to a crystalline phase. A plausible explanation for this difference is indicated.

58 GEOSCIENCES↗

Validating Laser-Induced Birefringence Theory with Plasma Interferometry

Intense laser beams crossing paths in plasma is theorized to induce birefringence in the medium, resulting from density and refractive index modulations that affect the polarization of incoming light. The goal of the associated experiment, conducted on Janus at Lawrence Livermore’s Jupiter Laser Facility, was to create a tunable laser-plasma waveplate to verify the relationship between dephasing angle and beam intensity, plasma density, plasma temperature, and interaction length. Interferometry analysis of the plasma channel was performed to obtain a density map and to constrain temperature measured from Thomson scattering. Various analysis techniques, including Fast Fourier transform (FFT) and two variations of fringe-counting, were tried because interferograms captured in this experiment contained unusual features such as fringe discontinuity at channel edges, saddle points, and islands. The chosen method is flexible, semi-automated, and uses a fringe tracking algorithm on a reduced image of pre-traced synthetic fringes. Ultimately, a maximum dephasing angle of 49.6° was achieved using a 1200 μm interaction length, and the experimental results appear to agree with predictions.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Experimental study of high-energy single-pulse nanosecond discharges in pin-to-pin configuration

Single-pulse pin-to-pin nanosecond pulsed discharges in ambient air (gap distances of 3–7 mm) were investigated at high pulse energies (∼20–30 mJ deposited energy per 11 ns full width at half maximum pulse). A Michelson interferometry setup (532 nm continuous-wave laser) was employed to record time-resolved interferograms of the discharge, enabling spatially resolved calculation of the electron number density. An intensified charge-coupled device camera was used to capture the spatiotemporal evolution of the discharge (streamer formation and spark channel development), and Coherent Anti-Stokes Raman Spectroscopy (CARS) was used to measure post-discharge N 2 vibrational temperatures. Discharge current and voltage were monitored with a back-current shunt. The discharge was initiated with simultaneous cathode-directed and anode-directed streamers that bridge the gap within ∼1 ns and form a luminous, filamentary plasma channel immediately after breakdown. Laser interferometry measurements showed peak electron number densities of the order of 10 1 7–10 18 cm −3 , occurring about 15–20 ns after pulse arrival at the discharge gap. Shorter gap discharges yielded higher peak electron densities, consistent with the higher energy density in the smaller gaps. Spatially, the electron density was highest near the electrodes and decreased toward the midgap region, with 5 and 7 mm gaps exhibiting a pronounced drop in the central channel. CARS indicated initial vibrational temperatures of approximately 4000–6000 K in the spark core of ∼50 ns after the discharge onset, decaying on a ∼500 ns timescale as the plasma cooled and recombined.

Coherent anti-Stokes Raman spectroscopy↗

Optimizing ablator thickness for laser shock experiments

In laser shock experiments, a well-defined, flat-top shock wave at the ablator/sample interface is important for accurately probing material response under uniaxial strain compression. However, the relationship between the ablator thickness and the resulting shock wave characteristics is insufficiently understood, limiting the ability to design optimal experiments. To address this need, we conducted a systematic experimental study using a 100 J laser to shock-compress polyimide ablators to peak stresses ranging from 20.4 to 111.6 GPa. Laser interferometry diagnostics measured the transmitted wave profiles at the ablator/sample interface, consistently showing a single jump followed by a constant peak state before the arrival of release waves. Here, by analyzing shock transit time, flat-top duration, and stress, our results establish a framework for selecting ablator thickness to maximize the flat-top duration, improving the precision and reproducibility of laser shock experiments.

design of experiments↗