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At least 73 records · Page 4

Kinetic effects of self-organization in low-temperature magnetized plasmas

This final report presents the progress made for the DOE-SC0020623 for the period of performance between January 1 2020 and September 30 2024. The research project is entitled "Kinetic effects of self-organization in low-temperature magnetized plasmas", in which kinetic theory and simulations are used to under stand self-organization patterns.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Analysis of an induced Langmuir wave by ponderomotive forces and its applicability for plasma diagnostics

We present a numerical study on the electron and ion density perturbation in low-temperature plasmas driven by the frequency detuning of two intense laser beams. Our study is performed in the hydrodynamic regime, which becomes applicable when the plasma grating period induced by the beating of the laser beams is greater than the Debye length and collective processes such as plasma oscillations can be excited. Our findings show a resonance in electron density perturbation as the frequency detuning approaches a value consistent with the Bohm–Gross dispersion relation in low- and high-pressure plasmas. We discuss the potential of this resonance as a diagnostic tool for precisely measuring electron temperature and density in low-temperature plasmas through coherent scattering.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Continued Validation Studies using the MOOSE Framework for Plasma Simulation with Electromagnetics

Resources and tools for the modeling and simulation of low-temperature plasma (LTP) discharges are increasingly vital to progress in the field in order to properly characterize and study complex source designs and plasma chemistries beyond the scope of traditional diagnostics. Open-source software provides powerful platforms for this work and can enable community-driven LTP R&D. Within the Multiphysics Object-Oriented Simulation Environment (MOOSE) open-source framework [1], capabilities have been demonstrated in the areas of plasma fluids (Zapdos [2]), plasma chemistry (CRANE [3]), and general electromagnetic wave theory (Electromagnetic Library for Kinetics & fluids [ELK] [4]). ELK has since been coupled to Zapdos/CRANE to enable fully coupled electromagnetic plasma simulations. This talk will detail the continued validation efforts and discuss Zapdos-ELK-CRANE code coupling with various-low temperature plasma sources. The impact of fully coupled electromagnetics on process parameters (e.g., temperature and electron/ion energy) versus an electrostatic description will also be discussed. [1] Permann et al., SoftwareX, 11 (2020) 100430. [2] Lindsay et al., J. Phys. D: Appl. Phys. 49 (2016) 235204. [3] Keniley et al., Talk, GEC Session DT3.00002 (2019). [4] Icenhour et al., Talk, GEC Session RR1.00006 (2019). Acknowledgements: INL Graduate Fellowship Program, NSF SI2 Grant 1740300, U.S. Dept. of Energy Office of Science Graduate Student Research Program

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Transition Metal Dichalcogenide MoS 2 : Oxygen and Fluorine Functionalization for Selective Plasma Processing

Low-temperature plasma processing is a promising technique for tailoring transition metal dichalcogenides (TMDs). For chalcogen substitution processing, a key challenge is to identify the ion energy window that enables selective chalcogen removal while preserving the metal lattice. Using ab initio molecular dynamics (AIMD), we demonstrate that oxygen and fluorine functionalization widen the processing window by significantly lowering the sulfur sputtering energy threshold (E sputt,S ) of MoS 2 from ∼30 to ∼10 eV via formation of sputtering products such as SO 2 and SF n . Additionally, we show that experimentally relevant cryogenic temperatures strongly affect E sputt,S (T). The dependence is confirmed via AIMD and also predicted by a mechanistic parameter-free theory, suggesting that E sputt (T) generalizes to other TMDs, functionalizations, and surface impact conditions. Our results highlight oxygen/fluorine functionalization, ionic impact angle, and material temperature to be key control parameters for selective, damage-controlled chalcogen removal in TMD processing.

Polyachenko, Yury [Princeton Plasma Physics Labora↗

1D EDIPIC

EDIPIC codes were developed for simulation of kinetic effects in low-temperature plasmas. They can be used for simulation of plasmas in electrostatic approximation and include many atomistic and plasma-surface interaction processes needed for simulations of low temperature plasmas. These codes include a detailed model of secondary electron emission induced by electrons and ions. The Monte-Carlo model of electron-neutral collisions and the Langevin model of Coulomb collisions for electrons are also implemented.

Sydorenko, Dmytro↗

EDIPIC-2D

EDIPIC codes were developed for simulation of kinetic effects in low-temperature plasmas. They can be used for simulation of plasmas in electrostatic approximation and include many atomistic and plasma-surface interaction processes needed for simulations of low temperature plasmas. These codes include a detailed model of secondary electron emission induced by electrons and ions. The Monte-Carlo model of electron-neutral collisions and the Langevin model of Coulomb collisions for electrons are also implemented.

Sydorenko, Dmytro↗

Science challenges and research opportunities for plasma applications in microelectronics

Low-temperature plasmas (LTPs) are essential to manufacturing devices in the semiconductor industry, from creating extreme ultraviolet photons used in the most advanced lithography to thin film etching, deposition, and surface modifications. It is estimated that 40%–45% of all process steps needed to manufacture semiconductor devices use LTPs in one form or another. LTPs have been an enabling technology in the multidecade progression of the shrinking of device dimensions, often referred to as Moore’s law. New challenges in circuit and device design, novel materials, and increasing demands to achieve environmentally benign processing technologies require advances in plasma technology beyond the current state-of-the-art. The Department of Energy Office of Science Fusion Energy Sciences held a workshop titled Plasma Science for Microelectronics Nanofabrication in August 2022 to discuss the plasma science challenges and technical barriers that need to be overcome to continue to develop the innovative plasma technologies required to support and advance the semiconductor industry. One of the key outcomes of the workshop was identifying a set of priority research opportunities (PROs) to focus attention on the most strategic plasma science challenges to address to benefit the semiconductor industry. For each PRO, scientific challenges and recommended strategies to address those challenges were identified. Furthermore, this article summarizes the PROs identified by the workshop participants.

36 MATERIALS SCIENCE↗

Simultaneous Imaging of Molecular Rovibrational Nonequilibrium, Reactive Species, and Electric Field for Plasma-Assisted Chemistry

The Sandia-PRF has built a new capability for the low-temperature plasma community for the simultaneous imaging of molecular rotation/vibration nonequilibrium, electric field, and the distribution of OH radical and formaldehyde in reactive low temperature plasma systems. The system is currently investigating the plasma-assisted deflagration to detonation transition in a micro-combustor channel.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Nonthermal plasma synthesis of silicon carbonitride

Abstract The use of a low‐temperature plasma for the synthesis of amorphous silicon carbonitride (SiCN) nanoparticles enables the realization of sintered bulk samples with high thermal stability. Amorphous SiCN nanoparticles are produced from a mixture of silane, methane, and ammonia utilizing a mid‐pressure, radio‐frequency, continuous flow reactor. Particle characterization shows that the nanoparticles are largely amorphous with some crystalline silicon and silicon carbide domains <10 nm in size. Compositional tuning, controlled by varying the precursor flow rates, coupled with the uniform mixing of elements at the nanoscale, results in samples that resist crystallization even when sintered at temperatures as high as 2000°C. This study suggests that the low‐temperature plasma synthesis of nanoparticles has great potential to produce bulk structural materials for application in harsh environments.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Expansion dynamics and chemistry evolution in ultrafast laser filament produced plasmas

Laser ablation in conjunction with optical emission spectroscopy is a potential non-contact, standoff detection method for all elements in the periodic table and certain isotopes such as radionuclides. Currently, significant development efforts are on-going to use ultrafast laser filaments for remote sensing. The application of filaments is of particular interest in extending the range of stand-off capability associated with elemental and isotopic detection via laser-induced breakdown spectroscopy. In this study, we characterize the expansion dynamics and chemical evolution of filament-produced uranium (U) plasmas. Laser filaments are generated in the laboratory by loosely focusing 35 femtosecond (fs), 6 milli Joule (mJ) pulses in air. Two-dimensional spectrally-integrated and time-resolved imaging was performed to study hydrodynamics and evolution of U atomic and UO molecular emission in filament-produced U plasmas. Our results highlight that filament ablation of U plasmas gives a cylindrical plasma plume morphology with an appearance of plume splitting into slow and fast moving components at later times of its evolution. Emission from the slow-moving region shows no distinct spectral features (i.e. broadband-like) and is contributed in part by nanoparticles generated during ultrafast laser ablation. Additionally, we find U atoms and U oxide molecules (i.e. UO, UxOy) co-exist in the filament produced plasma, which can be attributed to the generation of low-temperature plasma conditions during filament ablation

(140.3440) Laser-induced breakdown, (280.5395) Pla↗

Low temperature hydrogen plasma permeation in palladium and its alloys for fuel recycling in fusion systems

Superpermeation of hydrogen isotopes through metal foils is a critical component for efficient fuel recycling in fusion power systems. In that context hydrogen permeation through foils of palladium and its alloys with silver and copper was studied at low temperature (60 - 200°C) under plasma exposure. These alloys differ significantly in both bulk and surface properties, and comparisons can provide mechanistic insights. Here, permeation was observed only during plasma operation, confirming the negligible contribution of molecular hydrogen to the observed flux. As-received foils required surface treatment to achieve top performance. For Pd and Pd75Ag25 an oxidation treatment increased permeation an order of magnitude, but proved unstable as this desirable surface was reduced under hydrogen plasma exposure. In contrast, an Ar plasma cleaning step provided both high and stable flux. As-received FCC phase Pd60Cu40 foils required annealing to transform it into the high permeability BCC phase that delivered top performance. All foils displayed similar temperature dependence with flux declining with temperature, suggesting that the primary rate-limiting step is absorption of superthermal hydrogen. Among these foils the hydrogen flux through PdCu was 3 - 5X greater than that of Pd or PdAg, which were similar. The superiority of BCC PdCu is attributed to its superior hydrogen desorption kinetics. Using PdCu 100% permeation of supplied hydrogen was achieved, and the flux saturated with increasing plasma power at values >10 –2 mol H•m –2 •s– 1 , and under these conditions permeation rates are equivalent with or without the membrane present. The fluxes achieved are the highest reported to date at these conditions, and the results highlight the important roles of both surface and bulk properties.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE Plasma Science Center - Predictive Control of Plasma Kinetics: Multi-Phase and Bounded Systems (Final Report DE-SC0001939)

Low temperature plasmas (LTPs) are the plasmas of electron-volt (eV) physics and eV technologies. LTPs have characteristic electron temperatures of a few eV and fractional ionizations that are typically small. Since LTPs have electron temperatures commensurate with the threshold energies of excited states in neutral atoms and molecules, power transfer from electrons to these atoms and molecules efficiently produces activated species (e.g., radicals, excited states, photons). Acceleration of ions in the sheaths of LTPs to energies of tens to hundreds of eV enable activation of surface modifying processes – sputtering, etching, deposition. With such properties, LTPs are often and beneficially used in technological devices, ranging from etching and deposition in microelectronics and solar cell fabrication, to hardening of surgical instruments. LTPs harbor fundamental science issues that are intellectually challenging and rewarding. At the same time, there are enormous societal benefits that are enabled by LTPs. The entire present-day and future information technology infrastructure owes its very existence to LTPs. Renewable energy sources, such as solar cell arrays, could not be economically produced in the absence of deposition and etching by LTPs. In acknowledgment of the importance of LTPs, the DOE Office of Fusion Energy Sciences supported the Plasma Science Center for Predictive Control of Plasma Kinetics: Multi-Phase and Bounded Systems from August 2009 to July 2021, consisting of an initial 5-year grant, 3 funded extensions and 2 no-cost extensions. This is the final report of the Center in which the productivity of the Center is discussed in terms of publications, impact and personnel. High-lights of the research performed in the Center are provided.

36 MATERIALS SCIENCE↗

Pretreatment of Bituminous Coal By-Products for the Hydrometallurgical Extraction of Rare Earth Elements

Low-temperature plasma (LTP) oxidation has been widely used to study the mineralogy of the mineral matter existing in coal sources. The current study investigated the potential of LTP oxidation as a pre-treatment method to improve rare earth element (REE) leachability from coal and its by-products. Representative density-fractionated samples of Baker and Fire Clay coarse refuse seam materials were ground to a top size of 180 µm and subjected to low-temperature plasma oxidation. Subsequently, the treated samples were leached at 1% w/v solids concentration and 75 °C for 5 h using (i) de-ionized (DI) water, (ii) 0.1 mol/L of ammonium sulfate, and (iii) 1.2 mol/L of sulfuric acid. It was determined that LTP treatment improved REE leaching characteristics, especially the leaching of heavy REEs (HREE), existing in the lighter density fractions of the Baker seam coarse refuse material. For instance, the HREE recovery for the 1.6 specific gravity (SG) float fraction increased from 8% to 33% using 0.1 mol/L of ammonium sulfate solution after 32 h of LTP treatment. This finding indicated that HREEs associated with the organic matter were released by the LTP treatment and adsorbed onto the surfaces of highly negative charged mineral matter and was exchanged with ammonium to allow their recovery. Similarly, when using 1.2 mol/L of sulfuric acid, the HREE recovery increased from 23% to 53% for the 1.6 SG float fraction. Interestingly, LTP oxidation did not provide significant improvement in REE recovery from the 2.2 sink density fractions, which was likely due to its lower organic content. No significant benefits were observed when treating the Fire Clay coarse refuse material, which was likely due to the lack of organic affinity and the difficult-to-leach REE minerals associated with the coal source such as monazite, xenotime, and zircon. Conversely, high-temperature oxidation within a temperature range of 600–750 °C significantly improved REE leaching characteristics for both coal sources. Improvement in REE recovery was due to decarbonization of the material, clay dehydroxylation and subsequent conversion of liberated REE-bearing minerals into a more leachable form. However, increasing the temperature above 800 °C decreased REE recovery due to the conversion of meta-kaolinite into mullite, which is chemically stable.

58 GEOSCIENCES↗

In Situ Infrared Spectroscopy of a Plasma Jet and Data-Driven Solution of Multi-Scale Plasma Chemistry Problems

Multi-scale problems are commonly known in many scientific and engineering fields where microscopic behaviors are coupled with macroscopic processes. This is also an unsolved problem in low-temperature plasma chemistry where hundreds of chemical species are involved in thousands of chemical reactions. To address this problem, a physics-informed data-driven modeling is developed to solve such a multi-scale problem using the experimental Fourier-transform infrared spectroscopy (FTIR) measurements of several species’ concentrations. The modeling based on modern machine learning techniques provides concentrations of other relevant species along with the electron temperature and gas temperature at the location of FTIR measurements. For example, the concentrations O, OH, and H 2 O 2 play key roles in plasma-based cancer therapy. This approach overcomes the multi-scale difficulties of microscopic low-temperature plasma chemistry coupling with macroscopic gas flow and allows the acquisition of a full picture of output species concentrations. Presented here for the helium-air jet at atmospheric pressure, the ML-based modeling can be used to describe and possibly control multiscale systems using partial experimental data sets.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Process Intensification by One-Step, Plasma-Assisted Catalytic Synthesis of Liquid Chemicals from Light Hydrocarbons

In this project, we present a plasma-assisted, catalytic process that can handle variations in production rates and gas compositions of producing wells and reliably converts the hydrocarbons to gas phase olefins, high molecular weight alkanes, and liquid chemicals. The low-temperature plasma serves as a reactive chemical environment that activates and converts the light hydrocarbons to these valuable products. We present results from the integration of a catalyst into the low-temperature plasma zone to improve reaction efficiency and product selectivity. We show that the gas composition, bulk gas temperature, and input power of the plasma, with and without catalysts, influence the production rates of liquids from natural gas feeds.

03 NATURAL GAS↗

Observation of fully detached divertor integrated with improved core confinement for tokamak fusion plasmas

Integration of divertor detachment with a high-performance (β N ~ 3, β p > 2, H 98 ~ 1.5) core plasma has been demonstrated in DIII-D high-β p (poloidal beta) plasmas associated with a sustained core internal transport barrier (ITB) and an H-mode edge transport barrier (ETB). Such good core-edge integration has been achieved for both neon and nitrogen seeding, for both favorable and unfavorable B-field directions, independently from the impurity puffing locations, though these variations play important roles on divertor characteristics. Compared to the standard H-mode plasmas, the high-β p plasma exhibits a much wider window of detachment compatible with high confinement core. Fully detached divertor plasmas with low plasma temperature (Te < 5 eV), low particle flux, and low heat flux across the entire divertor target plate were obtained by using nitrogen seeding. This detached high-β p plasma is compatible with a newly developed detachment control system which can help optimize the nitrogen gas flow rate. Several features, i.e., the high edge safety factor in the high-β p scenario, impurity injection, closed divertor and reduced heating power requirement due to the high confinement, facilitate the achievement of full divertor detachment at lower density. Instead of degrading global performance, the divertor detachment facilitates the access to an even stronger ITB at large radius with a relatively weak ETB through self-organized synergy between ITB and ETB, leading to sustained high confinement. The strengthening of the large-radius ITB compensates for the ETB degradation associated with divertor detachment. In addition, a weak ETB naturally has smaller edge localized modes (ELMs). In particular, with neon injection, a long-period no-ELM H-mode phase has been achieved simultaneously with high-performance core and partially detached divertor plasmas. Furthermore, these results demonstrate the possibility of integrating excellent core plasma performance with an effective divertor solution, an essential step toward steady-state operation of reactor-grade plasmas.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Dielectric Resonator Design for Low Power and Low Temperature Microwave Plasma

Waveguide-based microwave plasmas generally operate at high temperatures (2000 - 6000K)[1], making it difficult to directly interface solid materials with the plasma without significant thermal damage. Dielectric microwave resonators (DMRs), long studied for wave-based manipulation of electromagnetic radiation for telecom and optics, can focus radiation to extremely small mode volumes, creating intense localized fields with low-power input.[2] This phenomenon can be used for applications ranging from efficient plasma electronics to near-ambient plasma-materials interactions. Such DMR-based plasmas have been demonstrated a handful of times in the literature, but the majority of research towards this utilize the lowest frequency resonance mode.[3], [4], [5] By carefully controlling the geometry of cylindrical resonators, a variety of electromagnetic modes can be excited. In this work, COMSOL Multiphysics simulations are used to study the electric field enhancement and absorption properties of CaTiO3 DMRs as a function of geometry and excitation frequency. Whereas previous studies have utilized the HEM111 resonance frequency to drive low power plasma excitation, we find that higher order resonance frequencies are more effective at field enhancement and result in less power loss within the dielectric material, hence less wasted heating. The effectiveness of these modes is also geometry dependent and can be computationally optimized for plasma generation. Complementing these computational efforts, we demonstrate a new closed-system reactor design built in a WR-650 waveguide and experimentally demonstrate the formation of atmospheric argon microwave plasma using < 30 W input power on DMR dimers. We observe a shifting resonance frequency as the DMRs heat in response to microwave excitation and develop a Python-based lock-in mechanism to effectively track the DMR resonance over time, leading to stable plasma operation. We use infrared thermal imaging to monitor the temperature of the DMR dimers and surrounding quartz chamber, demonstrating thermal temperatures < 60 degreesC. Finally, we utilize optical emission spectroscopy (OES) to probe the plasma properties as a function of the resonance mode.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Inertial and anisotropic pressure effects on cross-field electron transport in low-temperature magnetized plasmas

In this paper, a one-dimensional (1D) particle-in-cell Monte Carlo collision (PIC-MCC) model is developed to investigate the effects of anisotropic pressure and inertial terms due to non-Maxwellian velocity distribution functions on cross-field electron transport. The conservation of momentum is evaluated by taking the moments of the first-principles gas-kinetic equation. A steady-state discharge is obtained without any low-frequency ionization oscillations by considering an anomalous electron scattering profile. Further, the results obtained from the 1D PIC-MCC model are compared with fluid models, including the quasi-neutral drift-diffusion (DD), non-neutral DD, and full fluid moment models. The discharge current obtained from the PIC-MCC model is in good agreement with the fluid models. The cross-field electron transport due to the inertial terms, i.e. the gradient of axial and azimuthal drift, is evaluated. Moreover, PIC-MCC simulation results show non-zero, anisotropic, off-diagonal pressure tensor terms due to asymmetric non-Maxwellian electron velocity distribution function, potentially contributing to cross-field electron transport.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗