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DOE OSTI2020

All-Sputtered, Superior Power Density Thin-Film Solid Oxide Fuel Cells with a Novel Nanofibrous Ceramic Cathode

Thin film solid oxide fuel cells (TF-SOFCs) are attracting attention due to their ability to operate at comparatively lower temperatures (400–650 °C) that are unattainable for conventional anode-supported SOFCs (650–800 °C). However, limited cathode performance and cell scalability remain persistent issues. Here, we report a new approach of fabricating yttria-stabilized zirconia (YSZ)-based TF-SOFCs via a scalable magnetron sputtering process. Notable is the development and deposition of a porous La 0.6 Sr 0.4 Co 0.2 Fe 0.8 O 2.95 (LSCF)-based cathode with a unique fibrous nanostructure. This all-sputtered cell shows an open-circuit voltage of ~1.0 V and peak power densities of ~1.7 and ~2.5 W/cm 2 at 600 and 650 °C, respectively, under hydrogen fuel and air along with showing stable performance in short-term testing. The power densities obtained in this work are the highest among YSZ-based SOFCs at these low temperatures, which demonstrate the feasibility of fabricating exceptionally high-performance TF-SOFC cells with distinctive dense or porous nanostructures for each layer, as desired, by a sputtering process. This work illustrates a new, potentially low-cost, and scalable platform for the fabrication of next-generation TF-SOFCs with excellent power output and stability.

25 ENERGY STORAGE↗

DOE OSTI2026

Efficient continuous-wave normal conducting accelerator for industrial applications

A normal conducting, high power, high efficiency copper linear accelerator prototype is being developed for industrial applications. The system will be powered by low-cost high-efficiency magnetron RF sources and will use a gridded thermionic cathode electron gun. Leveraging the significant accelerator expertise at JLab and industry partners, these technologies will be combined to deliver high-power (>100 kW) electron beams with energies of 1 MeV or higher that are cost-effective to produce and operate. The design is modular such that energy and power can be increased by adding additional sections as required. The status of the design, prototype fabrication and plans for a beam demonstration at JLab are described.

Accelerator Physics↗

NASA NTRS1988

Performance and impedance studies of thin, porous molybdenum and tungsten electrodes for the alkali metal thermoelectric converter

Columnar, porous, magnetron-sputtered molybdenum and tungsten films show optimum performance as alkali metal thermoelectric converter electrodes at thicknesses less than 1.0 micron when used with molybdenum or nickel current collector grids. Power densities of 0.40 W/sq cm for 0.5-micron molybdenum films at 1200 K and 0.35 W/sq cm for 0.5-micron tungsten films at 1180 K were obtained at electrode maturity after 40-90 h. Sheet resistances of magnetron sputter deposited films on sodium beta-double-prime-alumina solid electrolyte (BASE) substrates were found to increase very steeply as thickness is decreased below about 0.3-double-prime 0.4-micron. The ac impedance data for these electrodes have been interpreted in terms of contributions from the bulk BASE and the porous electrode/BASE interface. Voltage profiles of operating electrodes show that the total electrode area, of electrodes with thickness less than 2.0 microns, is not utilized efficiently unless a fairly fine (about 1 x 1 mm) current collector grid is employed.

Wheeler, B. L.↗

NASA NTRS1981

Status of the microwave power transmission components for the solar power satellite

During the 1970-1980 time period a substantial advance has been made in developing all portions of a microwave power transmission system for the solar power satellite (SPS). The most recent advances pertain to the transmitting portion of the system in the satellite and are based upon experimental observations of the use of the magnetron combined with a passive directional device to convert it into a highly efficient directional amplifier with excellent low-noise properties and potentially very long life. The ability of its microwave output to track a phase reference makes it possible to combine it with many other radiating units to provide a highly coherent microwave beam. The ability of its output to track an amplitude reference while operating from a dc power source with varying voltage makes it possible to eliminate most of the power conditioning equipment that would otherwise be necessary.

Brown, W. C.↗

DOE OSTI2020

Combinatorial Synthesis and High-Throughput Characterization of Microstructure and Phase Transformation in Ni–Ti–Cu–V Quaternary Thin-Film Library

Ni–Ti–based shape memory alloys (SMAs) have found widespread use in the last 70 years, but improving their functional stability remains a key quest for more robust and advanced applications. Named for their ability to retain their processed shape as a result of a reversible martensitic transformation, SMAs are highly sensitive to compositional variations. Alloying with ternary and quaternary elements to fine-tune the lattice parameters and the thermal hysteresis of an SMA, therefore, becomes a challenge in materials exploration. Combinatorial materials science allows streamlining of the synthesis process and data management from multiple characterization techniques. In this study, a composition spread of Ni–Ti–Cu–V thin-film library was synthesized by magnetron co-sputtering on a thermally oxidized Si wafer. Composition-dependent phase transformation temperature and microstructure were investigated and determined using high-throughput wavelength dispersive spectroscopy, synchrotron X-ray diffraction, and temperature-dependent resistance measurements. Of the 177 compositions in the materials library, 32 were observed to have shape memory effect, of which five had zero or near-zero thermal hysteresis. These compositions provide flexibility in the operating temperature regimes that they can be used in. A phase map for the quaternary system and correlations of functional properties are discussed with respect to the local microstructure and composition of the thin-film library.

42 ENGINEERING↗

DOE OSTI2021

Functionalized carbon nanotubes for thermionic emission and cooling applications

Barium strontium oxide-coated carbon nanotubes (CNTs) were implemented as a work function lowering and field enhancing functional coating on a coiled tungsten filament to create a new thermionic cathode. This cathode resembles conventional oxide cathodes in structure. It has the same coiled tungsten filament as a conventional oxide cathode but uses barium strontium oxide-coated CNTs instead of the traditional barium strontium calcium oxide powder mixture as an emissive coating. The cathode produces a strong thermionic emission. At 1395 K and 2.5 V/μm, the thermionic emission current of 0.87 A or current density of 2.9 A/cm 2 was obtained from this oxide-coated CNT cathode. This level of emission is about three times as large as a conventional oxide cathode operating at similar temperature and field strength. Strong thermionic emissions from the cathode also lead to a large thermionic cooling effect. Temperature reduction as large as 90° was observed from the cathode surface when it was emitting electrons. Strong thermionic emission and a large cooling effect obtained are the result of the combination of the low work function of barium strontium oxide (1.6 eV) and the large field effect induced by the CNTs. Plasma enhanced chemical vapor deposition was used to grow CNTs, and magnetron sputtering deposition was used to deposit the barium strontium oxide functional coating; details of the cathode fabrication are presented to illustrate both the versatility of the processing techniques and the adaptability of barium strontium oxide-coated CNTs as a functional coating. Finally, measurements on thermionic emission and thermionic cooling of the cathode are also presented.

36 MATERIALS SCIENCE↗

DOE OSTI2023

Underlying Substrate Effect on Electrochemical Activity for Hydrogen Evolution Reaction with Low‐Platinum‐Loaded Catalysts

Platinum is known as the best catalyst for the hydrogen evolution reaction (HER) but the scarcity and high cost of Pt limit its widespread applicability. Herein, the role of the underlying substrate on the HER activity of dispersed Pt atoms is uncovered. A direct current magnetron sputtering technique is utilized to deposit transition metal (TM) thin films of W, Ti, and Ta as underlying substrates for extremely low loading of Pt (<1.5 at%). The electrocatalytic performance of as‐synthesized samples for the HER is examined in both alkali and acidic media. The results show that despite the low loading of Pt, the Pt/TM catalysts produce hydrogen at a rate comparable to that of pristine bulk Pt. Pt/TM catalysts also display good stability with less than 5% decay in performance after 10 h of continuous HER operation. Based on the computational study, the excellent performance is attributed to the modified electronic properties of the Pt atoms, offering ideal binding energy for HER due to interaction with the underlying substrates. This work provides a robust and industry‐friendly route toward designing efficient catalytic systems for important electrochemical reactions such as HER and others.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

NASA NTRS2007

MoO3 Cathodes for High-Temperature Lithium Thin-Film Cells

MoO3 has shown promise as a cathode material that can extend the upper limit of operating temperature of rechargeable lithium thin-film electrochemical cells. Cells of this type are undergoing development for use as energy sources in cellular telephones, wireless medical sensors, and other, similarly sized portable electronic products. The LiCoO2 and LiMn2O4 cathodes heretofore used in these cells exhibit outstanding cycle lives (of the order of hundreds of thousands of cycles) at room temperature, but operation at higher temperatures reduces their cycle lives substantially: for example, at a temperature of 150 C, cells containing LiCoO2 cathodes lose half their capacities in 100 charge/discharge cycles. The superiority of MoO3 as a cathode material was demonstrated in experiments on lithium thin-film cells fabricated on glass slides. Each cell included a layer of Ti (for adhesion to the glass slide), a patterned layer of Pt that served as a cathode current collector, a cathode layer of MoO3, a solid electrolyte layer of Li3.3 PO3.8 N0.22 ("LiPON"), and an anode layer of Li. All the layers were deposited by magnetron sputtering except for the Li layer, which was deposited by thermal evaporation. These cells, along with similar ones containing LiCoO2 cathodes, were subjected to several tests, including measurements of specific capacity in charge/discharge cycling at a temperature of 150 C. The results of these measurements, plotted in the figure, showed that whereas specific capacity of the cells containing LiCoO2 cathodes faded to about half its initial value after only 100 cycles, the specific capacity of the cells containing the MoO3 cathodes faded only slightly during the first few hundred cycles and thereafter not only recovered to its initial value but continued to increase up to at least 5,500 cycles.

West, William↗

NASA NTRS2007

X-Band Radar for Studies of Tropical Storms from High Altitude UAV Platform

The increased role of unmanned aerial vehicles (UAV) in NASA's suborbital program has created a strong interest in the development of instruments with new capabilities, more compact sizes and reduced weights than the instruments currently operated on manned aircrafts. There is a strong demand and tremendous potential for using high altitude UAV (HUAV) to carry weather radars for measurements of reflectivity and wind fields from tropical storms. Tropical storm genesis frequently occurs in ocean regions that are inaccessible to piloted aircraft due to the long off shore range and the required periods of time to gather significant data. Important factors of interest for the study of hurricane genesis include surface winds, profiled winds, sea surface temperatures, precipitation, and boundary layer conditions. Current satellite precipitation and surface wind sensors have resolutions that are too large and revisit times that are too infrequent to study this problem. Furthermore, none of the spaceborne sensors measure winds within the storm itself. A dual beam X-band Doppler radar, UAV Radar (URAD), is under development at the NASA Goddard Space Flight Center for the study of tropical storms from HUAV platforms, such as a Global Hawk. X-band is the most desirable frequency for airborne weather radars since these can be built in a relatively compact size using off-the-shelf components which cost significantly less than other higher frequency radars. Furthermore, X-band radars provide good sensitivity with tolerable attenuation in storms. The low-cost and light-weight URAD will provide new capabilities for studying hurricane genesis by analyzing the vertical structure of tropical cyclones as well as 3D reflectivity and wind fields in clouds. It will enable us to measure both the 3D precipitation structure and surface winds by using two antenna beams: fixed nadir and conical scanning each produced by its associated subsystem. The nadir subsystem is a magnetron based radar modified from a marine radar transceiver. It is capable of measuring vertical reflectivity and velocity profile while being a lower-cost, smaller size, and lighter weight version of the NASA ER-2 Doppler Radar (EDOP), which has flown during many NASA field campaigns and has provided valuable scientific information on hurricanes and weather phenomena. Unfortunately, EDOP is too large and heavy for most UAV platforms, but the experience gained with this instrument provided us with the heritage to build a new low-cost, light-weight, smaller system that will be capable of flying on UAVs. The scanning subsystem uses a TWT transmitter and provides measurements of 3D reflectivity/wind fields in-clouds. Conical scanning of the radar beam at a 35 deg. incidence angle will also provide information of surface wind speed and direction derived from the surface return over a single 360 deg. sweep. URAD data system will be Linux based with the capability of autonomous operation. It will utilize cutting edge digital receiver and FPGA technologies to carry out the data acquisition and processing tasks. High speed navigation data from the aircraft will also be captured and saved along with radar data for 3D measurement field reconstruction and aircraft motion correction. There is a tremendous potential for UAVs to carry down-looking weather radars for measurements of reflectivity, horizontal and vertical winds from tropical storms. With operation from HUAV platforms, the dual beam X-band radar under development promises to provide greatly needed information for tropical storm research.

Rodriquez, Shannon↗

NASA NTRS2010

Igniter Testing and Development for Liquid Oxygen/Liquid Methane (LOX/LCH4) and Liquid Oxygen/Gaseous Hydrogen (LOX/GH2) Injectors

In support of NASA's efforts to advance methane technology for future exploration missions, two different igniter concepts were developed and tested at NASA's Marshall Space Flight Center for ignition of oxygen/methane propellants. The first type of igniter, an impinging injection, spark-initiated torch igniter (impinging igniter), used traditional spark plug technology to produce a small, but very intense, pulsed plasma as the ignition source. The second type of igniter, a microwave-generated plasma igniter (microwave igniter), used a microwave magnetron to produce a continuous, larger-volume plasma as the ignition source. Two new designs for both types of igniters were leveraged off past oxygen/methane igniter designs that were tested at MSFC and documented in a 2008 JANNAF paper. In this most recent work, the two new igniters were to be tested at the component level as well as inside a liquid oxygen/liquid methane (LOX/LCH4) 40-element swirl coaxial injector. Although the microwave igniter achieved ignition in every test, it encountered technical difficulties that prevented it from being tested with the injector. The impinging igniter required several design iterations as well as testing at different mixture ratios and mass flow rates before reliable operation with minimal ignition delay was achieved. The final design of the impinging igniter was successfully tested in the LOX/LCH4 injector. The same igniter was later re-configured and component-tested to demonstrate reliable ignition of oxygen/hydrogen propellants. Future tests of the impinging igniter will include ignition of a LOX/hydrogen two-stage swirl injector, which is one of several injector concepts being tested in the Lunar Lander Descent Engine Test Bed at MSFC. All igniter and injector tests have been funded by the Propulsion & Cryogenics Advanced Development project managed by Glenn Research Center and sponsored by NASA s Exploration Technology Development Program.

Osborne, Robin J.↗

NASA NTRS2019

Fatigue Behavior of Coated Titanium Alloys

Advanced multi-component TiAlCrTaSiN-based multilayered coatings were developed and processed onto Ti-6Al-4V (Ti-6-4) and GammaMet PX (GMPX or TiAl) alloys by a magnetron-enhanced physical vapor deposition technique. The coatings have recently been in development with the goal of improving advanced titanium alloy, turbine engine component durability and oxidation-erosion resistance. In this work, the performance of the multi-component coating system (including the outer layer nitride based coating and inner TiAlCrSi oxidation barrier bond coat) was studied, and the coating's influence on the fatigue behavior of the titanium-based alloys were compared. Although the multi-component coating was initially optimized to improve the coating's high temperature oxidation and erosion resistance, the lower ductility nitride-based coating needs further work on microstructure or composition to improve its mechanical stress resistance and strain tolerance for use in cyclically loaded, turbine blade operating conditions. This is particularly true for GMPX and other γ-TiAl alloys because these intermetallic titanium alloys have limited ductility and are very sensitive to defects such as coating cracks. However, the inner layer TiAlCrSi-coating had better adhesion and ductility, and may be a suitable choice to improve the oxidation resistance of titanium alloys.

Oxidation Barrier Coatings↗

DOE OSTI2025

Development and Testing of a new Current-Regulated Arc Modulator for the LINAC

In this study, the performance of a current-regulated arc modulator was investigated with a focus on its role in initiating and sustaining plasma discharge within the Magnetron Body of the LINAC system. The analysis centered on how switching components, circuit topology, and feedback loop architecture influence critical factors such as energy efficiency, discharge stability, and long-term plasma containment. Particular attention was given to variations in pulse termination behavior, as observed through oscilloscope traces, which revealed inconsistencies affecting the duty factor and cathode temperature. These fluctuations have downstream effects on the cesium-coated cathode surface, thereby impacting H⁻ ion production and beam reliability. Simulation-based testing in LTspice was used to evaluate noise suppression techniques and arc current regulation schemes, revealing how optimized snubber networks, improved pulse shaping, and feedback stability can mitigate modulator-induced noise. The results identified hardware level parameters that significantly enhance discharge repeatability and improve overall plasma performance under operational conditions.

Campos, Nathan [Unlisted, US; Fermilab]↗

DOE OSTI2021

Fast X-ray Nanotomography with Sub-10 nm Resolution as a Powerful Imaging Tool for Nanotechnology and Energy Storage Applications

In the last decade, transmission X-ray microscopes (TXMs) have come into operation in most of the synchrotrons worldwide. They have proven to be outstanding tools for non-invasive ex and in situ 3D characterization of materials at the nanoscale across varying range of scientific applications. However, their spatial resolution has not improved in many years, while newly developed functional materials and microdevices with enhanced performances exhibit nanostructures always finer. Here, optomechanical breakthroughs leading to fast 3D tomographic acquisitions (85 min) with sub-10 nm spatial resolution, narrowing the gap between X-ray and electron microscopy, are reported. These new achievements are first validated with 3D characterizations of nanolithography objects corresponding to ultrahigh-aspect-ratio hard X-ray zone plates. Then, this powerful technique is used to investigate the morphology and conformality of nanometer-thick film electrodes synthesized by atomic layer deposition and magnetron sputtering deposition methods on 3D silicon scaffolds for electrochemical energy storage applications.

36 MATERIALS SCIENCE↗

DOE OSTI2023

Fabrication of superconducting Nb 3 Sn film by Co-sputtering

High-efficiency SRF cavities are the key technology to construct cost-effective CW SRF accelerators. Improvements in the efficiency of SRF cavities are realized by using novel materials, such as niobium-tin. Advances in niobium-tin coatings on the inner surface of SRF cavities showed the potential for this material to increase the operating temperature of the SRF cavity to above 4 K, leading to significant reduction of the capital and operating cost of SRF accelerators. Among the techniques used to apply the niobium-tin coating to the surface of the SRF cavity is sputtering. Old Dominion University, Jefferson Lab, and Fermilab are collaborating on developing an optimized niobium-tin coating of the inside surface of niobium SRF cavities using a recently-developed cylindrical sputtering system. This research will result in optimized sputtering coating techniques leading to high efficiency SRF structures.

42 ENGINEERING↗

NASA NTRS2005

Actuated Hybrid Mirror Telescope

The figure depicts the planned Actuated Hybrid Mirror Telescope (AHMT), which is intended to demonstrate a new approach to the design and construction of wide-aperture spaceborne telescopes for astronomy and Earth science. This technology is also appropriate for Earth-based telescopes. The new approach can be broadly summarized as using advanced lightweight mirrors that can be manufactured rapidly at relatively low cost. More specifically, it is planned to use precise replicated metallic nanolaminate mirrors to obtain the required high-quality optical finishes. Lightweight, dimensionally stable silicon carbide (SiC) structures will support the nanolaminate mirrors in the required surface figures. To enable diffraction- limited telescope performance, errors in surface figures will be corrected by use of mirror-shape-control actuators that will be energized, as needed, by a wave-front-sensing and control system. The concepts of nanolaminate materials and mirrors made from nanolaminate materials were discussed in several previous NASA Tech Briefs articles. Nanolaminates constitute a relatively new class of materials that can approach theoretical limits of stiffness and strength. Nanolaminate mirrors are synthesized by magnetron sputter deposition of metallic alloys and/or compounds on optically precise master surfaces to obtain optical-quality reflector surfaces backed by thin shell structures. As an integral part of the deposition process, a layer of gold that will constitute the reflective surface layer is deposited first, eliminating the need for a subsequent and separate reflective-coating process. The crystallographic textures of the nanolaminate will be controlled to optimize the performance of the mirror. The entire deposition process for making a nanolaminate mirror takes less than 100 hours, regardless of the mirror diameter. Each nanolaminate mirror will be bonded to its lightweight SiC supporting structure. The lightweight nanolaminate mirrors and SiC supporting structures will be fabricated from reusable master molds. The mirror-shape-control actuators will be low-power, high-capacitance lead magnesium niobate electrostrictive actuators that will be embedded in the SiC structures. The mode of operation of these actuators will be such that once power was applied, they will change in length and once power was removed, they will maintain dimensional stability to nanometer precision. This mode of operation will enable the use of low-power, minimally complex electronic control circuitry. The wave-front-sensing and control system will be designed and built according to a two-stage architecture. The first stage will be implemented by a Shack- Hartmann (SH) sensor subsystem, which will provide a large capture range. The second, higher-performance stage will be implemented by an image-based wave-front-sensing subsystem that will include a phase-retrieval camera (PRC), and will utilize phase retrieval and other techniques to measure wavefront error directly. Phase retrieval is a process in which multiple images of an unresolved object are iterated to estimate the phase of the optical system that acquired the images. The combination of SH and phase-retrieval sensors will afford the virtues of both a dynamic range of 105 and an accuracy of <10 nm.

Hickey, Gregory↗

NASA NTRS1990

Characterization of Iridium Coated Rhenium Used in High-Temperature, Radiation-Cooled Rocket Thrusters

Materials used for radiation-cooled rocket thrusters must be capable of surviving under extreme conditions of high-temperatures and oxidizing environments. While combustion efficiency is optimized at high temperatures, many refractory metals are unsuitable for thruster applications due to rapid material loss from the formation of volatile oxides. This process occurs during thruster operation by reaction of the combustion products with the material surface. Aerojet Technical Systems has developed a thruster cone chamber constructed of Re coated with Ir on the inside surface where exposure to the rocket exhaust occurs. Re maintains its structural integrity at high temperature and the Ir coating is applied as an oxidation barrier. Ir also forms volatile oxide species (IrO2 and IrO3) but at a considerably slower rate than Re. In order to understand the performance limits of Ir-coated Re thrusters, we are investigating the interdiffusion and oxidation kinetics of Ir/Re. The formation of iridium and rhenium oxides has been monitored in situ by Raman spectroscopy during high temperature exposure to oxygen. For pure Ir, the growth of oxide films as thin as approximately 200 A could be easily detected and the formation of IrO2 was observed at temperatures as low as 600 C. Ir/Re diffusion test specimens were prepared by magnetron sputtering of Ir on Re substrates. Concentration profiles were determined by sputter Auger depth profiles of the heat treated specimens. Significant interdiffusion was observed at temperatures as low as 1000 C. Measurements of the activation energy suggest that below 1350 C, the dominant diffusion path is along defects, most likely grain boundaries, rather than bulk diffusion through the grains. The phases that form during interdiffusion have been examined by x ray diffraction. Analysis of heated test specimens indicates that the Ir-Re reaction produces a solid solution phase of Ir dissolved in the HCP structure of Re.

Stulen, R. H.↗

NASA NTRS2005

Making Wide-IF SIS Mixers with Suspended Metal-Beam Leads

A process that employs silicon-on-insulator (SOI) substrates and silicon (Si) micromachining has been devised for fabricating wide-intermediate-frequency-band (wide-IF) superconductor/insulator/superconductor (SIS) mixer devices that result in suspended gold beam leads used for radio-frequency grounding. The mixers are formed on 25- m-thick silicon membranes. They are designed to operate in the 200 to 300 GHz frequency band, wherein wide-IF receivers for tropospheric- chemistry and astrophysical investigations are necessary. The fabrication process can be divided into three sections: 1. The front-side process, in which SIS devices with beam leads are formed on a SOI wafer; 2. The backside process, in which the SOI wafer is wax-mounted onto a carrier wafer, then thinned, then partitioned into individual devices; and 3. The release process, in which the individual devices are separated using a lithographic dicing technique. The total thickness of the starting 4-in. (10.16-cm)-diameter SOI wafer includes 25 m for the Si device layer, 0.5 m for the buried oxide (BOX) layer, and 350 m the for Si-handle layer. The front-side process begins with deposition of an etch-stop layer of SiO2 or AlN(x), followed by deposition of a Nb/Al- AlN(x) /Nb trilayer in a load-locked DC magnetron sputtering system. The lithography for four of a total of five layers is performed in a commercial wafer-stepping apparatus. Diagnostic test dies are patterned concurrently at certain locations on the wafer, alongside the mixer devices, using a different mask set. The conventional, self-aligned lift-off process is used to pattern the SIS devices up to the wire level.

Kaul, Anupama↗

DOE OSTI2025

Synthesis and characterization of electron beam irradiation-induced damage in polycrystalline metal thin films

High-energy physics research, industrial sterilizing, and material processing depend extensively on electron beam accelerators. Exit windows are crucial components of such electron accelerator systems, maintaining vacuum integrity inside the machine while providing mechanical strength, thermal stability, and radiation resistance at the beam-target interface. In this study, thin metallic films of Ni, Ti, Cr, and V were explored for use in electron beam exit windows, and their properties were compared with the properties of their bulk counterparts. Simulation results of metal foils predicted Ti to exhibit less beam power dissipation compared to Ni. However, Ni possesses superior mechanical and structural properties compared to Ti. The performance of these films under electron beam irradiation was examined by depositing thin layers of these films on silicon and metallic substrates using magnetron sputtering and exposing them to e-beam irradiation in a controlled setup. The deposited films were subjected to a dose of approximately 66 kGy at a beam energy of 10 MeV and characterized prior to and postexposure to the beam using field emission scanning electron microscopy, atomic force microscopy, x-ray diffraction (XRD), and nanoindentation. Particular emphasis was given to characteristics like the grain structure, surface morphology, dislocation density, and hardness. XRD patterns revealed irradiation-induced changes in peak intensities, while the crystallinity remained largely unchanged. Nanoindentation results showed that the pristine and irradiated Ti and Ni films were twice as hard when compared to bulk Ti and Ni samples, regardless of the substrate type used (Si or bulk Ti, or Ni). These results emphasize the superior mechanical properties of thin metal films compared to their bulk counterparts. In conclusion, this study advances the optimization of thin film materials for robust and efficient e-beam applications, ensuring improved durability and operational reliability.

AFM↗