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At least 721 records · Page 40

Mode transition in CF{sub 4} + Ar inductively coupled plasma

The E to H mode transitions are studied by a hairpin probe and optical emission spectroscopy in inductively coupled CF{sub 4} + Ar plasmas. Electron density, optical emission intensity of Ar, and the voltage and current are measured during the E to H mode transitions. It is found that the electron density and plasma emission intensity increase continuously at low pressure during the E to H mode transition, while they jump up discontinuously at high pressure. Meanwhile, the transition threshold power and △P (the power interval between E and H mode) increase by increasing the pressure. When the ratio of CF{sub 4} increases, the E to H mode transition happens at higher applied power, and meanwhile, the △P also significantly increases. Besides, the effects of CF{sub 4} gas ratio on the plasma properties and the circuit electrical properties in both pure E and H modes were also investigated. The electron density and plasma emission intensity both decrease upon increasing the ratio of CF{sub 4} at the two modes, due to the stronger electrons loss scheme. The applied voltages at E and H modes both increase as increasing the CF{sub 4} gas ratio, however the applied current at two modes behave just oppositely with the gas ratio.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Comparative study of laminar and turbulent flow model with different operating parameters for radio frequency-inductively coupled plasma torch working at 3 MHz frequency at atmospheric pressure

This paper provides 2D comparative study of results obtained using laminar and turbulent flow model for RF (radio frequency) Inductively Coupled Plasma (ICP) torch. The study was done for the RF-ICP torch operating at 50 kW DC power and 3 MHz frequency located at BARC. The numerical modeling for this RF-ICP torch is done using ANSYS software with the developed User Defined Function. A comparative study is done between laminar and turbulent flow model to investigate how temperature and flow fields change when using different operating conditions such as (a) swirl and no swirl velocity for sheath gas flow rate, (b) variation in sheath gas flow rate, and (c) variation in plasma gas flow rate. These studies will be useful for different material processing applications.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation—An alternate approach

Impedance matching circuit between radio frequency (RF) generator and the plasma load, placed between them, determines the RF power transfer from RF generator to the plasma load. The impedance of plasma load depends on the plasma parameters through skin depth and plasma conductivity or resistivity. Therefore, for long pulse operation of inductively coupled plasmas, particularly for high power (∼100 kW or more) where plasma load condition may vary due to different reasons (e.g., pressure, power, and thermal), online tuning of impedance matching circuit is necessary through feedback. In fusion grade ion source operation, such online methodology through feedback is not present but offline remote tuning by adjusting the matching circuit capacitors and tuning the driving frequency of the RF generator between the ion source operation pulses is envisaged. The present model is an approach for remote impedance tuning methodology for long pulse operation and corresponding online impedance matching algorithm based on RF coil antenna current measurement or coil antenna calorimetric measurement may be useful in this regard.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Spin precession by pulsed inductive magnetometry in thin amorphous plates

Broadband magnetic loss and damping behavior of Co-based amorphous ribbons and thin films have been investigated. The permeability and loss response of the transverse anisotropy ribbon samples in the frequency range DC to 1 GHz is interpreted in terms of combined and distinguishable contributions to the magnetization process by domain wall displacements and magnetization rotations. The latter alone are shown to survive at the highest frequencies, where the losses are calculated via coupled Maxwell and Landau–Lifshitz–Gilbert (LLG) equations. Remarkably high values of the LLG damping coefficient α = 0.1–0.2 are invoked in this theoretical prediction. Direct measurements of α by pulsed inductive microwave magnetometry are thus performed, both in these laminae and in amorphous films of identical composition, obtaining about one order of magnitude increase of the α value upon the 100 nm÷10 μm thickness range. This confirms that dissipation by eddy currents enters the LLG equation via large increase of the damping coefficient.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Effect of neutral gas heating on the wave magnetic fields of a low pressure 13.56 MHz planar coil inductively coupled argon discharge

The axial and radial magnetic field profiles in a 13.56 MHz (radio frequency) laboratory 6 turn planar coil inductively coupled plasma reactor are simulated with the consideration of the effect of neutral gas heating. Spatially resolved electron densities, electron temperatures, and neutral gas temperatures were obtained for simulation using empirically fitted electron density and electron temperature and heuristically determined neutral gas temperature. Comparison between simulated results and measured fields indicates that neutral gas heating plays an important role in determining the skin depth of the magnetic fields.

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General rotating quantum vortex filaments in the low-temperature Svistunov model of the local induction approximation

In his study of superfluid turbulence in the low-temperature limit, Svistunov [“Superfluid turbulence in the low-temperature limit,” Phys. Rev. B 52, 3647 (1995)] derived a Hamiltonian equation for the self-induced motion of a vortex filament. Under the local induction approximation (LIA), the Svistunov formulation is equivalent to a nonlinear dispersive partial differential equation. In this paper, we consider a family of rotating vortex filament solutions for the LIA reduction of the Svistunov formulation, which we refer to as the 2D LIA (since it permits a potential formulation in terms of two of the three Cartesian coordinates). This class of solutions holds the well-known Hasimoto-type planar vortex filament [H. Hasimoto, “Motion of a vortex filament and its relation to elastica,” J. Phys. Soc. Jpn. 31, 293 (1971)] as one reduction and helical solutions as another. More generally, we obtain solutions which are periodic in the space variable. A systematic analytical study of the behavior of such solutions is carried out. In the case where vortex filaments have small deviations from the axis of rotation, closed analytical forms of the filament solutions are given. A variety of numerical simulations are provided to demonstrate the wide range of rotating filament behaviors possible. Doing so, we are able to determine a number of vortex filament structures not previously studied. We find that the solution structure progresses from planar to helical, and then to more intricate and complex filament structures, possibly indicating the onset of superfluid turbulence.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

E→H mode transition density and power in two types of inductively coupled plasma configuration

E → H transition power and density were investigated at various argon pressures in inductively coupled plasma (ICP) in a cylindrical interlaid chamber. The transition power versus the pressure shows a minimum transition power at 4 Pa (ν/ω=1) for argon. Then the transition density hardly changes at low pressures (ν/ω≪1), but it increases clearly when argon pressure exceeds an appropriate value. In addition, both the transition power and transition density are lower in the re-entrant configuration of ICP compared with that in the cylindrical configuration of ICP. The result may be caused from the decrease of stochastic heating in the re-entrant configuration of ICP. This work is useful to understand E → H mode transition and control the transition points in real plasma processes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Superconducting inductive displacement detection of a microcantilever

We demonstrate a superconducting inductive technique to measure the displacement of a micromechanical resonator. In our scheme, a type I superconducting microsphere is attached to the free end of a microcantilever and approached to the loop of a dc Superconducting Quantum Interference Device (SQUID) microsusceptometer. A local magnetic field as low as 100 μT, generated by a field coil concentric to the SQUID, enables detection of the cantilever thermomechanical noise at 4.2 K. The magnetomechanical coupling and the magnetic spring are in good agreement with image method calculations assuming pure Meissner effect. These measurements are relevant to recent proposals of quantum magnetomechanics experiments based on levitating superconducting microparticles.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

In this study, we attempted to determine the possibility of multiple inductively coupled plasma (ICP) and helicon plasma sources for large-area processes. Experiments were performed with the one and two coils to measure plasma and electrical parameters, and a circuit simulation was performed to measure the current at each coil in the 2-coil experiment. Based on the result, we could determine the possibility of multiple ICP sources due to a direct change of impedance due to current and saturation of impedance due to the skin-depth effect. However, a helicon plasma source is difficult to adapt to the multiple sources due to the consistent change of real impedance due to mode transition and the low uniformity of the B-field confinement. As a result, it is expected that ICP can be adapted to multiple sources for large-area processes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Measurement of the target current by inductive probe during laser interaction on terawatt laser system PALS

Measurements of the return-current flowing through a solid target irradiated with the sub-nanosecond kJ-class Prague Asterix Laser System is reported. A new inductive target probe was developed which allows us measuring the target current derivative in a kA/ns range. The dependences of the target current on the laser pulse energy for cooper, graphite, and polyethylene targets are reported. The experiment shows that the target current is proportional to the deposited laser energy and is strongly affected by the shot-to-shot fluctuations. The corresponding maximum target charge exceeded a value of 10 μC. A return-current dependence of the electromagnetic pulse produced by the laser-target interaction is presented.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Low-frequency, self-sustained oscillations in inductively coupled plasmas used for optical pumping

We have investigated very low frequency, on the order of one hertz, self-pulsing in alkali-metal inductively-coupled plasmas (i.e., rf-discharge lamps). This self-pulsing has the potential to significantly vary signal-to-noise ratios and (via the ac-Stark shift) resonant frequencies in optically pumped atomic clocks and magnetometers (e.g., the atomic clocks now flying on GPS and Galileo global navigation system satellites). The phenomenon arises from a nonlinear interaction between the atomic physics of radiation trapping and the plasma's electrical nature. To explain the effect, we have developed an evaporation/condensation theory (EC theory) of the self-pulsing phenomenon.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Power dependence of electron density at various pressures in inductively coupled plasmas

Experimental observation of the electron density variation in inductively coupled plasmas with the electron energy probability function (EEPFs) was performed at various gas pressures at two RF powers (25 W and 200 W). The measured EEPFs at high power discharges (200 W) showed a Maxwellian distribution, while evolution of the EEPFs from a bi-Maxwellian distribution to a Druyvesteyn-like distribution was observed at low RF powers (25 W) with increasing pressure. A discrepancy of the electron density variation between the two RF powers was observed. This difference is explained by the modified collisional loss and the Bohm velocity from the EEPF of the bi-Maxwellian distribution and the Druyvesteyn–like distribution.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Collisionless electron heating in periodic arrays of inductively coupled plasmas

A novel mechanism of collisionless heating in large planar arrays of small inductive coils operated at radio frequencies is presented. In contrast to the well-known case of non-local heating related to the transversal conductivity, when the electrons move perpendicular to the planar coil, we investigate the problem of electrons moving in a plane parallel to the coils. Two types of periodic structures are studied. Resonance velocities where heating is efficient are calculated analytically by solving the Vlasov equation. Certain scaling parameters are identified. The concept is further investigated by a single particle simulation based on the ergodic principle and combined with a Monte Carlo code allowing for collisions with Argon atoms. Resonances, energy exchange, and distribution functions are obtained. The analytical results are confirmed by the numerical simulation. Pressure and electric field dependences are studied. Stochastic heating is found to be most efficient when the electron mean free path exceeds the size of a single coil cell. Then the mean energy increases approximately exponentially with the electric field amplitude.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

The total energy lost per electron-ion pair lost ε{sub T} is investigated with the electron energy distribution function (EEDF). The EEDFs are measured at various argon powers in RF inductively coupled plasma, and the EEDFs show a depleted distribution (a discontinuity occurring at the minimum argon excitation threshold energy level) with the bulk temperature and the tail temperature. The total energy loss per electron-ion pair lost ε{sub T} is calculated from a power balance model with the Maxwellian EEDFs and the depleted EEDFs and then compared with the measured ε{sub T} from the floating probe. It is concluded that the small population of the depleted high energy electrons dramatically increases the collisional energy loss, and the calculated ε{sub T} from the depleted EEDFs has a value that is similar to the measured ε{sub T}.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Global model analysis of negative ion generation in low-pressure inductively coupled hydrogen plasmas with bi-Maxwellian electron energy distributions

A global model was developed to investigate the densities of negative ions and the other species in a low-pressure inductively coupled hydrogen plasma with a bi-Maxwellian electron energy distribution. Compared to a Maxwellian plasma, bi-Maxwellian plasmas have higher populations of low-energy electrons and highly vibrationally excited hydrogen molecules that are generated efficiently by high-energy electrons. This leads to a higher reaction rate of the dissociative electron attachment responsible for negative ion production. The model indicated that the bi-Maxwellian electron energy distribution at low pressures is favorable for the creation of negative ions. In addition, the electron temperature, electron density, and negative ion density calculated using the model were compared with the experimental data. In the low-pressure regime, the model results of the bi-Maxwellian electron energy distributions agreed well quantitatively with the experimental measurements, unlike those of the assumed Maxwellian electron energy distributions that had discrepancies.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

Measuring the temperature of neutrals in inductively coupled plasmas (ICP) is important as heating of neutral particles will influence plasma characteristics such as the spatial distributions of plasma density and electron temperature. Neutral gas temperatures were deduced using a non-invasive technique that combines gas actinometry, optical emission spectroscopy and simulation which is described here. Argon gas temperature in a 13.56 MHz ICP were found to fall within the range of 500 − 800 K for input power of 140 − 200 W and pressure of 0.05 − 0.2 mbar. Comparing spectrometers with 0.2 nm and 0.5 nm resolution, improved fitting sensitivity was observed for the 0.2 nm resolution.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas

The electrical characteristics and the spatial distribution of oxygen plasma according to the number of turns in ferrite inductively coupled plasmas (ferrite ICPs) are investigated. Through a new ICP model, which includes the capacitive coupling and the power loss of the ferrite material with the conventional ICP model, the variation of the oxygen discharge characteristics depending on the number of turns is simply understood by the electrical measurement, such as the antenna voltages and the currents. As the number of the turns increases, the capacitive coupling dominantly affects the spatial plasma distribution. This capacitive coupling results in a center focused density profile along the radial direction. In spite of the same discharge conditions (discharge chamber, neutral gas, and pressure), the spatial plasma distribution over 450 mm has drastic changes by increasing number of the turns. In addition, the effect of the negative species to the density profile is compared with the argon discharge characteristics at the same discharge configuration.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Electromagnetic wave attenuation measurements in a ring-shaped inductively coupled air plasma

An aerocraft with the surface, inlet and radome covered large-area inductive coupled plasma (ICP) can attenuate its radar echo effectively. The shape, thickness, and electron density (N{sub e}) distribution of ICP are critical to electromagnetic wave attenuation. In the paper, an air all-quartz ICP generator in size of 20 × 20 × 7 cm{sup 3} without magnetic confinement is designed. The discharge results show that the ICP is amorphous in E-mode and ring-shaped in H-mode. The structure of ICP stratifies into core region and edge halo in H-mode, and its width and thickness changes from power and pressure. Such phenomena are explained by the distribution of RF magnetic field, the diffusion of negative ions plasma and the variation of skin depth. In addition, the theoretical analysis shows that the N{sub e} achieves nearly uniform within the electronegative core and sharply steepens in the edge. The N{sub e} of core region is diagnosed by microwave interferometer under varied conditions (pressure in range of 10–50 Pa, power in 300–700 W). Furthermore, the electromagnetic wave attenuation measurements were carried out with the air ICP in the frequencies of 4–5 GHz. The results show that the interspaced ICP is still effective to wave attenuation, and the wave attenuation increases with the power and pressure. The measured attenuation is approximately in accordance with the calculation data of finite-different time-domain simulations.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗