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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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797 records · Page 41
All sourcesNASA NTRSDOE OSTI
DOE OSTI2023

Atomistic‐Level Effects of Noncovalent Interactions and Crystalline Packing for Organic Material Structural Integrity upon Exposure to Gamma Radiation

Developing an atomistic understanding of ionizing radiation induced changes to organic materials is necessary for intentional design of greener and more sustainable materials for radiation shielding and detection. Cocrystals are promising for these purposes, but a detailed understanding of how the specific intermolecular interactions within the lattice upon exposure to radiation affect the structural stability of the organic crystalline material is unknown. This study evaluates atomistic-level effects of γ radiation on both single- and multicomponent organic crystalline materials and how specific noncovalent interactions and packing within the crystalline lattice enhance structural stability. Dose studies were performed on all crystalline systems and evaluated via experimental and computational methods. Changes in crystallinity were evaluated by p-XRD and free radical formation was analyzed via EPR spectroscopy. Type of intermolecular interactions and packing within the crystal lattice was delineated and related to the specific free radical species formed and the structural integrity of each material. Periodic DFT and HOMO-LUMO surface mapping calculations provided atomistic-level identifications of the most probable sites for the radicals formed upon exposure to γ radiation and relate intermolecular interactions and molecular packing within the crystalline lattice to experimental results.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2025

A Reductively Stable Electrolyte Realizes Deep Cycling Behavior in Anode‐free Sodium Batteries

For anode‐free sodium batteries to achieve practical consideration, highly reversible chemistries require exceptional ≥99.95% coulombic efficiencies that maintain over prolonged cycling periods. To do so, consumption of this severely limited sodium inventory must be restricted while metal nucleation processes that comprise the in situ formed metal anode are improved. Herein, we describe a fluorine‐free carborane electrolyte that satisfies these criteria by emphasizing reductive stability and weakly coordinating anion behavior as design principles. We find this approach promotes the development of a thin, robust SEI chemistry rich in both organic speciation and boron. The electrolyte described herein exhibits ideal metal nucleation behavior on one‐micron thin carbonaceous current collector surfaces and achieves a metal deposition/stripping efficiency near parity for 400 cycles. This novel anode chemistry is introduced to anode‐free full cell configurations where 87% of the initial discharge capacity is retained after 1000 cycles at 2.0 C. In conclusion, post‐test characterization of deep‐cycled anode‐free cells reveals suppressed capacity fade in these systems is attributed to the chemical stability of the carborane anion.

anode-free↗
DOE OSTI2026

Improving Marine Energy Production Through Commercialization of a Low Cost, Drag-Reducing Slippery Coating (CRADA 679 Abstract)

Marine energy capture systems offer great promise for providing clean energy, but they operate in a challenging and dynamic environment and must be optimized to the highest extent possible. Computational studies predict that drag reduction on marine energy and blue economy systems will result in meaningful improvements in energy efficiency. Based on extensive coating experience, PNNL is proposing to bring to market a new drag-reducing coating called Superhydrophobic Lubricant-Infused Drag-Efficient Coating – SLIDE-Coat. PNNL has a deep knowledge base regarding this class of slippery coatings, and we have a group of enthusiastic industry partners who have committed to partnering, conducting field testing, and providing well over 50% cost share. In addition to validating the technology, the team will create a commercialization roadmap to ensure the commercial success of the technology after the government-sponsored two-year program is complete. The main technical goal is to design, manufacture, and experimentally validate a new coating that can reduce hydrodynamic skin friction drag by 20%. The main commercialization goal is to develop a roadmap that identifies activities needed to complete SLIDE-Coat’s development after the conclusion of this project. Year 1 will focus on adaptation and modification of the existing SLIC coating system to optimize drag reduction and assessment and quantification of drag reduction on relevant materials in a laboratory setting. Year 2 will focus on optimizing and demonstrating drag reduction with preferred coatings. The manufacturability, ease of application, adhesion to relevant surfaces, and consistency will be assessed. Quantification of drag reduction on prototype materials in a relevant marine field setting will be executed.

16 TIDAL AND WAVE POWER↗
NASA NTRS2026

A Summary of Test and Analysis Results from a Second Lift+Cruise Full-Scale Drop Test

The realization of advanced air mobility markets is enabling new forms of transportation to take shape in the United States and around the world. Though currently in development, as these markets mature, new types of vertical take-off and landing (VTOL) vehicles have been undergoing development for use. There are many factors which must be addressed prior to these types of vehicles becoming viable alternative forms of transportation in these markets. These factors include incorporation into the existing airspaces, the logistics of operating in urban environments, along with numerous factors associated with safety and reliability. To address some of the safety aspects associated with the development of these new types of vehicles, NASA has been conducting research into the performance of an example electric VTOL (eVTOL) aircraft as a part of the Revolutionary Vertical Lift Technology (RVLT) project. Over the course of this research, many aspects including the development of energy absorbing components, the evaluation of seating systems, the development of advanced finite element material model systems and the acquisition of full-scale vehicle impact data were investigated. The report will discuss aspects related to the acquisition of full-scale vehicle data which occurred in the form of a full-scale impact test conducted in the Summer of 2025. This test was on a NASA designed Lift+Cruise composite cabin test article and represented a partial capstone in the entirety of previous eVTOL research conducted for the project. In this test, a variety of experiments were included in order to investigate the effect of a full-scale environment on the experiment results. In parallel, the development of a computational impact model to simulate the full-scale test will be discussed in this report. A model of the Lift+Cruise test article was developed utilizing data collected from previous sub- and full-scale test data and then simulated in the current test environment. The model development, its use in pre-test predictions, and its use in post-test correlation will all be presented. This report will present the test data acquired from the Lift+Cruise test and document several of the results obtained. One intended result is to determine the effect of a complex full-scale crash impact on the identification of occupant injury risk within seat and vehicle designs. A second intended result is to determine whether high-fidelity models can be used with some confidence in the prediction of test events and can allow for additional test cases to be simulated without the need of having to conduct additional tests. The overall goal of the test is to provide the community with data that can be used for design, development or certification efforts, along with providing data on what an example eVTOL crash incident could entail.

energy storage systems↗
NASA NTRS2026

Multi-Agent Swarm State of the Art Report

The Next-Generation Multi-Agent Swarm (NGS) Study conducted by NASA’s Ames Research Center for NASA’s Space Technology Mission Directorate (STMD) will develop a comprehensive understanding of emerging multi-agent swarm capabilities. The study aims to identify existing swarm capabilities and asses their potential for persistent lunar space situational awareness, surface monitoring, and distributed autonomy demonstrations. A key objective is to inform the design of a next-generation multi-agent swarm that can perform autonomous distributed remote sensing, position, navigation, and timing (PNT) services, automated deployment that leverages autonomy, edge computing, and interoperable networking to enable cooperative operations without the need for immediate human operation. This study will address specific shortfalls identified by STMD, including intelligent multi-agent constellations, autonomy, edge computation, position, navigation, and timing for small spacecraft, small spacecraft propulsion, and space situational awareness (1625, 1438, 1433, 1557, 1431, 1430, 1589). The NASA Ames Mission Design Center (MDC) will provide subject matter expertise to support systems engineering trades, while experts in autonomy and spacecraft swarms in NASA’s Intelligent Systems Division will lead the study and focus on identifying emerging next-generation swarm capabilities. The study objectives include: capturing the current state-of-the-art for multi-agent swarm capabilities, evaluating technologies and creating technology roadmaps, and developing at least one new technology demonstration mission concept. This initial NGS study report surveys the current state of the art in technology areas relevant for the next-generation multi-agent swarm design. Our primary focus is on surveying relevant deployed space systems1, supplemented with selective analysis of relevant proposed missions and technology developments that have yet to fly.

agent↗
DOE OSTI2022

Conformer-Specific Dissociation Dynamics in Dimethyl Methylphosphonate Radical Cation

The dynamics of the dimethyl methylphosphonate (DMMP) radical cation after production by strong field adiabatic ionization have been investigated. Pump-probe experiments using strong field 1300 nm pulses to adiabatically ionize DMMP and a 800 nm non-ionizing probe induce coherent oscillations of the parent ion yield with a period of about 45 fs. The yields of two fragments, PO 2 C 2 H 7 + and PO 2 CH 4 + , oscillate approximately out of phase with the parent ion, but with a slight phase shift relative to each other. We use electronic structure theory and nonadiabatic surface hopping dynamics to understand the underlying dynamics. The results show that while the cation oscillates on the ground state along the P=O bond stretch coordinate, the probe excites population to higher electronic states that can lead to fragments PO 2 C 2 H 7 + and PO 2 CH 4 + . The computational results combined with the experimental observations indicate that the two conformers of DMMP that are populated under experimental conditions exhibit different dynamics after being excited to the higher electronic states of the cation leading to different dissociation products. These results highlight the potential usefulness of these pump-probe measurements as a tool to study conformer-specific dynamics in molecules of biological interest.

59 BASIC BIOLOGICAL SCIENCES↗
DOE OSTI2026

15.3% AM1.5G Efficiency GaAs Solar Cells Fabricated via an Epitaxy-Free Process

Here, we report simple and potentially low-cost techniques for creating high-quality n-type gallium arsenide (GaAs) and GaAs p/n junctions and fabricate GaAs p/n junction solar cells. Detailed-balance modeling suggests that 20% AM1.5G efficiency p/n homojunction devices may be possible if the surface doping concentration can be limited to values less than ∼ 5 × 10 19 cm −3 . Our process exploits an open-tube, vapor-phase, deposition-free, zinc diffusion technique for forming p-type layers in melt-grown n-GaAs substrates that results in sheet resistances less than 1 kΩ/$\square$. In addition, we have improved the minority carrier diffusion lengths of melt-grown GaAs from less than one micron to over five microns using an open-tube, vacuum-free, annealing process which reduces the density of EL2 midgap defects. Finally, we have combined these advances to fabricate epitaxy-free, GaAs solar cells with a validated AM1.5G efficiency of 15.3%.

14 SOLAR ENERGY↗
NASA NTRS2026

Optimization of X-ray Absorbers for High-Resolution TES Detectors in NewATHENA X-IFU

NewATHENA’s X-ray Integral Field Unit (X-IFU) uses a large-format array of Transition Edge Sensor (TES) microcalorimeters coupled with absorbers made of gold and bismuth providing 4 eV FWHM resolution up to 7 keV in the 0.2- 12 keV band. X-ray absorbers must be thick enough for photon absorption, maintain low heat capacity for energy resolution, and have good thermalization properties. The X-IFU requires total Quantum Efficiency (QE) of 96%, 87%, and 63% at 1, 7, and 9.5 keV, respectively. Optimal thicknesses are 1.05 µm gold and 5.5 µm bismuth to achieve 0.731 pJ/K at 90 mK and 87% QE at 7 keV. While typical TES absorbers are 3-4 µm thick, producing the required 5.5 µm Bi absorbers via standard electroplating creates enlarged grains and surface roughness. The increased roughness and grain size variability produced with our standard recipe have resulted in instances of 1) low energy spectral tails 2) spectral broadening of the energy resolution and 3) thermal shorts between pixels when a large grain bridges the gap between absorbers. In this study, we have introduced a new fabrication process and altered the morphology of the thick Bi through changes in the electroplating process. The process changes are intended to address all three issues as well as reduce particulate contamination observed on the finished detector arrays.

Absorber↗
DOE OSTI2026

Catalytic disproportionation on carbon superstructures enables long-life, high-loading Li–S batteries

Electrocatalysis has been widely explored as an effective strategy to accelerate polysulfide (PS) conversion and suppress the shuttle effect in lithium–sulfur (Li–S) batteries. However, the underlying mechanisms remain elusive, and electrocatalytic reactions are inactive during cell resting. In this work, we reveal and quantitatively analyze a previously unrecognized sulfur reduction route (SRR) driven by catalytic disproportionation at the carbon cathode surface—fundamentally distinct from conventional electrocatalysis. Unlike conventional stepwise pathways, this SRR enables high-order polysulfides (Sₓ²⁻, x = 5–8) to directly convert into S₈ and Li₂S₂, bypassing low-order intermediates. This sulfur-reduction shortcut is systematically elucidated through high-performance liquid chromatography, revealing the intrinsic catalytic contribution of carbon frameworks and the dynamic evolution of PS species. We demonstrate that carbon superstructures (CSS-0.5), assembled from nanosheet subunits with abundant N/O functionalities and interconnected charge-migration channels, synergistically promote this catalytic process. Benefiting from these features, CSS-0.5 delivers superior electrochemical performance under practical conditions, enabling high sulfur loading (6.0 mg cm⁻²) pouch cells with 80.5% capacity retention over 210 cycles. This study provides the first quantitative evidence of electrocatalytic disproportionation in Li–S batteries, offering mechanistic insights and design principles for advanced sulfur cathodes.

25 ENERGY STORAGE↗
NASA NTRSDate not supplied

Spacecraft Fire Safety Predictions using Verified Saffire Model

A model developed using Fire Dynamics Simulator (FDS) that aimed to determine the effect of a fire in a spacecraft was validated by data collected during the Saffire campaign. The model used inlet and outlet temperatures and CO 2 concentrations of the Saffire payload where fire spread was taking place to determine the amount of heat and combustion products that made it into Northrop Grumman’s Cygnus vehicle. The model was then validated using six remote sensors in various places in the vehicle, as well as a far field device (FFD) in the open zenith section that was representative of average vehicle values. The current work focuses on using the model to predict fire safety scenarios. One simulation aimed to determine the fate of HCl, which sticks to surfaces. The model prediction showed that the HCl was removed from the atmosphere rapidly. This compared well against the FFD data in the Saffire VI campaign event where a bottle of 5% HCl was released into the vehicle. An additional simulation where the Environmental Control and Life Support System (ECLSS) was shut off once the FFD reached 5 ppm of HCl showed that HCl stayed in the atmosphere considerably longer. Continuing the simulation with the ECLSS activated and after temperatures returned to their initial conditions, resulted in a rapid removal of HCL similar to that observed in the original HCl release scenario model. Finally, a simulation that used the heat release rate from a lithium-ion battery test to determine the effect it would have on a spacecraft was performed. This simulation used a heat addition rate that is considerably higher than what was determined from the burning of solid fuels in the Saffire campaign and hence produced a non-trivial temperature increase in more locations within the vehicle.

Fire Safety↗
DOE OSTI2026

Rapid Coal-Ash Characterization using Geophysical Methods & Machine Learning

Coal combustion products (CCP) are challenging to delineate in heterogeneous field settings. Conventional methods (test pits, coring, and laboratory analyses) are labor-intensive, slow, invasive, and provide sparse spatial coverage. This study evaluates whether rapid non-invasive geophysical screening methods—induced polarization (IP), magnetic susceptibility, and nuclear magnetic resonance (NMR) —combined with surface colorimetry (RGB_24), can discriminate CCP-soil mixtures and provide reliable estimates of CCP content. Laboratory measurements were collected on five CCP-soil mixtures (series) and modeled using (i) a linear baseline, (ii) a calibrated non-linear (power-mean) model, and (iii) a machine-learning (ML) Random Forest approach, with validation via leave-one-series-out and site-specific tests. Across the five series, individual signals—particularly IP and magnetic susceptibility—were strongly predictive of ash content but were consistently outperformed by combined models. The pooled calibrated non-linear and ML models captured the observed non-linearity and achieved high accuracy and precision, improving on linear fits. Colorimetry showed the weakest direct relationship with ash content for the tested samples but improved performance when included in multi-signal models. At pre-selected 3.5% decision threshold, calibrated and ML approaches yielded near-perfect classification (Matthews correlation coefficient ˜ 1), suggesting strong practical operability for field screening. Additionally, field-analog tests highlighted the role of endmembers—accuracy declined without access to end-member measurements but was largely recovered by collecting a minimal labeled pair for local recalibration. With end members, accuracy remained high. Globally trained models performed well on three operational unknowns; however, series-specific refits provided the most accurate predictions. Overall, these results highlight the potential of combining rapid geophysics and minimal local calibration for improved coal-ash delineation.

Peshtani, Klaudio↗
DOE OSTI2026

Identifying Suitable Front Contacts for High‐Efficiency Cd(Se,Te) Solar Cells on Space‐Qualified Cover Glass

Deployment of photovoltaics in space requires devices that combine high-efficiency, low areal mass, and resilience to harsh environments. Historically, high-efficiency multijunction III–V materials have dominated space power systems; however, their high cost and limited manufacturing throughput motivate the exploration of scalable alternatives. While CdTe-based thin-film photovoltaics offer an attractive option, their performance on non-conventional substrates can suffer from front contact instability under higher-temperature processing. Here, the role of front contact chemistry in limiting cell performance is investigated using CdTe-based devices fabricated on 150 μm thick Ceria-doped space-qualified 0214 Corning glass. A matrix of four transparent conducting oxides (TCOs: CTO, AZO, ITO, IZO) combined with two n-type emitters (MZO, IGO) reveals chemical stability at the front interface—rather than absorber composition alone—governs recombination losses, voltage deficits, and device reproducibility. Chemically stable front contact combinations suppress elemental diffusion and interfacial degradation, resulting in significantly improved carrier lifetimes and junction quality. These insights are validated through record-certified Cd(Se,Te) cell efficiencies of 18.4% under AM1.5G and 16.2% under AM0 illumination on ultra-thin glass. Beyond CdTe, this work provides a general framework for the rational selection of TCO/emitter interfaces in superstrate thin-film photovoltaics, including emerging technologies like metal halide perovskites, while enabling high-efficiency, lightweight photovoltaics for space applications.

14 SOLAR ENERGY↗
DOE OSTI2025

Electrochemical Behavior of Cerium at an Indium Tin-Doped Oxide Electrode in Acidic Media

The redox behavior and speciation of cerium at mesoporous thin films composed of nanoparticles of indium tin-doped oxide (nITO) electrodes were characterized in pH 4.8, 0.1 M acetate buffer and both 0.1 and 1 M HNO 3 using electrochemical techniques and X-ray photoelectron spectroscopy. Anodic deposition of ceria species from Ce(III) to the nITO electrode was achieved under all solvent conditions via spontaneous condensation of electrochemically generated ceric hydroxide species. In 1 M nitric acid, the rate of CeO 2 dissolution is on the same order as CeO 2 deposition, resulting in negligible amounts of CeO 2 electrodeposited at the nITO surface. The cathodic stripping of CeO 2 from the nITO substrate deposited in 0.1 M nitric acid or pH 4.8 acetate buffer follows a 2-step process where Ce(IV)-oxide is initially reduced to an unstable Ce(III)-oxide species that rapidly undergoes acid catalyzed dissolution to yield soluble Ce(III) (aq) . These findings provide a foundation for the pH and anodic potential controlled deposition of CeO 2 thin films to ITO substrates, which can aid in the development of materials composed of ceria. As a result, they can also be used to infer likely analogous actinide redox behavior and speciation at these electrodes.

Cerium↗
DOE OSTI2026

Liquified SO 2 induced solid/cathode electrolyte interphase for lithium ion batteries

Formation of robust solid/cathode electrolyte interphases (S/CEI) is vital for long-term stability and high-performance operation of lithium-ion batteries (LIBs), particularly under high voltage regimes. However, engineering electrochemically stable S/CEIs that effectively suppress interfacial side reactions remains a key challenge. Herein, we introduce a liquefied sulfur dioxide (SO 2 )– ionic liquid complex as a fluorine-free multifunctional electrolyte additive for the first time that significantly improves the formation of sulfate/sulfite-rich S/CEI layers at both graphite and NMC811 interfaces. The unique SO 2 -N coordination with a 1,2,4-triazolide-based ionic liquid enables homogeneous SO 2 dissolution, resulting in controlled SO 2 decomposition during the initial electrochemical cycle. This decomposition yields sulfur-rich interphase species that stabilize the electrolyte-electrode interface, reduce impedance growth, and lessen electrolyte decomposition. Electrochemical tests show significantly improved cycle life, reduced polarization, and increased Coulombic efficiency for both anodes and cathodes. XPS confirms the presence of SO 2 -derived surface species that contribute to interfacial stability. In conclusion, this approach highlights a new direction for interphase engineering using liquefied gas additives and opens pathways for sulfur-based S/CEI chemistry in advanced battery systems.

Graphite↗
NASA NTRS2026

Long-Term Evaluation of Landsat 9 Oli Data Product Uniformity at Focal Plane Module-Boundaries Using Earth Scenes

The uniformity performance characteristic in remote sensing data products is a metric that helps evaluate how an image accurately represents radiometric responses to geophysical variability at the Earth’s surface or within the atmosphere. These uniformity attributes are used in Earth remote sensing science applications such as investigating water quality, land-cover/land-use classifications, and crop health assessments. To ensure these applications perform effectively, it is crucial to maintain and regularly assess the uniformity of calibrated remote sensing data products. In the Landsat missions, data from the onboard radiometric reference Solar diffuser device are used as the standard approach to derive the calibration parameters, ensuring the maintenance of both absolute radiance and radiometric uniformity through quarterly updates. This publication presents an alternative approach that leverages Earth scene data to assess the on-orbit uniformity performance of the Landsat 9 (L9) mission. The analysis characterizes uniformity at a specific set of spatial positions (the focal-plane boundary zones) that are intrinsic to the Operational Land Imager (OLI) focal plane design. By employing these Earth data statistics, the article further explores the temporal trends in the radiometric uniformity results. The results shown in this article demonstrate that for pushbroom imaging design systems with staggered sensor chip focal plane architectures, the co-registered pixels, i.e., overlapping measurements of the same ground target viewed by different detectors, offer a self-contained mechanism for assessing product uniformity. Remarkably, this alternative approach achieves a level of radiometric quality comparable to that delivered by a stable, well-characterized onboard Solar diffuser calibration device. The findings demonstrate the potential and capability of such Earth scene statistics in maintaining radiometric uniformity in calibrated data products to better than 1% (1-sigma) throughout the mission’s operational lifetime.

trend↗
DOE OSTI2025

Amphiphilic nanopores that condense undersaturated water vapor and exude water droplets

Condensation of water vapor in confined geometries, known as capillary condensation, is a fundamental phenomenon with far-reaching implications. While hydrophilic pores enable liquid formation from undersaturated vapor without energy input, the condensate typically remains confined, limiting practical utility. Here, we explore the use of amphiphilic nanoporous polymer-infiltrated nanoparticle films that condense and release liquid water under isothermal and undersaturated conditions. By tuning the polymer fraction and nanoparticle size, we optimize condensation and droplet formation. As vapor pressure increases, voids fill with condensate, which subsequently exudes onto the surface as microscopic droplets. This behavior, enabled by a balance of polymer hydrophobicity and capillarity, reveals how amphiphilic nanostructures can drive accessible water collection. Our findings provide design insights for materials supporting energy-efficient water harvesting and heat management without external input.

Science & Technology - Other Topics↗
NASA NTRSDate not supplied

Enabling Reliable, Fault-Tolerant Autonomous Lunar Habitats with High-Performance Spaceflight Computing

The lunar surface presents unfavorable constraints and harsh living conditions. To address these challenges, autonomous habitats will require complex integrated systems that combine advanced software, high-performance hardware, and cutting-edge sensors to ensure sustainability, safety, and operational efficiency. Consequently, maintaining a sustainable presence on the Moon requires reliable infrastructure and efficient development, precise monitoring, and utilization of resources within a lunar installation. These elements are essential not only to ensure that lunar settlement can be long-term, self-sustaining, and resource-efficient, but also to serve as a foundation for future missions and eventual human habitation on Mars. Humans are not native to the Moon; therefore, our survival and ability to thrive will depend on autonomous systems that can foster safety and resilience through high-availability architectures, graceful degradation, and highly fault-tolerant spaceflight hardware capable of continuing operation during failures. This requires advanced human-rated distributed systems architectures with specialized electronics, scalable capabilities, and an integrated design approach. Unlike current practices focused on short-term missions and regularly maintained components, permanent lunar compute systems must be designed for extended operations beyond mission durations. This paper explores the necessity of transitioning toward fault- tolerant, highly autonomous hardware systems designed for multi-year missions. It also identifies critical subsystems that require high levels of autonomy, supported by radiation-hardened processors and extreme thermal loads, which are essential to mitigate long-term degradation and ensure sustainable lunar habitation. Finally, the paper aligns with NASA’s identified Civil Space Shortfalls, particularly in high-performance onboard computing, advanced data acquisition, extreme-environment avionics, radiation monitoring and countermeasures, and autonomous health management. It proposes NASA’s new High-Performance Spaceflight Computing (HPSC) processor as a turnkey solution, delivering 100 times the performance-per-watt of legacy rad-hard CPUs and enabling onboard AI, edge computing, and fault-tolerant features essential for sustained lunar autonomy and beyond.

Sarkis S Mikaelian↗
DOE OSTI2023

CFD Simulation of the Dosing Behavior within the Atomic Layer Deposition Feeding System

The effective operation of atomic layer deposition (ALD) feeding system is the premise of realizing specific ALD processes. In the present work, a detailed computational fluid dynamics (CFD) model of the feeding system has been developed and validated, which accounts for the roles of ALD valves and manifolds. A numerical simulation of the compressible fluid flow and heat/mass transfer within the feeding system was conducted. The dosing amounts and the spatiotemporal distributions of the precursors can be accurately predicted using the CFD model, as validated by experimental results. Different precursors, operating conditions, and structures of the feeding system were simulated and analyzed to examine the operating flexibility of the feeding system. The simulation results can be adopted as the upstream boundary conditions for simulations of the ALD process in the reaction chamber. The substrate-scale simulation indicates that the effect of the feeding system on the film deposition is highly related to the surface kinetics of ALD. The present work can serve as a guide for the development and optimization of different ALD-based processes via proper operation and even the design of the feeding system.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗