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At least 775 records · Page 43
All sourcesNASA NTRSDOE OSTI
DOE OSTI2023

System and method for simulation-assisted additive manufacturing involving estimating anisotropic deformation

A simulation-assisted additive manufacturing system and method for generating an anisotropic compensation to account for non-uniform deformation due to additive manufacturing and service loading. The predicted deformation may not be fully defined. The present disclosure provides a system and method for estimating the missing deformation data through regression analysis. The present disclosure also provides an integrated framework where the various simulated-assisted design modules are configured for two-way communication and sharing access to changes to the model.

Kim, Seokpum↗
DOE OSTI2017

RatCAP Time to Digital Converter and Signal Processing module (TSPM)

The TSPM receives and processes ASIC signals and transmits processed data over to the PC using an Ethernet cable. The data is given a location and a time stamp. This is the heart of the device as it gathers and stamps the timing and location of events on each of the ASICs. The five files for the TSPM are needed to manufacture Pet scanners that are based on the RatCAP (Rat Conscious Animal PET). They include a TSPM schematic, a raw data file to build the RatCAP TSPM, an output file that along with the assay file is used by an assembly house to build the RatCAP TSPM, an assay file that provides the part list and XY location for the components that go on the RatCAP TSPM, firmware that includes the source code to program the FPGA, and a realized program on the TSPM based on the firmware.

Fried, Jack↗
NASA NTRSDate not supplied

In-Situ Surface Construction of Infrastructure

In situ resources offer an opportunity to reduce the amount of items brought from Earth when exploring moons and planets. Utilizing those resources requires energy that comes with a cost. In the case of human missions to Mars, trading surface power for launch mass is beneficial for propellant and consumables required to sustain human pioneering and settlement on the planet’s surface. However, In Situ Resource Utilization (ISRU) can mean far more than propellant production and consumables replacement for missions beyond Low Earth Orbit. NASA’s Systems Capability Leader-ship Team (SCLT) for ISRU created a work break-down structure based on functions identified in roadmaps pertaining to human exploration. That WBS includes Prospecting, Extraction, Processing, Construction, Manufacturing, and Energy. Over the years, NASA has developed some capabilities and technologies for prospecting, extraction, and processing carbon dioxide and water on Mars into propellants and life support consumables. However, that is a small subset of the ISRU needs that are coming to light with NASA’s push to return to the Moon for extended periods of time. For instance, astronauts require shielding from Ga-lactic Cosmic Rays and nuclear radiation and protection from the low temperatures and pressures in Space. Surface assets including crew, landers, and ascent modules can be damaged by surface ejecta during landing and launch operations on the Moon and Mars. Creating shielding, berms, and pads requires movement of large volumes and stabilization of regolith in the context of a civil engineering construction project. Because of the multi-disciplinary nature of the aerospace systems needed for human exploration, SCLT on ISRU created an ISRU Construction Integrated Steering Group that combines expertise among several NASA Principal Technologists and Capabilities Leaders for exploring options, assessing opportunities, and developing requirements for construction and manufacturing on the Moon and Mars NASA’s new program to develop Lunar landers for small, mid, and large payload deliveries to the Lunar surface leading to human missions by 2025 spawned an investigation into plume surface interactions caused by the lander during descent and ascent. The trade space to resolve this issue includes regolith stabilization via landing pad construction techniques and lander nozzles characteristics due to vehicle systems design. Some data exists from the Apollo missions but more is required for the missions ahead. The purpose of this paper [1] is to outline an approach for developing requirements that can guide systems designs while taking advantage of flight opportunities in NASA’s plans to return to the Moon.

In-Situ↗
NASA NTRS2016

Space to Space Advanced EMU Radio

The main task for this project was the development of a prototype for the Space to Space Advanced EMU Radio (SSAER). The SSAER is an updated version of the Space to Space EMU Radio (SSER), which is the current radio used by EMUs (Extravehicular Mobility Unit) for communication between suits and with the ISS. The SSER was developed in 1999, and it was desired to update the design used in the system. Importantly, besides replacing out-of-production parts it was necessary to decrease the size of the radio due to increased volume constraints with the updated Portable Life Support System (PLSS) 2.5, which will be attached on future space suits. In particular, it was desired to fabricate a PCB for the front-end of the prototype SSAER system. Once this board was manufactured and all parts assembled, it could then be tested for quality of operation as well as compliancy with the SSER required specifications. Upon arrival, a small outline of the target system was provided, and it was my responsibility to take that outline to a finished, testable board. This board would include several stages, including frequency mixing, amplification, modulation, demodulation, and handled both the transmit and receive lines of the radio. I developed a new design based on the old SSER system and the outline provided to me, and found parts to fit the tasks in my design. It was also important to consider the specifications of the SSER, which included the system noise figure, gain, and power consumption. Further, all parts needed to be impedance matched, and spurious signals needed to be avoided. In order to fulfill these two requirements, it was necessary to perform some calculations using a Smith Chart and excel analysis. Once all parts were selected, I drew the schematics for the system in Altium Designer. This included developing schematic symbols, as well as layout. Once the schematic was finished, it was then necessary to lay the parts out onto a PCB using Altium. Similar to the schematic design, in order to accomplish this it was necessary to develop component land patterns and add component 3D models. All of this was achieved, and the PCB is currently in review. After it is finished being reviewed, this board will be sent out for manufacture. All electronic components used in the PCB have been acquired, and once the board arrives they will be soldered onto the board using a machine in building 44. Finally, the board will be tested for performance on-site. This will likely be accomplished by the end of the internship.

Maicke, Andrew↗
NASA NTRSDate not supplied

Development of Acoustic Mufflers for Cabin Noise Reduction in Orion Spacecraft

Controlling cabin acoustic noise levels in the Crew Module (CM) of the Orion spacecraft is critical to ensure adequate speech intelligibility, to avoid fatigue, and prevent any possibility of temporary and permanent hearing loss to the crew. The primary source of cabin noise for the on-orbit phase of the mission is from the Environmental Control and Life Support System (ECLSS) which recycles and conditions breathing air and maintains cabin pressurization through its duct network and components. Unfortunately, as a side effect, noise from the ECLSS fans propagates through theses ducts and emanate into the cabin habitable volume via the ECLSS inlet and outlets. To mitigate excessive duct-borne noise, two ECLSS mufflers have been designed to provide significant acoustic transmission loss (TL) so that the cabin noise requirements can be met. Each muffler is meant to be installed in the ducting of the ECLSS air inlet and outlet sides, respectively. Packaging constraints and tight volume requirements necessitated the mufflers to be of complex geometry and compatible with the bends of the ECLSS duct layout. To design and characterize the acoustic performance of the inlet and outlet mufflers, computational acoustic models were developed using the Finite Element Method (FEM) with 𝑤𝑎𝑣𝑒଺ vibroacoustic software. Characterization of the acoustic material and perforations in the mufflers were addressed with poroelastic theory. Once the mufflers were designed on paper and its TL predicted, prototypes of these mufflers were created using additive manufacturing. The muffler prototypes were subsequently tested for acoustic TL in the laboratory with various con-figurations of acoustic materials. Comparing the analytical predictions to the test performance yielded excellent correlation for acoustic TL and demonstrated significant broadband noise attenuation. The ECLSS mufflers are currently scheduled to be installed on the Artemis II Crew Module (CM) of the Orion spacecraft and will provide significant cabin comfort to crew during the mission.

Indranil Dandaroy↗
DOE OSTI2016

SU-F-T-171: Manufacturing Cost Effective Heterogeneous Phantoms for Use in Proton Therapy

Purpose: To study the feasibility of 3D printing cost effective heterogeneous phantoms for use in proton therapy treatment planning quality assurance. Methods: A desktop 3D printer was utilized to create a series of 2 cm × 2 cm × 4 cm PLA plastic blocks of varying fill materials and hexagonal fill pattern. The blocks were than tested when filled with air, polyurethane foam, paraffin, silicone, and caulk of calcium carbonate – acrylic polymer blend. The blocks were evaluated with a “GE Lightspeed” 16 slice CT scanner and average CT# of the materials’ centers evaluated. Blocks were then placed into a custom aperture fitted to a Mevion Proton system to determine the relative stopping power of each. Scans were performed in water tank with Marcus type parallel plate chamber under a beam with a range of 15 cm and modulation of 2 cm. Shifts in range occurring relative to the 80% distal edge of the open SOBP were evaluated. Results: The CT#s of the blocks were plotted against their measured relative stopping power. This curve was compared to that which is in clinical use. While the trend agrees generally, specific differences between the relative stopping powers were as great as 10%. Conclusion: We have demonstrated that it is possible to utilize different cost effective materials in the manufacturing of phantoms for use in proton therapy. While different materials may provide better agreement to established calibration curves, a custom curve specific to the materials used may be utilized to accurately predict proton treatment dose distributions.

60 APPLIED LIFE SCIENCES↗
NASA NTRS1980

Cell module and fuel conditioner

Stack tests indicate that the discrepancies between calculated and measured temperature profiles are due to reactant cross-over and a lower than expected thermal conductivity of cells. Preliminary results indicate that acceptable contact resistance between cooling plane halves can be achieved without the use of paper. The preliminary design of the enclosure, definition of required labor and equipment for manufacturing repeating components, and the assembly procedures for the benchwork design were developed. Fabrication of components for a second 5-cell stack of the MK-2 design and a second 23-cell stack of the MK-1 design was started. The definition of water and fuel for the reforming subsystem was developed along with a preliminary definition of the control system for the subsystem. The construction and shakedown of the differential catalytic reactor was completed and testing of the first catalyst initiated.

Hoover, D. Q., Jr.↗
NASA NTRS1999

A Study of Flame Propagation on Water-Mist Laden Gas Mixtures in Microgravity

The use of water mists (very fine water sprays) for fire suppression is currently receiving increased attention as a replacement technology for halogen-based chemical agents-such as Halon 1301 (CF3Br)--the manufacturing of which has been banned by the Montreal Protocol due to their high ozone depletion potential. Water mist technology has been found effective for a wide range of applications such as Class B pool fires, shipboard machinery, aircraft cabins, computers, and electronic equipment. There are five distinct mechanisms by which water droplets may interact with a flame. First, the high enthalpy of vaporization of water (2450 kJ/kg) leads to heat removal from the flame front as the liquid droplets turn to steam. Second, as water vaporizes its volume increases approximately three orders of magnitude, which leads to the dilution of the oxygen and vaporized fuel required to maintain the flame. The third effect is the recombination of H-atoms and other radicals on the droplet surface. A fourth effect of water mists in fires is the retardation of surface propagation rates due to the wetting of walls and surfaces. The last potential impact of fine water mists affects the radiative propagation of the fire by forming an optically thick barrier to infrared radiation which prevents ignition of the unburned regions. Unfortunately, little fundamental information exists on the interaction of a flame with a water mist. To date, there is no widely accepted interpretation of the critical concentration of droplets required to suppress a flame or of the fundamental mechanisms involved in flame extinguishment by water mists. One of the main obstacles to obtaining such understanding is the difficulty of providing a simple, well-defined experimental setup for the flame front/water mist interaction. Some of the difficulty stems from the problem of generating, distributing and maintaining a homogeneous concentration of droplets throughout a chamber while gravity depletes the concentration and alters the droplet size by coalescence and agglomeration mechanisms. Experiments conducted in the absence of gravity provide an ideal environment to study the interaction of water mists and flames by eliminating these distorting effects. In addition, microgravity eliminates the complex flow patterns induced between the flame front and the water droplets. The long duration and quality of microgravity in space flights provide the required conditions to perform the setup and monitoring of flame suppression experiments. Consequently, a series of experiments have been identified to be performed on the Combustion Module (CM-2) in the Space Shuttle. These consist of measuring the extinguishing capability of a water mist on a premixed flame propagating along a tube. These experiments should provide the necessary data to obtain further understanding of the water mist suppression phenomena that can be later used to design and manufacture appropriate fire suppression systems. In preparation for the orbital flights, experiments have been conducted on low-gravity ground facilities to obtain the preliminary data necessary to define the scientific objectives and technical issues of the spacecraft experiments.

Abbud-Madrid, A.↗
DOE OSTI2025

3D nanolithography with metalens arrays and spatially adaptive illumination

The growing demand for advanced materials, miniaturized devices and integrated microsystems calls for the reliable fabrication of complex, multiscale, three-dimensional (3D) architectures, a need increasingly addressed through light-based and laser-based processes. However, owing to the field-of-view (FOV) limitations of conventional imaging optics, existing 3D laser nanofabrication techniques face fundamental challenges in throughput, proximity error and stitching defects on the path to scaling. Here, in this study, we present a scalable 3D nanofabrication platform that uses a metalens-generated focal spot array to parallelize two-photon lithography (TPL) beyond centimetre-scale write field areas. Metalenses are ideally suited for producing submicron-scale focal spots for high-throughput nanolithography, as they uniquely feature large numerical apertures (NAs), immersion media compatibility and large-scale manufacturability. We experimentally demonstrate a printing system that uses a 12-cm 2 metalens array to produce more than 120,000 cooperative focal spots, corresponding to a throughput exceeding 10 8 voxels s −1 . By programmatically patterning the focal spot array using a spatial light modulator (SLM), an adaptive parallel printing strategy is developed for precise greyscale linewidth modulation and choreographed printing of semiperiodic and fully aperiodic 3D geometries. We demonstrate parallel printing of replicated microstructures (>50 M microparticles per day), centimetre-scale 3D architectures with feature sizes down to 113 nm, and photonic and mechanical metamaterials. This work demonstrates the potential of 3D nanolithography towards wafer-scale production, showing how TPL could be used at scale for applications in microelectronics, biomedicine, quantum technology and high-energy laser targets.

Materials science↗
DOE OSTI2015

A practical method of modeling a treatment couch using cone-beam computed tomography for intensity-modulated radiation therapy and RapidArc treatment delivery

The effect of a treatment couch on dose perturbation is not always fully considered in intensity-modulated radiation therapy (IMRT) and volumetric modulated arc therapy (VMAT). In the course of inverse planning radiotherapy techniques, beam parameter optimization may change in the absence of the couch, causing errors in the calculated dose distributions. Although modern treatment planning systems (TPS) include data for the treatment couch components, they are not manufactured identically. Thus, variations in their Hounsfield unit (HU) values may exist. Moreover, a radiotherapy facility may wish to have a third-party custom tabletop installed that is not included by the TPS vendor. This study demonstrates a practical and simple method of acquiring reliable computed tomography (CT) data for the treatment couch and shows how the absorbed dose calculated with the modeled treatment couch can differ from that with the default treatment couch found in the TPS. We also experimentally verified that neglecting to incorporate the treatment couch completely in the treatment planning process might result in dose differences of up to 9.5% and 7.3% for 4-MV and 10-MV photon beams, respectively. Furthermore, 20 RapidArc and IMRT cases were used to quantify the change in calculated dose distributions caused by using either the default or modeled couch. From 2-dimensional (2D) ionization chamber array measurements, we observed large dose distribution differences between the measurements and calculations when the couch was omitted that varied according to the planning technique and anatomic site. Thus, incorporating the treatment couch in the dose calculation phase of treatment planning significantly decreases dose calculation errors.

61 RADIATION PROTECTION AND DOSIMETRY↗
DOE OSTI2015

Powerloads on the front end components and the duct of the heating and diagnostic neutral beam lines at ITER

The heating and current drive beam lines (HNB) at ITER are expected to deliver ∼16.7 MW power per beam line for H beams at 870 keV and D beams at 1 MeV during the H-He and the DD/DT phases of ITER operation respectively. On the other hand the diagnostic neutral beam (DNB) line shall deliver ∼2 MW power for H beams at 100 keV during both the phases. The path lengths over which the beams from the HNB and DNB beam lines need to be transported are 25.6 m and 20.7 m respectively. The transport of the beams over these path lengths results in beam losses, mainly by the direct interception of the beam with the beam line components and reionisation. The lost power is deposited on the surfaces of the various components of the beam line. In order to ensure the survival of these components over the operational life time of ITER, it is important to determine to the best possible extent the operational power loads and power densities on the various surfaces which are impacted by the beam in one way or the other during its transport. The main factors contributing to these are the divergence of the beamlets and the halo fraction in the beam, the beam aiming, the horizontal and vertical misalignment of the beam, and the gas profile along the beam path, which determines the re-ionisation loss, and the re-ionisation cross sections. The estimations have been made using a combination of the modified version of the Monte Carlo Gas Flow code (MCGF) and the BTR code. The MCGF is used to determine the gas profile in the beam line and takes into account the active gas feed into the ion source and neutraliser, the HNB-DNB cross over, the gas entering the beamline from the ITER machine, the additional gas atoms generated in the beam line due to impacting ions and the pumping speed of the cryopumps. The BTR code has been used to obtain the power loads and the power densities on the various surfaces of the front end components and the duct modules for different scenarios of ITER operation. The gas profile and the magnetic field distribution for each scenario has been considered in these evaluations. The worst case power loads and power densities for each surface have been used to study their thermo-mechanical behaviour and manufacturing feasibility. The details of these calculations and results obtained are presented and discussed.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2016

SU-G-IeP1-09: MRI Evaluation of a Direction-Modulated Brachytherapy (DMBT) Tandem Applicator for Cervical Cancer On 3T

Purpose: To assess image quality and artifact extent of a novel direction modulated brachytherapy (DMBT) tandem applicator on a 3T MRI using various clinical imaging sequences. Methods: The tandem applicator is composed of a tungsten alloy with 6 peripheral grooves covered with a PEEK tip. An MR-compatible phantom with similar dimensions to the female pelvis was manufactured. To visually assess the spatial shift of the applicator’s tip, a mountable radial-fiducial with 4 plastic rods, each of 3mm diameter, was designed to tightly fit on the applicator. The rods are separated by 16 mm and mounted at 90-degree relative to one another. The pelvis phantom was filled with a solution of MnCl2 to mimic T2 relaxation time of the cervix (60-80 ms at 3T).Imaging was performed on a 3T Philips Achieva using a 16-channel Torso coil array. Four MR sequences were tested: T2-weighted fast spin-echo (T2w-FSE), proton density weighted FSE (PDw-FSE), T1-weighted FSE (T1w-FSE) and T1 weighted spoiled gradient echo (T1w-GE). The spatial resolution was kept the same between all sequences: 0.6 × 0.6 × 3 mm{sup 3} with no slice gaps. Para-sagittal images were acquired with the applicator fixed at a 30-degree angle anterior to the B0- field to mimic clinical settings. Results: Minimal artifacts were observed on T2w-FSE, PDw-FSE and T1-FSE, while significant artifacts were seen on T1w-GE images. Artifacts induced in all 3 FSE sequences did not hinder accurate localisation of the tip and the applicator boundaries. The drift of the applicator’s centreline from the radial fiducials was measured and found to be < 1 mm for the 3 FSE sequences. Conclusion: The tungsten–based DMBT applicator can be potentially used on 3T with various clinical sequences without inducing significant artifacts. Further validation on patients as well as the evaluation of relative SNR among the different sequences is required.

60 APPLIED LIFE SCIENCES↗
DOE OSTI2019

50 KW Multi-beam Klystron

Statement of problem or situation that is being addressed: microwave power sources (such as klystrons) offering an increased efficiency (80% or above) are needed for various applications. Of a particular interest is a source at 952.6 MHz delivering 50kW (continuous) CW for the RF systems for ion acceleration in the Energy Electron Ion Collider EIC being developed at Thomas Jefferson National Accelerator Facility. General statement of how this problem is being addressed: A novel tube (klystron) concept with efficiency in excess of 80%, delivering 50 kW CW at 952.6 MHz MHz is proposed. It is a combination of proven technologies put together: its uses multiple beams to have its perveance low to boost beam-power to RF efficiency. It uses a partially grounded depressed collector (as invented by Omega P R&D) with a carefully tailored beam distribution after the cavity chain to recover energy thereby increasing the overall efficiency even more. A low operating voltage makes the tube more user-friendly avoiding need for costly modulators and oil insulation. A sectioned solenoid is used to insure superb beam-matching to all components downstream of the electron gun, increasing the tube performances. What is to be done in Phase I: The overall goal of this project is to develop, design, engineer, manufacture and test a multi-beam klystron operating in CW regime, delivering 50kW CW of power at 952.6 MHz. The effort is to be coordinated with TJNAF to insure excellent compatibility with the facility. The device will have a high efficiency >80% (operating at 12kV). The main goals during Phase I are to numerically simulate and optimize the klystron main components, namely the gun, the RF cavity chain, the multi-channel-channel partially grounded depressed collector, and the magnetic system. Preliminary engineering issues will be coordinated by Omega-P R&D with its strategic alliance partner Calabazas Creek Research Inc., which expected to participate formally during Phase II in final design and fabrication. Commercial Applications and Other Benefits: The klystrons of this type can serve as the main RF-energy source of in RF-systems for accelerators which have found their applications both in science and industry, and is of high interest to Thomas Jefferson National Accelerator Facility.

RF power sources, klystron, high efficiency, CW, e↗
NASA NTRS1982

Wafering economies for industrialization from a wafer manufacturer's viewpoint

The key technical limitations which inhibit the lowering of value-added costs for state-of-the-art wafering techniques are assessed. From the best experimental results to date, a projection was made to identify those parts of each system which need to be developed in order to meet or improve upon the value-added cost reduction necessary for $0.70/Wp photovoltaics modules.

Rosenfield, T. P.↗
NASA NTRS2016

On-Orbit Manufacturing From Orbital Factories to In Situ Resource Utilization

This webinar will review commercial prospects for manufacturing in orbit. Doing business in space is rapidly becoming more reliable, affordable and accessible. From 2010 to 2015 launch prices went down by a factor of 10 or more, to about $5,000kg while investments into Space 2.0 companies and technologies are closing in on $2.5 Billion (New Space Global). With three commercial suppliers (SpaceX, Orbital ATK and Sierra Nevada Corp) to Earths orbits, mission frequency is improving dramatically. Moreover, private space companies (SpaceX Reusable Dragon Lab; Bigelows B330) are also scouting the opportunities of renting or selling modules as platforms for orbital free-flying facilities; modules that can be used for automated fabrication to manned experiments.Topics addressed in the webinar include: 1. Case studies of unique competitive advantages that can be gained from microgravity and space vacuum: wafer reprocessing, fiber optics, crystal growth;2. Prospective solar power orbital data centers;3. Reuse and recycling of orbital debris as a possible feedstock for robotic 3D fabrication potentially in the vacuum as well as inside facilities;4. The story behind the original WakeShield wafer fabrication facility and its relevance to todays activities;5. Energy needs for on-orbit manufacturing6. Environmental value proposition of on-orbit manufacturing for products with toxic byproducts or excessively large green house gases footprints;7. Longer term scenario of flexible, connected, automated, intelligent and sustainable orbital factories of the future.Opening up a less-appreciated aspect of NewSpace, this webinar will be of high interest to CTOs, Directors and Managers from product development to RD, Innovation Strategy leaders, and investors, across many different industrial verticals (materials, electronics, pharmaceuticals, advanced sustainable manufacturing, bioengineering, etc.)and anyone trying to understand what value space can have for their business in the near and far future.

Cozmuta, Ioana↗
DOE OSTI2026

Lessons from the IEC Durability of Adhesion Accelerated Test Sequence

The IEC 62788-1-1 and IEC 63209-2 standards use aging sequences for durability of adhesion in photovoltaic (PV) modules, which may be evaluated using the single cantilever beam (SCB) test. Because the encapsulant forms critical interfaces with the front glass and solar cells, degradation at those interfaces under ultraviolet (UV) exposure, elevated temperature, and humidity can lead to interfacial delamination - compromising the long-term reliability. In this work, adhesion durability of UV-transmitting poly(ethylene-co-vinyl acetate) (EVA) encapsulant to glass and to silicon solar cells is evaluated after sequenced UV and damp heat aging (85C/85%RH). Laminates were prepared using StarPhire solar front glass with thin glass or PERC cells, and two EVA formulations with different concentrations of siloxane coupling agent. Adhesion was quantified by measuring critical debond energy using the SCB method. Both formulations exhibit similar qualitative trends, while different adhesion is observed at the periphery despite the use of low-shrink manufacturing. The results show that while glass/EVA adhesion remains stable or increases after UV exposure and shows only moderate changes after damp heat, the EVA/cell interface exhibits an irreversible loss of adhesion following UV and then damp heat exposure. Although glass/EVA interfaces generally exhibit lower debond energies, the EVA/cell interface is significantly more vulnerable to UV-driven degradation, identifying it as the dominant reliability risk location through early- and intermediate-module life. These results demonstrate that accelerated aging sequences can expose large, interface-specific losses in adhesion durability and underscore the importance of interface engineering for long-term PV module reliability.

14 SOLAR ENERGY↗
DOE OSTI2024

Properties of Nb x Ti (1–x) N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits

Scaling superconducting digital circuits requires fundamental changes in the current material set and fabrication process. The transition to 300 mm wafers and the implementation of advanced lithography are instrumental in facilitating mature CMOS processes, ensuring uniformity, and optimizing the yield. Here, this study explores the properties of Nb x Ti (1–x) N films fabricated by magnetron DC sputtering on 300 mm Si wafers. As a promising alternative to traditional Nb in device manufacturing, Nb x Ti (1–x) N offers numerous advantages, including enhanced stability and scalability to smaller dimensions, in both processing and design. As a ternary material, Nb x Ti (1–x) N allows engineering material parameters by changing deposition conditions. The engineered properties can be used to modulate device parameters through the stack and mitigate failure modes. We report characterization of Nb x Ti (1–x) N films at less than 2% thickness variability, 2.4% T c variability and 3% composition variability. Film resistivity (140–375 Ωcm) shows a strong correlation with the film oxygen content, while the critical temperature T c (4.6 K–14.1 K) is strongly affected by film stoichiometry and its microstructure has only a moderate effect on modifying T c . Our results offer insights about the interplay between film stoichiometry, film microstructure and critical temperature.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗