Search NASA⌕ Search

SEARCH · Search NASA

Results for “Sputtering”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 883 records · Page 49
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Comprehensive new insights on the potential use of SiC as plasma-facing materials in future fusion reactors

Abstract The performance of silicon carbide as an alternative plasma facing material (PFM) was studied at various irradiation conditions relevant to ion energies and fluxes of a fusion reactor. This analysis involves detailed modeling of subsurface plasma/material interactions, sputtered particle transport above the surface and redeposition, and related changes in material composition and microstructure induced by steady-state and Edge Localized Mode ion fluxes. Transition of a crystalline SiC surface to semi-crystalline and amorphous phases was analyzed based on advanced modeling of DIII-D tokamak experiments where SiC was irradiated in single- and multiple- L-mode and H-mode discharges. This analysis shows that displacement damage, particle deposition/redeposition, and D accumulation on the SiC divertor surface can lead to significant microstructural changes that result in enhanced sputtering erosion in comparison with the original crystalline material. However, the resulting total net erosion rate for a full-coverage, advanced tokamak, SiC coated divertor may well be acceptably low. Moreover, the C sputtering yield from the evolved SiC surface can be seven times lower than from a pure graphite surface; this would imply significantly reduced tritium co-deposition rates in a D-T tokamak reactor, compared with a pure carbon surface. It was also determined that chemical sputtering of both C and Si should not result in any noticeable effect on the net erosion, for attached plasma regimes. Our results thus show encouraging results overall for use of SiC as a PFM in tokamaks.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2023

NuDustC++

NuDustc++ is a nucleating and sputtering dust code. It takes in the temperature-density profiles, abundance data, and chemistry network. It creates a binned size distribution from user input data to track certain grain sizes. NuDustc++ loads the data and calculates where and when a shock is detected in the input data. Using a runge-Kutta DoPri 5 integrator, it calculates nucleation and growth of grains by solving a system of coupled non-linear ODEs. It calculates sputtering based on the presence or lack of a shock by either integrating over energy or summing up the sputtering yield contributions per gas species. It is used to determine and track dust grain nucleation, growth, and erosion (sputtering) in gaseous systems to determine characteristics of the produced grain distribution.

Stangl, Sarah↗
NASA NTRS1974

Theoretical investigations on plasma processes in the Kaufman thruster

An analysis of the sputtering of metal surfaces and grids by ions of medium energies is given and it is shown that an exact, nonlinear, hyperbolic wave equation for the temperature field describes the transient transport of heat in metals. Quantum statistical and perturbation theoretical analysis of surface sputtering by low energy ions are used to develop the same expression for the sputtering rate. A transport model is formulated for the deposition of sputtered atoms on system components. Theoretical efforts in determining the potential distribution and the particle velocity distributions in low pressure discharges are briefly discussed.

Wilhelm, H. E.↗
NASA NTRS1973

A 9700-hour durability test of a five centimeter diameter ion thruster

A modified Hughes SIT-5 thrustor has been life-tested at the Lewis Research Center. The final 2700 hours of the test are described with a charted history of thrustor operating parameters and off-normal events. Performance and operating characteristics were nearly constant throughout the test except for neutralizer heater power requirements and accelerator drain current. A post-shutdown inspection revealed sputter erosion of ion chamber components and component flaking of sputtered metal. Several flakes caused beamlet divergence and anomalous grid erosion, causing the test to be terminated. All sputter erosion sources have been identified and promising sputter resistant components are currently being evaluated.

Nakanishi, S.↗
NASA NTRS1976

Sodium in the Jovian magnetosphere

Observations of sodium D-line emission from Io and the magnetosphere of Jupiter are reported. A disk-shaped cloud of sodium is found to exist in the Jovian magnetosphere with an inner edge at about 4 Jovian radii and an outer edge at about 10 Jovian radii. The gravitational scale height above the equatorial plane is a few Jovian radii. The data are interpreted in terms of a sputtering model in which the sodium required to maintain the cloud is sputtered off the surface of Io by trapped energetic radiation-belt protons. Conditions on the atmospheric density are obtained. The Keplerian orbits attainable by such escaping sputtered atoms can provide the observed spatial distribution. The required 500-keV proton flux required to provide the 1-10-keV protons which will sputter the sodium at the surface of Io is consistent with the limiting trapped flux determined by ion-cyclotron turbulence.

Mekler, Y.↗
NASA NTRS1977

Ion beam texturing

A microscopic surface texture was created by sputter-etching a surface while simultaneously sputter-depositing a lower sputter yield material onto the surface. A xenon ion-beam source was used to perform the texturing process on samples as large as 3-cm diameter. Textured surfaces have been characterized with SEM photomicrographs for a large number of materials including Cu, Al, Si, Ti, Ni, Fe, stainless steel, Au, and Ag. A number of texturing parameters are studied including the variation of texture with ion-beam powder, surface temperature, and the rate of texture growth with sputter etching time.

Hudson, W. R.↗
NASA NTRS1977

Direct measurement of surface carbon concentrations

Measurements of surface concentrations of carbon in lunar soils and soil breccias provide information on the origin of carbon in the regolith. The reaction C-12 (d, p sub zero) is used to measure 'surface' and 'volume' concentrations in lunar samples. This method has a depth resolution of 1 micron, which permits only a 'surface' and a 'volume' component to be measured. Three of four Apollo 16 double drive tube samples show a surface carbon concentration of about 8 by 10 to the 14th power/sq cm, whereas the fourth sample gave 4 by 10 to the 14th power/sq cm. It can be convincingly shown that the measured concentration does not originate from fluorocarbon or hydrocarbon contaminants. Surface adsorbed layers of CO or CO2 are removed by a sputter cleaning procedure using a 2-MeV F beam. It is shown that the residual C concentration of 8 by 10 to the 14th power/sq cm cannot be further reduced by increased F fluence, and it is therefore concluded that it is truly lunar. If one assumes that the measured surface C concentration is a steady-state concentration determined only by a balance between solar-wind implantation and sputtering, a sputter erosion rate of 0.1 A/yr is obtained. However, it would be more profitable to use an independently derived sputter erosion rate to test the hypothesis of a solar-wind origin of the surface carbon.

Filleux, C.↗
NASA NTRS1978

Adaptation of ion beam technology to microfabrication of solid state devices and transducers

A number of areas were investigated to determine the potential uses of ion beam techniques in the construction of solid state devices and transducers and the packaging of implantable electronics for biomedical applications. The five areas investigated during the past year were: (1) diode-like devices fabricated on textured silicon; (2) a photolithographic technique for patterning ion beam sputtered PVC (polyvinyl chloride); (3) use of sputtered Teflon as a protective coating for implantable pressure sensors; (4) the sputtering of Macor to seal implantable hybrid circuits; and (5) the use of sputtered Teflon to immobilize enzymes.

Topich, J. A.↗
NASA NTRS1981

Erosion of Galilean satellite surfaces by Jovian magnetosphere particles

The effects on the surfaces of the Galilean satellites Europa, Ganymede and Callisto of impacts by particles of the Jupiter magnetosphere in which they are immersed are estimated. Differential ion fluxes measured by the Voyager low-energy magnetosphere particle analyzer as a function of ion energy were used to calculate ice erosion fluxes for the satellites under the assumption that each is 50% ice covered. Calculations were performed on the basis of laboratory data concerning the ice sputtering coefficients of protons and oxygen ions of various energies. A water erosion rate of greater than 10 to the 10th/sq cm per sec is obtained for Europa, which implies a total erosion over 1 billion years of an ice layer 100 m deep. Atmospheric column densities of the H2O molecules sputtered from the surface but not escaping the satellites are also calculated for the three satellites assuming a sputtered ion temperature of 2000 K, and are found to dominate those produced by sublimation. Finally, estimates are presented of the source and loss processes for an oxygen atmosphere around Ganymede created by sputtering or sublimation.

Johnson, R. E.↗
NASA NTRS1982

Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber

The processing of wafer devices to form multilevel interconnects for microelectronic circuits is described. The method is directed to performing the sequential steps of etching the via, removing the photo resist pattern, back sputtering the entire wafer surface and depositing the next layer of interconnect material under common vacuum conditions without exposure to atmospheric conditions. Apparatus for performing the method includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a DC magnetron sputtering system. A gas inlet is provided in the chamber for the introduction of various gases to the vacuum chamber and the creation of various gas plasma during the sputtering steps.

Routh, D. E.↗
NASA NTRS1981

Effects of Io ejecta on Europa

The effects of plasma ejected from Io on the nature and evolution of the surface of Europa and on the relative importance of the roles played by the two satellites in the Jupiter magnetosphere are examined. Observations of an ultraviolet absorption feature on the trailing side of Europa are interpreted as due to an equilibrium column density of SO2 in a steady-state model of the implantation of iogenic ions into the surface of Europa and their subsequent sputtering. The observed sulfur column density of 2 x 10 to the 16th/sq cm implies a slow loss of material from Europa, mainly water ice, and indicates that the spectrum of particles sputtered is soft. Considerations of the comparative roles of corotating and energetic heavy ions are shown to suggest that the implantation and sputtering is primarily the result of the proton and light ion component of the plasma. The weakness of Europa as a plasma source resulting from the soft sputtered particle spectrum thus leads to the dominance of Io in contributing to the magnetospheric plasma.

Eviatar, A.↗
NASA NTRS1982

Research on planetary samples

Sputtering yields of solid SO2 by high energy ions were measured in order to study the mechanism for sputtering dielectrics with ions in the electronic stopping power region. The incident ions were helium and fluorine with energies ranging from 1.5 MeV to 25 MeV. Yields as high as 7000 SO2 molecules/incident F ion were measured; the 1.5 MeV He4 beam had a sputtering yield of 50. The data are compared to yield measurements made on UF4 and H2O targets. There is a striking similarity in the yield as a function of the Energy for all three targets. The data compare favorably with theoretical curves based on a model for the sputtering which considers the electronic excitations induced the target by the incident beam. Measurements and calculations of the sort are also useful in understanding processes which occur on the surface of Jupiter's satellite Io, which is covered with SO2 frost and bombarded by energetic ions trapped in the Jovian magnetosphere.

Tombrello, T. A.↗
NASA NTRS1983

Surface acoustic wave/silicon monolithic sensor/processor

A new technique for sputter deposition of piezoelectric zinc oxide (ZnO) is described. An argon-ion milling system was converted to sputter zinc oxide films in an oxygen atmosphere using a pure zinc oxide target. Piezoelectric films were grown on silicon dioxide and silicon dioxide overlayed with gold. The sputtered films were evaluated using surface acoustic wave measurements, X-ray diffraction, scanning electron microscopy, Auger electron spectroscopy, and resistivity measurements. The effect of the sputtering conditions on the film quality and the result of post-deposition annealing are discussed. The application of these films to the generation of surface acoustic waves is also discussed.

Kowel, S. T.↗
NASA NTRS1984

Status of Plasma Physics Techniques for the Deposition of Tribological Coatings

This paper reviews the plasma physics deposition techniques of sputtering and ion-plating. Their characteristics and potentials are discussed in terms of synthesis or deposition of tribological coatings. Since the glow discharge or plasma generated in the conventional sputtering and ion-plating techniques has a low ionization efficiency (<0.1%), rapid advances have been made in equipment design to further increase the ionization efficiency. The enhanced ionization favorably affects the nucleation and growth sequence of the coating. This leads to improved adherence and coherence, higher density, favorable morphological growth, and reduced internal stresses in the coatings. As a result, desirable coating characteristics can be precision tailored. Tribological coating characteristics of sputtered solid film lubricants such as MoS2, ion-plated soft gold and lead metallic films, and sputtered and ion-plated wear-resistant refractory compound films such as nitrides and carbides are discussed.

Talivaldis Spalvins↗
NASA NTRS1983

Ring and plasma - The enigmae of Enceladus

The E ring associated with the Kronian moon Enceladus has a lifetime of only a few thousand years against sputtering by slow corotating O ions. The existence of the ring implies the necessity for a continuous supply of matter. Possible particle source mechanisms on Enceladus include meteoroidal impact ejection and geysering. Estimates of ejection rates of particulate debris following small meteoroid impact are on the order of 3 x 10 to the -18th g/(sq cm sec), more than an order of magnitude too small to sustain the ring. A geyser source would need to generate a droplet supply at a rate of approximately 10 to the -16th g/(sq cm sec) in order to account for a stable ring. Enceladus and the ring particles also directly supply both plasma and vapor to space via sputtering. The absence of a 60 eV plasma at the Voyager 2 Enceladus L-shell crossing, such as might have been expected from sputtering, cannot be explained by absorption and moderation of plasma ions by ring particles, because the ring is too diffuse. Evidently, the effective sputtering yield in the vicinity of Enceladus is on the order of, or smaller than, 0.4, about an order of magnitude less than te calculated value. Small scale surface roughness may account for some of this discrepancy.

Haff, P. K.↗
NASA NTRS1985

Aluminum oxide barriers in MCrAlY superalloy systems

An investigation was made of sputtered aluminum oxide diffusion barriers to protect gas turbine engine blade and vane alloys from their coatings. MAR M200 + Hf coated with sputtered NiCoCrAlY and MAR M509 coated with sputtered FeCrAlY were obtained both with and without 1 and 2 micron sputtered Al2O3 barrier layers. Electron dispersive X-ray analysis was used to determine the concentration profiles of as-received and heat treated samples.

Kreider, Kenneth G.↗
NASA NTRS1991

Recent advances in the ITO/InP solar cell

It was demonstrated that Indium Tin Oxide (ITO)/InP solar cells can now be made on as-received p(-) bulk substrates which are of nearly equal quality to those which could previously only be made on epitaxially grown p(-) InP base layers. Although this advancement is due in part to both increases in substrate quality and a better understanding of back contact formation, it appears that the passivation/compensation effects resulting from having H2 in the sputtering gas tends to reduce significantly the performance differences previously observed between these two substrates. It is shown that since high efficiency ITO/InP cells can be made from as-received substrates, and since the type conversion process is not highly spatially dependent, large area ITO/InP cells (4 sq cm) with efficiencies approaching 17 percent (Global) can be made. Furthermore, the measured open circuit voltages (V sub OC) and quantum efficiencies (QEs) from these large cells suggest that, when they are processed using optimum grid designs, the efficiencies will be nearly equal to that of the smaller cells thus far produced. It has been shown, through comparative experiments involving ITO/InP and IO/InP cells, that Sn may not be the major cause of type conversion of the InP surface and thus further implies that the ITO may not be an essential element in this type of device. Specifically, very efficient photovoltaic solar cells were made by sputtering (Sn free) In2O3 showing that type conversion and subsequent junction formation will occur even in the absence of the sputtered SN species. The result suggests that sputter damage may indeed be the important mechanism(s) of type conversion. Finally, an initial study of the stability of the ITO/InP cell done over the course of about one year has indicated that the J(sub SC) (short circuit current) and the fill factor (FF) are measurably stable within experimental certainty.

Gessert, T. A.↗
NASA NTRS1992

Lunar and Asteroid Composition Using a Remote Secondary Ion Mass Spectrometer

Laboratory experiments simulating solar wind sputtering of lunar surface materials have shown that solar wind protons sputter secondary ions in sufficient numbers to be measured from low-altitude lunar orbit. Secondary ions of Na, Mg, Al, Si, K, Ca, Mn, Ti, and Fe have been observed sputtered from sample simulants of mare and highland soils. While solar wind ions are hundreds of times less efficient than those used in standard secondary ion mass spectrometry, secondary ion fluxes expected at the Moon under normal solar wind conditions range from approximately 10 to greater than 10(exp 4) ions cm(sup -2)s(sup -1), depending on species. These secondary ion fluxes depend both on concentration in the soil and on probability of ionization; yields of easily ionized elements such as K and Na are relatively much greater than those for the more electronegative elements and compounds. Once these ions leave the surface, they are subject to acceleration by local electric and magnetic fields. For typical solar wind conditions, secondary ions can be accelerated to an orbital observing location. The same is true for atmospheric atoms and molecules that are photoionized by solar EUV. The instrument to detect, identify, and map secondary ions sputtered from the lunar surface and photoions arising from the tenuous atmosphere is discussed.

Elphic, R. C.↗