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DOE OSTI2015

An Assessment of Critical Dimension Small Angle X-ray Scattering Metrology for Advanced Semiconductor Manufacturing

Simultaneous migration of planar transistors to FinFET architectures, the introduction of a plurality of materials to ensure suitable electrical characteristics, and the establishment of reliable multiple patterning lithography schemes to pattern sub-10 nm feature sizes imposes formidable challenges to current in-line dimensional metrologies. Because the shape of a FinFET channel cross-section immediately influences the electrical characteristics, the evaluation of 3D device structures requires measurement of parameters beyond traditional critical dimension (CD), including their sidewall angles, top corner rounding and footing, roughness, recesses and undercuts at single nanometer dimensions; thus, metrologies require sub-nm and approaching atomic level measurement uncertainty. Synchrotron critical dimension small angle X-ray scattering (CD-SAXS) has unique capabilities to non-destructively monitor the cross-section shape of surface structures with single nanometer uncertainty and can perform overlay metrology to sub-nm uncertainty. In this dissertation, we perform a systematic experimental investigation using CD-SAXS metrology on a hierarchy of semiconductor 3D device architectures including, high-aspect-ratio contact holes, H2 annealed Si fins, and a series of grating type samples at multiple points along a FinFET fabrication process increasing in structural intricacy and ending with fully fabricated FinFET. Comparative studies between CD-SAXS metrology and other relevant semiconductor dimensional metrologies, particularly CDSEM, CD-AFM and TEM are used to determine physical limits of CD-SAXS approach for advanced semiconductor samples. CD-SAXS experimental tradeoffs, advice for model-dependent analysis and thoughts on the compatibility with a semiconductor manufacturing environment are discussed.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

DOE OSTI2014

Effect of Ag addition to L1{sub 0} FePt and L1{sub 0} FePd films grown by molecular beam epitaxy

L1{sub 0} ordered FePt-Ag (5 nm) and FePd-Ag (5 nm) films were grown on MgO (001) substrate at temperatures of 250–400 °C by using molecular beam epitaxy method, and their crystal and surface structures, perpendicular magnetic anisotropies and Curie temperatures were investigated. In the case of FePt-Ag, Ag addition with the amount of 10–20 at. % was effective to promote L1{sub 0} ordering and granular growth, resulting in the increase of the perpendicular magnetic anisotropy and coercivity of the FePt-Ag films. On the other hand, in the case of FePd-Ag, Ag addition changed the surface morphology from island to continuous film associated with the reductions of its coercivity and perpendicular anisotropy. The variations of lattice constants and Curie temperature with Ag addition were significantly different between FePt-Ag and FePd-Ag. For FePd-Ag, the c and a axes lattice spacings and Curie temperature gradually changed with increasing Ag content, while they unchanged for FePt-Ag. These results suggest the possibility of the formation of FePdAg alloy in FePd-Ag, while Ag segregation in FePt-Ag.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2015

Ultrasonic imaging of materials under unconventional circumstances

This paper reflects the contents of the plenary talk given by Nico Felicien Declercq. “Ultrasonic Imaging of materials” covers a wide technological area with main purpose to look at and to peek inside materials. In an ideal world one would manage to examine materials like a clairvoyant. Fortunately this is impossible hence nature has offered sufficient challenges to mankind to provoke curiosity and to develop science and technology. Here we focus on the appearance of certain undesired physical effects that prohibit direct imaging of materials in ultrasonic C-scans. Furthermore we try to make use of these effects to obtain indirect images of materials and therefore make a virtue of necessity. First we return to one of the oldest quests in the progress of mankind: how thick is ice? Our ancestors must have faced this question early on during migration to Northern Europe and to the America’s and Asia. If a physicist or engineer is not provided with helpful tools such as a drill or a device based on ultrasound, it is difficult to determine the ice thickness. Guided waves, similar to those used for nondestructive testing of thin plates in structural health monitoring can be used in combination with the human ear to determine the thickness of ice. To continue with plates, if an image of its interior is desired high frequency ultrasonic pulses can be applied. It is known by the physicist that the resolution depends on the wavelength and that high frequencies usually result in undesirably high damping effects inhibiting deep penetration into the material. To the more practical oriented engineer it is known that it is advantageous to polish surfaces before examination because scattering and diffraction of sound lowers the image resolution. Random scatterers cause some blurriness but cooperating scatters, causing coherent diffraction effects similar to the effects that cause DVD’s to show rainbow patterns under sunlight, can cause spooky images and erroneous measurements of material properties. However when properly understood, diffraction effects, for instance if one has no other options but to work with frequencies that are fortuitously very effectively diffracted by the surface structure of a material under investigation, can be used to obtain high contract images or to obtain information that would normally be hidden from standard C-scan techniques. Similar contrast enhancement is also obtained for oblique C-scans of composites.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

DOE OSTI2016

Elucidating the Phase Transformation of Li 4 Ti 5 O 12 Lithiation at the Nanoscale

Here this work provides insight regarding the fundamental lithiation and delithiation mechanism of the popular lithium ion battery anode material, Li 4 Ti 5 O 12 (LTO). Our results quantify the extent of reaction between Li 4 Ti 5 O 12 and Li 7 Ti 5 O 12 at the nanoscale, during the first cycle. Lithium titanate’s discharge (lithiation) and charge (delithiation) reactions are notoriously difficult to characterize due to the zero-strain transition occurring between the end members Li 4 Ti 5 O 12 and Li 7 Ti 5 O 12 . Interestingly, however, the latter compound is electronically conductive, while the former is an insulator. We take advantage of this critical property difference by using conductive atomic force microscopy (c-AFM) to locally monitor the phase transition between the two structures at various states of charge. To do so, we perform ex situ characterization on electrochemically cycled LTO thin-films that are never exposed to air. We provide direct confirmation of the manner in which the reaction occurs, which proceeds via percolation channels within single grains. We complement scanning probe analyses with an X-ray photoelectron spectroscopy (XPS) study that identifies and explains changes in the LTO surface structure and composition. Additionally, we provide a computational analysis to describe the unique electronic differences between LTO and its lithiated form.

36 MATERIALS SCIENCE↗

NASA NTRS1993

Scanning Tunneling Microscope For Use In Vacuum

Scanning tunneling microscope with subangstrom resolution developed to study surface structures. Although instrument used in air, designed especially for use in vacuum. Scanning head is assembly of small, mostly rigid components made of low-outgassing materials. Includes coarse-positioning mechanical-translation stage, on which specimen mounted by use of standard mounting stub. Tunneling tip mounted on piezoelectric fine-positioning tube. Application of suitable voltages to electrodes on piezoelectric tube controls scan of tunneling tip across surface of specimen. Electronic subsystem generates scanning voltages and collects data.

Abel, Phillip B.↗

DOE OSTI2015

Improve the corrosion and cytotoxic behavior of NiTi implants with use of the ion beam technologies

The corrosion resistance behavior and cytotoxicity of binary NiTi-base alloy specimens subjected to surface modification by silicon ion beams and the proliferative ability of mesenchymal stem cells (MSC) of rat marrow on an ion-implanted surface of the alloy have been studied. The silicon ion beam processing of specimen surfaces is shown to bring about a nearly two-fold improvement in the corrosion resistance of the material to attack by acqueous solutions of NaCl and human plasma and a drastic decrease in the nickel concentration after immersion of the specimens into the solutions for ∼3400 and ∼6000 h, respectively. It is found that MSC proliferation strongly depends on the surface structure, roughness and chemical condition of NiTi implants.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2016

COMPOSITIONAL SIMILARITIES AND DISTINCTIONS BETWEEN TITAN’S EVAPORITIC TERRAINS

We document the similarities in composition between the equatorial basins Tui Regio, Hotei Regio, and other 5-μm-bright materials, notably the north polar evaporites, by investigating the presence and extent of an absorption feature at 4.92 μm. In most observations, Woytchugga Lacuna, Ontario Lacus, MacKay Lacus, deposits near Fensal, some of the lakes and dry lake beds south of Ligeia, and the southern shores of Kraken Mare share the absorption feature at 4.92 μm observed in the spectra of Tui and Hotei. Besides Woytchugga and at Fensal, these 5-μm-bright deposits are geomorphologically substantiated evaporites. Thus, the similarity in composition strengthens the hypothesis that Tui and Hotei once contained liquid. Other evaporite deposits, however, do not show the 4.92 μm absorption, notably Muggel Lacus and the shores of Ligeia Mare at the north pole. This difference in composition suggests that there is more than one kind of soluble material in Titan’s lakes that can create evaporite and/or that the surface properties at the Visual and Infrared Mapping Spectrometer wavelength scale are not uniform between the different deposits (crystal size, abundance, etc.). Our results indicate that the surface structure, composition, and formation history of Titan’s evaporites may be at least as dynamic and complex as their Earth counterparts.

79 ASTRONOMY AND ASTROPHYSICS↗

DOE OSTI2026

Pressurized Gas-Driven Elemental Redistribution Enables Ultrastable PtNi Catalysts for Heavy-Duty Vehicles

Gas-driven element redistribution, characterized by the preferential enrichment of one element at the surface relative to the bulk, is frequently observed in multicomponent alloys. Using L1 0 -ordered PtNi as a model system, we reveal that gas pressure plays a critical role in governing adsorption-driven surface composition during annealing in reducing gases: low pressure favors Pt surface segregation, while high pressure facilitates Ni surface enrichment. In this study, we developed a high-pressure nitriding (HPN) strategy that modulates the surface structure and composition of PtNi catalysts. The resulting HPN-PtNi exhibits enhanced performance and durability in membrane electrode assemblies for heavy-duty fuel cell applications, maintaining a high current density of 1.19 A cm −2 at 0.7 V after 90,000 voltage cycles. Through a combination of experimental and theoretical analyses, we reveal that the HPN process forms additional stabilizing Ni−N bonds and induces elemental redistribution with Ni surface enrichment and a Ni-deficient Pt subsurface. These modifications alter the atomic coordination environment of the ordered PtNi phase. This work presents a generalizable strategy to design robust and high-performing Pt-based catalysts by controlling gas-pressure-driven elemental redistribution and dopant incorporation.

30 DIRECT ENERGY CONVERSION↗

DOE OSTI2016

Synthesis and characterization of Eu{sup 3+}:Gd{sub 2}O{sub 3} hollow spheres for biomedical applications

Multifunctional magnetic Nanoparticles (MFMNPs) are potentially applicable in both drug delivery systems (DDS) and hyperthermia treatment. Structural, surface morphology and optical property were investigated by X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM) and photoluminescence (PL) measurement. Uniform Eu{sup 3+}:Gd{sub 2}O{sub 3} hollow microspheres of 1.8-2.0 μm diameters were synthesized by template based approach. We found that synthesized Hollow spheres are 100 nm in thickness. FE-SEM images revealed that the synthesized material are hollow in structure with good porous structure and these pores work as pathway for releasing drugs from the hollow particle inside. Luminescent properties of material were studied by room temperature photoluminescence emission spectra under the excitation of 275 nm. Material exhibit bright red emission corresponding to the {sup 5}D{sub 0}-{sup 7}F{sub 2} transition of the activator ions under ultraviolet light excitation, which might find potential applications in fields such as drug delivery or biological labeling because of their excellent luminescence properties.

36 MATERIALS SCIENCE↗

DOE OSTI2019

Well‐Dispersed Nickel‐ and Zinc‐Tailored Electronic Structure of a Transition Metal Oxide for Highly Active Alkaline Hydrogen Evolution Reaction

Abstract The practical scale‐up of renewable energy technologies will require catalysts that are more efficient and durable than present ones. This is, however, a formidable challenge that will demand a new capability to tailor the electronic structure. Here, an original electronic structure tailoring of CoO by Ni and Zn dual doping is reported. This changes it from an inert material into one that is highly active for the hydrogen evolution reaction (HER). Based on combined density functional theory calculations and cutting‐edge characterizations, it is shown that dual Ni and Zn doping is responsible for a highly significant increase in HER activity of the host oxide. That is, the Ni dopants cluster around surface oxygen vacancy of the host oxide and provide an ideal electronic surface structure for hydrogen intermediate binding, while the Zn dopants distribute inside the host oxide and modulate the bulk electronic structure to boost electrical conduction. As a result, the dual‐doped Ni, Zn CoO nanorods achieve current densities of 10 and 20 mA cm −2 at overpotentials of, respectively, 53 and 79 mV. This outperforms reported state‐of‐the‐art metal oxide, metal oxide/metal, metal sulfide, and metal phosphide catalysts.

Ling, Tao↗

NASA NTRS1985

Size and shape dependence of CO adsorption sites on sapphire supported Fe microcrystals

The surface structure and stoichiometry of alumina substrates, as well as the size, growth characteristics, and shape of Fe deposits on sapphire substrates have been investigated by low energy electron diffraction (LEED), Auger electron spectroscopy, electron energy loss spectroscopy, and X-ray photoemission spectroscopy (XPS), as well as work function measurements, in conjunction with transition electron microscopy observations. The substrates used in this work were the following: (1) new, clean Al2O3; (2) same surface amorphized by Ar ion bombardment; (3) same surface regenerated by 650 C annealing; (4) amorphous alumina films on Ta slab; and (5) polycrystal alumina films, obtained by heating amorphous films to 600 C. Substrate cleaning was found to be most effective in producing a reproducible surface upon oxygen RF plasma treatment. The Fe nucleation and growth process was found to depend strongly on the type of substrate surface and deposition conditions. Ar ion bombardment under beam flooding, and subsequent annealing at 650 C was found an effective means to restore the original Al2O3 (1102) surface for renewed Fe deposition.

Papageorgopoulos, C.↗

DOE OSTI2017

X-Ray Reflectometry of DMPS Monolayers on a Water Substrate

The molecular structure of dimyristoyl phosphatidylserine (DMPS) monolayers on a water substrate in different phase states has been investigated by X-ray reflectometry with a photon energy of ~8 keV. According to the experimental data, the transition from a two-dimensional expanded liquid state to a solid gel state (liquid crystal) accompanied by the ordering of the hydrocarbon tails C{sub 14}H{sub 27} of the DMPS molecule occurs in the monolayer as the surface pressure rises. The monolayer thickness is 20 ± 3 and 28 ± 2 Å in the liquid and solid phases, respectively, with the deflection angle of the molecular tail axis from the normal to the surface in the gel phase being 26° ± 8°. At least a twofold decrease in the degree of hydration of the polar lipid groups also occurs under two-dimensional monolayer compression. The reflectometry data have been analyzed using two approaches: under the assumption about the presence of two layers with different electron densities in the monolayer and without any assumptions about the transverse surface structure. Both approaches demonstrate satisfactory agreement between themselves in describing the experimental results.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

NASA NTRS1989

Asymptotic/numerical analysis of supersonic propeller noise

An asymptotic analysis based on the Mach surface structure of the field of a supersonic helical source distribution is applied to predict thickness and loading noise radiated by high speed propeller blades. The theory utilizes an integral representation of the Ffowcs-Williams Hawkings equation in a fully linearized form. The asymptotic results are used for chordwise strips of the blade, while required spanwise integrations are performed numerically. The form of the analysis enables predicted waveforms to be interpreted in terms of Mach surface propagation. A computer code developed to implement the theory is described and found to yield results in close agreement with more exact computations.

Myers, M. K.↗

DOE OSTI2014

Surface modification of structural materials by low-energy high-current pulsed electron beam treatment

Microstructure formation in surface layers of pure titanium and ferritic-martensitic steel subjected to electron beam treatment is studied. It is shown that low energy high-current pulsed electron beam irradiation leads to the martensite structure within the surface layer of pure titanium. Contrary, the columnar ferrite grains grow during solidification of ferritic-martensitic steel. The effect of electron beam energy density on the surface morphology and microstructure of the irradiated metals is demonstrated.

36 MATERIALS SCIENCE↗

NASA NTRS1987

The spectroscopic chemical and photophysical properties of Martian soils and their analogs

The program of research outlined should advance significantly the understanding of the spectral signal of montmorillonites in general and the variations produced in it by structural and surface ferric and ferrous iron and interlayer water as a function of several environmental conditions that are different between Earth and Mars. In addition, an extensive data base was collected providing spectral characterization of several features (iron, both surface and structural, OH-groups, both structural and from adsorbed water and O(-) centers) that are known, or thought to be, influential in directing the surface activity of these important materials. With this data base with which to assess the results of the Viking labeled release simulation studies, it should be possible to gain important insights into the mechanisms of surface reactivity for this important chemical reaction. The results to be gained from these studies will provide a significant body of ground base truth from which to assess: the presence of smectite clays on Mars; the mineralogical form in which the Martian iron is bound; establish upper limits on the present surface water content of Martian soils; perhaps provide insights on the Martian surface radiation history; and to make strong predictions about the nature of surface chemistry on Mars, if iron-bearing clays are a significant component of the surface mineralogical assemblage.

Coyne, Lelia M.↗

DOE OSTI2018

Freestanding Organic Charge-Transfer Conformal Electronics

Wearable conformal electronics are essential components for next-generation humanlike sensing devices that can accurately respond to external stimuli in nonplanar and dynamic surfaces. However, to explore this potential, it is indispensable to achieve the desired level of deformability and charge-transport mobility in strain-accommodating soft semiconductors. In this report we show pseudo-two-dimensional freestanding conjugated polymer heterojunction nanosheets integrated into substrate-free conformal electronics owing to their exceptional crystalline controlled charge transport and high level of mechanical strength. These freestanding and mechanical robust polymer nanosheets can be adapted into a variety of artificial structured surfaces such as fibers, squares, circles, etc., which produce large-area stretchable conformal charge-transfer sensors for real-time static and dynamic monitoring.

36 MATERIALS SCIENCE↗

NASA NTRS2002

Tetragonal Lysozyme Nucleation and Crystal Growth: The Role of the Solution Phase

Lysozyme, and most particularly the tetragonal form of the protein, has become the default standard protein for use in macromolecule crystal nucleation and growth studies. There is a substantial body of experimental evidence, from this and other laboratories, that strongly suggests this proteins crystal nucleation and growth is by addition of associated species that are preformed by standard reversible concentration-driven self association processes in the bulk solution. The evidence includes high resolution AFM studies of the surface packing and of growth unit size at incorporation, fluorescence resonance energy transfer measurements of intermolecular distances in dilute solution, dialysis kinetics, and modeling of the growth rate data. We have developed a selfassociation model for the proteins crystal nucleation and growth. The model accounts for the obtained crystal symmetry, explains the observed surface structures, and shows the importance of the symmetry obtained by self-association in solution to the process as a whole. Further, it indicates that nucleation and crystal growth are not distinct mechanistically, but identical, with the primary difference being the probability that the particle will continue to grow or dissolve. This model also offers a possible mechanism for fluid flow effects on the growth process and how microgravity may affect it. While a single lysozyme molecule is relatively small (M.W. = 14,400), a structured octamer in the 4(sub 3) helix configuration (the proposed average sized growth unit) would have a M.W. = 115,000 and dimensions of 5.6 x 5.6 x 7.6 nm. Direct AFM measurements of growth unit incorporation indicate that units as wide as 11.2 nm and as long as 11.4 nm commonly attach to the crystal. These measurements were made at approximately saturation conditions, and they reflect the sizes of species that both added or desorbed from the crystal surface. The larger and less isotropic the associated species the more likely that it will be oriented to some degree in a flowing boundary layer, even at the low flow velocities measured about macromolecule crystals. Flow-driven effects resulting in misorientation upon addition to and incorporation into the crystal need only be a small fraction of a percentage to significantly affect the resulting crystal. One Earth, concentration gradient driven flow will maintain a high interfacial concentration, i.e., a high level (essentially that of the bulk solution) of solute association at the interface and higher growth rate. Higher growth rates mean an increased probability that misaligned growth units are trapped by subsequent growth layers before they can be desorbed and try again, or that the desorbing species will be smaller than the adsorbing species. In microgravity the extended diffusive boundary layer will lower the interfacial concentration. This results in a net dissociation of aggregated species that diffuse in from the bulk solution, i.e., smaller associated species, which are more likely able to make multiple attempts to correctly bind, yielding higher quality crystals.

Pusey, Marc L.↗

DOE OSTI2016

Effect of annealing ambient on anisotropic retraction of film edges during solid-state dewetting of thin single crystal films

During solid-state dewetting of thin single crystal films, film edges retract at a rate that is strongly dependent on their crystallographic orientations. Edges with kinetically stable in-plane orientations remain straight as they retract, while those with other in-plane orientations develop in-plane facets as they retract. Kinetically stable edges have retraction rates that are lower than edges with other orientations and thus determine the shape of the natural holes that form during solid-state dewetting. In this paper, measurements of the retraction rates of kinetically stable edges for single crystal (110) and (100) Ni films on MgO are presented. Relative retraction rates of kinetically stable edges with different crystallographic orientations are observed to change under different annealing conditions, and this accordingly changes the initial shapes of growing holes. The surfaces of (110) and (100) films were also characterized using low energy electron diffraction, and different surface reconstructions were observed under different ambient conditions. The observed surface structures were found to correlate with the observed changes in the relative retraction rates of the kinetically stable edges.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗