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At least 91 records · Page 5

PARTICULATE STUDY OF NEG PUMPS IRRADIATED IN THE CEBAF TUNNEL

Non-evaporable getter (NEG) pumps are being used to maintain ultra-high vacuum in the beamline of superconducting radio-frequency (SRF) accelerators, such as the Continuous Electron Beam Accelerator Facility (CEBAF) at Jefferson Lab. Because of the sensitivity of the performance of SRF cavities to particulate contamination, it is important to evaluate the integrity of the NEG material after exposure to high radiation during beam operation. The particulate from two NEG pumps based on ZAO® getter alloy was measured with a particle counter in a clean-room. The pumps were assembled onto a hermetically sealed setup which was placed in the CEBAF tunnel. The setup was exposed to 24 h beam operation for ~ 230 days. The total gamma-rays dose measured on the test setup was ~ 1.6 Mrad. The total neutron dose measured at ~ 75 cm of the test setup was ~ 11 krad. The particulate count from the two pumps was measured again in the clean-room after irradiation. Whereas an increase of particulate counts was measured, compared to before irradiation, subsequent measurements indicate the absence of systematically loose particulate. The pumping speed of one of the irradiated pumps was also measured to be consistent with that of a non-irradiated one, corroborating the absence of significant damage to the ZAO® NEG material due to irradiation.

Ciovati, G. [Thomas Jefferson National Accelerator↗

PARTICULATE STUDY OF NEG PUMPS IRRADIATED IN THE CEBAF TUNNEL

Non-evaporable getter (NEG) pumps are being used to maintain ultra-high vacuum in the beamline of superconducting radio-frequency (SRF) accelerators, such as the Continuous Electron Beam Accelerator Facility (CEBAF) at Jefferson Lab. Because of the sensitivity of the performance of SRF cavities to particulate contamination, it is important to evaluate the integrity of the NEG material after exposure to high radiation during beam operation. The particulate from two NEG pumps based on ZAO® getter alloy was measured with a particle counter in a clean-room. The pumps were assembled onto a hermetically sealed setup which was placed in the CEBAF tunnel. The setup was exposed to 24 h beam operation for ~ 230 days. The total gamma-rays dose measured on the test setup was ~ 1.6 Mrad. The total neutron dose measured at ~ 75 cm of the test setup was ~ 11 krad. The particulate count from the two pumps was measured again in the clean-room after irradiation. Whereas an increase of particulate counts was measured, compared to before irradiation, subsequent measurements indicate the absence of systematically loose particulate. The pumping speed of one of the irradiated pumps was also measured to be consistent with that of a non-irradiated one, corroborating the absence of significant damage to the ZAO® NEG material due to irradiation.

Ciovati, Gianluigi [Thomas Jefferson National Acce↗

Encapsulating High–Temperature Superconducting Twisted van der Waals Heterostructures Blocks Detrimental Effects of Disorder

High-temperature cuprate superconductors based van der Waals (vdW) heterostructures hold high technological promise. One of the obstacles hindering their progress is the detrimental effect of disorder on the properties of the vdW-devices-based Josephson junctions (JJs). Here, a new method of fabricating twisted vdW heterostructures made of Bi 2 Sr 2 CuCa 2 O 8+δ , crucially improving the JJ characteristics and pushing them up to those of the intrinsic JJs in bulk samples, is reported. The method combines cryogenic stacking using a solvent-free stencil mask technique and covering the interface by insulating hexagonal boron nitride crystals. Despite the high-vacuum condition down to 10 –6 mbar in the evaporation chamber, the interface appears to be protected from water molecules during the in situ metal deposition only when fully encapsulated. Comparing the current-voltage curves of encapsulated and unencapsulated interfaces, it is revealed that the encapsulated interfaces' characteristics are crucially improved, so that the corresponding JJs demonstrate high critical currents and sharpness of the superconducting transition comparable to those of the intrinsic JJs. Finally, it is shown that the encapsulated heterostructures are more stable over time.

2D materials↗

Design of Ionization Profile Monitors at the Integrable Optics Test Accelerator Facility at Fermilab

The Integrable Optics Test Accelerator (IOTA) at Fermilab is transitioning from an electron beam facility to a proton beam facility for studies in nonlinear accelerator optics and space-charge dominated proton beams. This project involves the commissioning and fabrication of Ionization Profile Monitors (IPMs) to enable beam profile measurements at IOTA. In general, IPMs work on principle of residual gas ionization by the beam to generate beam profile. This work focuses on a mechanical design that leverages a controlled injection of noble gases, primarily Argon, as the ultra-high vacuum of the IOTA ring provides insufficient residual gas for ionization. Efforts to understand vacuum integration to ensure compatibility with the storage ring environment, the integration of real-time data acquisition systems and the commissioning of the IPMs will be discussed. This project provides a versatile diagnostic tool, supporting IOTA’s role as a testbed for larger-scale accelerator facilities and contributing to the broader understanding of beam physics in high-intensity, high-space-charge regimes.

Mwaniki, M. W. [IIT, Chicago] (ORCID:0000000169057↗

SIREN: Scaling Ion-Traps by REquiring iNnovative Heterogenous Integration

The SIREN (Scaling Ion Traps by Requiring iNnovative heterogenous integration) project explores the feasibility of heterogeneous integration (HI) as a transformative approach to scaling ion traps, a critical technology for advancing quantum computers and atomic clocks. Traditional ion trap architectures face significant challenges in scalability due to limitations in optical access, fabrication techniques, and material constraints. SIREN addresses these challenges by leveraging HI, which combines different materials and fabrication processes to create more complex and efficient ion trap structures. HI integrated structures can be manufactured without compromising the process to maintain compatibility to ion traps. This project focuses on integrating a separately fabricated waveguide with a fully functional ion trap. The respective alignment between the pieces needs to be accurate to less than 2 µm to ensure that the light from the waveguide can overlap with the trapping region. The fine alignment must also be maintained through an ultra-high vacuum bake, a critical step in preparing an ion trap experiment. The project's outcomes suggest that heterogeneous integration is a promising pathway for overcoming current scalability barriers, paving the way for the next generation of quantum technologies. SIREN's findings contribute significantly to the field, offering a scalable solution that could accelerate the development of practical quantum computers and highly accurate atomic clocks.

42 ENGINEERING↗

Retrieving images from tarnished daguerreotypes using X-ray fluorescence imaging with an X-ray micro beam with tunable energy

We report recent observations using a synchrotron X-ray micro-beam to retrieve images from tarnished 19th century daguerreotypes. We confirm that high quality image can always be retrieved from tarnished plates using Hg L α XRF as long as the bulk of the image particles and their distribution remains intact. We also report results from using tunable tender X-rays (2 - 7 keV) to conduct imaging in high vacuum at energy above the Ag L-edge and the Hg M-edge, extracting images using Ag L α and Hg M α , respectively among others (e.g., S to track corrosion). Images obtained with the surface sensitive total electron yield (TEY) and the bulk sensitive fluorescence yield (FLY) as well as corresponding micro-XANES are reported. Flux tolerance to high intensity X-beam is also explored. These results and their implications for cultural heritage research are discussed.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Microstructure and Elevated Temperature Flexure Testing of Tungsten Produced by Electron Beam Additive Manufacturing

Abstract Due to their superior high-temperature thermomechanical capabilities, sputter erosion durability, and excellent resistance to hydrogen isotopes, tungsten materials have garnered significant interest in fusion nuclear applications. However, low room-temperature ductility and complex machining strategies present significant challenges for traditional fabrication. Electron beam powder bed fusion (EB-PBF) shows promise in manufacturing pure tungsten via high thermal energy input, elevated build temperature, and a tightly controlled high-vacuum environment. This work explores the process, structure, and property relationship of pure tungsten fabricated by EB-PBF, where 99.8% relative density was achieved with reduced cracking by isolating the build substrate and optimizing the print parameter suite. Optical and electron imaging revealed that the microstructure contained equiaxed grains along the build direction, with subgrains present in all inspected grains. Flexural testing at ambient and elevated temperatures demonstrated high ductility at 900°C and flexural strength of 470 MPa at room temperature of additively manufactured tungsten.

Zhang, Haozhi↗

Modifying magnetic properties of MnBi with carbon: an experimental and theoretical study

MnBi and MnBi-based materials have been investigated as prospective rare-earth-free permanent magnets with moderate energy product. One of the main issues with MnBi synthesis is the presence of residual Bi in the sample which reduces the net magnetization. Here, we have found that MnBi synthesized in the presence of carbon substantially reduces the amount of residual Bi, improving its saturation magnetization. We have synthesized Mn 55 Bi 45 and Mn 55 Bi 45 C x samples using arc melting and high-vacuum annealing. The room temperature x-ray diffraction patterns indicate that both Mn 55 Bi 45 and Mn 55 Bi 45 C x crystallize in the hexagonal NiAs-type structure. The Rietveld analysis of the x-ray patterns shows that the amount of residual Bi reduces from 16 wt.% for Mn 55 Bi 45 to 5 wt.% for Mn 55 Bi 45 C x . The high-field (3 T) magnetizations measured at room temperature are 61 emu g –1 and 66 emu g –1 for Mn 55 Bi 45 and Mn 55 Bi 45 C x , respectively. To understand the role of C in enhancing the magnetization of MnBi, we carried out the first-principles calculations of both stoichiometric and nonstoichiometric MnBi alloys, which suggests that the increase of magnetization in Mn 55 Bi 45 C x may be due to the coating of MnBi grains with C.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Robotic four-dimensional pixel assembly of van der Waals solids

Van der Waals (vdW) solids can be engineered with atomically precise vertical composition through the assembly of layered two-dimensional materials. However, the artisanal assembly of structures from micromechanically exfoliated flakes is not compatible with scalable and rapid manufacturing. Further engineering of vdW solids requires precisely designed and controlled composition over all three spatial dimensions and interlayer rotation. Here, we report a robotic four-dimensional pixel assembly method for manufacturing vdW solids with unprecedented speed, deliberate design, large area and angle control. We used the robotic assembly of prepatterned 'pixels' made from atomically thin two-dimensional components. Wafer-scale two-dimensional material films were grown, patterned through a clean, contact-free process and assembled using engineered adhesive stamps actuated by a high-vacuum robot. We fabricated vdW solids with up to 80 individual layers, consisting of 100 x 100 μm 2 areas with predesigned patterned shapes, laterally/vertically programmed composition and controlled interlayer angle. This enabled efficient optical spectroscopic assays of the vdW solids, revealing new excitonic and absorbance layer dependencies in MoS 2 . Furthermore, we fabricated twisted $N$-layer assemblies, where we observed atomic reconstruction of twisted four-layer WS 2 at high interlayer twist angles of >= 4°. In conclusion, our method enables the rapid manufacturing of atomically resolved quantum materials, which could help realize the full potential of vdW heterostructures as a platform for novel physics and advanced electronic technologies.

42 ENGINEERING↗

Evidence of Inverse Hall-Petch Behavior and Low Friction and Wear in High Entropy Alloys

We present evidence of inverse Hall-Petch behavior for a single-phase high entropy alloy (CoCrFeMnNi) in ultra-high vacuum and show that it is associated with low friction coefficients (~0.3). Grain size measurements by STEM validate a recently proposed dynamic amorphization model that accurately predicts grain size-dependent shear strength in the inverse Hall-Petch regime. Wear rates in the initially soft (coarse grained) material were shown to be remarkably low (~10 –6 mm 3 /N-m), the lowest for any HEA tested in an inert environment where oxidation and the formation of mixed metal-oxide films is mitigated. The combined high wear resistance and low friction are linked to the formation of an ultra-nanocrystalline near-surface layer. The dynamic amorphization model was also used to predict an average high angle grain boundary energy (0.87 J/m 2 ). This value was used to explain cavitation-induced nanoporosity found in the highly deformed surface layer, a phenomenon that has been linked to superplasticity.

36 MATERIALS SCIENCE↗

Side-by-side evaluation of the outgassing rate and ultimate pressure achieved inside tubes made of low-carbon and stainless steel

The hydrogen outgassing rate of a vacuum chamber made of AISI 1020 low-carbon steel was found to be notably smaller than a similar chamber made of AISI 316L stainless steel following heat treatment at 150 °C. When the chambers were baked at 400 °C, the outgassing rate of the 1020 low-carbon steel chamber was approximately 2000 times smaller than that of the 316L stainless-steel chamber. After quantifying hydrogen outgassing rates, vacuum chambers made of 1020 low-carbon steel and 316L stainless steel were heated for a prescribed duration and then pumped with an ion pump and nonevaporable getter pump to reach “ultimate pressure.” The 1020 low-carbon steel chamber reached lower pressures than the 316L stainless-steel chamber. Monte Carlo simulation predictions using the measured hydrogen outgassing rates are in good agreement with the ultimate pressure measurements. Finally, our measurements indicate that low-carbon steel can provide pressures within the extreme high vacuum range (<7.5 × 10 -13 Torr) if care is taken to minimize the surface area contribution from stainless steel.

36 MATERIALS SCIENCE↗

Trace Chemical Detection Using Intercalated MXenes as a Signal Enhancing Substrate in Optical Probes

MXenes are 2D materials composed of layered transition metal nitrides or carbides. These materials are synthesized by HF exfoliation from MAX phases (Ti{sub 3}AlC{sub 2}). The 2D nanomaterial was synthesized by the removal of the 'A' element, resulting in a Mxene product (Ti{sub 3}C{sub 2}). MXenes have the general formula M{sub n+1}X{sub n}T{sub x}, where M is an early transition metal, X is Carbon and/or Nitrogen, and T accounts for surface terminated functional groups such as Fluoride, hydroxyl, and oxygen. These materials have very unique properties, similar to graphene, that allows them to be applied in a variety of trace detection techniques including surface-enhanced Raman spectroscopy (SERS). MXenes have also been demonstrated to selectively uptake uranyl ion, UO{sub 2}{sup 2+}. If this property can be combined with SERS or fluorescence detection, it may be possible to use MXenes as the basis for an alternative method to kinetic phosphorescence analysis (KPA) for trace uranyl measurements. Objectives: To confirm that MXene Nano materials are suitable substrates for SERS and sensor development by enhancing Raman signaling. To determine if certain MXene preparation methods yield materials that are more suitable for trace sensing methods. To determine uranyl uptake properties of these MXene materials and test them for analytical signals. Sample Preparation: Preparation of Ti{sub 3}C{sub 2}MXene (at FSU). MXenes were prepared by etching Al from Ti{sub 3}AlC{sub 2} (MAX phase)material. Two etching techniques yield different MXene products: LiF/HCl: Milder reaction, larger MXene flakes. HF: Harsher reaction, smaller flakes, larger layer separation. Products washed to remove etchant, vacuum filtered, and dried. Dried MXene flakes are air-stable. Film preparation for sensor testing (at SRNL): Suspend powder in diH{sub 2}O, purge with Ar, sonicate for 30 min. Centrifuge and collect supernate with suspended particles. Observed LiF-etched Mxene yielded a higher density of particles and darker collected solution. Drop-cast (4 ml) supernate onto slides and dried with Ar. For Rhodamine B (RhB) testing, drop-cast 4 ml drops onto Mxene spots and dried with Ar. Scanning Electron Microscopy conditions: 10 kV Beam energy, high vacuum; Working distance of 8 mm; beam penetration depth appx. 4 microns, beam spot size appx. 2 nanometers. Results: Detection of aluminum correlates with bright spots on image. Presence of aluminum shows that LiF/HCl etching was less thorough than HF etching. Trace Cl detection in LiF images suggests incomplete rinsing. HF has smaller feature size, more layer structure, and increased homogeneity, consistent with expectations. Macroscopic Raman spectroscopy measurements: 532 nm excitation, ∼50 mW with a ∼100 micron spot size (InPhotonics RPB probe). Kaiser Optical Holospec f/1.8 spectrometer with cooled (-60 deg.C) Andor iDus OE420 CCD. LiF 1x supernate showed good signal for trace measurements of Rhodamine B. HF and 1/4x LiF supernates showed little Mxene or Rhodamine B signal. Low deposition densities led to excess background signal from glass slides. For LiF film, response is linear with Rhodamine B concentration over range tested. Will retest with Raman microscope (∼1 micron spot size) to characterize SERS of more dilute LiF and HF etched Mxenes. Conclusions: The LiF etched material was more suitable for macroscopic SERS measurements because it was more concentrated, resulting in a thicker film than the HF etched Mxene and diluted LiF sample. However, the other materials may give greater SERS enhancements, which we hope to determine from measurements with the Raman microscope. From characterization with SEM we concluded that the HF etched Mxene is more uniform/homogenous and has smaller particle size than the LiF etched Mxene. There is still aluminum present in both samples indicating that etching wasn't complete, but the removal of the aluminum was more efficient in the HF method. Path Forward: Observe SERS with Raman microscopy, to obtain better signals for the more diluted samples and be able to compare enhancement effects for the different MXenes. Characterize uranyl sorption into MXene films and test Raman and fluorescence signals. Revisit the etching conditions to improve removal of aluminum. FSU and SRNL will continue to collaborate to create and characterize different Mxene materials and test their usefulness for sensor applications.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Removal of deuterium retained in boron powder by oxygen or high-temperature bakeout

Fuel retention in dust accumulated in fusion devices is a potential operational hazard. Boronization is one of the leading wall-conditioning candidates for future fusion devices. Fuel retention characteristics of boron dust must be studied to accurately understand the potential hazards of boron dust in fusion devices. We evaluated the retention of deuterium (D) in commercially available boron powder as a proxy for tritium retention in boron dust. Diffuse reflectance infrared Fourier transform spectroscopy revealed that boron powder between 300 and 500 K exposed to neutral hydrogen (H 2 ) gas retains H via B-H bonding. We utilized D 2 exposures of 17,400 L on the boron powder, which led to retention on the order of 0.5 g D per 100 kg B or 1.2 g D per m 2 B, as estimated from temperature programmed desorption measurements. We evaluated how powder bakeouts under ultra-high vacuum (UHV), or in an oxygen (O 2 ) or H 2 gas backfilled environment can remove the retained fuel. Bakeouts below 523 K under UHV exhibited poor D removal, promoting recapture of D 2 present as background gas in the chamber. Higher temperature bakeouts led to the removal of over 80% of the retained D within 3 days (623 K) or 1 h (723 K). Bakeouts at 423 K under an O 2 gas environment removed ∼150% more retained D from the boron powder, when compared to bakeouts conducted under UHV. These results suggest that efficient fuel removal from boron dust can be achieved by high-temperature bakeout (>623 K) or by bakeouts at lower temperature (423 K) under an O 2 environment.

Bakeout↗

Eliminating Signal Bias Caused by Vacuum System Backstreaming in the Diagnostic Residual Gas Analyzer of ITER

In fusion neutral gas analysis, such as with the Diagnostic Residual Gas Analyzer (DRGA) for ITER, the primary measurement range of interest comprises the low-amu species (1 to 6), especially deuterium and helium. The challenge in successfully obtaining accurate measurements is two-fold. First, the sensitivity of the method must be sufficient to resolve trace amounts accurately; typically, one percent or less. Second, the gas signal from the fusion processes must be free of bias caused by the latent presence (from system outgassing and/or vacuum backstreaming) of these gases to enable accurate interpretation of the measured signal. This latter criterion can be problematic for the lightest gases since there is a propensity for some fraction of the pumped gas load to undergo a phenomenon known as backstreaming. This behavior is manifested in pumping systems for gas properties related to relative atomic weight (lightest) and size (smallest). Backstreaming results in a significant amount of the pumped gas undertaking a reverse flow and re-entering the measurement region; thus, contaminating the forward, real-time measurement. To fully eliminate this adverse effect, a conductance-limiting device – or orifice – has been installed in the high-vacuum pumping system of the present ITER DRGA prototype. The system was already equipped with a secondary turbomolecular pump (TMP), but with limited effectiveness against backstreaming in the inter-pump volume (IPV). This orifice is placed within the suction inlet coupling of the secondary TMP, which is downstream of the IPV. Its objective is to eliminate the backstreaming phenomenon by increasing the back pressure in the IPV. However, the orifice sizing must take into consideration other factors, such as the diagnostic measurement objectives. For example, in the ITER DRGA, one of the measurement requirements is a dynamic response time of ~1s. Fortunately, an added benefit of the pumping restriction created by the orifice is that the upstream pressure increase is beneficial for the DRGA’s optical gas analysis (OGA) sensors. These sensors are attached to the IPV in the present design. The glow discharges, when used as an OGA light source, will typically have a brighter light emission with increasing plasma cell pressure. In addition to the fusion machine research sector, there are other potential applications of this pumping technique where the monitoring of lighter gas concentrations is essential, such as the photolithography process for the semiconductor fabrication of integrated circuits. This presentation will describe the vacuum system used to demonstrate a process to eliminate backstreaming as well as show test results to verify the accomplishment of this critical objective.

Marcus, Chris↗

Tensile creep properties of NbTaTi and NbTaTiV refractory complex concentrated alloys

Refractory complex concentrated alloys (RCCAs) have emerged as promising candidates for high-temperature structural applications due to their high melting points and potential for exceptional strength, whereas their creep properties remain relatively underexplored. Here, we investigate the tensile creep behavior of NbTaTi and NbTaTiV in high vacuum to elucidate the influence of alloying on creep mechanisms. NbTaTiV exhibits higher creep resistance than NbTaTi, which is attributed to V-induced edge-dislocation-glide-controlled deformation. Microstructural analysis reveals the formation of Ti- and interstitial impurity-rich secondary phases during creep, which enhances the creep resistance without significant embrittlement. Stress exponents (∼3) and activation energies (∼those for vacancy diffusion) align with thermally activated dislocation glide-controlled creep. Despite NbTaTiV surpassing Ni-based superalloys in yield strength at elevated temperatures, its single-phase BCC structure limits creep resistance under engineering-relevant conditions, highlighting the necessity of deliberate secondary phase design to achieve competitive high-temperature performance.

Complex concentrated alloys↗

Porous Cu 2 BaSn(S,Se) 4 Film as a Photocathode Using Non-Toxic Solvent and a Ball-Milling Approach

Cu 2 BaSn(S,Se) 4 (CBTSSe) has been proposed as an alternative to Cu 2 ZnSn(S,Se) 4 (CZTSSe) for solar absorbers due to its reduced propensity for antisite disorder and band tailing, while maintaining the desirable characteristics of band gap tunability, earth-abundance, and low toxicity constituent metals. However, current film deposition methods require high-vacuum conditions or toxic solvents, less desirable features for prospective large-scale production. Here, ball milling is demonstrated as a route towards a scalable processing method for CBTSSe, using a precursor ink consisting of common elements Cu 2 S, BaS, Sn, and S in low-toxicity ethanol. A final film with a thickness and average grain size on the order of 1 µm was synthesized with a band gap of 1.56 eV, corresponding to a Cu 2 BaSnS 4-x Se x (x ≈ 3) stoichiometry. A porous CBTSSe photocathode with Pt/TiO 2 /CdS overlayers was fabricated to demonstrate the photocurrent-generating capabilities of the film, yielding current densities of as high as 5.54 mA/cm 2 at 0 V versus a reversible hydrogen electrode (V/RHE) .

14 SOLAR ENERGY↗

GUI Control System for the Mu2e Electrostatic Septum High Voltage at Fermilab

The Mu2e Experiment has stringent beam structure requirements; namely, its proton bunches with a time structure of 1.7 $\mu$s in the Fermilab Delivery Ring. This beam structure will be delivered using the Fermilab 8-GeV Booster, the 8-GeV Recycler Ring, and the Delivery Ring. The 1.7-$\mu$s period of the Delivery Ring will generate the required beam structure by means of a third order resonant extraction system operating on a single circulating bunch. The electrostatic septum (ESS) for this system is particularly challenging, requiring mechanical precision in a ultra high vacuum of 1 x 10$^-8$ Torr to generate 100 kV across 15 mm. This paper describes a graphical user interface that has been developed to automate the conditioning and commissioning process for the electrostatic septa. It is based on an interface to the Fermilab ACNET system using the ACSys Python Data Pool Manager (DPM) Client produced and maintained by Fermilab Accelerator Controls. Network interfacing between data pool managers made by the application and ACNET devices introduce an inherent (approximately 1 s) latency in throughput of the readouts. This delay is utilized to process and graph incoming data events of devices crucial to conditioning of a electrostatic septum (ESS). 'Ramping' and 'Monitoring' modes adjust settings of the power supply based on internal logic to efficaciously increase and maintain the high voltage (HV) in the ESS, easing the voltage setting on incidence of sparking or other possibly damaging events. A timestamped log file is produced as the application runs.

43 PARTICLE ACCELERATORS↗

The stability of Cl-, Br-, and I-passivated Si(100)-(2 × 1) in ambient environments for atomically-precise pattern preservation

Abstract Atomic precision advanced manufacturing (APAM) leverages the highly reactive nature of Si dangling bonds relative to H- or Cl-passivated Si to selectively adsorb precursor molecules into lithographically defined areas with sub-nanometer resolution. Due to the high reactivity of dangling bonds, this process is confined to ultra-high vacuum (UHV) environments, which currently limits its commercialization and broad-based appeal. In this work, we explore the use of halogen adatoms to preserve APAM-derived lithographic patterns outside of UHV to enable facile transfer into real-world commercial processes. Specifically, we examine the stability of H-, Cl-, Br-, and I-passivated Si(100) in inert N 2 and ambient environments. Characterization with scanning tunneling microscopy and x-ray photoelectron spectroscopy (XPS) confirmed that each of the fully passivated surfaces were resistant to oxidation in 1 atm of N 2 for up to 44 h. Varying levels of surface degradation and contamination were observed upon exposure to the laboratory ambient environment. Characterization by ex situ XPS after ambient exposures ranging from 15 min to 8 h indicated the Br– and I–passivated Si surfaces were highly resistant to degradation, while Cl–passivated Si showed signs of oxidation within minutes of ambient exposure. As a proof-of-principle demonstration of pattern preservation, a H–passivated Si sample patterned and passivated with independent Cl, Br, I, and bare Si regions was shown to maintain its integrity in all but the bare Si region post-exposure to an N 2 environment. The successful demonstration of the preservation of APAM patterns outside of UHV environments opens new possibilities for transporting atomically-precise devices outside of UHV for integrating with non-UHV processes, such as other chemistries and commercial semiconductor device processes.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗