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At least 91 records · Page 5

Ion beam sputter etching and deposition of fluoropolymers

Fluoropolymer etching and deposition techniques including thermal evaporation, RF sputtering, plasma polymerization, and ion beam sputtering are reviewed. Etching and deposition mechanisms and material characteristics are discussed. Ion beam sputter etch rates for polytetrafluoroethylene (PTFE) were determined as a function of ion energy, current density and ion beam power density. Peel strengths were measured for epoxy bonds to various ion beam sputtered fluoropolymers. Coefficients of static and dynamic friction were measured for fluoropolymers deposited from ion bombarded PTFE.

Banks, B. A.↗

Nitriding of titanium and titanium: 8 percent aluminum, 1 percent molybdenum, 1 percent vanadium alloy with an ion-beam source

Titanium and Ti-8Al-1Mo-1V alloy were nitrided with an ion-beam source of nitrogen or argon and nitrogen at a total pressure of 2 x 10 to the minus 4th power to 10 x 10 to the minus 4th power torr. The treated surface was characterized by surface profilometry, X-ray diffractometry, Auger electron spectroscopy and microhardness measurements. The tetragonal Ti2N phase formed in pure titanium and Ti-8Al-1Mo-1V alloy with traces of AlN in the alloy. Two opposite processes competed during the ion-beam-nitriding process: (1) formation of nitrides in the surface layer and (2) sputtering of the nitrided layers by the ion beam. The highest surface hardnesses, about 500 kg/sq mm in titanium and 800 kg/sq mm in Ti-8Al-1Mo-1V, were obtained by ion nitriding with an ion beam of pure nitrogen at 4.2 x 10 to the minus 4th power torr at a beam voltage of 1000 V.

Gill, A.↗

Surface modification using low energy ground state ion beams

A method of effecting modifications at the surfaces of materials using low energy ion beams of known quantum state, purity, flux, and energy is presented. The ion beam is obtained by bombarding ion-generating molecules with electrons which are also at low energy. The electrons used to bombard the ion generating molecules are separated from the ions thus obtained and the ion beam is directed at the material surface to be modified. Depending on the type of ion generating molecules used, different ions can be obtained for different types of surface modifications such as oxidation and diamond film formation. One area of application is in the manufacture of semiconductor devices from semiconductor wafers.

Chutjian, Ara↗

Ion Beam Textured and Coated Surfaces Experiment (IBEX)

Ion beam textured and commercial materials suitable for use in space power systems were flown in low Earth orbit on the Long Duration Exposure Facility (LDEF) for 5.8 years. Because of their location on LDEF (98 deg from the ram direction), the 36 materials were primarily exposed to vacuum ultraviolet radiation, thermal cycling, the vacuum of space, the micrometeoroid environment, and grazing incidence atomic oxygen. Measurements of solar absorptance and thermal emittance (pre- and post-flight) showed no changes for almost all of the materials, except for the S-13G and Kapton and coated Kapton samples. The optical property stability of ion beam textured surfaces and most other surfaces indicates that they are functionally durable to the synergistic rigors of the space environment.

Mirtich, Michael J.↗

Broad beam ion source operation with four common gases

A Kaufman-type broad beam ion source, used for sputtering and etching purposes, has been operated with Ar, Kr, O2 and N2 gas inputs over a wide range of beam energies (200-1200 eV) and gas flow rates (1-10 sccm). The maximum ion beam current density for each gas saturates at about 2.5 mA/sq cm as gas flow is increased. The discharge threshold voltage necessary to produce a beam and the beam efficiency (beam current/molecular current), however, varied considerably. Kr had the lowest threshold and highest efficiency, Ar next, then N2 and O2. The ion beam current varied only weakly with beam energy for low gas flow rates, but showed a factor of two increase when the gas flow was higher.

Pak, S.↗

Low-frequency electromagnetic waves driven by gyrotropic gyrating ion beams

The origin of left- and right-hand-polarized low-frequency waves in space plasmas is analyzed. It has been shown that a gyrotropic gyrating ion beam, a ring in velocity space, can excite electromagnetic modes in the plasma near the beam gyrofrequency. It excites left-hand-polarized shear Alfven waves and their harmonics via the coupling of Alfven modes with the beam modes. It can also excite right-hand-polarized fast-mode magnetosonic waves and their harmonics as well. The excitation is possible for beam ions heavier than the plasma ions. The growth rate varies as one-third power of the beam density and decreases with the angle of wave propagation with respect to the ambient magnetic field. The nonlocality has a stabilizing effect on the instability. The predicted values of the wave frequencies compare reasonably well with those observed in satellite data.

Sharma, O. P.↗

Simulations and Observations of Heating of Auroral Ion Beams

In the auroral zone, quasi-static parallel electric fields produce beams of ionospheric ions (e.g., H(+), He(+) and 0(+)), which flow outward into the magnetosphere, providing a significant source of ions for the ring current and plasma sheet. Because the velocities to which these beams are accelerated is dependent on the mass of the ions, differential flows between the various ion species can develop which are unstable to an ion-ion streaming instability. Particle simulations and observations from DE 1 are used to investigate the heating of the ion beams produced by this instability. It is shown that there is net transfer of energy from the light ions to the heavy ions, with the heavy ions reaching maximum velocities near the beam velocity of the light ions. Bulk heating of the heavy ions occurs when their relative density is low while high-energy tails are produced when their relative density is high. The heating is primarily parallel to the magnetic field if the difference in the heavy and light ion beam velocities is subsonic while both perpendicular and parallel heating can occur if it is supersonic. In the latter case, very strong heating of an intermediate ion's species such as He(+) can also occur. Comparison with observations shows features consistent with heating via the ion-ion instability including perpendicular heating in the supersonic regime and parallel heating in the subsonic regime and a change in the heating between these regimes as the ratio of the H(+) beam speed to the local sound speed is observed to decrease. This heating is, however, not always observed in association with enhanced wave emissions. This lack of waves is attributed to reabsorption of the waves as the ions become heated.

Winglee, R. M.↗

Friction and Wear of Ion-Beam-Deposited Diamondlike Carbon on Chemical-Vapor-Deposited, Fine-Grain Diamond

Friction and wear behavior of ion-beam-deposited diamondlike carbon (DLC) films coated on chemical-vapor-deposited (CVD), fine-grain diamond coatings were examined in ultrahigh vacuum, dry nitrogen, and humid air environments. The DLC films were produced by the direct impact of an ion beam (composed of a 3:17 mixture of Ar and CH4) at ion energies of 1500 and 700 eV and an RF power of 99 W. Sliding friction experiments were conducted with hemispherical CVD diamond pins sliding on four different carbon-base coating systems: DLC films on CVD diamond; DLC films on silicon; as-deposited, fine-grain CVD diamond; and carbon-ion-implanted, fine-grain CVD diamond on silicon. Results indicate that in ultrahigh vacuum the ion-beam-deposited DLC films on fine-grain CVD diamond (similar to the ion-implanted CVD diamond) greatly decrease both the friction and wear of fine-grain CVD diamond films and provide solid lubrication. In dry nitrogen and in humid air, ion-beam-deposited DLC films on fine-grain CVD diamond films also had a low steady-state coefficient of friction and a low wear rate. These tribological performance benefits, coupled with a wider range of coating thicknesses, led to longer endurance life and improved wear resistance for the DLC deposited on fine-grain CVD diamond in comparison to the ion-implanted diamond films. Thus, DLC deposited on fine-grain CVD diamond films can be an effective wear-resistant, lubricating coating regardless of environment.

Miyoshi, Kazuhisa↗

Low-energy ion beam sputtering of polycrystalline diamond

Ion beam milling is a highly versatile and precise technique for the microfabrication of diamond films, enabling controlled material removal at both micrometer and sub-micrometer scales while accommodating complex geometries and surface features. Comprehensive sputtering yield data are essential for process optimization. In this work, we systematically measure the sputter yield of polycrystalline diamond bombarded with $\textrm{N}_2^+$, Ne + , Ar + , Kr + , and Xe + ions over an energy range of 300–900 eV and beam incidence angles of 0°−80°, providing data critical for precision machining applications. Results show that the sputter yield increases with both ion energy and the incidence angle and decreases with increasing ion mass. For $\textrm{N}_2^+$ ions, the sputter yield is largely insensitive to ion energy and exceeds values expected for pure physical sputtering. The concurrent formation of volatile C 2 N 2 molecules during $\textrm{N}_2^+$ ion bombardment suggests that the process is dominated by chemical sputtering. The absence of a peak in the dependence of the sputter yield on the beam incidence angle expected at oblique incidence angles is attributed to the effects of surface roughness.

Materials science↗

Heavy ion beams in extended materials - Computational methods and experiment

The transport of heavy ion beams in extended materials is a problem of interest in accelerator and space shielding, radiation therapy, and astrophysical and radiobiological studies. The beam particles change their energy and direction of motion through atomic/molecular collisions and undergo occasional radical transformation in nuclear collision. In health physics applications, a heavy ion beam of initially well defined radiation quality is transformed into a complex mixture of diverse quality components after passing through a modest amount of material. This transformation of radiation quality must be understood to adequately explain the biological response of tissue to heavy ion radiation. A theoretical/experimental program to define an ion beam and its products in extended matter is described.

Wilson, J. W.↗

Ion-beam sputtering increases solar-cell efficiency

Ion-beam sputtering, fabrication of oxide-semiconductor-on-silicon (OSOS) solar cells, results in cells of 12% efficiency. Ion-beam sputtering technique is compatible with low-cost continuous fabrication and requires no high-temperature processing.

Burk, D. E.↗

Engineering of beam direct conversion for a 120-kV, 1-MW ion beam

Practical systems for beam direct conversion are required to recover the energy from ion beams at high efficiency and at very high beam power densities in the environment of a high-power neutral-injection system. Such an experiment is now in progress using a 120-kV beam with a maximum total current of 20 A. After neutralization, the H(+) component to be recovered will have a power of approximately 1 MW. A system testing these concepts has been designed and tested at 15 kV, 2 kW in preparation for the full-power tests. The engineering problems involved in the full-power tests affect electron suppression, gas pumping, voltage holding, diagnostics, and measurement conditions. Planning for future experiments at higher power includes the use of cryopumping and electron suppression by a magnetic field rather than by an electrostatic field. Beam direct conversion for large fusion experiments and reactors will save millions of dollars in the cost of power supplies and electricity and will dispose of the charged beam under conditions that may not be possible by other techniques.

Barr, W. L.↗

Observations of the artificially injected Porcupine xenon ion beam in the ionosphere

Results are given of ion beam injection experiments performed in the auroral ionosphere in connection with the German Sounding Rocket Project Porcupine. A heavy (xenon) ion beam was injected into the collisionless ionospheric plasma approximately perpendicular to the ambient magnetic field at altitudes from 190 km to about 450 km. The beam propagates nearly undistorted across the plasma because it is essentially depolarized; at the same time the beam is not current neutralized. This unexpected behavior poses the interconnected problems of how the beam manages to become charge neutralized, how current closure is maintained, and what is the mechanism of depolarization.

Haeusler, B.↗

Heavy ion beam probe measurements of radial potential profiles in the modified Penning discharge

A heavy ion beam probe was used to examine the radial potential profile of a plasma in the modified Penning discharge. The plasma has strong (approximately kV) electrostatic potentials near the anode ring which can be a large fraction of the injected ion beam energy. A primary (singly ionized) thallium ion beam is injected through the plasma in the midplane of a double Penning anode ring. After passage through the plasma, primary and secondary (doubly ionized) ions are detected with either a set of flat probes or an electrostatic energy analyzer. A calculation of the primary orbit through the plasma is performed to obtain an approximation to the measured primary beam trajectory. As the real radial potential profile is unknown, an adjustable model is used in the computer program. The adjustable potential profile is varied until the best agreement between measured and calculated trajectories is obtained. Secondary orbits are also predicted using the best fitting adjustable profile. The calculations indicate that secondary beams originating at more than one point in the plasma can be simultaneously observed at the electrostatic analyzer with certain primary beam initial conditions.

Kambic, G. X.↗

A preliminary model of ion beam neutralization

A theoretical model of neutralized thruster ion beam plasmas has been developed. The basic premise is that the beam forms an electrostatic trap for the neutralizing electrons. A Maxwellian spectrum of electron energies is maintained by collisions between trapped electrons and by collective randomization of velocities of electrons injected from the neutralizer into the surrounding plasma. The theory contains the observed barometric law relationship between electron density and electron temperatures and ion beam spreading in good agreement with measured results.

Parks, D. E.↗