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The low-pressure chemical vapor deposition (LPCVD) of polycrystalline silicon was investigted. The physical system was described, as was the controlling process parameters and requirements for producing films for use as an integral portion of the solar cell contact system.
Determination of physisorption isotherms of these gases on stainless steel by pressure change measurements in very low pressure cryogenic baths where a steel nipple was brought in contact with the test gas at 77 to 90 K in a sealed constant-volume system. The position of the nipple in the gas was changed in such a manner that gas adsorption on a 47.5 sq cm area of the steel surface could be measured. The Dubinin-Radushkevich (DR) equation (1947) was used for an empirical description of isotherms at different temperatures. The mean adsorption energies calculated from the DR plots were 1290, 1545, 1490 and 1903 cal/mol for Ar, Kr, CH4 and N2, respectively, being about 10% higher than the corresponding values on Pyrex.
The overall and blade-element performance of a low pressure ratio, low tip speed fan stage at design speed is presented for tow off-design rotor blade angle settings. The rotor design tip speed is 243.8 m/sec and weight flow per unit annulus area is 175.8 kg/sec. Design weight flow and pressure ratio are 29.9 kg/sec and 1.151, respectively.
The detection of CF(x) (x=1-3) radicals in low pressure discharges using source gases such as CF4 and CHF3 is of importance to the understanding of their chemical structure and relevance in plasma based etching processes. These radicals are known to contribute to the formation of fluorocarbon polymer films, which affect the selectivity and anisotropy of etching. In this study, we present preliminary results of the quantitative measurement of trifluoromethyl radicals, CF3, in low pressure discharges. The discharge studied here is an inductively (transformer) coupled plasma (ICP) source in the GEC reference cell, operating on pure CF4 at pressures ranging from 10 - 100 mTorr, This plasma source generates higher electron number densities at lower operating pressures than obtainable with the parallel-plate capacitively coupled version of the GEC reference cell. Also, this expanded operating regime is more relevant to new generations of industrial plasma reactors being used by the microelectronics industry. Fourier transform infrared (FTIR) spectroscopy is employed to observe the absorption band of CF3 radicals in the electronic ground state X2Al in the region of 1233-1270/cm. The spectrometer is equipped with a high sensitivity HgCdTe (MCT) detector and has a fixed resolution of 0.125/cm. The CF3 concentrations are measured for a range of operating pressures and discharge power levels.
This report summarizes research performed in support of the NASA Glenn Research Center (GRC) Low-Pressure Turbine (LPT) Flow Physics Program. The work was performed experimentally at the U.S. Naval Academy faculties. The geometry corresponded to "Pak B" LPT airfoil. The test section simulated LPT flow in a passage. Three experimental studies were performed: (a) Boundary layer measurements for ten baseline cases under high and low freestream turbulence conditions at five Reynolds numbers of 25,000, 50,000, 100,000, 200,000, and 300,000, based on passage exit velocity and suction surface wetted length; (b) Passive flow control studies with three thicknesses of two-dimensional bars, and two heights of three-dimensional circular cylinders with different spanwise separations, at same flow conditions as the 10 baseline cases; (c) Active flow control with oscillating synthetic (zero net mass flow) vortex generator jets, for one case with low freestream turbulence and a low Reynolds number of 25,000. The Passive flow control was successful at controlling the separation problem at low Reynolds numbers, with varying degrees of success from case to case and varying levels of impact at higher Reynolds numbers. The active flow control successfully eliminated the large separation problem for the low Reynolds number case. Very detailed data was acquired using hot-wire anemometry, including single and two velocity components, integral boundary layer quantities, turbulence statistics and spectra, turbulent shear stresses and their spectra, and intermittency, documenting transition, separation and reattachment. Models were constructed to correlate the results. The report includes a summary of the work performed and reprints of the publications describing the various studies.This report summarizes research performed in support of the NASA Glenn Research Center (GRC) Low-Pressure Turbine (LPT) Flow Physics Program. The work was performed experimentally at the U.S. Naval Academy faculties. The geometry corresponded to "Pak B" LPT airfoil. The test section simulated LPT flow in a passage. Three experimental studies were performed: (a) Boundary layer measurements for ten baseline cases under high and low freestream turbulence conditions at five Reynolds numbers of 25,000, 50,000, 100,000, 200,000, and 300,000, based on passage exit velocity and suction surface wetted length; (b) Passive flow control studies with three thicknesses of two-dimensional bars, and two heights of three-dimensional circular cylinders with different spanwise separations, at same flow conditions as the 10 baseline cases; (c) Active flow control with oscillating synthetic (zero net mass flow) vortex generator jets, for one case with low freestream turbulence and a low Reynolds number of 25,000. The Passive flow control was successful at controlling the separation problem at low Reynolds numbers, with varying degrees of success from case to case and varying levels of impact at higher Reynolds numbers. The active flow control successfully eliminated the large separation problem for the low Reynolds number case. Very detailed data was acquired using hot-wire anemometry, including single and two velocity components, integral boundary layer quantities, turbulence statistics and spectra, turbulent shear stresses and their spectra, and intermittency, documenting transition, separation and reattachment. Models were constructed to correlate the results. The report includes a summary of the work performed and reprints of the publications describing the various studies. The folders in this supplement contain processed data in ASCII format. Streamwise pressure profiles and velocity profiles are included. The velocity profiles were acquired using single sensor and cross sensor hot-wire probes which were traversed from the wall to the freestream at various streamwise locations. In some of the flow control cases (3D Trips and Jets) profiles were acquired at multiple spanwise locations.
The low pressure turbine for the NASA/General Electric Energy Efficient Engine is a highly loaded five-stage design featuring high outer wall slope, controlled vortex aerodynamics, low stage flow coefficient, and reduced clearances. An assessment of the performance of the LPT has been made based on a series of scaled air-turbine tests divided into two phases: Block 1 and Block 2. The transition duct and the first two stages of the turbine were evaluated during the Block 1 phase from March through August 1979. The full five-stage scale model, representing the final integrated core/low spool (ICLS) design and incorporating redesigns of stages 1 and 2 based on Block 1 data analysis, was tested as Block 2 in June through September 1981. Results from the scaled air-turbine tests, reviewed herein, indicate that the five-stage turbine designed for the ICLS application will attain an efficiency level of 91.5 percent at the Mach 0.8/10.67-km (35,000-ft), max-climb design point. This is relative to program goals of 91.1 percent for the ICLS and 91.7 percent for the flight propulsion system (FPS).
A theory is developed for isentropic metastable sound propagation in high pressure gas-liquid mixtures. Without simplification, it also correctly predicts the minimum speed for low pressure air-water measurements where other authors are forced to postulate isothermal propagation. This is accomplished by a mixture heat capacity ratio which automatically adjusts from its single phase values to approximately the isothermal value of unity needed for the minimum speed. Computations are made for the pure components parahydrogen and nitrogen, with emphasis on the latter. With simplifying assumptions, the theory reduces to a well known approximate formula limited to low pressure.
The objective of this study was to demonstrate the capability to analyze the aerodynamic performance of the complete low pressure subsystem (LPS) of the Energy Efficient Engine (EEE). Detailed analyses were performed using three- dimensional Navier-Stokes numerical models employing advanced clustered processor computing platforms. The analysis evaluates the impact of steady aerodynamic interaction effects between the components of the LPS at design and off- design operating conditions. Mechanical coupling is provided by adjusting the rotational speed of common shaft-mounted components until a power balance is achieved. The Navier-Stokes modeling of the complete low pressure subsystem provides critical knowledge of component acro/mechanical interactions that previously were unknown to the designer until after hardware testing.
The objective of this project is to provide the capability to analyze the aerodynamic performance of the complete low pressure subsystem (LPS) of the Energy Efficient Engine (EEE). The analyses were performed using three-dimensional Navier-Stokes numerical models employing advanced clustered processor computing platforms. The analysis evaluates the impact of steady aerodynamic interaction effects between the components of the LPS at design and off-design operating conditions. Mechanical coupling is provided by adjusting the rotational speed of common shaft-mounted components until a power balance is achieved. The Navier-Stokes modeling of the complete low pressure subsystem provides critical knowledge of component aero/mechanical interactions that previously were unknown to the designer until after hardware testing.
Cyclotron resonance study of ionization in low pressure flames - electron concentrations and electron-molecule collisions
Cryogenic propellant venting under low pressure conditions - heat-transfer coefficients for two- phase, single component, solid-gas mixture flow in short, vertical tube
Manometric gauge with outside collector for very low pressure applications
RF induction heating and production of low pressure plasmas, discussing plasma electron density function
Mass spectrometer pyrolysis of ammonium perchlorate at low pressure
One dimensional theory for cylindrical low pressure electrodeless discharge, predicting electron number density and temperature as function of applied fields
The low pressure turbine for the energy efficient engine is a five-stage configuration with moderate aerodynamic loading incorporating advanced features of decambered airfoils and extended blade overlaps at platforms and shrouds. Mechanical integrity of 18,000 hours on flowpath components and 36,000 hours on all other components is achieved along with no aeromechanical instabilities within the steady-state operating range. Selection of a large number (156) of stage 4 blades, together with an increased stage 4 vane-to-blade gap, assists in achieving FAR 36 acoustic goals. Active clearance control (ACC) of gaps at blade tips and interstage seals is achieved by fan air cooling judiciously applied at responsive locations on the casing. This ACC system is a major improvement in preventing deterioration of the 0.0381 cm (0.015 in.) clearances required to meet the integrated-core/low-spool turbine efficiency goal of 91.1% and the light propulsion system efficiency goal of 91.7%.
The flow field produced by low pressure gas vents are described based on experimental data obtained from tests in a large vacuum chamber. The gas density, pressure, and flux at any location in the flow field are calculated based on the vent plume description and the knowledge of the flow rate and velocity of the venting gas. The same parameters and the column densities along a specified line of sight traversing the plume are also obtained and shown by a computer-generated graphical representation. The fields obtained with a radially scanning Pitot probe within the exhausting gas are described by a power of the cosine function, the mass rate and the distance from the exit port. The field measurements were made for gas at pressures ranging from 2 to 50 torr venting from pipe fittings with diameters of 3/16 inch to 1-1/2 inches I.D. (4.76 mm to 38.1 mm). The N(2) mass flow rates ranged from 2E-4 to 3.7E-1 g/s.
The flow field produced by low pressure gas vents are described based on experimental data obtained from tests in a large vacuum chamber. The gas density, pressure, and flux at any location in the flow field are calculated based on the vent plume description and the knowledge of the flow rate and velocity of the venting gas. The same parameters and the column densities along a specified line of sight traversing the plume are also obtained and shown by a computer generated graphical representation. The fields obtained with a radically scanning Pitot probe within the exhausting gas are described by a power of the cosine function, the mass rate, and the distance from the exit port. The field measurements were made for gas at pressures ranging from 2 to 50 torr venting from pipe fittings with diameters to 3/16 to 1-1/2 inches I.D. (4.76 to 38.1 mm). The N2 mass flow rates ranged from 2E-4 to 3.7E-1 g/s.