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Fabrication of X-ray Microcalorimeter Focal Planes Composed of Two Distinct Pixel Types

We develop superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting the specifications of X-ray imaging spectrometers, including high count rate, high energy resolution, and large field of view. In particular, a focal plane composed of two subarrays: one of fine pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit Instrument on the European Space Agencys ATHENA mission. We have based the subarrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all-gold X-ray absorber on 50 and 75 micron pitch, where the Mo/Au TES sits atop a thick metal heatsinking layer, have shown high resolution and can accommodate high count rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au, and an added bismuth layer in a 250-sq micron absorber. To tune the parameters of each subarray requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single-ion milling step. We demonstrate methods for integrating the heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each subarray, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature (T(sub c)) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these 'hybrid' arrays will be presented.

Terms—Arrays

Microcalorimetry: The First Two Decades

Our group at GSFC began experimental and theoretical work on microcalorimetry almost twenty years ago, in August of 1982. Over the next 10 months, we completed the initial demonstration of a Si impurity thermometer-based calorimeter as an X-ray spectrometer. This successful demonstration resulted in the development by many investigators of scientific applications for microcalorimeters, ranging from optical spectroscopy to dark matter detection to particle physics applications. Many new technical approaches for cryogenic detectors were proposed by investigators and have been developed. In this presentation, I will describe the early development of microcalorimeters at GSFC and University of Wisconsin and the subsequent rapid growth of this work around the world The key milestones in the early development were the initial spectroscopy demonstrations and the selection of XRS, our microlcalorimeter-based instrument for the Advanced X-ray Astrophysics Facility (AXAF) and ultimately for ASTRO-E. An additional key event was the development of the direct detection of dark matter experiment and the formation of the Center for Particle Astrophysics. Both of these programs provided long term support for this technology in its precarious early days. A major additional technical step in the development of detectors was the demonstration of devices based on superconducting transition edge sensors (TES). These detectors promised (and have delivered) improved energy resolution and higher event rate capabilities. They couple naturally to SQUIDS, which operate well at the low temperatures where the detectors must operate. The past two decades have taken microcalorimeters from their infancy to applications in real experiments. I will provide an overview of the early development of the devices and review the breadth of the present technology and applications.

Moseley, Harvey

Design of a 3-Stage ADR for the Soft X-Ray Spectrometer Instrument on the Astro-H Mission

The Japanese Astro-H mission will include the Soft X-ray Spectrometer (SXS) instrument, whose 36-pixel detector array of ultra-sensitive x-ray microcalorimeters requires cooling to 50 mK. This will be accomplished using a 3-stage adiabatic demagnetization refrigerator (ADR). The design is dictated by the need to operate with full redundancy with both a superfluid helium dewar at 1.3 K or below, and with a 4.5 K Joule-Thomson (JT) cooler. The ADR is configured as a 2-stage unit that is located in a well in the helium tank, and a third stage that is mounted to the top of the helium tank. The third stage is directly connected through two heat switches to the JT cooler and the helium tank, and manages heat flow between the two. When liquid helium is present, the 2-stage ADR operates in a single-shot manner using the superfluid helium as a heat sink. The third stage may be used independently to reduce the time-average heat load on the liquid to extend its lifetime. When the liquid is depleted, the 2nd and 3rd stages operate as a continuous ADR to maintain the helium tank at as low a temperature as possible - expected to be 1.2 K - and the 1st stage cools from that temperature as a single-stage, single-shot ADR. The ADR s design and operating modes are discussed, along with test results of the prototype 3-stage ADR.

Shirron, Peter J.

Operating Modes and Cooling Capabilities of the 3-Stage ADR Developed for the Soft-X-Ray Spectrometer Instrument on Astro-H

A 3-stage adiabatic demagnetization refrigerator (ADR) is used on the Soft X-ray Spectrometer instrument on Astro-H to cool a 6x6 array of x-ray microcalorimeters to 50 mK. The ADR is supported by a cryogenic system consisting of a superfluid helium tank, a 4.5 K Joule-Thomson (JT) cryocooler, and additional 2-stage Stirling cryocoolers that pre-cool the JT cooler and cool radiation shields within the cryostat. The ADR is configured so that it can use either the liquid helium or the JT cryocooler as its heat sink, giving the instrument an unusual degree of tolerance for component failures or degradation in the cryogenic system. The flight detector assembly, ADR and dewar were integrated into the flight dewar in early 2014, and have since been extensively characterized and calibrated. This paper summarizes the operation and performance of the ADR in all of its operating modes

x-ray astronomy

Thermodynamic Analysis of the 3-Stage ADR for the Astro-H Soft X-Ray Spectrometer Instrument

The Soft X-ray Spectrometer (SXS) instrument on Astro-H will use a 3-stage ADR to cool the microcalorimeter array to 50 mK. In the primary operating mode, two stages of the ADR cool the detectors using superfluid helium at 1.20 K as the heat sink. In the secondary mode, which is activated when the liquid helium is depleted, two of the stages continuously cool the (empty) helium tank using a 4.5 K Joule-Thomson cooler as the heat sink, and the third stage cools the detectors. In the design phase, a high-fidelity model of the ADR was developed in order to predict both the cooling capacity and heat rejection rates in both operating modes. The primary sources of heat flow are from the salt pills, hysteresis heat from the magnets and magnetic shields, and power dissipated by the heat switches. The flight instrument dewar, ADR, detectors and electronics were integrated in mid-2014 and have since undergone extensive performance testing, in part to validate the performance model. This paper will present the thermodynamic performance of the ADR, including cooling capacity, heat rejection to the heat sinks, and various measures of efficiency.

space cryogenics

On-Orbit Operation of the Adiabatic Demagnetization Refrigerator on the Astro-H/Hitomi Soft X-ray Spectrometer Instrument

The Soft X-ray Spectrometer instrument on the Astro-H observatory contains a 6x6 array of x-ray microcalorimeters, which is cooled to 50 mK by an adiabatic demagnetization refrigerator (ADR). The ADR consists of three stages in order to provide stable detector cooling using either a 1.2 K superfluid helium bath or a 4.5 K Joule-Thomson (JT) cryocooler as its heat sink. When liquid helium is present, two of the ADRs stages are used to single-shot cool the detectors while rejecting heat to the helium. After the helium is depleted, all three stages are used to cool both the helium tank (to about 1.5 K) and the detectors (to 50 mK) using the JT cryocooler as its heat sink. The Astro-H observatory, renamed Hitomi after its successful launch in February 2016, carried approximately 36 liters of helium into orbit. On day 5, the helium had cooled sufficiently (1.4 K) to allow operation of the ADR. This paper describes the design, operation and on-orbit performance of the ADR.

sub-kelvin refrigeration

Final Summary of On-Orbit ADR Operation on Hitomis Soft X-Ray Spectrometer Instrument

The Soft X-ray Spectrometer (SXS) on the Astro-H observatory contains a 6x6 array of x-ray microcalorimeters that are cooled to 50 mK by an adiabatic demagnetization refrigerator (ADR). The ADR consists of three stages in order to provide stable detector cooling using either a 1.2 K superfluid helium bath or a 4.5 K Joule-Thomson (JT) cryocooler as its heat sink. Astro-H was renamed Hitomi after it was successfully launched in February 2016. The SXS carried approximately 36 liters of helium into orbit, and by day 5 the helium had cooled sufficiently (1.4 K) to allow operation of the ADR. This paper summarizes the ADRs performance during the 38 days that the satellite was operational.

space astronomy

Design and On-Orbit Operation of the Adiabatic Demagnetization Refrigerator on the Hitomi Soft X-Ray Spectrometer Instrument

The Soft X-ray Spectrometer instrument on the Astro-H observatory contains a 6x6 array of x-ray microcalorimeters that is cooled to 50 mK by an adiabatic demagnetization refrigerator (ADR). The ADR consists of three stages in order to provide stable detector cooling using either a 1.2 K superfluid helium bath or a 4.5 K Joule-Thomson (JT) cryocooler as its heat sink. When liquid helium is present, two of the ADR's stages are used to single-shot cool the detectors while rejecting heat to the helium. After the helium is depleted, all three stages are used to continuously cool the helium tank (to about 1.5 K) and single-shot cool the detectors (to 50 mK), using the JT cryocooler as its heat sink. The Astro-H observatory, renamed Hitomi after its successful launch in February 2016, carried approximately 36 liters of helium into orbit. On day 5, the helium had cooled sufficiently (<1.4 K) to allow operation of the ADR. This paper describes the design, operation and on-orbit performance of the ADR, and the use of the ADR's heat rejection as a tool for mass gauging the helium tank.

adiabatic demagnetization refrigerator

The Astro-E High Resolution X-Ray Spectrometer

The Astro-E High Resolution X-ray Spectrometer (XRS) was developed jointly by the NASA/Goddard Space Flight Center and the Institute of Space and Astronautical Science in Japan. The instrument is based on a new approach to spectroscopy, the X-ray microcalorimeter. This device senses the energies of individual X-ray photons as heat with extreme precision. A 32 channel array of microcalorimeters is being employed, each with an energy resolution of about 12 eV at 6 keV (the Fe-K region). This will provide spectral resolving power 10 times higher than any other non-dispersive X-ray spectrometer. The instrument incorporates a three stage cooling system capable of operating the array at 60 mK for about two years in orbit. The array sits at the focus of a grazing incidence conical mirror. The quantum efficiency of the microcalorimeters and the reflectivity of the X-ray mirror system combine to give high throughput over the 0.3-12 keV energy band. This new capability will enable the study of a wide range of high-energy astrophysical sources with unprecedented spectral sensitivity. This paper presents the basic design requirements and implementation of the XRS, and also describes the instrument parameters and performance.

Kelley, Richard L.

Pre- and post-launch operation of the Resolve soft X-ray spectrometer onboard the XRISM satellite

Resolve is a high-resolution X-ray spectrometer onboard the X-Ray Imaging and Spectroscopy Mission (XRISM), launched on September 6 (UT), 2023. The Resolve has performed better than its required spectral resolution (7 eV at full width at half maximum at 6 keV), both on the ground and in orbit, and has been confirmed to have comparable performance to the soft X-ray spectrometer onboard the ASTRO-H (Hitomi) satellite. The focal plane is composed of an array of microcalorimeter detectors operated at 50 mK to achieve the required energy resolution, and the cooling system is designed to satisfy the lifetime requirement of over 3 years. The focal plane and cooling system are contained in a vacuum-insulated dewar. The cooling system is equipped with a two-stage adiabatic demagnetization refrigerator (ADR) that uses superfluid liquid helium (LHe) as its heat sink. The system includes a third ADR stage that can be used to provide the heat sink when the helium is exhausted. A Joule–Thomson cooler and several two-stage Stirling coolers are used to reduce the heat load on the LHe. During pre-launch operations, we carried out a superfluid LHe top-off operation. The resultant amount of LHe onboard Resolve was over 35 L before launch, which is sufficient to meet the lifetime requirement. During post-launch operation, the LHe vent valve was opened 5 min after launch during rocket acceleration, and the cryocoolers were turned on after several orbits, as planned, which established stable cooling within the dewar. Pre- and post-launch operations for the Resolve instrument were planned around multiple constraints from launch vehicle operations; all were successfully completed, and the launch requirements were fully met.

X-Ray Imaging and Spectroscopy Mission

Measuring the Heat Load on the Flight ASTRO-H Soft Xray Spectrometer Dewar

The Soft Xray Spectrometer (SXS) instrument on-board the ASTRO-H X-ray mission is based on microcalorimeters operating at 50 mK. Low temperature is achieved by use of an adiabatic demagnetization refrigerator (ADR) cyclically operating up to a heat sink at either 1.2 K or 4.5 K. The 1.2 K heat sink is provided by a 40 liter superfluid helium dewar. The parasitic heat to the helium from supports, plumbing, wires, and radiation, and the cyclic heat dumped by the ADR operation determine the liquid helium lifetime. To measure this lifetime we have used various techniques to rapidly achieve thermal equilibrium and then measure the boil-off rate of the helium. We have measured a parasitic heat of 650 microwatts and a cyclic heat of 100 microwatts for a total of 750 microwatts. This closely matches the predicted heat load. Starting with a fill level at launch of more than 33 liters results in a lifetime of greater than 4 years for the liquid helium. The techniques and accuracy for this measurement will be explained in this paper.

cryogenic Equipment

The AXAF/XRS test dewar - A versatile design

The X-Ray Spectrometer (XRS) to be flown on the Advanced X-ray Astrophysics Facility (AXAF) consists of an array of microcalorimeters and an Adiabatic Demagnetization Refrigerator (ADR). The ADR provides an operating temperature of 0.065 to 0.100 K. To support extensive development testing of the ADR and the detector array, a test dewar has been designed and built that surpasses specification requirements. Pumping on the liquid helium bath with a 47 l/s pump, we have achieved temperatures lower than 1.5 K with a hold time in excess of 72 hrs. The dewar can be operated without liquid nitrogen with a hold time of 36 hrs. This feature was incorporated in the design because boiling nitrogen may introduce microphonic noise to the detectors. To further reduce the susceptibility to microphonic vibration a unique suspension system utilizing Kevlar fibers was devised which provides both translational and rotational rigidity to the detector mount. Finally, the dewar is very manageable and may be rotated by only one person.

Weintz, Karl F.

Thermodynamic Performance of the 3-Stage ADR for the Astro-H Soft X-Ray Spectrometer Instrument

The Soft X-ray Spectrometer (SXS) instrument[1] on Astro-H[2] will use a 3-stage ADR[3] to cool the microcalorimeter array to 50 mK. In the primary operating mode, two stages of the ADR cool the detectors using superfluid helium at ≤1.20 K as the heat sink[4]. In the secondary mode, which is activated when the liquid helium is depleted, the ADR uses a 4.5 K Joule-Thomson cooler as its heat sink. In this mode, all three stages operate together to continuously cool the (empty) helium tank and singleshot cool the detectors. The flight instrument - dewar, ADR, detectors and electronics - were integrated in 2014 and have since undergone extensive performance testing. This paper presents a thermodynamic analysis of the ADR's operation, including cooling capacity, heat rejection to the heat sinks, and various measures of efficiency.

adiabatic demagnetization refrigerator

The AXAF/XRS ADR - Engineering model

A spaceworthy Adiabatic Demagnetization Refrigerator is under development at Goddard Space Flight Center as part of the X-Ray Spectrometer (XRS), an instrument on the Advanced X-ray Astrophysics Facility (AXAF). XRS will employ an array of 32 microcalorimeters capable of detecting X-rays in the energy range of 0.3 - 10 keV. In order to achieve a desired resolution of 12 eV, these detectors must be operated at a temperature of 0.065 - 0.100 K. An ADR must be used to cool these detectors in space. A breadboard model was designed and built less than two years ago, and provided excellent results. We are presently at the development stage of the engineering model. Several changes have been made to the original design in order to improve the efficiency of the ADR, to reduce its weight, and to strengthen the salt pill suspension system so that the ADR can survive launch loads and have low sensitivity to microphonic inputs. We shall report on the results of these changes; what worked and what did not.

Serlemitsos, Aristides T.

ADR Design and Operation for the X-Ray Imaging and Spectrometer Mission (XRISM)

Following the loss of the Hitomi x-ray astronomy satellite 38 days after its launch in early 2016, the US and Japanese space agencies (NASA and JAXA) agreed to fund a replacement mission, presently called XARM. XARM will include only the two soft x-ray instruments from Hitomi, the Soft X-ray Spectrometer (SXS), and the Soft X-ray Imager (SXI). For XARM, the spectrometer instrument named Resolve will be rebuilt to the original SXS design. It consists of a 6x6 array of silicon microcalorimeters cooled to 50 millikelvin by means of a 3-stage adiabatic demagnetization refrigerator (ADR) whose operation is supported by a 40 liter superfluid helium tank, a 4.5 K Joule-Thomson cryocooler and a number of 2-stage Stirling cryocoolers. These components were all successfully demonstrated on Hitomi before its failure. This talk will summarize the design of the XARM ADR and how it differs from the SXS version, and will briefly summarize on-orbit ADR performance during Hitomi's operational period.

adiabatic demagnetization refrigeration

3-Stage ADR for the X-Ray Imaging and Spectrometer Mission (XRISM)

Following the loss of the Hitomi x-ray astronomy satellite shortly after its launch in early 2016, the US and Japanese space agencies (NASA and JAXA) agreed to fund a replacement mission, presently called the X-Ray Imaging and Spectroscopy Mission (XRISM). XRISM will include only the two soft x-ray instruments from Hitomi, the Soft X-ray Spectrometer (SXS), and the Soft X-ray Imager (SXI). The spectrometer instrument, now named Resolve, will be similar to the original SXS design. It consists of a 6 by 6 array of silicon microcalorimeters cooled to 50 millikelvin by means of a 3-stage Adiabatic Demagnetization Refrigerator (ADR) whose operation is supported by a 40 liter superfluid helium tank, a 4.5-degrees-Kelvin Joule-Thomson cryocooler and a number of 2-stage Stirling cryocoolers. These components were all successfully demonstrated on Hitomi before its failure. This talk will summarize the design of the XRISM ADR and how it differs from the SXS version.

ADR (Adiabatic Demagnetization Refrigerator)

Performance Testing of the Engineering Model Astro-H 3-stage ADR

The Japanese Astro-H mission will include the Soft X-ray Spectrometer (SXS) instrument provided by NASA/GSFC. The SXS will perform imaging spectroscopy in the soft x-ray band using a 6x6 array of silicon microcalorimeters operated at 50 mK. The detectors are cooled by a 3-stage adiabatic demagnetization refrigerator (ADR), which is configured to use either a 1.3 K superfluid helium tank or a 4.5 K Joule-Thomson cryocooler as a heat sink. At present, the engineering model SXS, including the detectors and ADR, has been performance tested at GSFC and integrated with the EM dewar in Japan. The flight model SXS is currently being fabricated. This paper presents test results of the EM ADR and changes that will be implemented in the flight version.

Shirron, Peter J.

Design and Development of the Astro-H 3-Stage ADR

The Japanese Astro-H mission will include the Soft X-ray Spectrometer (SXS) instrument provided by NASA/GSFC. The SXS will perform imaging spectroscopy in the soft x-ray band using a 6x6 array of silicon microcalorimeters operated at 50 mK. The detectors will be cooled by a 3-stage adiabatic demagnetization refrigerator (ADR). The configuration allows the ADR to operate with both a 1.3 K superfluid helium bath and a 4.5 K cryocooler as its heat sink. Initially, when liquid helium is present, the two coldest stages of the ADR will operate in a single-shot mode to cool the detectors from 1.3 K. The 3rd stage may be used to transfer heat from the liquid to the cryocooler to extend its lifetime. When the liquid is depleted, the two warmest stages will operate in a continuous mode to establish a 1.3 K base temperature, from which the cold stage will operate in a single-shot mode to cool the detectors. This paper will describe the design and operating modes of the ADR, as well as details of individual components.

Shirron, Peter J.