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Transition-Edge Hot-Electron Microbolometers for Millimeter and Submillimeter Astrophysics

The millimeter and the submillimeter wavelengths of the electromagnetic spectrum hold a wealth of information about the evolution of the universe. In particular, cosmic microwave background (CMB) radiation and its polarization carry the oldest information in the universe, and provide the best test of the inflationary paradigm available to astronomy today. Detecting gravity waves through their imprint on the CMB polarization would have extraordinary repercussions for cosmology and physics. A transition-edge hot-electron micro - bolometer (THM) consists of a superconducting bilayer transition-edge sensor (TES) with a thin-film absorber. Unlike traditional monolithic bolometers that make use of micromachined structures, the THM em ploys the decoupling between electrons and phonons at millikelvin temperatures to provide thermal isolation. The devices are fabricated photolithographically and are easily integrated with antennas via microstrip transmission lines, and with SQUID (superconducting quantum interference device) readouts. The small volume of the absorber and TES produces a short thermal time constant that facilitates rapid sky scanning. The THM consists of a thin-film metal absorber overlapping a superconducting TES. The absorber forms the termination of a superconducting microstripline that carries RF power from an antenna. The purpose of forming a separate absorber and TES is to allow flexibility in the optimization of the two components. In particular, the absorbing film's impedance can be chosen to match the antenna, while the TES impedance can be chosen to match to the readout SQUID amplifier. This scheme combines the advantages of the TES with the advantages of planar millimeter-wave transmission line circuits. Antenna-coupling to the detectors via planar transmission lines allows the detector dimensions to be much smaller than a wavelength, so the technique can be extended across the entire microwave, millimeter, and submillimeter wavelength ranges. The circuits are fabricated using standard microlithographic techniques and are compatible with uniform, large array formats. Unlike traditional monolithic bolometers that make use of micromachined structures, the THM employs the decoupling between electrons and phonons at millikelvin temperatures to provide thermal isolation. There is no fragile membrane in the structure for thermal isolation, which improves the fabrication yield.

Hsieh, Wen-Ting↗

Design and Expected Performance of GISMO-2, a Two Color Millimeter Camera for the IRAM 30 m Telescope

We present the main design features for the GISMO-2 bolometer camera, which we build for background-limited operation at the IRAM 30 m telescope on Pico Veleta, Spain. GISMO-2 will operate simultaneously in the 1 and 2 mm atmospherical windows. The 1 mm channel uses a 32 × 40 TES-based backshort under grid (BUG) bolometer array, the 2 mm channel operates with a 16 × 16 BUG array. The camera utilizes almost the entire full field of view provided by the telescope. The optical design of GISMO-2 was strongly influenced by our experience with the GISMO 2mm bolometer camera, which is successfully operating at the 30 m telescope. GISMO is accessible to the astronomical community through the regularIRAMcall for proposals.

Two-Color mm camera↗

The GISMO-2 Bolometer Camera

We present the concept for the GISMO-2 bolometer camera) which we build for background-limited operation at the IRAM 30 m telescope on Pico Veleta, Spain. GISM0-2 will operate Simultaneously in the 1 mm and 2 mm atmospherical windows. The 1 mm channel uses a 32 x 40 TES-based Backshort Under Grid (BUG) bolometer array, the 2 mm channel operates with a 16 x 16 BUG array. The camera utilizes almost the entire full field of view provided by the telescope. The optical design of GISM0-2 was strongly influenced by our experience with the GISMO 2 mm bolometer camera which is successfully operating at the 30m telescope. GISMO is accessible to the astronomical community through the regular IRAM call for proposals.

Staguhn, Johannes G.↗

Distributed Antenna-Coupled TES for FIR Detectors Arrays

We describe a new architecture for a superconducting detector for the submillimeter and far-infrared. This detector uses a distributed hot-electron transition edge sensor (TES) to collect the power from a focal-plane-filling slot antenna array. The sensors lay directly across the slots of the antenna and match the antenna impedance of about 30 ohms. Each pixel contains many sensors that are wired in parallel as a single distributed TES, which results in a low impedance that readily matches to a multiplexed SQUID readout These detectors are inherently polarization sensitive, with very low cross-polarization response, but can also be configured to sum both polarizations. The dual-polarization design can have a bandwidth of 50The use of electron-phonon decoupling eliminates the need for micro-machining, making the focal plane much easier to fabricate than with absorber-coupled, mechanically isolated pixels. We discuss applications of these detectors and a hybridization scheme compatible with arrays of tens of thousands of pixels.

antenna↗

An Ultrasensitive Hot-Electron Bolometer for Low-Background SMM Applications

We are developing a hot-electron superconducting transition-edge sensor (TES) that is capable of counting THz photons and operates at T = 0.3K. The main driver for this work is moderate resolution spectroscopy (R approx. 1000) on the future space telescopes with cryogenically cooled (approx. 4 K) mirrors. The detectors for these telescopes must be background-limited with a noise equivalent power (NEP) approx. 10(exp -19)-10(exp -20) W/Hz(sup 1/2) over the range v = 0.3-10 THz. Above about 1 THz, the background photon arrival rate is expected to be approx. 10-100/s), and photon counting detectors may be preferable to an integrating type. We fabricated superconducting Ti nanosensors with a volume of approx. 3x10(exp -3) cubic microns on planar substrate and have measured the thermal conductance G to the thermal bath. A very low G = 4x10(exp -14) W/K, measured at 0.3 K, is due to the weak electron-phonon coupling in the material and the thermal isolation provided by superconducting Nb contacts. This low G corresponds to NEP(0.3K) = 3x10(exp -19) W/Hz(sup 1/2). This Hot-Electron Direct Detector (HEDD) is expected to have a sufficient energy resolution for detecting individual photons with v > 0.3 THz at 0.3 K. With the sensor time constant of a few microseconds, the dynamic range is approx. 50 dB.

bolometers↗

Characterization of AlMn TES Impedance, Noise, and Optical Efficiency in the First 150 mm Multichroic Array for Advanced ACTPol

The Advanced ACTPol (AdvACT) upgrade to the Atacama Cosmology Telescope features large arrays of multichroic pixels consisting of two orthogonal-polarization pairs of superconducting bolometers at two observing frequency bands. We present measurements of the detector properties and noise data in a subset of a fielded multichroic array of AlMn transition-edge sensor (TES) detectors. In this array, the distribution of critical temperature T(sub c) across detectors appears uniform at the percent level. The measured noise-equivalent power (NEP) distributions over approximately 1200 detectors are consistent with expectations. We find median NEPs of 4.0×10(exp −17) W/ √ Hz for low-band detectors and 6.2×10(exp −17) W/ √ Hz for high-band detectors under covered-window telescope test conditions with optical loading comparable to observing with precipitable water vapor approximately 0.5 mm. Lastly, we show the estimated detector optical efficiency, and demonstrate the ability to perform optical characterization over hundreds of detectors at once using a cryogenic blackbody source.

Crowley, Kevin T.↗

Distributed Antenna-Coupled Transition Edge Sensors

We describe progress toward realizing a new architecture for focal plane arrays for the Submillimeter and Far- Infrared (FIR) bands. This architecture is based on a detector design utilizing distributed hot{electron transition edge sensors (TES) coupled to slot antenna elements. Arrays utilizing this type of detector can be considerably easier to manufacture than membrane-isolated TES arrays, because the need for micro-machining is eliminated. We present background and rationale for this new array architecture and details of a new antenna design for an imaging polarimeter, which yields greater bandwidth than past designs. In addition, we describe a cryogenic facility for testing these arrays.

bolometer↗

Microwave Transmission Technique for Accurate Impedance Characterization of Superconductive Bolometric Mixers

The impedance of the supconducting hot-electron bolometer mixer was measured in the range 0.2-4 GHz. A special technique relying on determination of S21 transmission parameter of the device was used. Many advantages of the techinque (wide frequency range, in sity calibration, low tes power, accuracy) are demonstrated. The estimate of the mixer bandwidth from the impedance data using the mixer theory is in good agreement with the results ofthe direct bandwidth measurements.

hot-electron bolometer mixer transmission↗

Fabrication of an Antenna-Coupled Bolometer for Cosmic Microwave Background Polarimetry

We describe the development of a detector for precise measurements of the cosmic microwave background polarization. The detector employs a waveguide to couple light between a pair of Mo/Au superconducting transition edge sensors (TES) and a feedhorn. Incorporation of an on-chip ortho-mode transducer (OMT) results in high isolation. The OMT is micromachined and bonded to the microstrip and TES circuits in a low temperature wafer bonding process. The wafer bonding process incorporates a buried superconducting niobium layer with a single crystal silicon layer which serves as the leg isolated TES membrane and as the microstrip dielectric. We describe the micromachining and wafer bonding process and report measurement results of the microwave circuitry operating in the 29-43GHz band along with Johnson noise measurements of the TES membrane structures and development of Mo/Au TES operating under '00mK.

Denis, K.L.↗

A Dry-Etch Process for Low Temperature Superconducting Transition Edge Sensors for Far Infrared Bolometer Arrays

The next generation of ultra-low power bolometer arrays, with applications in far infrared imaging, spectroscopy and polarimetry, utilizes a superconducting bilayer as the sensing element to enable SQUID multiplexed readout. Superconducting transition edge sensors (TES s) are being produced with dual metal systems of superconductinghormal bilayers. The transition temperature (Tc) is tuned by altering the relative thickness of the superconductor with respect to the normal layer. We are currently investigating MoAu and MoCu bilayers. We have developed a dry-etching process for MoAu TES s with integrated molybdenum leads, and are working on adapting the process to MoCu. Dry etching has the advantage over wet etching in the MoAu system in that one can achieve a high degree of selectivity, greater than 10, using argon ME, or argon ion milling, for patterning gold on molybdenum. Molybdenum leads are subsequently patterned using fluorine plasma.. The dry-etch technique results in a smooth, featureless TES with sharp sidewalls, no undercutting of the Mo beneath the normal metal, and Mo leads with high critical current. The effects of individual processing parameters on the characteristics of the transition will be reported.

Allen, Christine A.↗

Dual Transition Edge Sensor Bolometer for Enhanced Dynamic Range

Broadband surveys at the millimeter and submillimeter wavelengths will require bolometers that can reach new limits of sensitivity and also operate under high background conditions. To address this need, we present results on a dual transition edge sensor (TES) device with two operating modes: one for low background, ultrasensitive detection and one for high background, enhanced dynamic range detection. The device consists of a detector element with two transition temperatures (T(sub c)) of 0.25 and 0.51 K located on the same micromachined, thermally isolated membrane structure. It can be biased on either transition, and features phonon-limited noise performance at the lower T(sub c). We measure noise performance on the lower transition 7 x 10(exp -18) W/rt(Hz) and the bias power on the upper transition of 12.5 pW, giving a factor of 10 enhancement of the dynamic range for the device. We discuss the biasable range of this type of device and present a design concept to optimize utility of the device.

Chervenak, J. A.↗

The First Multichroic Polarimeter Array on the Atacama Cosmology Telescope: Characterization and Performance

The Atacama Cosmology Telescope Polarimeter (ACTPol) is a polarization sensitive receiver for the 6-meter Atacama Cosmology Telescope (ACT) and measures the small angular scale polarization anisotropies in the cosmic microwave background (CMB). The full focal plane is composed of three detector arrays, containing over 3000 transition edge sensors (TES detectors) in total. The first two detector arrays, observing at 146 gigahertz, were deployed in 2013 and 2014, respectively. The third and final array is composed of multichroic pixels sensitive to both 90 and 146 gigahertz and saw first light in February 2015. Fabricated at NIST, this dichroic array consists of 255 pixels, with a total of 1020 polarization sensitive bolometers and is coupled to the telescope with a monolithic array of broad-band silicon feedhorns. The detectors are read out using time-division SQUID multiplexing and cooled by a dilution refrigerator at 110 meter Kelvins. We present an overview of the assembly and characterization of this multichroic array in the lab, and the initial detector performance in Chile. The detector array has a TES detector electrical yield of 85 percent, a total array sensitivity of less than 10 microns Kelvin root mean square speed, and detector time constants and saturation powers suitable for ACT CMB observations.

Ho, S. P.↗

Development of a Robust, Efficient Process to Produce Scalable, Superconducting Kilopixel Far-IR Detector Arrays

The far-IR band is uniquely suited to study the physical conditions in the interstellar medium from nearby sources out to the highest redshifts. FIR imaging and spectroscopy instrumentation using incoherent superconducting bolometers represents a high sensitivity technology for many future suborbital and space missions, including the Origins Space Telescope. Robust, high sensitivity detector arrays with several 104 pixels, large focal plane filling factors, and low cosmic ray cross sections that operate over the entire far-IR regime are required for such missions. These arrays could consist of smaller sub-arrays, in case they are tileable. The TES based Backshort Under Grid array architecture which our group has fielded in a number of FIR cameras, is a good candidate to meet these requirements: BUGs are tileable, and with the integration of the SQUID multiplexer scaleable beyond wafer sizes; they provide high filling factors, low cosmic cross section and have been demonstrated successfully in far-infrared astronomical instrumentation. However, the production of BUGs with integrated readout multiplexers has many time and resource consuming process steps. In order to meet the requirement of robustness and efficiency on the production of future arrays, we have developed a new method to provide the superconducting connection of BUG detectors to the readout multiplexers or general readout boards behind the detectors. This approach should allow us to reach the goal to produce reliable, very large detector arrays for future FIR missions.

Staguhn, Johannes↗

Novel Multiplexing Technique for Detector and Mixer Arrays

Future submillimeter and far-infrared space telescopes will require large-format (many 1000's of elements) imaging detector arrays to perform state-of-the-art astronomical observations. A crucial issue related to a focal plane array is a readout scheme which is compatible with large numbers of cryogenically-cooled (typically < 1 K) detectors elements. When the number of elements becomes of the order of thousands, the physical layout for individual readout amplifiers becomes nearly impossible to realize for practical systems. Another important concern is the large number of wires leading to a 0.1-0.3 K platform. In the case of superconducting transition edge sensors (TES), a scheme for time-division multiplexing of SQUID read-out amplifiers has been recently demonstrated. In this scheme the number of SQUIDs is equal to the number (N) of the detectors, but only one SQUID is turned on at a time. The SQUIDs are connected in series in each column of the array, so the number of wires leading to the amplifiers can be reduced, but it is still of the order of N. Another approach uses a frequency domain multiplexing scheme of the bolometer array. The bolometers are biased with ac currents whose frequencies are individual for each element and are much higher than the bolometer bandwidth. The output signals are connected in series in a summing loop which is coupled to a single SQUID amplifier. The total number of channels depends on the ratio between the SQUID bandwidth and the bolometer bandwidth and can be at least 100 according to the authors. An important concern about this technique is a contribution of the out-of-band Johnson noise which multiplies by factor N(exp 1/2) for each frequency channel. We propose a novel solution for large format arrays based on the Hadamard transform coding technique which requires only one amplifier to read out the entire array of potentially many 1000's of elements and uses approximately 10 wires between the cold stage and room temperature electronics. This can significantly reduce the complexity of the readout circuits.

Karasik, Boris S.↗

High-bandwidth frequency domain multiplexed readout of transition-edge sensors for neutrinoless double beta decay searches

The next-generation of cryogenic neutrinoless double-beta decay experiments require increasingly fast readout in order to improve background discrimination. These experiments, operated as cryogenic calorimeters at ∼ 10 mK, are usually read out by high-impedance neutron transmutation doped (NTD) thermistors, which provide good energy resolution, but are limited by ∼ 1 ms response times. Superconducting detectors, such as transition-edge sensors (TESs) with a time resolution of ∼ 100 μs, offer superior timing performance over NTD semiconductor bolometers. To make this technology viable for an application to a thousand or more channels, multiplexed readout is necessary in order to minimize the thermal load and radioactive contamination induced by the readout. Frequency-domain multiplexing readout (fMUX) for TESs, previously developed at Berkeley Lab and McGill University, is currently in use for mm-wave telescopes with detector sampling rates in the order of 100 Hz. We demonstrate a new readout system, based on the McGill/Berkeley digital fMux readout, to satisfy the higher bandwidth and noise requirements of the next generation of TES-instrumented cryogenic calorimeters. Each multiplexing readout module comprises 10 superconducting resonators in the 1–5 MHz range and a DC superconducting quantum interference device (DC-SQUID), interfaced to high-speed field programmable gate array (FPGA)-based electronics for digital signal processing and low-latency SQUID feedback. The new readout samples detectors at 156 kHz, three orders of magnitude faster than its cosmology-oriented predecessor, and demonstrates a stable feedback bandwidth of 3 kHz in a real TES-based system.

47 OTHER INSTRUMENTATION↗

Fabrication of Ultrasensitive Transition Edge Sensor Bolometric Detectors for HIRMES

The high resolution mid-infrared spectrometer (HIRMES) is a high resolving power (R approx. 100,000) instrument operating in the 25-122 micron spectral range and will fly on board the Stratospheric Observatory for Far-Infrared Astronomy (SOFIA) in 2019. Central ot HIRMES are its two transition edge sensor (TES) bolometric cameras, an 8x16 detector high resolution array and a 64x16 detector low resolution array. Both types of detectors consist of MoAu TES fabricated on leg-isolated Si membranes. Whereas the high resolution detectors, with noise equivalent power (NEP) approx. 2 aW/square root of (Hz), are fabricated on 0.45 micron Si substrates, the low resolution detectors, with NEP approx. 10 aW/square root of (Hz), are fabricated on 1.40 micron Si. Here we discuss the similarities and difference in the fabrication methodologies used to realize the two types of detectors.

Detectors↗

A Path to High Efficiency Optical Coupling for HIRMES

The high-resolution mid-infrared spectrometer (HIRMES) under development for SOFIA (Stratospheric Observatory for Infrared Astronomy) is an instrument operating in the 25-122 μm spectral range with a spectral resolution R= Δ ʎ /ʎ ~100,000 and has two absorber-coupled transition edge sensor (TES) bolometric detector focal planes. We have developed novel NbTiN low stress absorber coatings which have the required optical impedance across the HIRMES operating band. The low intrinsic stress of these coatings allow for a peak-to-valley corrugation amplitude < 5 μm of the 450 nm thick, 1.4 mm x 1.7 mm detector pixels. Furthermore, these coatings have a superconducting transition temperature ~ 10 K, which allows them to simultaneously serve as an absorber in the desired signal band and a rejection filter at long wavelengths. This attribute makes them especially attractive for ultrasensitive absorber-coupled bolometric detector applications, because it helps in controlling the optical loading from out-of band radiation. We also discuss a novel method for integrating a wedged reflective absorber-termination to the detector array.

bolometers↗

Record Low NEP in the Hot-Electron Titanium Nanobolometers

We are developing hot-electron superconducting transition-edge sensors (TES) capable of counting THz photons and operating at T = 0.3K. We fabricated superconducting Ti nanosensors with Nb contacts with a volume of approx. 3x10(exp -3) cu microns on planar Si substrate and have measured the thermal conductance due to the weak electron-phonon coupling in the material G = 4x10(exp -14) W/K at 0.3 K. The corresponding phonon-noise NEP = 3x10(exp -19) W/Hz(sup 1/2). Detection of single optical photons (1550nm and 670nm wavelength) has been demonstrated for larger devices and yielded the thermal time constants of 30 microsec at 145 mK and of 25 microsec at 190 mK. This Hot-Electron Direct Detector (HEDD) is expected to have a sufficient energy resolution for detecting individual photons with (nu) > 1 THz where NEP approx. 3x10(exp -20) W/Hz(sup 1/2) is needed for spectroscopy in space.

transition edge sensors↗