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DOE OSTI2022

On the Ohmic-dominant heating mode of capacitively coupled plasma inverted by boundary electron emission

Electron emission from the boundary is ubiquitous in a capacitively coupled plasma (CCP) and precipitates nonnegligible influence on the discharge properties. Here, we present Particle-in-Cell/Monte Carlo Collision simulation of an Ohmic-dominant heating mode of the capacitively coupled plasma, where the stochastic heating vanishes and only Ohmic heating sustains the discharge due to sheath inversion by boundary electron emission. The inverted CCP features negative sheath potential without Bohm presheath, hence excluding plasma heating due to sheath edge oscillation. The particle and energy transport of the proposed heating mode is analyzed. The influence of boundary electron emission flux, source voltage, and neutral pressure on the transition between classic and Ohmic-dominant CCP heating modes is shown with designated simulation scans. Further, a modified inverse sheath–plasma coupling due to excessive ionization is discovered. In the end, key indicators of the proposed heating mode in plasma diagnostics are provided for future experimental verifications.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2023

Solvent effects determine the sign of the charges of maximum entropy and capacitance at silver electrodes

Fully harnessing electrochemical interfaces for reactions requires a detailed understanding of solvent effects in the electrochemical double layer. Predicting the significant impact of solvents on entropic and electronic properties of electrochemical interfaces has remained an open challenge of computational electrochemistry. Using molecular dynamics simulations of silver–water and silver–acetonitrile interfaces, we show that switching the solvent changes the signs for both the charge of maximum capacitance (CMC) and charge of maximum entropy (CME). Contrasting the capacitance and CME behavior of these two interfaces, we demonstrate that the preferred orientation of the solvent molecule and the corresponding charge density determine the sign of the CMC and CME and, hence, the qualitatively different charge asymmetry of the electrochemical interface.

Chemistry↗

DOE OSTI2023

Characterization of superconducting through-silicon vias as capacitive elements in quantum circuits

The large physical size of superconducting qubits and their associated on-chip control structures presents a practical challenge toward building a large-scale quantum computer. In particular, transmons require a high-quality-factor shunting capacitance that is typically achieved by using a large coplanar capacitor. Other components, such as superconducting microwave resonators used for qubit state readout, are typically constructed from coplanar waveguides, which are millimeters in length. Here, we use compact superconducting through-silicon vias to realize lumped-element capacitors in both qubits and readout resonators to significantly reduce the on-chip footprint of both of these circuit elements. We measure two types of devices to show that through-silicon vias are of sufficient quality to be used as capacitive circuit elements and provide a significant reduction in size over existing approaches.

Physics↗

DOE OSTI2024

Role of gas composition in weakened nonlinear standing wave excitation and improved plasma radial uniformity in very-high-frequency asymmetric capacitive Ar/CF 4 discharges

Abstract The higher harmonics generated by nonlinear sheath motion would enhance the standing wave effect, and thus lead to center-peaked plasma density profile in very-high-frequency (VHF) capacitive discharges. In this work, a nonlinear transmission line (NTL) model introduced in Zhouet al(2021Plasma Sources Sci. Technol.30125017) has been extended, with radial transport of various particles and nonlinear sheath motion into account, to investigate the effects of CF 4 fraction α on the nonlinear standing wave excitation and plasma radial uniformity in VHF (60 MHz) capacitively coupled Ar/CF 4 plasmas at 3 Pa. The results indicate that for pure Ar discharges (i.e. α = 0%), the nonlinearly excited harmonics with short wavelength significantly enhance the electron power absorption at the radial center, resulting in a pronounced central-high plasma density profile. As α increases, the high-order harmonics are gradually damped due to the increase of resistance, as well as the longer wavelength caused by thicker sheath thickness. Thus, the radial profile of the electron absorbed power density shifts from center-peak to edge-high. Besides, at the radial center, the electron density and Ar + ion density decrease with α , CF 3 + ion density shows an increasing trend, while F − ion density initially rises and then decreases. Moreover, the density profiles of all the species become more uniform at higher CF 4 fraction, due to the suppressed nonlinear standing wave excitation and the longer wavelength of the nonlinear harmonics.

Physics↗

DOE OSTI2024

Effects of low-frequency voltage on nonlinear standing wave excitation, plasma uniformity, and ion dynamics in dual-frequency asymmetric capacitive discharges

Abstract It is known that in very-high-frequency (VHF) capacitively coupled plasmas, the higher harmonics generated by nonlinear sheath motion can enhance the standing wave effect (SWE), which can lead to center-peaked plasma density profiles. In this work, an improved nonlinear electromagnetic model incorporating a transmission line model, an electron momentum balance model, a bulk plasma model, a collisionless nonlinear numerical sheath model, and an ion Monte-Carlo collision (MCC) model is developed to study the effects of low-frequency (LF) voltage V L on the nonlinear standing wave excitation, plasma uniformity, and ion energy and angular distribution functions (IEDFs and IADFs) in dual-frequency (DF) asymmetric capacitive argon discharges at relatively low pressure of 3 Pa. The plasma diffusion in the radial direction and ion dynamics within the LF oscillating sheath are self-consistently considered. The LF voltage V L at 2 MHz varies from 0 to 700 V while the HF voltage V H at 60 MHz is fixed at 100 V. Simulation results indicate that without the addition of an LF source (i.e. V L = 0 V), there are a considerable number of high-order harmonics with short wavelengths, leading to significant SWE and central peak in the radial plasma density profile. Nevertheless, the high-order harmonic excitations tend to be weakened and merely occur around the phase of the full LF sheath collapse due to a shorter characteristic damping time of the surface waves as V L increases. This, combined with increased surface wavelengths of both the driving frequency and the higher harmonics at a higher V L , leads to suppressed standing waves and improved plasma uniformity. Meanwhile, the simulations show that both the low and the high energy peaks of IEDF move towards higher energies, and the energy peak separation width ΔEbecomes wider with the increase of V L . The IEDF at the radial center of the powered electrode exhibits a broader ΔEthan that at the edge. For the IADF, an increased V L results in more ions incident on the electrode with a smaller deflection angle. Because of a thinner sheath and a higher sheath voltage at the electrode center, the peak value of IADF at the electrode center is greater than that at the edge.

Physics↗

DOE OSTI2024

Distance preserving machine learning for uncertainty aware accelerator capacitance predictions

Abstract Accurate uncertainty estimations are essential for producing reliable machine learning models, especially in safety-critical applications such as accelerator systems. Gaussian process models are generally regarded as the gold standard for this task; however, they can struggle with large, high-dimensional datasets. Combining deep neural networks with Gaussian process approximation techniques has shown promising results, but dimensionality reduction through standard deep neural network layers is not guaranteed to maintain the distance information necessary for Gaussian process models. We build on previous work by comparing the use of the singular value decomposition against a spectral-normalized dense layer as a feature extractor for a deep neural Gaussian process approximation model and apply it to a capacitance prediction problem for the High Voltage Converter Modulators in the Oak Ridge Spallation Neutron Source. Our model shows improved distance preservation and predicts in-distribution capacitance values with less than 1% error.

43 PARTICLE ACCELERATORS↗

DOE OSTI2020

Particle-in-cell simulations and passive bulk model of collisional capacitive discharge

Intermediate pressure (0.2–6.0 Torr), radio frequency capacitive discharges are of increasing importance in the thin film processing industry. However, existing low pressure (<0.1 Torr) discharge models are often used beyond their applicability in this pressure range. In this work, the authors performed one-dimensional particle-in-cell (PIC) simulations of a capacitive 2.5 cm gap argon discharge driven at 13.56 MHz with current density amplitude J 0 50 A/m 2 over a wide range of gas pressures p g = 0.04–20 Torr. For intermediate pressures, the PIC results showed that most of the ionization occurs near the plasma-sheath edges with very little occurring within the central bulk region. This led us to develop a “passive bulk” model of the discharge in which bulk electron heating does not contribute to ionization, and all the ionization is due solely to the sheath-heated electrons. The model assumes a constant ion-neutral mean free path λ i in the plasma bulk and either constant λ i or constant ion mobility μ i in the sheaths. The model is solved using an electron temperature iteration scheme. The PIC scalings of the discharge equilibrium parameters (e.g., electron density and temperature, sheath width, and voltage) with the input parameters p g and J 0 showed good agreement with those of the passive bulk model. A constant μ i sheath model showed the best agreement with the PIC results in the intermediate pressure regime of interest, but a constant λ i model is simpler to implement and showed reasonable agreement over a wide pressure range.

36 MATERIALS SCIENCE↗

DOE OSTI2021

Erosion of focus rings in capacitively coupled plasma etching reactors

In plasma etching reactors, the structure surrounding the wafer, often called a focus ring (FR), plays an important role in maintaining uniform fluxes of reactants across the wafer. The FR is typically made of dielectric materials. During the plasma etching process, the sheath that forms over the wafer to accelerate ions anisotropically into the surface extends over the FR. Electrical charging of the FR modifies the sheath relative to that over the wafer. On the one hand, one wants the sheath to be uniform across the wafer-FR boundary to enable uniform fluxes to the edge of the wafer. On the other hand, maintaining a high voltage sheath over the FR will erode the FR, which is undesirable as the FR is a consumable component that must be periodically replaced in high volume manufacturing. In this work, we computationally investigated the consequences of dielectric constant ε of the FR materials on erosion of the FR. The series capacitance of the FR and its underlying structure is typically smaller than that of the wafer and its underlying structure. As a result, the FR charges quickly relative to the wafer, which then reduces the voltage across the sheath on top of the FR. The ion energy and angular distributions (IEADs) striking the FR are, therefore, generally lower in energy with a broader angular distribution. With ε = 2, the ion energies striking the middle to the outer edge of the FR are 30–180 eV, whereas for ε = 100, the ion energies are 120–380 eV. At the transition between the wafer and the FR, there is a skew in the IEAD as large as 15° that results from the difference in sheath thickness above the wafer and the FR. This skew and the erosion rate across the FR are functions of the dielectric constant of the FR material. With low ε, the FR charges quickly, less plasma is produced above the FR, and there is less voltage across the sheath that results in less FR erosion. Increasing ε of the FR produces a higher sheath voltage as well as higher ion fluxes over the FR, which increases erosion, while the skew at the edge of the wafer is less severe. Further, the material of the subsurface portion of the FR, which dominates its capacitance, is an important consideration in the design of the substrate assembly.

36 MATERIALS SCIENCE↗

DOE OSTI2020

Capacitance of thin films containing polymerized ionic liquids

Electrode-polymer interfaces dictate many of the properties of thin films such as capacitance, the electric field experienced by polymers, and charge transport. However, structure and dynamics of charged polymers near electrodes remain poorly understood, especially in the high concentration limit representative of the melts. To develop an understanding of electric field–induced transformations of electrode-polymer interfaces, we have studied electrified interfaces of an imidazolium-based polymerized ionic liquid (PolyIL) using combinations of broadband dielectric spectroscopy, specular neutron reflectivity, and simulations based on the Rayleigh’s dissipation function formalism. Overall, we obtained the camel-shaped dependence of the capacitance on applied voltage, which originated from the responses of an adsorbed polymer layer to applied voltages. This work provides additional insights related to the effects of molecular weight in affecting structure and properties of electrode-polymer interfaces, which are essential for designing next-generation energy storage and harvesting devices.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2024

Subsurface electrical conductivity across the BEO site inferred using a capacitively coupled resistivity survey in May 2013, Utqiagvik, Alaska

Multiple transects across and around the Barrow Environmental Observatory (BEO) site were surveyed using a capacitively coupled resistivity tool to infer the subsurface electrical conductivity in the top ~6 m in order to improve the understanding of heterogeneity in ice and salinity content. This work was led by the environmental geophysics team from Lawrence Berkeley National Laboratory as part of the Next-Generation Ecosystem Experiments: Arctic (NGEE Arctic). The acquisition was performed in May 2013 using a capacitively coupled resistivity tool (OhmMapper from Geometrics, Inc) mounted behind a sled hooked to a snowmobile. Twenty-eight ~750 m long transects cover the NGEE intensive site (polygon areas A, B, C, D) in the BEO with a measurement (apparent resistivity for 5 different geometries) taken every 1.5 to 2 m. The survey also includes other transects that have been acquired along Electrical Resistivity Tomography (ERT) transects previously acquired at the site (Site 0, AB, and BD), and several long transects (up to 7 km each) around the BEO site crossing several Drained Thawed Lake Basins (DTLB). The various transects acquired during this survey cover a distance of about 100 km. All the datasets are provided with the acquisition geometry and the associated subsurface apparent electrical conductivity. In addition, the 28 transects at the BEO intensive site were inverted to infer the subsurface electrical conductivity. Unprocessed and processed data products are included in this package. This metadata document contains a description of the survey and processing steps and the inferred products.The Next-Generation Ecosystem Experiments: Arctic (NGEE Arctic) was a 15-year research effort (2012-2027) to reduce uncertainty in Earth System Models by developing a predictive understanding of carbon-rich Arctic ecosystems and feedbacks to climate. NGEE Arctic was supported by the Department of Energy’s Office of Biological and Environmental Research. The NGEE Arctic project had two field research sites: 1) located within the Arctic polygonal tundra coastal region on the Barrow Environmental Observatory (BEO) and the North Slope near Utqiagvik (Barrow), Alaska, and 2) multiple areas in the discontinuous permafrost region of the Seward Peninsula north of Nome, Alaska. Through observations, experiments, and synthesis with existing datasets, NGEE Arctic provided an enhanced knowledge base for multi-scale modeling and contributed to improved process representation at global pan-Arctic scales within the Department of Energy’s Earth system Model (the Energy Exascale Earth System Model, or E3SM), and specifically within the E3SM Land Model component (ELM).

54 ENVIRONMENTAL SCIENCES↗

DOE OSTI2024

Microscopic 3D Graphene for High-Performance Supercapacitors with Ultra-High Areal Capacitance

Despite graphene being considered as an ideal supercapacitor electrode material, its use in commercial devices is limited because few methods exist to produce high-quality graphene at large scale and low-cost. We report a simple method to synthesize 3D graphene by graphenization of coal tar pitch with a K2CO3 catalyst. This produces 3D graphenes with high specific surface areas up to 2113 m2 g-1 and exceptional crystallinity (Raman ID/IG as low as ~ 0.15). The material has an outstanding specific capacitance of 182.6 F g-1 at a current density of 1.0 A g-1. This occurs at mass loading of 30 mg cm-2 which is 3 times higher than commercial requirements, yielding an ultra-high areal capacitance of 5.48 F cm-2. Moreover, the K2CO3 is recycled and reused over 10 cycles. The synthesis method and resulting electrocapacitive performance properties create new opportunities for using 3D graphene more broadly in practical supercapacitor devices.

Pham, Viet Hung↗

DOE OSTI2024

High-Density Capacitive Energy Storage in Low-Dielectric-Constant Polymer PMMA/2D Mica Nanofillers Heterostructure Composite

The ubiquitous, rising demand for energy storage devices with ultra-high storage capacity and efficiency has drawn tremendous research interest in developing energy storage devices. Dielectric polymers are one of the most suitable materials used to fabricate electrostatic capacitive energy storage devices with thin-film geometry with high power density. In this work, we studied the dielectric properties, electric polarization, and energy density of PMMA/2D Mica nanocomposite capacitors where stratified 2D nanofillers are interfaced between the multiple layers of PMMA thin films using two heterostructure designs of the capacitors, PMMA/2D Mica/PMMA (PMP) and PMMA/2D Mica/PMMA/2D Mica/PMMA (PMPMP). The incorporation of a 2D Mica nanofiller in the low-dielectric-constant PMMA leads to an enhancement in the dielectric constant, with ∆ε ~ 15% and 53% for PMP and PMPMP heterostructures at room temperature. Additionally, a significant improvement in discharged energy density was measured for the PMPMP capacitor (Ud ~ 38 J/cm3 at 825 MV/m) compared to the pristine PMMA (Ud ~ 9.5 J/cm3 at 522 MV/m) and PMP capacitors (Ud ~ 19 J/cm3 at 740 MV/m). This excellent capacitive and energy storage performance of the PMMA/2D Mica heterostructure nanocomposite may inform the fabrication of thin-film, high-density energy storage capacitor devices for potential applications in various platforms.

Biochemistry & Molecular Biology↗

DOE OSTI2020

Mesoporous nanocrystalline film architecture for capacitive storage devices

A mesoporous, nanocrystalline, metal oxide construct particularly suited for capacitive energy storage that has an architecture with short diffusion path lengths and large surface areas and a method for production are provided. Energy density is substantially increased without compromising the capacitive charge storage kinetics and electrode demonstrates long term cycling stability. Charge storage devices with electrodes using the construct can use three different charge storage mechanisms immersed in an electrolyte: (1) cations can be stored in a thin double layer at the electrode/electrolyte interface (non-faradaic mechanism); (2) cations can interact with the bulk of an electroactive material which then undergoes a redox reaction or phase change, as in conventional batteries (faradaic mechanism); or (3) cations can electrochemically adsorb onto the surface of a material through charge transfer processes (faradaic mechanism).

25 ENERGY STORAGE↗

DOE OSTI2022

Flow-through electrode capacitive deionization cell

Disclosed here is a capacitive deionization device for removing ions from a target solution. The capacitive deionization device includes a first porous electrode, a second porous electrode, a first header plate, a second header plate, and a sealant. The second porous electrode is disposed below and spaced from the first porous electrode. The first header plate is disposed on the first porous electrode. The first header plate defines an input flow channel that is in fluidic communication with the first porous electrode. The second header plate is disposed below the second porous electrode. The second header plate defines an output flow channel that is in fluidic communication with the second porous electrode. The sealant is disposed between the first header plate and the second header plate and surrounds the first porous electrode and the second porous electrode.

Campbell, Patrick G.↗

DOE OSTI2022

Multi-modular capacitive wireless power transfer circuit and related techniques

A high performance kilowatt-scale large air-gap multi-modular capacitive wireless power transfer (WPT) system is provided for electric vehicle (EV) charging. In one particular implementation, the multi-modular system achieves high power transfer while maintaining fringing electric fields within prescribed safety limits. The fringing fields are reduced using near-field phased-array field-focusing techniques, wherein the adjacent modules of the multi-modular system are out-phased with respect to one another. The inter-module interactions in this multi-modular system can be modeled, and an approach to eliminate these interactions in a practical EV charging environment is provided. To illustrate one example implementation, a prototype 1.2-kW 6.78-MHz 12-cm air-gap multi-modular capacitive WPT system comprising two 600-W modules is provided. This prototype system achieves 21.2 kW/m2 power transfer density and a peak efficiency of 89.8%. This multi-modular system also achieves a fringing field reduction of 50% compared to its individual modules.

Afridi, Khurram K.↗

DOE OSTI2024

Mesoporous nanocrystalline film architecture for capacitive storage devices

Dunn, Bruce S.↗

DOE OSTI2024

Advanced Multi-Dimensional Capacitance Sensors Based Subsea Multiphase Mass Flow Meter to Measure and Monitor Offshore Enhanced Oil

This innovation is based on advanced multi-dimensional extensions of ECVT sensors that involve ECVT, Displacement Current Phase Tomography (DCPT), Maxwell-Wagner-Sillars polarization effect (MWS), and velocimetry which exploit the variation of electric properties between the oil, water, and gas coming out of the well. Capacitance sensors are embedded on the inside of a pipe spool and placed in-line with the subsea oil line piping on the extraction end of the well. The difference in dielectric, dielectric loss, surface polarization, and velocity of each phase are used in the multi-dimensional algorithm to measure the volume fraction, distribution, velocity, mass flow rate, and flow regime of the mixture moving through the pipe.

02 PETROLEUM↗

DOE OSTI2023

Propellant Mass Gauging in a Spherical Tank under Micro-Gravity Conditions Using Capacitance Plate Arrays and Machine Learning

Propellant mass gauging under micro-gravity conditions is a challenging task due to the unpredictable position and shape of the fuel body inside the tank. Micro-gravity conditions are common for orbiting satellites and rockets that operate on limited fuel supplies. Capacitance sensors have been investigated for this task in recent years; however, the effect of various positions and shapes of the fuel body is not analyzed in detail. In this paper, we investigate this with various fill types, such as annular, core-annular, and stratified fills at different positions. We compare the performance among several curve-fitting-based approaches and a machine-learning-based approach, the latter of which offers superior performance in estimating the fuel content.

47 OTHER INSTRUMENTATION↗