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At least 91 records · Page 5

Langmuir Probe Measurements in an Inductively Coupled Ar/CF4 Plasmas

Technological advancement in the microelectronics industry requires an understanding of the physical and chemical processes occurring in plasmas of fluorocarbon gases, such as carbon tetrafluoride (CF4) which is commonly used as an etchant, and their mixtures to optimize various operating parameters. In this paper we report data on electron number density (ne), electron temperature'(Te), electron energy distribution function (EEDF), mean electron energy, ion number density (ni), and plasma potential (Vp) measured by using Langmuir probe in an inductively coupled 13.56 MHz radio frequency plasmas generated in 50%Ar:50%CF4 mixture in the GEC cell. The probe data were recorded at various radial positions providing radial profiles of these plasma parameters at 10-50 mTorr pressures and 200 W and 300 W of RF power. Present measurements indicate that the electron and ion number densities increase with increase in pressure and power. Whereas the plasma potential and electron temperature decrease with increase in pressure, and they weakly depend on RF power. The radial profiles exhibit that the electron and ion number densities and the plasma potential peak at the center of the plasma with an exponential fall away from it, while the electron temperature has a minimum at the center and it increases steadily towards the electrode edge. The EEDFs have a characteristic drop near the low energy end at all pressures and pressures and their shapes represent non-Maxwellian plasma and exhibit more like Druyvesteyn energy distribution.v

Rao, M. V. V. S.↗

Analysis of ISS Plasma Interaction

To date, the International Space Station (ISS) has been one of the largest objects flown in lower earth orbit (LEO). The ISS utilizes high voltage solar arrays (160V) that are negatively grounded leading to pressurized elements that can float negatively with respect to the plasma. Because laboratory measurements indicate a dielectric breakdown potential difference of 80V, arcing could occur on the ISS structure. To overcome the possibility of arcing and clamp the potential of the structure, two Plasma Contactor Units (PCUs) were designed, built, and flown. Also a limited amount of measurements of the floating potential for the present ISS configuration were made by a Floating Potential Probe (FPP), indicating a minimum potential of 24 Volts at the measurement location. A predictive tool, the ISS Plasma Interaction Model (PIM) has been developed accounting for the solar array electron collection, solar array mast wire and effective conductive area on the structure. The model has been used for predictions of the present ISS configuration. The conductive area has been inferred based on available floating potential measurements. Analysis of FPP and PCU data indicated distribution of the conductive area along the Russian segment of the ISS structure. A significant input to PIM is the plasma environment. The International Reference Ionosphere (IRI 2001) was initially used to obtain plasma temperature and density values. However, IRI provides mean parameters, leading to difficulties in interpretation of on-orbit data, especially at eclipse exit where maximum charging can occur. This limits our predicative capability. Satellite and Incoherent Scatter Radar (ISR) data of plasma parameters have also been collected. Approximately 130,000 electron temperature (Te) and density (Ne) pairs for typical ISS eclipse exit conditions have been extracted from the reduced Langmuir probe data flown aboard the NASA DE-2 satellite. Additionally, another 18,000 Te and Ne pairs of ISR data from several radar locations around the globe were used to assure consistency of the satellite data. PIM predictions for ISS charging made with this data correlated very well with FPP data, indicating that the general physics of spacecraft charging with high voltage solar arrays have been captured. The predictions also provided the probabilities of occurrences for ISS charging. These probabilities give a numerical measure of the number of times when the ISS will approach or exceed the vehicle plasma hazard conditions for each configuration. In this paper we shall present the interaction mechanisms between the ISS and the surrounding plasma and give an overview of the PIM components. PIM predictions are compared with available data followed by a discussion of the variability of plasma parameters and the conductive area on the ISS. The ISS PIM will be further tested and verified as data from the Floating Potential Measurement Unit become available, and construction of the ISS continues.

Reddell, Brandon↗

Experimentally Determined Plasma Parameters in a 30 cm Ion Engine

Single planar Langmuir probes and fiber optic probes are used to concurrently measure the plasma properties and neutral density variation in a 30cm diameter ion engine discharge chamber, from the immediate vicinity of the keeper to the near grid plasma region. The fiber optic probe consists of a collimated optical fiber recessed into a double bore ceramic tube fitted with a stainless steel light-limiting window. The optical fiber probe is used to measure the emission intensity of excited neutral xenon for a small volume of plasma, at various radial and axial locations. The single Langmuir probes, are used to generate current-voltage characteristics at a total of 140 spatial locations inside the discharge chamber. Assuming a maxwellian distribution for the electron population, the Langmuir probe traces provide spatially resolved measurements of plasma potential, electron temperature, and plasma density. Data reduction for the NSTAR TH8 and TH15 throttle points indicates an electron temperature range of 1 to 7.9 eV and an electron density range of 4e10 to le13 cm(sup -3), throughout the discharge chamber, consistent with the results in the literature. Plasma potential estimates, computed from the first derivative of the probe characteristic, indicate potential from 0.5V to 11V above the discharge voltage along the thruster centerline. These values are believed to be excessively high due to the sampling of the primary electron population along the thruster centerline. Relative neutral density profiles are also obtained with a fiber optic probe sampling photon flux from the 823.1 nm excited to ground state transition. Plasma parameter measurements and neutral density profiles will be presented as a function of probe location and engine discharge conditions. A discussion of the measured electron energy distribution function will also be presented, with regards to variation from pure maxwellian. It has been found that there is a distinct primary population found along the thruster centerline, which causes estimates of electron temperature, electron density, and plasma potential, to err on the high side, due this energetic population. Computation of the energy distribution fimction of the plasma clearly indicates the presence of primaries, whose presence become less obvious with radial distance from the main discharge plume.

near grid plasma↗

About the influence of electron temperature and relative ionic composition on ion depletion in the wake of the AE-C satellite

Data from the cylindrical electrostatic probe and from the Bennett ion mass spectrometer on board the AE-C satellite were examined in order to determine the influence of electron temperature (Te) and ion composition on the amount of ion depletion in the wake of an ionospheric satellite. It is observed that both electron temperature and ionic composition significantly influence the amount of ion depletion in the near wake zone, as measured by the ion current collected by the cylindrical probe mounted about 32 cm from the surface of the satellite. The ion current in the wake in an O(+) dominated plasma decreases with respect to ambient by about two orders of magnitude at a Te of about 1000 K and by a factor of about 30 at a Te of about 3000 K. For a plasma where the O(+) density equals the H(+) density, the ion current decreases by a factor of 6 in the wake at a Te of about 1000 K and by a factor of 2.3 at 3000 K.

Samir, U.↗

A Coupled Plasma Dynamics and Gas Flow Model for Semiconductor Processing

A continuum modeling approach by self-consistently coupling plasma dynamics and gas flow will be presented for the analysis of high density plasma reactors. Experimental data shows that gas flow distribution affects the etch rate uniformity even at low pressures (6-20 mTorr) and flow rates (20-70 sccm). This study will investigate the effects of gas flow and gas energy on bulk plasma densities and temperatures using a continuum model. The model solves multidimensional equations of mass balance for neutrals and ions, gas momentum, separate energy equations for electrons and neutrals and Maxwell's equations for power coupling. A test case of N2 plasma in a 300mm TCP etch reactor, for which hybrid model and Langmuir probe data are available, is chosen for this analysis. Our preliminary results show that modeling gas flow and energy improves the predictions of electron density and its spatial variation in the reactor when compared with the experimental data. The aim of this study is to identify the operating conditions for the TCP reactor when a self-consistent modeling of gas flow is important.

Bose, Deepak↗

Sites of fine-scale electron density turbulence in the interstellar medium

Observations of radio-wave scattering effects probe interstellar electron-density turbulence. But with limited use of complementary data sets only broad conclusions have been obtained. The locations of this turbulence are unknown (phases, objects, etc.), as is the mechanism for its production, although it could play a role in various galactic processes. The IRAS data set was used to search for correlations between scattering and structures traced by infrared emitting dust. The existent HI (21-cm line emission), and 408-MHz radio-continuum all-sky surveys were used to search for correlations between scattering and structures traced by these emissions. Only lines of sight outside the galactic plane were considered (to better delimit the structures which might be causing scattering). No correlation is apparent between 21-cm line emission, or infrared continuum emission and interstellar scattering. However, a correlation exists between the scattering toward extragalactic radio sources and 408-MHz continuum emission.

Simonetti, John H.↗

Electrostatic Probe Measurements of Plasma Surrounding Three 25,000 Foot Per Second Reentry Flight Experiments

A high-altitude electrostatic probe experiment is described and data are presented for three RAM C reentries at velocities of approximately 25 OOO feet per second. The electron density profiles inferred from the probe measurements are compared with theoretical calculations, and the probable cause of significant disagreement is briefly discussed. Probe measurements during material-addition sequences for radio-blackout alleviation are presented, and comparisons of probe measurements with other pertinent diagnostic measurements are made.

W Linwood Jones, Jr↗

Studies of the chemistry of the nightside ionosphere of Venus

A combination of numerical modeling and analysis of the Pioneer Venus UADS data base is studied, specifically data from the orbiter ion mass spectrometer (OIMS), orbiter neutral mass spectrometer (ONMS), and orbiter electron temperature probe (OETP). A one dimensional model of the Venus nightside ionosphere was set up in which downward fluxes of atomic ions are introduced at the upper boundary to simulate transport of ions from the dayside. The model shows that the densities of mass-28 ions, CO(+) + N(2+), resulting from an influx of atomic ions from the dayside are quite small, due to the high ionization potentials of CO and N2 that make chemical production difficult. A look at the data reveals that the actual densities of mass-28 ions are quite variable, from values near 10 to more than 10(exp 4) cm(exp -3). The excess mass-28 ions are assumed to be produced by electron precipitation and that the presence of high densities of mass-28 ions is a signature of auroral precipitation. A discussion of the atomic oxygen green line in the nightglow of Venus, which is produced mainly by dissociative recombination of O(2+), is presented. Original calculations of production rates of excited states for models based on Pioneer Venus data are also presented.

Fox, J. L.↗

Influence of ablation impurities on blunt body re-entry ionization

Electron density profiles which include the effect of an ablated sodium impurity were computed for the boundary layer on a blunt-nosed body re-entering the atmosphere at 7.62 km/sec. Profiles are computed from the nose to a distance of four diameters along the RAM C-payload. A finite-difference, laminar, nonequilibrium chemistry boundary-layer program was used. Comparison of theory with S-band diagnostic antenna results, electron concentration deduced from X- and C-band attenuation data, and Langmuir probe data at several different aft body locations show that agreement is good at high altitude. At the lower altitudes there is disagreement between theory and S-band antenna data where the apparent discrepancy is attributed to the three-body recombination rate constant used for deionization of sodium coupled with the effect of angle of attack.

Schexnayder, C. J., Jr.↗

Studies of noble-metal thermocouple stability at high temperatures

Two investigatory studies on performance characteristics of noble-metal thermocouples are described. (1) thermoelectric stability as affected by preferential oxidation of iridium in the system iridium-40% rhodium versus iridium, and (2) the effects of temperature gradients on the emf stability of the systems platinum-13% rhodium versus platinum and iridium-40% rhodium versus iridium, operating in air. The stability investigation was carried out at three temperatures - 1700, 1850, and 2000 C - by comparing the output of the test thermocouple in air with the output of an identically constructed reference thermocouple in nitrogen. The results show that no calibration shift was observed producing a change in output greater than that corresponding to a 2.0% change in the indicated temperature for all samples tested. The investigation of gradient effects was carried out by subjecting test thermocouples to both severe and mild gradients for periods up to 200 hours. For the platinum system, the operating temperature was 1500 C with gradients of 1475 and 700 C/cm; for the iridium system, 2000 C with gradients of 700, 1500, and 1975 C/cm. Exposure to temperature gradients was found to introduce significant changes in calibration for both systems. In both investigations, the thermoelements were examined by means of electron-probe analysis and by metallographic methods to detect chemical and structural changes. Data and micrographs are presented.

Freeze, P.↗

An experimental investigation of mesospheric ionization

Mesospheric ionization and its variability are examined. Data were obtained primarily by the parachute-borne blunt probe technique conducted in coordinated rocket experiments at White Sands Missile Range, New Mexico and Wallops Island, Virginia. Electrical conductivity measurements and deduced charge density values from ten rocket launches are presented and discussed. Positive ion conductivity and electron density were found to be relatively invariant with height between 45 and 60 km. Variations in positive conductivity of a factor of two and enhancements in negative conductivity by as much as a factor of four were measured by the blunt probe. A simple lumped parameter ion chemistry model is shown to satisfactorily explain the charge density values for the undisturbed lower D-region. Implications of the data in terms of this model are considered. The principal loss mechanism for positive ions in the 45 to 60 km. region is concluded to be dissociative recombination. Electron densities deduced from the conductivity data are explained by detachment involving a minor neutral constituent which is mixed between 65 and 45 km. and then cuts off sharply below 45 km. A correlation study involving blunt probe measurements shows relatively good agreement between variations in positive conductivity and temperature.

Mitchell, J. D.↗

Characteristics of the Dust-Plasma Interaction Near Enceladus' South Pole

We present RPWS Langmuir probe data from the third Enceladus flyby (E3) showing (he presence of dusty plasma near Enceladus' South Pole. There is a sharp rise in both the electron and ion number densities when the spacecraft traverses through Enceladus plume. The ion density near Enceladus is found to increase abruptly from about 10(exp 2) cm (exp -3) before the closest approach to 10(exp 5) cm (exp -3) just 30 s after the closest approach, an amount two orders of magnitude higher than the electron density. Assuming that the inconsistency between the electron and ion number densities is due to the presence of dust particles that are collecting the missing electron charges, we present dusty plasma characteristics down to sub-micron particle sizes. By assuming a differential dust number density for a range in dust sizes and by making use of Langmuir probe data, the dust densities for certain lower limits in dust size distribution were estimated. In order to achieve the dust densities of micrometer and larger sized grains comparable to the ones reported in the literature. we show that the power law size distribution must hold down to at least 0.03 micron such that the total differential number density is dominated by the smallest sub-micron sized grains. The total dust number density in Enceladus' plume is of the order of l0(exp 2) cm(exp -3) reducing to 1 cm(exp -3) in the E- ring. The dust density for micrometer and larger sized grains is estimated to be about 10(exp -4) cm(exp -3) in the plume while it is about 10(exp -6) - 10(exp -7) cm(exp -3) in the E-ring. Dust charge for micron sized grains is estimated to be about eight thousand electron charges reducing to below one hundred electron charges for 0.03 micron sized grains. The effective dusty plasma Debye length is estimated and compared with intergrain distance as well as the electron Debye length. The maximum dust charging time of 1.4 h is found for 0.03 11mmicron sized grains just 1 min before the closest approach. The charging time decreases substantially in the plume where it is only a fraction of a second for 1 micron sized grains, 1 s for 0.l micron sized grains and about 10 s for 0.03 micron sized grains.

Shafiq, Muhammad↗

Electron attachment line shapes, cross sections, and rate constants at ultralow energies in CF3SO3H, (CF3SO2)2O, and CF3I

Electron attachment cross sections are reported in the energy range 0-160 meV, and at resolutions of 6.0-6.5 meV (FWHM) for the molecules CF3SO3H (triflic acid), (CF3SO2)2O (triflic anhydride), and CF3I (methyl iodide). Use is made of the Kr photoionization method. Attachment line shapes are deconvoluted from the spectral slit (electron energy) function, and are converted to cross sections by normalization to thermal attachment rate constants at 300 K. Rate constants as a function of mean electron energy are calculated from the cross sections using a Maxwellian electron energy distribution function. Present data are compared with flowing-afterglow, Langmuir-probe results in triflic acid and anhydride, and with high-Rydberg ionization results in CF3I.

Alajajian, S. H.↗

Indirect Calibration In Electron-Probe Microanalysis

Technique for indirect calibration in electron-probe microanalysis reduces number of measurements needed without significantly degrading precision of measurement data. Advantageous when many analyses must be performed; for example, determining varying chemical composition at many positions across specimen of multicomponent alloy. Time spent acquiring data reduced considerably.

Terepka, F. M.↗

Observations of the nightside Venus ionosphere: Final encounter of the Pioneer Venus Orbiter Ion Mass Spectrometer

During the last orbital sequences of the Pioneer-Venus spacecraft prior to final encounter and atmospheric entry, data were obtained by the Orbiter Ion Mass Spectrometer (OIMS) at the lowest periapsis altitudes of the mission. These data verified OIMS observations of the nightside ionospheric peak reported earlier in the mission, and revealed additional details related to composition, energetics and maintenance of the nightside ionosphere. OIMS observations of the ion peak during the final encounter sequence are compared with radio occultation data and OIMS peak observations obtained earlier. OIMS ion density and Orbiter Electron Temperature Probe (OETP) electron density are found to correlate near the peak. Coupling of mass channels 30 and 32 during nightside passes is observed and its interpretation considered. Changes in high altitude composition of the nightside ionosphere, especially the relative changes in O(+) and H(+), are described.

Cloutier, P. A.↗