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Deep Etching Process Developed for the Fabrication of Silicon Carbide Microsystems

Silicon carbide (SiC), because of its superior electrical and mechanical properties at elevated temperatures, is a nearly ideal material for the microminiature sensors and actuators that are used in harsh environments where temperatures may reach 600 C or greater. Deep etching using plasma methods is one of the key processes used to fabricate silicon microsystems for more benign environments, but SiC has proven to be a more difficult material to etch, and etch depths in SiC have been limited to several micrometers. Recently, the Sensors and Electronics Technology Branch at the NASA Glenn Research Center at Lewis Field developed a plasma etching process that was shown to be capable of etching SiC to a depth of 60 mm. Deep etching of SiC is achieved by inductive coupling of radiofrequency electrical energy to a sulfur hexafluoride (SF6) plasma to direct a high flux of energetic ions and reactive fluorine atoms to the SiC surface. The plasma etch is performed at a low pressure, 5 mtorr, which together with a high gas throughput, provides for rapid removal of the gaseous etch products. The lateral topology of the SiC microstructure is defined by a thin film of etch-resistant material, such as indium-tin-oxide, which is patterned using conventional photolithographic processes. Ions from the plasma bombard the exposed SiC surfaces and supply the energy needed to initiate a reaction between SiC and atomic fluorine. In the absence of ion bombardment, no reaction occurs, so surfaces perpendicular to the wafer surface (the etch sidewalls) are etched slowly, yielding the desired vertical sidewalls.

Beheim, Glenn M.↗

Variable Gravity Effects on the Cooling Performance of a Single Phase Confined Spray

The objective of this paper is to discuss the testing of a spray cooling experiment designed to be flown on NASA's KC-135 Reduced Gravity Testing Platform. Spray cooling is an example of a thermal management technique that may be utilized in high flux heat acquisition and high thermal energy transport concepts. Many researchers have investigated the utility of spray cooling for the thermal management of devices generating high heat fluxes. However, there has been little research addressing the physics and ultimate performance of spray cooling in a variable gravity environment. An experimental package, consisting of a spray chamber coupled to a fluid delivery loop system, was fabricated for variable gravity flight tests. The spray chamber contains two opposing nozzles spraying on target Indium Tin Oxide (ITO) heaters. These heaters are mounted on glass pedestals, which are part of a sump system to remove unconstrained liquid from the test chamber. Liquid is collected in the sumps and returned to the fluid delivery loop. Thermocouples mounted in and around the pedestals are used to determine both the heat loss through the underside of the IT0 heater and the heat extracted by the spray. A series of flight tests were carried out aboard the KC-135, utilizing the ability of the aircraft to produce various gravity conditions. During the flight tests, for a fixed flow rate, heat input was varied at 20, 30, 50, and 80W with variable gravities of 0.01, 0.16, 0.36, and 1.8g. Flight test data was compared to terrestrial baseline data in addition to analytical and numerical solutions to evaluate the heat transfer in the heater and support structure . There were significant differences observed in the spray cooling performance as a result of variable gravity conditions and heat inputs. In general, the Nussult number at the heater surface was found to increase with decreasing gravity conditions for heat loads greater than 30W.

Michalak, Travis↗

Transparent, Weakly Conductive Films for Space Applications

Electrically insulating spacecraft surfaces are vulnerable to nonuniform charge buildup due to particles emitted by the sun. On Mars, insulating surfaces of exploration vehicles and structures will be affected by dust coatings possibly held in place by triboelectric surface charge. Application of a conductive film may be a solution to the charging problem, but the coating must be highly transparent if used on solar panels, lenses, etc. Sheet resistivity requirements depend on the application and are in the range 10(exp 2) - 10(exp 8) ohms/square. Co-deposited indium tin oxide (ITO) and MgF2 is promising, with high transparency, tailorable electrical properties, and durability to atomic oxygen. Due to ITO's relatively narrow bandgap (approximately 3.5 eV), the film might absorb enough ultraviolet to protect polymeric substrates. Recent work on dual-magnetron-sputtered ITO-MgF2 showed that a variety of polymeric substrates can be coated at room temperature. However, the sheet resistivity is very sensitive to composition, suggestive of a percolation transition. This could be a serious problem for large-scale coating production. We will report on attempts to control film composition by plasma emission monitoring of the ITO and MgF2 guns.

Griffin, John↗

Slightly Conductive Transparent Films for Space Applications: Manufacturability and Durability

Highly transparent, slightly conductive films of co-deposited indium tin oxide (ITO) and MgF, have possible applications for environmental protection of exterior surfaces of spacecraft. Reliable preparation of films with the desired sheet resistivity (approximately 10(exp 8) ohms/square) is difficult because the electrical properties of ITO-Mg F, are highly dependent on film composition. We have investigated the use of plasma emission monitoring to improve the reproducibility of films prepared by RF magnetron sputtering. While considerable improve ment was observed, it appears that some in-situ electrical or optica l characterization will be needed for reliable production coating wit h ITO-MgF,. We have also done further evaluation of a possibly undesi rable photoconductive effect previously observed in these films.

Uppala, N.↗

Antenna sunshield membrane

An RF-transparent sunshield membrane covers an antenna reflector such as a parabolic dish. The blanket includes a single dielectric sheet of polyimide film 1/2-mil thick. The surface of the film facing away from the reflector is coated with a transparent electrically conductive coating such as vapor-deposited indium-tin oxide. The surface of the film facing the reflector is reinforced by an adhesively attached polyester or glass mesh, which in turn is coated with a white paint. In a particular embodiment of the invention, polyurethane paint is used. In another embodiment of the invention, a layer of paint primer is applied to the mesh under a silicone paint, and the silicone paint is cured after application for several days at room temperature to enhance adhesion to the primer.

Bogorad, Alexander↗

Reflective liquid crystal light valve with hybrid field effect mode

There is disclosed a high performance reflective mode liquid crystal light valve suitable for general image processing and projection and particularly suited for application to real-time coherent optical data processing. A preferred example of the device uses a CdS photoconductor, a CdTe light absorbing layer, a dielectric mirror, and a liquid crystal layer sandwiched between indium-tin-oxide transparent electrodes deposited on optical quality glass flats. The non-coherent light image is directed onto the photoconductor; this reduces the impedance of the photoconductor, thereby switching the AC voltage that is impressed across the electrodes onto the liquid crystal to activate the device. The liquid crystal is operated in a hybrid field effect mode. It utilizes the twisted nematic effect to create a dark off-state (voltage off the liquid crystal) and the optical birefringence effect to create the bright on-state. The liquid crystal thus modulates the polarization of the coherent read-out or projection light responsively to the non-coherent image. An analyzer is used to create an intensity modulated output beam.

Boswell, Donald D.↗

Electromagnetically Clean Solar Arrays

The term 'electromagnetically clean solar array' ('EMCSA') refers to a panel that contains a planar array of solar photovoltaic cells and that, in comparison with a functionally equivalent solar-array panel of a type heretofore used on spacecraft, (1) exhibits less electromagnetic interferences to and from other nearby electrical and electronic equipment and (2) can be manufactured at lower cost. The reduction of electromagnetic interferences is effected through a combination of (1) electrically conductive, electrically grounded shielding and (2) reduction of areas of current loops (in order to reduce magnetic moments). The reduction of cost is effected by designing the array to be fabricated as a more nearly unitary structure, using fewer components and fewer process steps. Although EMCSAs were conceived primarily for use on spacecraft they are also potentially advantageous for terrestrial applications in which there are requirements to limit electromagnetic interference. In a conventional solar panel of the type meant to be supplanted by an EMCSA panel, the wiring is normally located on the back side, separated from the cells, thereby giving rise to current loops having significant areas and, consequently, significant magnetic moments. Current-loop geometries are chosen in an effort to balance opposing magnetic moments to limit far-0field magnetic interactions, but the relatively large distances separating current loops makes full cancellation of magnetic fields problematic. The panel is assembled from bare photovoltaic cells by means of multiple sensitive process steps that contribute significantly to cost, especially if electomagnetic cleanliness is desired. The steps include applying a cover glass and electrical-interconnect-cell (CIC) sub-assemble, connecting the CIC subassemblies into strings of series-connected cells, laying down and adhesively bonding the strings onto a panel structure that has been made in a separate multi-step process, and mounting the wiring on the back of the panel. Each step increases the potential for occurrence of latent defects, loss of process control, and attrition of components. An EMCSA panel includes an integral cover made from a transparent material. The silicone cover supplants the individual cover glasses on the cells and serves as an additional unitary structural support that offers the advantage, relative to glass, of the robust, forgiving nature of the silcone material. The cover contains pockets that hold the solar cells in place during the lamination process. The cover is coated with indium tin oxide to make its surface electrically conductive, so that it serves as a contiguous, electrically grounded shield over the entire panel surface. The cells are mounted in proximity to metallic printed wiring. The painted-wiring layer comprises metal-film traces on a sheet of Kapton (or equivalent) polyimide. The traces include contact pads on one side of the sheet for interconnecting the cells. Return leads are on the opposite side of the sheet, positioned to form the return currents substantially as mirror images of, and in proximity to, the cell sheet currents, thereby minimizing magnetic moments. The printed-wiring arrangement mimics the back-wiring arrangement of conventional solar arrays, but the current-loop areas and the resulting magnetic moments are much smaller because the return-current paths are much closer to the solar-cell sheet currents. The contact pads are prepared with solder fo electrical and mechanical bonding to the cells. The pocketed cover/shield, the solar cells, the printed-wiring layer, an electrical bonding agent, a mechanical-bonding agent, a composite structural front-side face sheet, an aluminum honeycomb core, and a composite back-side face sheet are all assembled, then contact pads are soldered to the cells and the agents are cured in a single lamination process.

Stem, Theodore G.↗

NASA Glenn Research Center's Materials International Space Station Experiments (MISSE 1-7)

NASA Glenn Research Center (Glenn) has 39 individual materials flight experiments (>540 samples) flown as part of the Materials International Space Station Experiment (MISSE) to address long duration environmental durability of spacecraft materials in low Earth orbit (LEO). MISSE is a series of materials flight experiments consisting of trays, called Passive Experiment Carriers (PECs) that are exposed to the space environment on the exterior of the International Space Station (ISS). MISSE 1-5 have been successfully flown and retrieved and were exposed to the space environment from one to four years. MISSE 6A & 6B were deployed during the STS-123 shuttle mission in March 2008, and MISSE 7A & 7B are being prepared for launch in 2009. The Glenn MISSE experiments address atomic oxygen (AO) effects such as erosion and undercutting of polymers, AO scattering, stress effects on AO erosion, and in-situ AO fluence monitoring. Experiments also address solar radiation effects such as radiation induced polymer shrinkage, stress effects on radiation degradation of polymers, and radiation degradation of indium tin oxide (ITO) coatings and spacesuit fabrics. Additional experiments address combined AO and solar radiation effects on thermal control films, paints and cermet coatings. Experiments with Orion Crew Exploration Vehicle (CEV) seals and UltraFlex solar array materials are also being flown. Several experiments were designed to provide ground-facility to in-space calibration data thus enabling more accurate in-space performance predictions based on ground-laboratory testing. This paper provides an overview of Glenn s MISSE 1-7 flight experiments along with a summary of results from Glenn s MISSE 1 & 2 experiments.

deGroh, Kim K.↗

Very High Output Thermoelectric Devices Based on ITO Nanocomposites

A material having useful thermoelectric properties was synthesized by combining indium-tin-oxide (ITO) with a NiCoCrAlY alloy/alumina cermet. This material had a very large Seebeck coefficient with electromotive-force-versustemperature behavior that is considered to be excellent with respect to utility in thermocouples and other thermoelectric devices. When deposited in thin-film form, ceramic thermocouples offer advantages over precious-metal (based, variously, on platinum or rhodium) thermocouples that are typically used in gas turbines. Ceramic thermocouples exhibit high melting temperatures, chemical stability at high temperatures, and little or no electromigration. Oxide ceramics also resist oxidation better than metal thermocouples, cost substantially less than precious-metal thermocouples, and, unlike precious-metal thermocouples, do not exert catalytic effects.

Fralick, Gustave↗

Nanocomposite Strain Gauges Having Small TCRs

Ceramic strain gauges in which the strain-sensitive electrically conductive strips made from nanocomposites of noble metal and indium tin oxide (ITO) are being developed for use in gas turbine engines and other power-generation systems in which gas temperatures can exceed 1,500 F (about 816 C). In general, strain gauges exhibit spurious thermally induced components of response denoted apparent strain. When temperature varies, a strain-gauge material that has a nonzero temperature coefficient of resistance (TCR) exhibits an undesired change in electrical resistance that can be mistaken for the change in resistance caused by a change in strain. It would be desirable to formulate straingauge materials having TCRs as small as possible so as to minimize apparent strain. Most metals exhibit positive TCRs, while most semiconductors, including ITO, exhibit negative TCRs. The present development is based on the idea of using the negative TCR of ITO to counter the positive TCRs of noble metals and of obtaining the benefit of the ability of both ITO and noble metals to endure high temperatures. The noble metal used in this development thus far has been platinum. Combinatorial libraries of many ceramic strain gauges containing nanocomposites of various proportions of ITO and platinum were fabricated by reactive co-sputtering from ITO and platinum targets onto alumina- and zirconia-based substrates mounted at various positions between the targets.

Gregory, Otto↗

NASA Tech Briefs, January 2008

Topics covered include: Induction Charge Detector with Multiple Sensing Stages; Generic Helicopter-Based Testbed for Surface Terrain Imaging Sensors; Robot Electronics Architecture; Optimized Geometry for Superconducting Sensing Coils; Sensing a Changing Chemical Mixture Using an Electronic Nose; Inertial Orientation Trackers with Drift Compensation; Microstrip Yagi Antenna with Dual Aperture-Coupled Feed; Patterned Ferroelectric Films for Tunable Microwave Devices; Micron-Accurate Laser Fresnel-Diffraction Ranging System; Efficient G(sup 4)FET-Based Logic Circuits; Web-Enabled Optoelectronic Particle-Fallout Monitor; SiO2/TiO2 Composite for Removing Hg from Combustion Exhaust; Lightweight Tanks for Storing Liquefied Natural Gas; Hybrid Wound Filaments for Greater Resistance to Impacts; Making High-Tensile-Strength Amalgam Components; Bonding by Hydroxide-Catalyzed Hydration and Dehydration; Balanced Flow Meters without Moving Parts; Deflection-Compensating Beam for Use inside a Cylinder; Four-Point-Latching Microactuator; Curved Piezoelectric Actuators for Stretching Optical Fibers; Tunable Optical Assembly with Vibration Dampening; Passive Porous Treatment for Reducing Flap Side-Edge Noise; Cylindrical Piezoelectric Fiber Composite Actuators; Patterning of Indium Tin Oxide Films; Gimballed Shoulders for Friction Stir Welding; Improved Thermal Modulator for Gas Chromatography; Nuclear-Spin Gyroscope Based on an Atomic Co-Magnetometer; Utilizing Ion-Mobility Data to Estimate Molecular Masses; Optical Displacement Sensor for Sub-Hertz Applications; Polarization/Spatial Combining of Laser-Diode Pump Beams; Spatial Combining of Laser-Diode Beams for Pumping an NPRO; Algorithm Optimally Orders Forward-Chaining Inference Rules; Project Integration Architecture; High Power Amplifier and Power Supply; Estimating Mixing Heights Using Microwave Temperature Profiler; and Multiple-Cone Sunshade for a Spaceborne Telescope.

Source record↗

John F. Kennedy Space Center's Technology Development and Application 2006-2007 Report

Topics covered include: Reversible Chemochromic Hydrogen Detectors; Determining Trajectory of Triboelectrically Charged Particles, Using Discrete Element Modeling; Using Indium Tin Oxide To Mitigate Dust on Viewing Ports; High-Performance Polyimide Powder Coatings; Controlled-Release Microcapsules for Smart Coatings for Corrosion Applications; Aerocoat 7 Replacement Coatings; Photocatalytic Coatings for Exploration and Spaceport Design; New Materials for the Repair of Polyimide Electrical Wire Insulation; Commodity-Free Calibration; Novel Ice Mitigation Methods; Crack Offset Measurement With the Projected Laser Target Device; New Materials for Structural Composites and Protective Coatings; Fire Chemistry Testing of Spray-On Foam Insulation (SOFI); Using Aerogel-Based Insulation Material To Prevent Foam Loss on the Liquid-Hydrogen Intertank; Particle Ejection and Levitation Technology (PELT); Electrostatic Characterization of Lunar Dust; Numerical Analysis of Rocket Exhaust Cratering; RESOLVE Projects: Lunar Water Resource Demonstration and Regolith Volatile Characterization; Tribocharging Lunar Soil for Electrostatic Beneficiation; Numerically Modeling the Erosion of Lunar Soil by Rocket Exhaust Plumes; Trajectory Model of Lunar Dust Particles; Using Lunar Module Shadows To Scale the Effects of Rocket Exhaust Plumes; Predicting the Acoustic Environment Induced by the Launch of the Ares I Vehicle; Measuring Ultrasonic Acoustic Velocity in a Thin Sheet of Graphite Epoxy Composite; Hail Size Distribution Mapping; Launch Pad 39 Hail Monitor Array System; Autonomous Flight Safety System - Phase III; The Photogrammetry Cube; Bird Vision System; Automating Range Surveillance Through Radio Interferometry and Field Strength Mapping Techniques; Next-Generation Telemetry Workstation; GPS Metric Tracking Unit; and Space-Based Range.

Source record↗

Optically Transparent Split-Ring Antennas for 1 to 10 GHz

Split-ring antennas made from optically transparent, electrically conductive films have been invented for applications in which there are requirements for compact antennas capable of operation over much or all of the frequency band from 1 to 10 GHz. Primary examples of such applications include wireless local-area networks and industrial, scientific, and medical (ISM) applications. These antennas can be conveniently located on such surfaces as those of automobile windows and display screens of diverse hand-held electronic units. They are fabricated by conventional printed-circuit techniques and can easily be integrated with solid-state amplifier circuits to enhance gain. The structure of an antenna of this type includes an antenna/feed layer supported on the top or outer face of a dielectric (e.g., glass) and, optionally, a ground layer on the bottom or inner face of the substrate. The ring can be in the form of either a conductive strip or a slot in the antenna/feed layer. The ring can be of rectangular, square, circular, elliptical, or other suitable shape and can be excited by means of a microstrip, slot line, or coplanar waveguide. For example, the antenna shown in the figure features a square conductive-strip split ring with a microstrip feed. In general, an antenna fed at its external boundary in the manner of this invention presents very high impedance, thereby creating an impedance-matching problem. Splitting the ring . that is, cutting a notch through the ring . offers a solution to the problem in that the notch fixes the location of maximum electric field, which location is directly related to the impedance. Thus, an excellent impedance match can be achieved through proper choice of the location of the notch. In geometric layout, such a ring antenna structure is typically between 1.4 and 1.3 the size of a patch antenna capable of operating in the same frequency range. This miniaturization of the antenna is desirable, not only because it contributes to overall miniaturization of equipment, but also because minimization of the extent of the optically transparent, electrically conductive film helps to minimize the electrical loss associated with the surface resistance ( 5 ohms per square) of the transparent, electrically conductive film material. Incidentally, even at 5 ohms per square, this surface resistance is significantly less than that of indium tin oxide film (typically > 25 ohms per square), which, heretofore has been the transparent, electrically conductive film material of choice. At the time of writing this article, information on the composition of the lower-resistance film used in the antennas of this invention was not available.

Lee, Richard Q.↗

MISSE 6, 7 and 8 Materials Sample Experiments from the International Space Station Materials and Processes Team

The International Space Station Materials and Processes (ISS M&P) team has multiple material samples on MISSE 6, 7 and 8 to observe Low Earth Orbit (LEO) environmental effects on Space Station materials. Optical properties, thickness/mass loss, surface elemental analysis, visual and microscopic analysis for surface change are some of the techniques employed in this investigation. The ISS M&P team has participated in previous MISSE activities in order to better characterize the LEO effects on Space Station materials. This investigation will further this effort. Results for the following MISSE 6 samples materials will be presented: a comparison of anodize and chemical conversion coatings on various aluminum alloys, electroless nickel; AZ93 white ceramic thermal control coating with and without Teflon; Hyzod(TM) polycarbonate used to temporarily protect ISS windows; Russian quartz window material; reformulated Teflon (TM) coated Beta Cloth (Teflon TM without perfluorooctanoic acid (PFOA)) and a Dutch version of beta cloth. Discussion for current and future MISSE materials experiments will be presented. MISSE 7 samples are: deionized water sealed anodized aluminum Photofoil(TM); indium tin oxide (ITO)- coated Kapton(TM) used as thermo-optical surfaces; mechanically scribed tin-plated beryllium-copper samples for "tin pest" growth ( alpha/Beta transformation); Crew Exploration Vehicle (CEV) parachute soft goods. MISSE 8 sample: exposed "scrim cloth" (fiberglass weave) from the ISS solar array wing material, Davlyn fiberglass sleeve material, Permacel and Intertape protective tapes, and ITO-coated Kapton.

Kravchenko, Michael↗

Experimental Charging Behavior of Orion UltraFlex Array Designs

The present ground based investigations give the first definitive look describing the charging behavior of Orion UltraFlex arrays in both the Low Earth Orbital (LEO) and geosynchronous (GEO) environments. Note the LEO charging environment also applies to the International Space Station (ISS). The GEO charging environment includes the bounding case for all lunar mission environments. The UltraFlex photovoltaic array technology is targeted to become the sole power system for life support and on-orbit power for the manned Orion Crew Exploration Vehicle (CEV). The purpose of the experimental tests is to gain an understanding of the complex charging behavior to answer some of the basic performance and survivability issues to ascertain if a single UltraFlex array design will be able to cope with the projected worst case LEO and GEO charging environments. Stage 1 LEO plasma testing revealed that all four arrays successfully passed arc threshold bias tests down to -240 V. Stage 2 GEO electron gun charging tests revealed that only the front side area of indium tin oxide coated array designs successfully passed the arc frequency tests

Golofaro, Joel T.↗

Thin film solar cell inflatable ultraviolet rigidizable deployment hinge

A flexible inflatable hinge includes curable resin for rigidly positioning panels of solar cells about the hinge in which wrap around contacts and flex circuits are disposed for routing power from the solar cells to the power bus further used for grounding the hinge. An indium tin oxide and magnesium fluoride coating is used to prevent static discharge while being transparent to ultraviolet light that cures the embedded resin after deployment for rigidizing the inflatable hinge.

Simburger, Edward J.↗

Analysis of International Space Station Vehicle Materials on MISSE 6

The International Space Station Materials and Processes team has multiple material samples on MISSE 6, 7 and 8 to observe Low Earth Orbit (LEO) environmental effects on Space Station materials. Optical properties, thickness/mass loss, surface elemental analysis, visual and microscopic analysis for surface change are some of the techniques employed in this investigation. Results for the following MISSE 6 samples materials will be presented: deionized water sealed anodized aluminum; Hyzod(tm) polycarbonate used to temporarily protect ISS windows; Russian quartz window material; Beta Cloth with Teflon(tm) reformulated without perfluorooctanoic acid (PFOA), and electroless nickel. Discussion for current and future MISSE materials experiments will be presented. MISSE 7 samples are: more deionized water sealed anodized aluminum, including Photofoil(tm); indium tin oxide (ITO) over-coated Kapton(tm) used as thermo-optical surfaces; mechanically scribed tin-plated beryllium-copper samples for "tin pest" growth (alpha/beta transformation); and beta cloth backed with a black coating rather than aluminization. MISSE 8 samples are: exposed "scrim cloth" (fiberglass weave) from the ISS solar array wing material, protective fiberglass tapes and sleeve materials, and optical witness samples to monitor contamination.

Finckenor, Miria↗

Dust Removal Technology Demonstration for a Lunar Habitat

We have developed an Electrodynamic Dust Shield (EDS), an active dust mitigation technology with applications to solar panels, thermal radiators, optical systems, visors, seals and connectors. This active technology is capable of removing dust and granular material with diameters as large as several hundred microns. In this paper, we report on the development of three types of EDS systems for NASA's Habitat Demonstration Unit (HDU). A transparent EDS 20 cm in diameter with indium tin oxide electrodes on a 0.1 mm-thick polyethylene terephtalate (PET) film was constructed for viewport dust protection. Two opaque EDS systems with copper electrodes on 0.1 mm-thick Kapton were also built to demonstrate dust removal on the doors of the HDU. A lotus coating that minimizes dust adhesion was added to one of the last two EDS systems to demonstrate the effectiveness of the combined systems.

Calle, C. I.↗