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DOE OSTI2025

Characterizing Disorders Within Cathode Materials of Lithium‐Ion Batteries

The demand for developing high-energy density cathode materials has been increasing. The energy densities of cathode materials have been improved by adapting structural deviation from the ideal fully ordered α-NaFeO2 type, but that led to limitations in terms of structural stability and safety. Although disorders in cathode materials are closely related to their electrochemical properties, unfortunately, characterizing the disorder itself in cathode materials has been challenging due to its complex parasitic reaction and strong correlation with other disorders occurring during charge/discharge. In this review, we categorize various disorders by their scales of ordering from short-range to long-range. We addressed the principles of various characterization tools to figure out how they can help to identify the structural disorder in cathode materials. Specifically, we focused on the underlying principles of each characterization technique to correlate different disorder-driven phenomena through several case studies. It underscores the substantial importance of disorder-property relationships and the corresponding characterization methods, which can provide novel research strategies for developing high-energy density cathode materials with decent structural stability.

Lee, Hakwoo↗

NASA NTRS2014

Biomaterials Out of Thin Air: In Situ, On-Demand Printing of Advanced Biocomposites: A New Materials Design and Production Technique Using 3D-Printed Arrays of Bioengineered Cells

We have completed the proof of concept described in our Phase I proposal, a two-material array of nonstructural proteins. We created an implementation of each step in our technology concept and demonstrated its critical functionality. The biological chassis and printing hardware we created as part of this work can be re-used for future work by inserting a material coding region upstream of the fluorescent tag. Overall, we showed that our technology concept is sound. The mission benefit analyses, as described in our Phase I proposal, are complete and contained in this report. These calculations show that our technology can save hundreds of kilograms of upmass for a potential planetary human habit construction mission: the mass per habitat module can be reduced by approximately one third if the biomaterials are manufactured on Earth and included in the mission upmass, and the full 240 kg per module can be saved if the materials are derived entirely from in situ resources. Mass savings between these two extremes is expected for an actual mission, depending on the level of in situ resource extraction technology. We have shown that continued advancement of this technology concept for use in a space mission environment is justified. Our survey of future development pathways proved extremely informative in light of the lessons learned from our proof of concept work and mission scenario analyses. For example, we were able for the first time to distinguish between the levels of functionality provided by production of structural proteins, other polymers such as polysaccharides, and true organic-inorganic composites such as bone and mineralized shell. This new information represents a significant advance in formulating specific applications, and key enabling technologies, for our proposed concept. We surveyed potential collaborations with other projects and synergies with enabling technologies that are developing. We have received requests for collaboration from other institutions, including labs at Stanford University and Drexel University. We have also received visits from industry, including Organovo, a tissue engineering company, and Autodesk, a major 3D and materials design software company. Finally, we have been in touch with the team behind the 2013 NIAC Phase ll 'Super Ball Bot-Structures for Planetary Landing and Exploration' and are planning to develop our biomaterial printing technology with the goal of enabling tensegrity-based rovers such as theirs to use lighter, more robust materials. A smooth transition from TRL 2 to TRL 3 assumes that the implementations of the technology concept which demonstrate critical functionality are also pathways for future development; while this is the case for most hardware or software projects, the multidisciplinary nature of our project, particularly the biological aspect of it, means that this is not always true. For example, as part of this work we showed that although there are large number of known genetic parts that correspond to non-structural materials, this is not true for sequences for structural organic proteins, let alone biominerals. These realizations allowed us to further subdivide our concept into more detailed development areas, some of which are clearly established at TRL 3, others of which were newly identified sub-technologies moved from TRL 1 to TRL 2. Similarly, although a single feasibility /benefit analysis is sufficient for advancement from TRL 2 to TRL 3, not all potential benefits to a technology concept as broad in scope as ours are apparent at TRL 2. Both our future pathways survey and our proof of concept work highlighted that the true mass savings potential of our technology concept cannot be quantified without modification of existing materials modelling tools to take into account the possibility of positional materials properties customization. Therefore, we have simultaneously both advanced one potential set of applications of our technology concept from TRL 2 to TRL 3 and also identified a previously unknown set of applications and advanced it from TRL 1 to TRL 2. Overall, we have moved the original formulation of our concept forward from TRL 2 to TRL 3, and the expanded formulation of it presented in this document has been advanced from a combination of TRL 1 and early 1RL 2 to an overall late TRL 2. We have also identified the key areas necessary for both short-term and long-term advancement, and made recommendations for specific future work in the most promising directions. With future work on a 1-2 year timeframe to continue advancement to overall TRL 3, we will be well positioned to begin work on a specific space mission technology insertion path.

Biology↗

DOE OSTI2026

All-Polyester Multilayer Plastics (‘All-Polyester MLPs’): A Redesign for Inherently Recyclable Plastics

Multilayer plastics (MLPs) are widely used in modern packaging because they combine multiple functions such as oxygen and moisture barriers, mechanical strength, puncture resistance, and heat sealability into lightweight and cost-effective packaging solutions. These attributes are essential for food, beverage, pharmaceutical, and consumer goods packaging. However, conventional commercial MLPs typically consist of five to twelve layers made from chemically incompatible materials, including polyolefins, polyethylene terephthalate, nylon, ethylene-vinyl alcohol (EVOH), adhesives, and tie layers. This complexity makes MLPs extremely difficult to recycle. As a result, the vast majority of multilayer plastics (MLPs) are disposed of through landfilling or incineration. This disposal pathway perpetuates demand for virgin material production, thereby driving high industrial energy consumption, increasing greenhouse gas (GHG) emissions, and contributing to the long-term accumulation of plastic waste. The scope of work included: (1) Design and fabrication of all-polyester multilayer structures using commercially relevant processing methods; (2) Experimental validation of barrier, mechanical, and sealing performance; (3) Demonstration of both mechanical and chemical recycling pathways; and (4) Comprehensive techno-economic analysis (TEA) and life-cycle assessment (LCA) to quantify cost, energy, and environmental impacts.

36 MATERIALS SCIENCE↗

DOE OSTI2025

Tunable electrochemical pathway for high-purity REMs and CMs

This report details a comprehensive research initiative focused on developing a technical research plan for the efficient and sustainable production of rare earth elements (REEs) and critical materials (CMs) from coal-based resources, specifically lignite coal from the Williston Basin in North Dakota. The project’s methodology centers on the design and evaluation of a tunable electrochemical pathway (TEP), an innovative approach aimed at achieving high-purity rare earth oxides (REOs), rare earth salts (RES), and CMs. This research is crucial for addressing the growing demand for these materials in clean energy technologies, electric vehicles, and high-tech applications, while reducing the United States’ reliance on foreign supply chains.

01 COAL, LIGNITE, AND PEAT↗

DOE OSTI2025

Tunable Electrochemical Pathway for High-Purity REMs and CMs

01 COAL, LIGNITE, AND PEAT↗

DOE OSTI2025

Enhancing supply resilience for critical materials: case study of gallium supply in the United States

Accelerating energy technology development will increase demand for critical raw materials, such as gallium, that enable clean energy technologies. Processing of gallium is concentrated in mainland China (98 % of global production in 2023), resulting in high supply risks for importing countries. To investigate pathways for more resilient supply, we develop a material flow analysis and apply it to the United States, showing the impacts of future domestic primary raw material production and end-of-life (EoL) product recycling on reducing import reliance of raw gallium metal. We complement this analysis with a techno-economic assessment of North American gallium production costs under various demand growth scenarios. Our results indicate that sufficient domestic feedstocks exist to meet U.S. demand under most scenarios by 2035, while EoL recycling can supply up to 50 % under a low-demand growth scenario. Domestic primary production shows significant cost advantages over gallium recycling.

Cost analysis↗

DOE OSTI2025

Enhancing heat pump water heater performance with embedded phase change materials thermal energy storage: First hour rating improvement and demand response operation

The increasing global emphasis on energy efficiency and sustainability has put heat pump water heaters (HPWHs) in the spotlight as an energy-efficient alternative to traditional water heating systems. However, their widespread adoption is limited by challenges such as insufficient First Hour Rating (FHR), suboptimal control mechanisms, and limited flexibility for demand response operations. Here, to address these limitations, this study proposes an innovative HPWH system integrated with embedded phase change material (PCM)-based thermal energy storage (TES). The research introduces a novel design and control strategy that leverages optimized PCM integration to enhance thermal storage capacity, improve hot water delivery during peak demand, and increase load-shifting potential. A combination of system modeling, performance simulation, and demand response control strategy evaluation was employed to quantify the benefits of PCM integration. Results demonstrate that the proposed PCM-TES HPWH system significantly enhances FHR, with an optimal 7.0 lb. of PCM increasing FHR by over 26 %—from 62 to 78 gal—for a standard 50-gal HPWH. Additionally, under advanced demand response operation using a preheat strategy, the system reduces the percentage of control temperature out-of-band time from 65 % (conventional HPWH) to just 11.6 %, enabling a more stable and efficient hot water supply. This research contributes a novel PCM-embedded HPWH design and control framework that addresses both performance and grid-interactivity challenges. The findings offer a viable pathway to enhancing the operational efficiency, flexibility, and grid responsiveness of residential water heating systems.

Demand response control↗

DOE OSTI2025

Photoinduced electronic excitations drive polymerization of carbon monoxide: A first-principles study

Under pressure, carbon monoxide (CO) transforms into a polymer that can be recovered to ambient conditions. While this transformation can occur without additional stimuli, experimental observations have shown that laser irradiation can induce a similar transformation at reduced pressure. The resulting polymeric phase, which is metastable under ambient conditions, releases energy through decomposition into more stable configurations. Using time-dependent density functional theory and Born–Oppenheimer molecular dynamics simulations, we investigate the mechanism by which electronic excitation facilitates CO polymerization. Our calculations reveal that electronic excitation enhances carbon–carbon bonding, enabling polymerization at pressures significantly lower than those required by conventional compression methods. In conclusion, these findings suggest that a photo-assisted approach could be employed to synthesize novel, potentially energetic materials under less demanding pressure conditions.

Born-Oppenheimer molecular dynamics↗

DOE OSTI2025

High-throughput and data-driven search for stable optoelectronic AMSe 3 materials

The rapid advancement in emerging optoelectronic technologies demands highly efficient, affordable, and ecofriendly materials. In this context, ternary chalcogenides, especially ternary selenides, show early promise as a material class due to their stability and remarkable electronic, optical, and transport properties. In this work, we integrate first-principles-based high-throughput computations with machine learning (ML) techniques to predict the thermodynamic stability and optoelectronic properties of 920 valency-satisfied selenide compounds. Through investigating polymorphism, our study reveals the edge-sharing orthorhombic Pnma phase (NH 4 CdCl 3 -type) as the most stable structure for most ternary selenides. High-fidelity supervised ML models are trained and tested to accelerate stability and band gap predictions. These data-driven models pin down the most influential features that dominantly control key material characteristics. The multistep high-throughput computations identify the ternary selenides with optimal direct band gaps, light carrier masses, and strong optical absorption edges. The extensive materials screening considering phase stability, toxicity, and defect tolerance, finally identifies the seven most suitable candidates for photovoltaic applications. Two of these final compounds, SrZrSe 3 and SrHfSe 3 , have already been synthesized in a single-phase form, with the latter showing an optically suitable band gap, aligning well with our findings. The non-adiabatic molecular dynamics reveal sufficiently long photoexcited charge carrier lifetimes (on the order of nanoseconds) in some of these selected selenide materials, indicating their exciting characteristics. Overall, our study suggests a robust in silico framework that can be extended to screen large datasets of various material classes for identifying promising photoactive candidates.

36 MATERIALS SCIENCE↗

DOE OSTI2026

Cradle-to-gate life cycle assessment of advanced composite panels incorporating CO 2 -derived multi-walled carbon nanotubes and hemp fiber for sustainable building applications

Advanced composite panels represent a promising pathway to reducing carbon emissions in the construction industry, yet comprehensive environmental impact assessments remain limited. Here, in this study, we conduct a life cycle assessment (LCA) to evaluate the environmental impacts of innovative composite panels produced from multi-walled carbon nanotubes (MWCNTs), hemp fiber (HF), recycled carbon fiber (rCF), and recycled polypropylene (PP), exploring their potential as baseline structural equivalents to conventional gypsum board. MWCNTs and HF play a critical role in sequestering carbon during raw material production, while the recycling processes for CF and PP generally require less energy compared to virgin material production. The LCA evaluates environmental performance using the TRACI 2.1 method, covering global warming potential (GWP), ozone depletion, smog formation, acidification, eutrophication, carcinogenic and non-carcinogenic effects, respiratory impacts, ecotoxicity, and fossil fuel depletion. Compositional variations—resin type (virgin vs. recycled), rCF content (9–29 wt%), and HF content (10–30 wt%)—are introduced for sensitivity and hotspot analyses. Results demonstrate that, when compared on the basis of preliminary structural equivalence, increasing recycled PP, rCF, and HF content can significantly reduce global warming potential compared to gypsum board. Beyond carbon reduction, the composite panels show trade-offs across other environmental categories. With the growing demand for composite materials in interior panels, ceiling systems, and exterior claddings, these findings highlight the environmental benefits and potential trade-offs of the proposed composites, establishing a foundational framework to support their continued development toward full building-system integration.

Advanced composite manufacturing↗

NASA NTRS2017

Selection of High Temperature Organic Materials for Future Stirling Convertors

In the future higher temperature Stirling convertors for improved efficiency and performance, various high temperature organic materials have been demanded as essential components for their unique properties and functions such as bonding, potting, sealing, thread locking, insulation, and lubrication. The higher temperature capabilities would also allow current state-of-the-art (SOA) convertors to be used in additional missions, particularly those that require a Venus flyby for a gravity assist. Stirling convertor radioisotope generators have been developed for potential future space applications including Lunar/Mars surface power or a variety of spacecraft and vehicles, especially with a long mission cycle, sometimes up to 17 years, such as deep space exploration. Thus, performance, durability, and reliability of the organics should be critically evaluated in terms of comprehensive structure-process-service environment relations based on the potential mission specifications. The initial efforts in screening the high temperature candidates focused on the most susceptible organics, such as adhesive, potting compound, o-ring, shrink tubing, and thread locker materials in conjunction with commercially available materials. More systematic and practical test methodologies that were developed and optimized based on the extensive organic evaluations and validations performed for various Stirling convertor types were employed to determine thermal stability, outgassing, and material compatibility of the selected organic candidates against their functional requirements. Processing and fabrication conditions and procedures were also optimized. This paper presents results of the three-step candidate evaluation processes, their application limitations, and the final selection recommendations.

Organics↗

DOE OSTI2024

Science challenges and research opportunities for plasma applications in microelectronics

Low-temperature plasmas (LTPs) are essential to manufacturing devices in the semiconductor industry, from creating extreme ultraviolet photons used in the most advanced lithography to thin film etching, deposition, and surface modifications. It is estimated that 40%–45% of all process steps needed to manufacture semiconductor devices use LTPs in one form or another. LTPs have been an enabling technology in the multidecade progression of the shrinking of device dimensions, often referred to as Moore’s law. New challenges in circuit and device design, novel materials, and increasing demands to achieve environmentally benign processing technologies require advances in plasma technology beyond the current state-of-the-art. The Department of Energy Office of Science Fusion Energy Sciences held a workshop titled Plasma Science for Microelectronics Nanofabrication in August 2022 to discuss the plasma science challenges and technical barriers that need to be overcome to continue to develop the innovative plasma technologies required to support and advance the semiconductor industry. One of the key outcomes of the workshop was identifying a set of priority research opportunities (PROs) to focus attention on the most strategic plasma science challenges to address to benefit the semiconductor industry. For each PRO, scientific challenges and recommended strategies to address those challenges were identified. Furthermore, this article summarizes the PROs identified by the workshop participants.

36 MATERIALS SCIENCE↗

DOE OSTI2025

Molten Salt Corrosion Tests of Additively Manufactured Stainless Steel 316H

Molten salt reactors (MSRs) have drawn considerable interest due to their favorable safety features, high thermal efficiency, and compatibility with different fuel cycles. Yet, the success of MSRs hinges critically on the performance of structural materials to be used in these aggressive molten salt environments, where corrosion and material compatibility remain primary challenges to long-term reliability. Additively manufactured (AM) nuclear structural materials prompt the use of novel geometries and compositions to enhance material performance and reduce costs of constructing MSRs. The rapid solidification conditions inherent to AM processing impart distinctive microstructural features, including cellular sub-structures, dislocation densities, residual stress, and oxide inclusions, which can influence material performance in MSR components. While the mechanical properties of AM stainless steels have been widely studied, their corrosion behavior, particularly in molten salt environments, has received far less attention. Addressing these needs, the Advanced Materials and Manufacturing Technologies (AMMT) program provides a framework for systematically evaluating how unique microstructures produced by AM processes influence the performance of these materials in these demanding environments and for developing reproducible testing workflows that can support future code qualification efforts and standards development. Bridging this knowledge gap is essential for assessing the viability of AM alloys in MSRs and informing qualification strategies. A further challenge is the absence of standardized protocols for molten salt corrosion testing. Accordingly, this report provides an account of the corrosion evaluation of AM 316H stainless steel in NaCl 2 -MgCl 2 molten salt at 550 °C, with exposure times of 100 and 500 hours. It documents the experimental procedures implemented under the AMMT program, including salt preparation, exposure protocols, and post-test characterization methods, to establish reproducibility and transparency. Importantly, the study examines AM 316H samples in the as-fabricated condition, directly reflecting the surface state most relevant to engineering applications, and compares their behavior to machine-cut surfaces. Overall, preliminary evaluations have noted that surface conditions (e.g. morphology, contamination, etc.) have a noticeable impact on the corrosion resiliency. The impact of the corrosion is difficult to detect at 100h, unless, in the case of AM 316H, the specimen surface is decontaminated. After 500 h, as-fabricated surfaces of AM and wrought 316H display evidence of general versus preferential corrosion attack, respectively. Both AM and wrought 316H machine-cut surfaces exhibit a continuous Cr depletion zone, evident of general corrosion. While the estimated extent of corrosion appears within the same order of magnitude regardless of the surface condition, it is apparent that more predictable behavior is observed on machine-cut surfaces. Nonetheless, further investigation is necessary to fully elucidate the corrosion mechanism under these conditions.

36 - MATERIALS SCIENCE↗

NASA NTRSDate not supplied

3D Construction of Biologically Derived Materials

System for the 3D Construction of Biologically Derived Materials, Structures, and Parts NASA has developed a novel approach for macroscale biomaterial production by combining synthetic biology with 3D printing. Cells are biologically engineered to deposit desired materials, such as proteins or metals, derived from locally available resources. The bioengineered cells build different materials in a specified 3D pattern to produce novel microstructures with precise molecular composition, thickness, print pattern, and shape. Scaffolds and reagents can be used for further control over material product. This innovation provides modern design and fabrication techniques for custom-designed organic or organic-inorganic composite biomaterials produced from limited resources. Benefits Conserves resources. Few raw or bulk starting materials needed Enables custom design of diverse materials Fast, portable, macroscale, on-demand manufacturing High-fidelity microstructures Uses commercially available parts Applications Biomaterials, biotechnology Organic-inorganic composite materials On-demand manufacturing In situ resource utilization Space stations Military Infrastructure materials The Technology Once genes for a desired material type, delivery mode, control method and affinity have been chosen, assembling the genetic components and creating the cell lines can be done with well-established synthetic biology techniques. A 3D microdeposition system is used to make a 3D array of these cells in a precise, microstructure pattern and shape. The engineered cells are suspended in a printable 'ink'. The 3D microdeposition system deposits minute droplets of the cells onto a substrates surface in a designed print pattern. Additional printer passes thicken the material. The cell array is fed nutrients and reagents to activate the engineered genes within the cells to create and deposit the desired molecules. These molecules form the designed new material. If desired, the cells may be removed by flushing. The end product is thus a 3D composite microstructure comprising the novel material. This innovation provides a fast, controlled production of natural, synthetic, and novel biomaterials with minimum resource overhead and reduced pre- and post-processing requirements.

3D↗

DOE OSTI2025

Selective Recovery of Critical Minerals from Simulated Electronic Wastes Via Reaction‐Diffusion Coupling

Abstract Atom‐ and energy‐efficient chemical separations are urgently needed to meet the surging demand for critical materials that has strained supply chains and threatened environmental damage. In this study, we used reaction‐diffusion coupling to separate iron, neodymium, and dysprosium ions from model feedstocks of permanent magnets, which are typically found in electronic wastes. Feedstock solutions were placed in contact with a hydrogel loaded with potassium hydroxide and/or dibutyl phosphate, resulting in complex precipitation patterns as the various metal ions diffused into the reaction medium. Specifically, we observed the precipitation of up to 40 mM of iron from the feedstock, followed by the enrichment of 73 % dysprosium, and the extraction of >95 % neodymium product at a further distance from the solution‐gel interface. We designed a series of experiments and simulations to determine the relevant ion diffusivities, D Nd =5.4×10 −10 and D Dy =5.1×10 −10 m 2 /s, and precipitation rates, k Nd =1.0×10 −5 and k Dy =5.0×10 −3 m 9 mol −3 s −1 , which enabled a numerical model to be established for predicting the distribution of products in the reaction medium. Our proof‐of‐concept study validates reaction‐diffusion coupling as an effective and versatile approach for critical materials separations, without relying on ligands, membranes, resins, or other specialty chemicals.

Wang, Qingpu [Physical and Computational Sciences ↗

DOE OSTI2026

Effect of fiber sizing and glass fiber laminate hybridization on vibration damping and mechanical properties of banana fiber reinforced polypropylene composites

Modern automotive applications demand lightweight, multifunctional materials to reach mileage goals and natural fiber reinforced composites (NFRCs) are one of the classes of materials proposed as a solution. NFRCs exhibit good vibration damping properties and have low density, but are often limited by processing challenges, poor-fiber matrix compatibility and variable performance. Herein, we investigate non-woven wet-lay of comingled banana fiber (BF), recycled glass fiber (rGF), and polypropylene (PP) fibers to in situ sizing and preparation of composite feedstocks for compression molding. BF and rGF hybrids were prepared by stacking rGF layers during compression molding to produce composites with various fiber ratios. The effect of fiber content, in-situ sizing and ratio of BF to rGF on tensile, flexural and vibration damping performance are investigated. Key results are the significant increase in tensile strength by in situ sizing (40 % sized at 60 wt% BF) and in flexural modulus (+58 % sized at 60 wt% BF) and flexural strength (+41 % sized 60 wt% BF) compared to the unsized equivalent. For BF-rGF hybrid composites with40 wt% total fiber content, flexural strength and modulus were improved by 51 % and 231 % respectively for a 1:1 ratio BF:rGF compared to BF reinforced system. Lastly, identifying the cross-over point where damping and stiffness are optimized for a hybrid composite. These findings demonstrate that these composites can be used as alternative to synthetic fiber or mineral filled composites in automotive applications, particularly where weight reduction, vibration damping and stiffness are desired.

Banana fiber↗

DOE OSTI2026

Uncertainty-Aware Machine Learning for Small-Angle X-ray Scattering Analysis in Autonomous Experimentation

Small-angle X-ray scattering (SAXS) is a powerful high-throughput characterization tool for probing nanoscale structure in native sample environments, providing real-time morphological information such as nanoparticle size and shape during synthesis. However, automated SAXS data analysis for extracting meaningful structural parameters is non-trivial and remains a bottleneck in closed-loop experimentation towards autonomous materials discovery, which demands fast, reliable, and uncertainty-aware data analysis. Here, we develop a machine-learning approach for automated SAXS analysis tailored to closed-loop nanoparticle synthesis. A Random Forest (RF) regression model is trained on 100,000 synthetic SAXS curves generated from polydisperse spherical nanoparticles with realistic background contributions. Using normalized one-dimensional SAXS intensity profiles as input, the RF model directly predicts nanoparticle radius, size polydispersity, and background parameters, while the ensemble standard deviation across trees provides built-in uncertainty quantification (UQ). On synthetic data, we show that combining fit-quality metrics (R 2 , MAE) with thresholds on prediction uncertainty reliably identifies accurate parameter estimates without access to ground truth. We then apply the trained model to 365 experimental SAXS profiles of citrate-reduced gold nanoparticles synthesized using an automated droplet-flow microreactor with in situ SAXS at a synchrotron beamline, classifying the results into high- and low-confidence subsets based on UQ metrics. Finally, we integrate RF-based SAXS analysis into a simulated closed-loop optimization campaign using Gaussian process Bayesian optimization to minimize nanoparticle polydispersity, benchmarking against conventional automated Levenberg–Marquardt fitting. The RF-guided campaign exhibits substantially faster convergence and lower relative opportunity cost (∼0.07 vs ∼0.3), demonstrating that uncertainty-aware machine-learning SAXS analysis significantly enhances the efficiency and robustness of autonomous nanomaterials synthesis workflows.

Bayesian optimization↗

DOE OSTI2025

3D nanolithography with metalens arrays and spatially adaptive illumination

The growing demand for advanced materials, miniaturized devices and integrated microsystems calls for the reliable fabrication of complex, multiscale, three-dimensional (3D) architectures, a need increasingly addressed through light-based and laser-based processes. However, owing to the field-of-view (FOV) limitations of conventional imaging optics, existing 3D laser nanofabrication techniques face fundamental challenges in throughput, proximity error and stitching defects on the path to scaling. Here, in this study, we present a scalable 3D nanofabrication platform that uses a metalens-generated focal spot array to parallelize two-photon lithography (TPL) beyond centimetre-scale write field areas. Metalenses are ideally suited for producing submicron-scale focal spots for high-throughput nanolithography, as they uniquely feature large numerical apertures (NAs), immersion media compatibility and large-scale manufacturability. We experimentally demonstrate a printing system that uses a 12-cm 2 metalens array to produce more than 120,000 cooperative focal spots, corresponding to a throughput exceeding 10 8 voxels s −1 . By programmatically patterning the focal spot array using a spatial light modulator (SLM), an adaptive parallel printing strategy is developed for precise greyscale linewidth modulation and choreographed printing of semiperiodic and fully aperiodic 3D geometries. We demonstrate parallel printing of replicated microstructures (>50 M microparticles per day), centimetre-scale 3D architectures with feature sizes down to 113 nm, and photonic and mechanical metamaterials. This work demonstrates the potential of 3D nanolithography towards wafer-scale production, showing how TPL could be used at scale for applications in microelectronics, biomedicine, quantum technology and high-energy laser targets.

Materials science↗