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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 91 records · Page 5
All sourcesNASA NTRSDOE OSTI
DOE OSTI2024

Development of Segregated Thermal-Hydraulics Solvers in MOOSE

The simulation of fluid flows is an essential part of the design and analysis of nuclear systems. Algorithms able to simulate flows at different fidelity levels are available in the Multiphysics Object-Oriented Simulation Environment (MOOSE) and MOOSE-based applications such as Pronghorn \cite{novak2018pronghorn}, Pronghorn-Subchannel, RELAP-7, and SAM. Currently, significant effort is being invested in the development of coarse-mesh Computational Fluid Dynamics (CFD) capabilities within MOOSE and Pronghorn for the simulation of Generation IV nuclear reactors. Traditionally, the solution algorithms in MOOSE have relied on Newton or quasi-Newton methods (such as the preconditioned Jacobian-free Newton-Krylov method) where residuals and Jacobians (or approximations thereof) are constructed. Both Newton and quasi-Newton methods require the solution of a linear system at each nonlinear Newton iteration with the Jacobian as the system matrix. The Jacobian contains blocks originating from all variables in the problem (i.e., for thermal-hydraulics at least pressure, velocities, and temperature). Due to the formulation of the problem in a general multiphysics setting on unstructured mesh, creating a good preconditioner for the linear system can be challenging, thus many fluid applications have utilized direct solver-based methods such as LU factorization. However, with increasing system size and complexity in multi-dimensional problems, the direct solution of linear systems becomes computationally expensive both in execution time and and memory. For this reason, recent effort has focused on adapting segregated solution algorithms for CFD problems in MOOSE. These algorithms use fixed-point iteration between segregated systems whose assembly and preconditioning are easier those of the monolithic system. Initial results show that the segregated solution algorithm outperforms the monolithic approach in terms of memory usage and for large 3D problems in terms of CPU time as well.

42 ENGINEERING↗
DOE OSTI2024

Development of Segregated Thermal-Hydraulics Solvers in MOOSE

The simulation of fluid flows is an essential part of the design and analysis of nuclear systems. Algorithms able to simulate flows at different fidelity levels are available in the Multiphysics Object-Oriented Simulation Environment (MOOSE) and MOOSE-based applications such as Pronghorn \cite{novak2018pronghorn}, Pronghorn-Subchannel, RELAP-7, and SAM. Currently, significant effort is being invested in the development of coarse-mesh Computational Fluid Dynamics (CFD) capabilities within MOOSE and Pronghorn for the simulation of Generation IV nuclear reactors. Traditionally, the solution algorithms in MOOSE have relied on Newton or quasi-Newton methods (such as the preconditioned Jacobian-free Newton-Krylov method) where residuals and Jacobians (or approximations thereof) are constructed. Both Newton and quasi-Newton methods require the solution of a linear system at each nonlinear Newton iteration with the Jacobian as the system matrix. The Jacobian contains blocks originating from all variables in the problem (i.e., for thermal-hydraulics at least pressure, velocities, and temperature). Due to the formulation of the problem in a general multiphysics setting on unstructured mesh, creating a good preconditioner for the linear system can be challenging, thus many fluid applications have utilized direct solver-based methods such as LU factorization. However, with increasing system size and complexity in multi-dimensional problems, the direct solution of linear systems becomes computationally expensive both in execution time and and memory. For this reason, recent effort has focused on adapting segregated solution algorithms for CFD problems in MOOSE. These algorithms use fixed-point iteration between segregated systems whose assembly and preconditioning are easier those of the monolithic system. Initial results show that the segregated solution algorithm outperforms the monolithic approach in terms of memory usage and for large 3D problems in terms of CPU time as well.

42 ENGINEERING↗
DOE OSTI2026

Measurement of low energy characteristic X-rays emitted present in U-10Mo HALEU alloy fuel

Advance high density monolithic alloy HALEU fuels have been scanned with a silicon drift detector scanning system to measure low-energy characteristic X-rays emitted by uranium daughters, as well as zirconium present as a foil diffusion barrier. Four peaks were measured across the surfaces of three plates, and are consistent with other thorium and protactinium peaks present in depleted uranium samples that are induced by the decay of 235 U and 238 U. Of the four peaks detected, three are dominated by the decay of 235 U, and one peak at 15.70 keV covers two characteristic X-rays from the zirconium diffusion barrier (Kα 1 ) and from a 231 Th 15.62 keV X-ray induced by 235 U α-decay. The low energies of these lines suggest that they are mostly emitted from the fuel meat surface, and the poor counting statistics caused by strong self-attenuation make these data a poor candidate for 235 U/ 238 U ratio analysis. We suggest, then, that these X-rays could be used for passive measurement of variations in the cladding thickness of these fuels to complement manual thickness measurement methods.

HALEU↗
DOE OSTI2025

MURR LEU structural and thermal hydraulics analyses: Part I – Preliminary irradiation thermo-mechanical behavior

The University of Missouri Research Reactor (MURR) is expected to be converted from highly enriched uranium (HEU, ≥ 20 wt% U-235) U-Al x dispersion fuel to low-enriched uranium (LEU, < 20 wt% U-235) with U-10Mo monolithic fuel. This work introduces high-fidelity irradiation thermo–mechanical (T-M) analysis of the MURR LEU focusing on changes in coolant channel gap thickness. Three-dimensional (3D) finite element (FE) models were developed to simulate the irradiation T-M behavior of the MURR LEU element with all 23 curved fuel plates, the two side plates, and the combs. It was shown that channel gap thickness changes were influenced not only by plate thickness variations due to fuel swelling and creep but also by the radial displacement of consecutive MURR LEU plates. Modeling the fuel element assembly captured side plate displacements, which were shown to reduce radial fuel plate displacements towards the convex side. The maximum local radial displacement in the element was predicted at the end of life (EOL) as 23.7 mil (602.0 µm) on the lateral centerline of plate 23 towards the convex side. The maximum stripe-averaged reduction in channel gap thickness, particularly relevant for thermal hydraulics (TH) safety analysis, was calculated as 15.9 mil (403.9 µm) in single-side heated channel 24 (the outermost channel). These results account for the thermal resistance from the oxide build-up on cladding surfaces which was shown to be up to 0.82 mil (20.8 µm) thick. It was demonstrated that accounting for oxide layer thermal resistance led to a 10 °C higher peak fuel temperature and a 4.4 mil (111.8 µm) greater maximum local radial displacement. The impact of the calculated channel gap thickness changes on the MURR LEU TH safety analysis is evaluated in Part II.

Irradiation thermo-mechanical analysis↗
DOE OSTI2025

Harnessing nanoscale densification for controlling gas selectivity in flexible zeolitic imidazolate frameworks

Flexible metal-organic frameworks (MOFs) are promising for gas separation due to their molecular recognition capabilities. However, gate-opening behavior in certain flexible MOFs can reduce gas selectivity, enabling simultaneous adsorption of multiple gases. We introduce a binder-free, pressure-free densification process to enhance gas selectivity in flexible zeolitic imidazolate frameworks (ZIF-7 and ZIF-9) by optimizing nanoparticle packing. Unlike powders, the densified ZIF-7 and ZIF-9 retain rhombohedral crystal structures after solvent removal, confirmed via synchrotron powder X-ray diffraction. This process modifies adsorption behavior by introducing a diffusion barrier, enabling diffusivity-driven kinetic separation and enhanced CO2/hydrocarbon selectivity. At 0.5 bar, ZIF-7 mono shows 2×, 4×, and 9.5× higher CO 2 selectivity over C 2 H 2 , C 2 H 4 , and C 2 H 6 , respectively, versus ZIF-7 pwd . ZIF-9 mono similarly shows 6.5×, 3×, and 39× improvements over ZIF-9 pwd . Both monoliths outperform powders in ternary gas mixtures. This study provides a novel strategy to control gate opening and enhance gas selectivity in flexible MOFs for practical separation applications.

CO2/hydrocarbon separation↗
DOE OSTI2025

Uncooled GeSn MWIR Photodetectors Using Fully Relaxed Thin Triple‐Step Buffer

GeSn photodetectors monolithically grown on Ge virtual substrates demonstrate mid-wave infrared (MWIR) detection at room temperature. The lattice mismatch between GeSn and Ge causes dislocations and compressive strain, creating leakage pathways and unwanted indirect band transitions. Designed thin Ge 0.91 Sn 0.09 triple-step buffer layers of ≈175 nm total thickness reduce dislocations and enable full relaxation, showing 100% lattice relaxation and smooth surface roughness of 0.83 nm with shorter auto-correlation length in surface morphology compared to single-step buffers. Ge 1-x Sn x photodetectors (x = 0.09, 0.12, and 0.15) on triple-step buffers with n-i-p configurations achieve lattice strain relaxations of 99%, 88%, and 80%, respectively. Ge 0.91 Sn 0.09 and Ge 0.88 Sn 0.12 show gradual variation in auto-correlation amplitude, while Ge 0.85 Sn 0.15 shows an increase due to lattice mismatch. Shockley–Read–Hall recombination current dominates at low reverse bias due to mismatch-induced dislocations, while band-to-band tunneling current dominates at higher reverse bias due to narrowing bandgap under strong electric fields. Here, the photodetectors show extended spectral response with increasing Sn composition of i-GeSn active layer sandwiched by barriers. Ge 0.88 Sn 0.12 and Ge 0.85 Sn 0.15 exhibit extended wavelength cut-offs of 3.12 and 3.27 µm at room temperature, demonstrating significant potential for silicon-based MWIR applications.

GeSn↗
DOE OSTI2024

Laterally Modulating Carrier Concentration by Ion Irradiation in CdO Thin Films for Mid‐IR Plasmonics

This report demonstrates tunable carrier densities in CdO thin films through local ion irradiation, providing lateral control of mid‐IR optical properties. Ion‐solid interactions produce donor‐like defects that boost electron concentrations from the practical minimum of 2.5 × 10 19 cm −3 to a maximum of 2.5 × 10 20 cm −3 by metered ion exposure. This range is achieved using He, N, Ar, or Au ions at 1–2.8 MeV; when normalized by displacements per atom, all ion species produce comparable results. Since CdO is well‐described by the Drude model, irradiation‐tuned carrier densities directly alter the infrared dielectric function, and in turn, mid‐infrared optical properties. Further, it is demonstrated that by combining irradiation with traditional lithography, CdO films expose to ions in the presence of 3‐µm thick, patterned photoresist exhibit lateral carrier density profiles with ≈400‐nm resolution. Scanning near‐field optical microscopy reveals sharp optical interfaces with almost no companion contrast in surface morphology, microstructure, or crystallinity. Finally, CdO lateral homostructures supporting surface plasmon polaritons (SPPs) are demonstrated whose dispersion relation can be tuned through periodic patterning in a monolithic platform by simple nanofabrication. Numerical simulations show these polaritons result from strong coupling between excitations at CdO plasma frequencies and SPPs supported by the platinum substrate.

cadmium oxide↗
DOE OSTI2025

Birefringent Glass‐Engraved Quasi‐Linear Nanograting Metasurface Based on Self‐Organizing Process for Large Aperture High Power Laser Applications

All-glass metasurface “nanograting” structures that exhibit birefringence in the formed layer are reported. The key enabler of this work is ion beam processing at an angle sufficiently off-normal incidence, inducing self-assembly of a deposited metal layer into quasi-linear metallic features that can function as an etching mask. As a result, a fused silica metasurface, monolithic to the underlying substrate, is demonstrated at 375 nm wavelength to exhibit a phase delay angle of 30° between the principal axes. The capability of an angled etch mask replenishment process is also demonstrated for achieving deeper etch depth and for increasing the grating period, another first – to the best of the knowledge. This is the first display of a technology capable of fabricating glass-engraved near-linear grating structure with a feature-to-feature period as small as 118.6 nm. Furthermore, this technology has the potential to generate grating-like structures with periods as small as 12.4 nm, as demonstrated here with reactive ion beam processing assisted mask assembly. Furthermore, these structures are shown to have reflectivity < 0.4% across the wavelength band 350 nm – 1000 nm. Such a technology can enable laser-durable grating structures for the deep-UV and even down to soft X-ray wavelengths.

Ray, Nathan J. [Lawrence Livermore National Labora↗
DOE OSTI2025

In‐Scribe Silane Bonding for Mechanical Reinforcement of Perovskite Photovoltaic Modules

Despite the extraordinary rise in power conversion efficiency over the last decade, metal halide perovskite (MHP) photovoltaics remain more mechanically fragile than other PV technologies. In this work, the scribe area, created by the monolithic interconnection of thin-film solar cells, is used to extrinsically reinforce the mechanical robustness of packaged MHP solar modules. In contrast to the epoxy-based chemistries often leveraged in the MHP literature, silane-grafted polyolefin encapsulants are designed to form strong covalent bonds to oxide surfaces, specifically to glass and the transparent conductive oxide at the base of the scribe line. Pseudo-modules encapsulated with silane-grafted polyolefin are measured with more than an order-of-magnitude enhancement infracture energy from 0.27 ± 0.01 J·m −2 (no scribes) to 5.97 ± 0.42 J·m −2 (scribes perpendicular to delamination directioncovering ≈2.2% of the module area). The silane-grafted polyolefin retains strong adhesion even after undergoing an accelerated IEC 61215 thermal cycling test consisting of 250 cycles. We find that the in-scribe bonding allows perovskite modules to have adhesion strength comparable to commercial c-Si and CdTe technologies with only 5% reduction in the active module area. This manufacturing-compatible approach offers a practical solution to address the mechanical integrity challenges in MHP solar modules, regardless of cell architecture.

14 SOLAR ENERGY↗
DOE OSTI2025

Control of machining-induced residual stress via tool geometry and process parameter modification

Distortion generated in machined, monolithic, thin-walled aerospace components due to residual stresses leads to significant material and economic waste in the manufacturing industry. Inherent residual stress (IRS) present in stock materials combines with machining-induced residual stress (MIRS) to influence the final machined part distortion. It is hypothesized that MIRS can be controlled, based on the part geometry, through deliberate cutting tool geometry and process parameter modifications to negate the effect of IRS on distortion, consequently resulting in distortion-free parts. A finite element (FE) orthogonal cutting model is developed to study how tool geometry and process parameters influence machining-induced residual stress (MIRS). Orthogonal cutting experiments are performed on Al 7075-T651 samples to measure cutting forces and MIRS. A cutting force dynamometer is used to measure forces during cutting and a novel digital image correlation (DIC) based hole drilling technique is employed to measure the near-surface residual stress (RS) in the cut samples. These data are subsequently utilized to validate the FE prediction model. Various cases of cutting simulations involving different depths of cut, tool tip radii, and rake angles are performed to study their effects on RS. Similar to prior literature, increasing the depth of cut, tool tip radius, or rake angle is found to promote the formation of near-surface tensile stresses. The competing effects of material plowing and temperature are shown to determine the type of RS at the end of the cut. Moreover, a window of variation of RS (up to ± 400 MPa) is estimated within the given range of conditions, allowing for the control of MIRS through tool and process modification.

Mathews, Ritin [ORNL] (ORCID:0000000301440828)↗
DOE OSTI2024

Topology optimization for the full-cell design of porous electrodes in electrochemical energy storage devices

In this paper, we introduce a density-based topology optimization framework to design porous electrodes for maximum energy storage. We simulate the full cell with a model that incorporates electronic potential, ionic potential, and electrolyte concentration. The system consists of three materials, namely pure liquid electrolyte and the porous solids of the anode and cathode, for which we determine the optimal placement. We use separate electronic potentials to model each electrode, which allows interdigitated designs. As a result, a penalization is required to ensure that the anode and cathode do not touch, i.e., causing a short circuit. We compare multiple 2D designs generated for different fixed conditions, e.g. material properties. A 3D design with complex channel and interlocked structure is also created. All optimized designs are far superior to the traditional monolithic electrode design with respect to energy storage metrics. We observe up to a 750% increase in energy storage for cases with slow effective ionic diffusion within the porous electrode.

25 ENERGY STORAGE↗
DOE OSTI2026

Synthesis of boron-carbide aerogels

We present the synthesis of boron carbide aerogels utilizing nano-boron powder and resorcinol–formaldehyde (RF) organic aerogels as precursors. Monolithic aerogels were fabricated from suspensions of boron nanoparticles and RF via an organic sol-gel process, enabling effective distribution of boron in the gel network. The resulting gels underwent supercritical drying, thermal reduction, and subsequent heat treatment to yield boron carbide aerogels with densities ranging from 37 to 55 mg/cm³. By tuning the boron-to-carbon ratio, heat treatment temperature, and dwell time, surface areas up to 53 m²/g were obtained. X-ray diffraction analysis confirmed the formation of the boron carbide phase and detected the presence of residual carbon within the structure.

Materials science↗
DOE OSTI2024

Decomposing a renewable energy design and dispatch model

We address a mixed-integer linear programming model which selects a cost-minimizing set of available technologies with which to design a renewable energy system and prescribe their associated dispatch decisions. Realistically sized instances of such models pose computational challenges. To this end, we develop a Lagrangian heuristic based on a decomposition methodology which partitions the model into blocks and optimizes these more manageable, smaller subproblems. It also provides a lower bound to assess solution quality. In conclusion, we apply this methodology to the National Renewable Energy Laboratory's Renewable Energy Integration and Optimization (REopt TM ) model to generate near-optimal solutions to realistic instances containing, on average, approximately 300,000 variables and at least as many constraints, with a mean 30% optimality gap improvement using a five-minute solution time limit, compared to directly solving the original monolith.

97 MATHEMATICS AND COMPUTING↗
DOE OSTI2025

Understanding Oxide–Metal Interactions During Hot Isostatic Pressing to Diffusion Bond Aluminum Alloy 6061 Plates

The interaction between Mg, Si, and Al 2 O 3 during hot isostatic pressing diffusion bonding of aluminum alloy 6061 (AA6061) plates was investigated through thermodynamic calculations and experimental microstructural characterization. Thermodynamic calculations as functions of temperature, pressure, and composition revealed that the interaction among Mg, Si, and Al 2 O 3 yields Mg 2 Si and either MgO + Al or MgAl 2 O 4 + Al, facilitating the reduction of Al 2 O 3 and allowing Al/Al metallic bonds to form. Total pressure variation had a negligible influence on the oxygen partial pressure, and consequently, the reaction product formation. Oxygen partial pressure variation as a function of temperature and initial amount of Al 2 O 3 determined the formation of either MgO or MgAl 2 O 4 . Experimental Hot Isostatic Pressure (HIP) bonding at 723 K and 833 K under a constant pressure of 1017 atm documented the cooling rate-dependent formation of β–Mg 2 Si precipitates. High-resolution transmission electron microscopy imaging and selected area electron diffraction patterns verified the formation of β–Mg 2 Si and MgO at the interface but did not detect MgAl 2 O 4 . In conclusion, findings from this study clarify the role of thermochemical interactions in oxide disruption and bonding mechanisms during HIP diffusion bonding of AA6061 and provide guidance for optimizing joining processes for monolithic nuclear fuel assemblies.

11 - NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2025

Impact of U-10Mo HALEU Fuel Element Tolerances on the Massachusetts Institute of Technology Reactor safety and operational performance – Neutronics

The U.S. is coordinating efforts for the conversion of six U.S. high performance research reactors (USHPRR), including one critical assembly from highly enriched uranium (HEU) to low-enriched uranium (LEU). In order to continue the mission of these reactors, including the Massachusetts Institute of Technology Reactor (MITR), and achieve similar performance, high assay low-enriched uranium (HALEU) with a high-density metallic alloy of uranium with 10 wt% molybdenum (U-10Mo) is being considered. Following the preliminary design of the proposed MITR LEU fuel elements using the U-10Mo monolithic alloy, the impact of the fabrication specification was assessed. This work focuses on the analysis of select neutronics characteristics of the MITR LEU core as a function of the variation of the relevant fuel specification parameters (e.g., U-10Mo composition, fuel plate thickness, etc.). A separate article submitted to this journal addresses the impact on the thermal hydraulic performance. The analyses in these works are performed based on an all-LEU conversion management plan identified in previous work, in which only the proposed elements are utilized for achieving the conversion of MITR. The variations of two main neutronics characteristics are assessed as a function of the variability of the specification parameters resulting from the fabrication process: the MITR LEU core reactivity and the fuel cycle length. The main findings of this work show that the MITR core can meet the operational requirements during the LEU transition plan under the limiting fabrication parameter combinations considered. In addition, the analyses show that the dependency of the core neutronics characteristics on the specification parameters is highly linear within the specification tolerances. The rates of variation are reported in detail for each parameter and can serve as a powerful tool for future MITR fuel management in cases such as when HALEU supply is established that may allow additional cycle length or other operational benefits.

Conversion↗
DOE OSTI2025

Impact of U-10Mo HALEU fuel element tolerances on the Massachusetts Institute of Technology reactor safety and operational performance – Thermal hydraulics

The U.S. is coordinating efforts for the conversion of six U.S. High Performance Research Reactors (USHPRR) including one critical facility from highly enriched uranium (HEU) to low-enriched uranium (LEU). In order to continue the mission of these reactors, including the Massachusetts of Institute of Technology Reactor (MITR), and achieve similar performance, high-assay low-enriched uranium (HALEU) with a high-density metallic alloy of uranium with 10 wt% molybdenum (U-10Mo) is being evaluated. The impact of the fabrication specification and tolerances was assessed following the preliminary design of the MITR LEU fuel elements using the U-10Mo monolithic alloy. This research focuses on the analysis of fabrication specification impact on thermal hydraulics (TH) characteristic of the MITR LEU core as a function of the variation of the relevant fuel specification parameters (e.g., coolant channel gap thickness, fuel plate thickness, etc.). The analyses are performed based on an all-fresh LEU fuel conversion plan identified in a preliminary safety analysis report submitted to the Nuclear Regulatory Commission. The reactor power margin to the onset of nucleate boiling (ONB) is assessed under the limiting safety system settings (LSSS), where a scram occurs, to ensure there is sufficient margin to the reactor safety limit, which is defined by the onset of flow instability that occurs after the ONB. The best estimate plus uncertainty approach is employed to analyze this TH characteristic, which yields realistic results while maintaining adequate conservatism, utilizing a statistical uncertainty propagation method with the STAT7 code. The TH characteristic is analyzed as a function of the variability of the specification parameters resulting from the fabrication process. The main findings of this study show that the MITR core can meet the TH safety and operational requirements at the all-LEU initial core startup (cycle 1), selected transition cycles (most reactive cycle and most limiting cycle: cycle 3 and 5, respectively) and equilibrium (cycle 14) cores under all limiting fabrication parameter combinations considered. In addition, the analyses show that the dependency of the core power margin to ONB on those specification parameters that have the most direct impact on TH performance is non-linear but monotonically decreasing within the specification tolerances. The third order polynomial fit curves are reported in detail for selected limiting cases and can serve as a powerful tool for future MITR fuel management in cases such as when HALEU supply is established that may allow additional cycle length or other operational benefits.

Conversion↗
DOE OSTI2025

Studies of the influence of heat pipe model and coupling strategy in heat pipe microreactor simulations using Sockeye

This work demonstrates various modeling approaches for thermally coupling heat pipes to a graphite monolithic block in a microreactor context, accounting for the presence of a gap. We show that heat pipe model selection has a significant impact on the transient behavior of a three-dimensional coupled microreactor assembly problem by comparing results obtained using different heat pipe models from the heat pipe code Sockeye. Additionally, we show that the choice of coupling strategy has significant consequences for both accuracy and performance. Furthermore, we found that our heat flux transfer strategy exhibited greater accuracy than our temperature transfer strategy, even when comparing a loose coupling of the heat flux transfer strategy to a tight coupling of the temperature transfer strategy. Although this research uses only theoretical test problems, it provides important insights in modeling thermal fluids phenomena in heat pipe microreactors.

Direwolf↗
DOE OSTI2026

Enhancing mobility and interface state engineering via UV-ozone treatment in BEOL-compatible ultrathin TiO 2 transistors

It has emerged as a potential candidate to improve the performance of monolithic-three-dimensional (M3D) integration of fused logic and memories through low-temperature in situ synthesis of high-performance metal–oxide–semiconductor (MOS) transistors. Here, we report the demonstration of the BEOL-compatible low thermal budget (350 °C) fabrication process of ultrathin-TiO2 transistors by the combination of RTA and UV-ozone treatment (RTA-UVOz). UV–ozone (UVOz) treatment of TiO2 anatase films significantly enhances stability, boosting ION current and field effect mobility (μ FE ) by two times of magnitude in TiO2 TFTs. UV ozone treatment helps to eliminate pre-existing oxygen vacancies and carbon contamination on TiO2 channels even at low temperature (100 °C), resulting in high-quality channel/dielectric interfaces with low interface states (D it ). During UVOz treatment, oxygen species (O x ) passivate the oxygen vacancies ($V$$^{2+}_{o}$), and hence low concentration of $V$$^{2+}_{o}$ would be left for ionization/de-ionization under PBS/NBS, leading to improved bias stress stability. Furthermore, the TiO 2 TFTs with thin ZrO 2 gate dielectric exhibited excellent performance including a lower subthreshold swing (SS) of 98 mV/dec with high drive I ON current ∼ 4.5 μA/μm, a high I ON /I OFF > 10 9 , and mobility μFE of 7 cm 2 /V-s under a battery powered voltage of 1 V. UV–ozone treatment enables high-performance, CMOS-compatible TiO 2 transistors with a low thermal budget, ideal for next-generation flexible, energy-efficient electronics.

BEOL↗