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At least 91 records · Page 5

Extreme Ultraviolet and Beyond Extreme Ultraviolet Lithography Using Amorphous Zeolitic Imidazolate Resists Deposited by Atomic/Molecular Layer Deposition

Amorphous zinc-imidazolate (aZnMIm) resists show potential to meet the demands for next-generation high-numerical aperture (high-NA) metal-containing extreme ultraviolet (EUV) resist materials, given their ease of deposition by atomic/molecular layer deposition (ALD/MLD) at thicknesses of 20 nm and below. Here, this study demonstrates that aZnMIm thin films, previously identified as high-resolution electron beam resists, can also function as negative-tone EUV photoresists. Water development achieves high sensitivity (5 mJ/cm 2 ) but leaves significant residue, while acetic acid development results in poor contrast. A hybrid approach─water followed by acetic acid─enables residue-free development with a sensitivity of 181 mJ/cm 2 . Dry development using 1,1,1,5,5,5-hexafluoroacetylacetone (hfacH) is also possible but shows lower sensitivity (375 mJ/cm 2 ) compared to wet development methods. EUV photoelectron spectroscopy (PES), reflectometry/EUV absorption, total electron yield (TEY), residual gas analysis (RGA), and time-of-flight secondary ion mass spectrometry (TOF-SIMS) were used to investigate the effects of EUV irradiation on aZnMIm resists. Reflectometry experiments reveal an aZnMIm EUV absorption coefficient of 6.2 μm –1 , while PES and TEY analyses show that, compared to poly(4-hydroxystyrene) (PHS), a polymer-based reference resist, aZnMIm emits more primary and secondary electrons but generates fewer slow electrons relative to its primary electron emission; its total electron yield is similar to that of poly(methyl methacrylate) (PMMA) resists. When exposed to EUV, aZnMIm predominantly outgasses H 2 , as determined by RGA. TOF-SIMS measurements demonstrate that high-dose EUV exposure only partially fragments the 2-methylimidazole (2MIm) organic linkers, unlike high-dose electron beam exposure, which is known to completely degrade them. Additionally, aZnMIm resists show promise for potential beyond EUV lithography (BEUVL) due to the presence of Zn, which provides higher sensitivity at a wavelength of 6.7 nm compared to other metal ions, such as Sn, that are currently used in the best-performing EUV metal–organic resists. TEY measurements demonstrate that aZnMIm emits nearly twice as many electrons as PHS at 6.7 nm. The BEUV TEY of aZnMIm also surpasses that of PMMA, poly(pentafluorostyrene), and poly(4-iodostyrene), with the latter two being known for their high EUV TEYs. This work provides insight into zeolitic imidazolate framework (ZIF)-based EUV and BEUV resists and highlights their potential for both wet and dry development.

lithography↗

Modulating the Lattice Stability in Sodium-Layered Oxide Cathodes through Inductive Effect

Stability and safety of sodium layered oxide cathodes relative to lithium analogs remain a critical concern, yet its fundamental origin remains poorly understood. Here, we examine the role of sodium – oxygen bond ionicity in governing outgassing by introducing 5% lithium (Li), potassium (K), or both into layered NaNiO 2 (NNO), yielding Na 0.95 Li 0.05 NiO 2 , Na 0.95 K 0.05 NiO 2 , and Na 0.90 Li 0.05 K 0.05 NiO 2 . Online electrochemical mass spectrometry at 4.3 V reveals that K substitution increases gas evolution with similar charge capacity, whereas Li substitution reduces gas evolution by nearly 80% with only a 16% capacity decrease. Capacity-controlled experiments show that NNO must be charged to only 3.8 V (144 mA h g -1 ) to achieve gas evolution comparable to Na 0.95 Li 0.05 NiO 2 charged to 4.3 V (175 mA h g -1 ). These results demonstrate that tuning alkali-metal–oxygen bond ionicity through the inductive effect regulates Ni–O covalency, lattice oxygen stability, and interfacial reactivity, providing design guidance for safer sodium layered oxide cathodes.

25 ENERGY STORAGE↗

Air‐Sea CO 2 Fluxes Localized by Topography in a Southern Ocean Channel

Abstract Air‐sea exchange of carbon dioxide (CO 2 ) in the Southern Ocean plays an important role in the global carbon budget. Previous studies have suggested that flow around topographic features of the Southern Ocean enhances the upward supply of carbon from the deep to the surface, influencing air‐sea CO 2 exchange. Here, we investigate the role of seafloor topography on the transport of carbon and associated air‐sea CO 2 flux in an idealized channel model. We find elevated CO 2 outgassing upstream of a seafloor ridge, driven by anomalous advection of dissolved inorganic carbon. Argo‐like Lagrangian particles in our channel model sample heterogeneously in the vicinity of the seafloor ridge, which could impact float‐based estimates of CO 2 flux.

59 BASIC BIOLOGICAL SCIENCES↗

A Lake Biogeochemistry Model for Global Methane Emissions: Model Development, Site‐Level Validation, and Global Applicability

Abstract Lakes are important sentinels of climate change and may contribute over 30% of natural methane (CH 4 ) emissions; however, no earth system model (ESM) has represented lake CH 4 dynamics. To fill this gap, we refined a process‐based lake biogeochemical model to simulate global lake CH 4 emissions, including representation of lake bathymetry, oxic methane production (OMP), the effect of water level on ebullition, new non‐linear CH 4 oxidation kinetics, and the coupling of sediment carbon pools with in‐lake primary production and terrigenous carbon loadings. We compiled a lake CH 4 data set for model validation. The model shows promising performance in capturing the seasonal and inter‐annual variabilities of CH 4 emissions at 10 representative lakes for different lake types and the variations in mean annual CH 4 emissions among 106 lakes across the globe. The model reproduces the variations of the observed surface CH 4 diffusion and ebullition along the gradients of lake latitude, depth, and surface area. The results suggest that OMP could play an important role in surface CH 4 diffusion, and its relative importance is higher in less productive and/or deeper lakes. The model performance is improved for capturing CH 4 outgassing events in non‐floodplain lakes and the seasonal variability of CH 4 ebullition in floodplain lakes by representing the effect of water level on ebullition. The model can be integrated into ESMs to constrain global lake CH 4 emissions and climate‐CH 4 feedback.

54 ENVIRONMENTAL SCIENCES↗

Inner southern magnetosphere observation of Mercury via SERENA ion sensors in BepiColombo mission

Mercury’s southern inner magnetosphere is an unexplored region as it was not observed by earlier space missions. In October 2021, BepiColombo mission has passed through this region during its first Mercury flyby. Here, we describe the observations of SERENA ion sensors nearby and inside Mercury’s magnetosphere. An intermittent high-energy signal, possibly due to an interplanetary magnetic flux rope, has been observed downstream Mercury, together with low energy solar wind. Low energy ions, possibly due to satellite outgassing, were detected outside the magnetosphere. The dayside magnetopause and bow-shock crossing were much closer to the planet than expected, signature of a highly eroded magnetosphere. Different ion populations have been observed inside the magnetosphere, like low latitude boundary layer at magnetopause inbound and partial ring current at dawn close to the planet. These observations are important for understanding the weak magnetosphere behavior so close to the Sun, revealing details never reached before.

79 ASTRONOMY AND ASTROPHYSICS↗

Robust fluorescent calcium coordination polymers as Cu 2+ sensors with high sensitivity and fast response

A three-dimensional (3D) and highly fluorescent calcium-based coordination polymer (Ca-CP) has been synthesized and structurally characterized. Furthermore, built on a strongly fluorescent (FL) chromophore ligand, [Ca(H 2 tcbpe)(H 2 O) 2 ] (1) (H 4 tcbpe = 4',4''',4''''',4'''''''-(ethene-1,1,2,2-tetrayl)tetrakis(([1,1'-biphenyl]-4-carboxylic acid))) is highly luminescent. Photoluminescence (PL) studies indicate that 1 undergoes a bathochromic shift in emission energy from blue to green color upon outgassing or under mechanic force. Notably, 1 exhibits selective FL sensing for Cu 2+ ions with a detection limit (LOD) of 0.064 ppm, far below the U.S. WHO and EPA standard for drinking water. Detailed investigation of the sensing mechanism reveals that uncoordinated COO– groups in 1 play a major role in recognizing Cu 2+ ions.

36 MATERIALS SCIENCE↗

Development of pebble-based extruded carbon rods for extreme plasma heat flux environments

This work presents first experiments toward the development of continuously renewable (extrudable) pebble-based carbon rods for use as plasma-facing components in extreme steady-state plasma flux environments. The primary envisioned application of this work is a first wall that can survive long-term in future magnetic fusion power reactors while also improving recovery of the reactor fuel (tritium and deuterium atoms). Bench tests applying extreme steady-state front-surface heat loads of up to 50 MW/m 2 are presented. Continuous pebble rod front-surface recession and intact pebble recovery are successfully demonstrated, at a rate of order 0.2 cm/s. Numerical simulations of the pebble rod front-surface recession are able to match observations reasonably well, indicating that the recession mechanism can be understood as occurring due to pebble thermal expansion and resulting shock and cracking of the inter-pebble binder. Tests of the pebble rod extrusion demonstrate that friction between the rods and the stainless-steel extrusion channel is tolerably low (<50 N for the expected channel length) over a wide range of temperatures. Front-surface outgassing rates below 1000 Torr L/s/m 2 are achieved, believed to be sufficiently low for use in magnetic fusion reactors. In conclusion, initial parametric scans over pebble rod size and binder fraction to vary front-surface recession rates are presented.

36 MATERIALS SCIENCE↗

Evaluation of lithium as a tritium storage medium for betavoltaics

Lithium foils were demonstrated to absorb surrogate protium for tritium-powered betavoltaics. 20μm thick lithium foils were hole-punched from a ribbon of electrodeposited lithium on copper foil. The lithium foils were loaded with hydrogen in a custom Sievert apparatus where the pressure drop showed full hydriding at a hydrogen pressure of 2 bar and at all loading temperatures above the lithium melting point at 190, 200, 225, 250, and 300. Lithium hydride formation was confirmed with Raman spectroscopy after hydrogen loading. The kinetics of experimental hydride formation was compared to the diffusion-limited Mintz–Bloch model. While the Mintz–Bloch model showed good fit with the experimental loadings, the model overpredicted the loading kinetics starting at 250 °C and at higher temperatures. In conclusion, The overprediction was either caused by lithium hydride outgassing due to some reduction with some residual lithium hydroxide created from brief air exposure when sealing the lithium in the reactor or a transition from diffusion-limited hydride growth to surface or metal–hydride interface-limited hydride growth.

25 ENERGY STORAGE↗

Methanediol from cloud-processed formaldehyde is only a minor source of atmospheric formic acid

Atmospheric formic acid is severely underpredicted by models. A recent study proposed that this discrepancy can be resolved by abundant formic acid production from the reaction ( 1 ) between hydroxyl radical and methanediol derived from in-cloud formaldehyde processing and provided a chamber-experiment-derived rate constant, k 1 = 7.5 × 10 −12 cm 3 s −1 . High-level accuracy coupled cluster calculations in combination with E,J -resolved two-dimensional master equation analyses yield k 1 = (2.4 ± 0.5) × 10 −12 cm 3 s −1 for relevant atmospheric conditions ( T = 260–310 K and P = 0–1 atm). We attribute this significant discrepancy to HCOOH formation from other molecules in the chamber experiments. More importantly, we show that reversible aqueous processes result indirectly in the equilibration on a 10 min. time scale of the gas-phase reaction HCHO + H 2 O ⇌ HOCH 2 OH (2) with a HOCH 2 OH to HCHO ratio of only ca . 2%. Although HOCH 2 OH outgassing upon cloud evaporation typically increases this ratio by a factor of 1.5–5, as determined by numerical simulations, its in-cloud reprocessing is shown using a global model to strongly limit the gas-phase sink and the resulting production of formic acid. Based on the combined findings in this work, we derive a range of 1.2–8.5 Tg/y for the global HCOOH production from cloud-derived HOCH 2 OH reacting with OH. The best estimate, 3.3 Tg/y, is about 30 times less than recently reported. The theoretical equilibrium constant K eq (2) determined in this work also allows us to estimate the Henry’s law constant of methanediol (8.1 × 10 5 M atm −1 at 280 K).

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Computer simulation of carbonization and graphitization of coal

Abstract This study describes computer simulations of carbonization and graphite formation, including the effects of hydrogen, nitrogen, oxygen, and sulfur. We introduce a novel technique to simulate carbonization, ‘Simulation of Thermal Emission of Atoms and Molecules (STEAM)’, designed to elucidate volatile outgassing and density variations in the intermediate material during carbonization. The investigation analyzes the functional groups that endure through high-temperature carbonization and examines the graphitization processes in carbon-rich materials containing non-carbon impurity elements. The physical, vibrational, and electronic attributes of impure amorphous graphite are analyzed, and the impact of nitrogen on electronic conduction is investigated.

Ugwumadu, C. (ORCID:0000000199207594)↗

Effect of a Cr-rich surface layer on D retention in various RAFM steels

In this work, deuterium (D) retention is compared between various reduced-activation ferritic/martensitic steels, including CLF-1, Eurofer, F82H, and Rusfer, exposed to pure D plasma (ion flux ~1.5–2 × 10 21 m -2 s -1 , fluence, &straightphi; D , ~1 × 10 25 m -2 , sample temperature ~373 K, and incident ion energy ~100 eV). It is found that there is a large difference (up to ~30x) in the D retention between CLF-1 and F82H even with the same plasma exposure condition and similar nominal composition. The &straightphi; D dependence of the D retention exhibits a peculiar, counterintuitive feature: the D retention decreases with an increase in &straightphi; D from 2 × 10 23 m -2 to 1 × 10 25 m -2 . Surface analyses reveal that a Cr-rich surface layer is formed during outgassing at 773 K for 1 h before plasma exposure, and that there exists a clear correlation between the D retention and the Cr content in the surface layer.

36 MATERIALS SCIENCE↗

Initial study on thermal stability of cold spray tantalum coating irradiated with deuterium for fusion applications

Abstract Removal of neutral hydrogen atoms in the plasma edge reduces the number of charge exchange events and thus, the net energy losses in the plasma, significantly improving performance of fusion devices. Effective control of the residual pressure of hydrogen isotopes (HIs) in the plasma edge may be achieved by utilizing a hydrogen absorbing first wall interface capable of withstanding the harsh fusion environment. In this study, we have investigated tantalum (Ta) coating deposited by cold spray technology on 316L stainless steel substrate as a potential plasma-facing material surface. High fluence low energy deuterium plasma irradiation experiments and subsequent thermal annealing cycles associated with thermal desorption spectrometry (TDS) demonstrated superior structural stability of the Ta coating. TDS experiments revealed the outgassing of deuterium (as measure of its retention) for cold spray Ta coatings to be three times higher than bulk Ta and two orders of magnitude greater than bulk polycrystalline W. X-ray photoelectron spectroscopy revealed evolution of oxidation states upon deuterium irradiation and a partial recovery of the metallic signature of Ta after the thermal treatment at 1100 K.

Physics↗

High-power test results for a cylindrical-shell silicon carbide higher-order-mode damper

The next high-current Electron-Ion Collider (EIC) is a new accelerator to be built at Brookhaven National Laboratory in collaboration with Thomas Jefferson National Accelerator Facility. In the EIC Electron Storage Ring (ESR), there will be beam currents of up to 2.5 A, which will excite massive higher-order-mode (HOM) power in the 17 single-cell 591 MHz superconducting radio-frequency (SRF) cavities. Damping the HOM power in the ESR SRF cavities is a challenge. A room temperature cylindrical shell shape silicon carbide (SiC) beamline HOM absorber (BLA) was chosen as the baseline design, due to its broadband and high-power capability, and previous demonstrations at other accelerator facilities, albeit at much lower power. Because the EIC BLA HOM power dissipation is significantly greater than the previous applications, it is imperative to carry out high-power testing to determine the maximum device performance levels achievable for thermal transport, rf breakdown, and mechanical stress, prior to finalizing the design. A SiC HOM absorber with a state-of-the-art geometry size was prototyped to verify the shrink-fit technique, test outgassing rate, and high-power handling capability. This paper presents the HOM damper’s prototyping and test results. Published by the American Physical Society 2024

43 PARTICLE ACCELERATORS↗

Thermomechanical Degradation of Sintered Copper Under High-Temperature Thermal Shock

The need for reliable bonded interface materials is critical to realize the performance benefits of wide-bandgap devices in power electronics modules, especially in operating temperatures greater than 150 degrees C. In this paper, we investigate the thermomechanical performance of sintered copper (Cu) as a large-area attachment, bonded between Cu baseplates and active-metal-bonded substrates, under accelerated thermal shock (-40 degrees C to 200 degrees C) conditions. In the fabrication phase of the samples, we used different stencil patterns and found that the grid and stripe patterns resulted in a better outgassing of the residual organics during the sintering process, thereby ensuring a substantially improved bond quality compared to a full-area print. The paste consisted of Cu microflakes, and we performed sintering using a Budatec SP300 sintering press at 275 degrees C with 15 MPa of bonding pressure for 5 minutes in a nitrogen atmosphere. Under accelerated experiments, we monitored the degradation of the sintered Cu bond in the samples through C-mode scanning acoustic microscope (C-SAM) images. To quantify the defect percentage in C-SAM images, we investigated image denoising techniques to exclude the pattern prints. Finally, we cross-sectioned a sample and obtained scanning electron microscope images, which revealed adhesive fracture as the dominant failure mechanism.

ADVANCED PROPULSION SYSTEMS,INORGANIC, ORGANIC, PH↗

Improved fabrication of scalable hybrid silicon nitride–thin-film lithium niobate electro-optic modulators

Strategies for improved fabrication of integrated thin-film lithium niobate electro-optic (EO) Mach–Zehnder modulators (MZMs) are reported using scalable processes and designs. The MZM devices utilize direct bonding of unetched and unpatterned thin-film lithium niobate to patterned and planarized silicon photonic microchips. The latter contains silicon nitride waveguide structures of various widths that are used to form hybrid modes that are suitable for high-bandwidth low-voltage EO modulators based on Pockels effect. We report that the incorporation of appropriately designed outgassing channels and certain modifications to key processing steps helped achieve a greater than 99% reduction in void density during bonding. Void reduction is critically important for these traveling-wave hybrid MZM devices in which the optical mode is controllably distributed between multiple thin layers and propagates over millimeter-scale lengths.

Mere, Viphretuo↗

Eliminating Signal Bias Caused by Vacuum System Backstreaming in the Diagnostic Residual Gas Analyzer of ITER

In fusion neutral gas analysis, such as with the Diagnostic Residual Gas Analyzer (DRGA) for ITER, the primary measurement range of interest comprises the low-amu species (1 to 6), especially deuterium and helium. The challenge in successfully obtaining accurate measurements is two-fold. First, the sensitivity of the method must be sufficient to resolve trace amounts accurately; typically, one percent or less. Second, the gas signal from the fusion processes must be free of bias caused by the latent presence (from system outgassing and/or vacuum backstreaming) of these gases to enable accurate interpretation of the measured signal. This latter criterion can be problematic for the lightest gases since there is a propensity for some fraction of the pumped gas load to undergo a phenomenon known as backstreaming. This behavior is manifested in pumping systems for gas properties related to relative atomic weight (lightest) and size (smallest). Backstreaming results in a significant amount of the pumped gas undertaking a reverse flow and re-entering the measurement region; thus, contaminating the forward, real-time measurement. To fully eliminate this adverse effect, a conductance-limiting device – or orifice – has been installed in the high-vacuum pumping system of the present ITER DRGA prototype. The system was already equipped with a secondary turbomolecular pump (TMP), but with limited effectiveness against backstreaming in the inter-pump volume (IPV). This orifice is placed within the suction inlet coupling of the secondary TMP, which is downstream of the IPV. Its objective is to eliminate the backstreaming phenomenon by increasing the back pressure in the IPV. However, the orifice sizing must take into consideration other factors, such as the diagnostic measurement objectives. For example, in the ITER DRGA, one of the measurement requirements is a dynamic response time of ~1s. Fortunately, an added benefit of the pumping restriction created by the orifice is that the upstream pressure increase is beneficial for the DRGA’s optical gas analysis (OGA) sensors. These sensors are attached to the IPV in the present design. The glow discharges, when used as an OGA light source, will typically have a brighter light emission with increasing plasma cell pressure. In addition to the fusion machine research sector, there are other potential applications of this pumping technique where the monitoring of lighter gas concentrations is essential, such as the photolithography process for the semiconductor fabrication of integrated circuits. This presentation will describe the vacuum system used to demonstrate a process to eliminate backstreaming as well as show test results to verify the accomplishment of this critical objective.

Marcus, Chris↗

Ferrite Specification for the Mu2e 300 kHz and 4.4 MHz AC Dipole Magnets

The Mu2e experiment at Fermilab will measure the rate for neutrinoless-conversion of negative muons into electrons with never-before-seen precision. This experiment will use a pulsed 8 GeV proton beam with pulses separated by 1.7 µs. To suppress beam induced backgrounds to this process, a set of dipoles operating at 300 kHz and 4.4 MHz have been developed that will reduce the fraction of out-of-time protons at the level of 1E-10 or less. Selection of magnetic ferrite material for construction must be carefully considered given the high repetition rate and duty cycle that can lead to excess heating in conventional magnetic material. A model of the electromagnetic and thermal properties of candidate ferrite materials has been constructed. Magnetic permeability, inductance, and power loss were measured at the two operating frequencies in toroidal ferrite samples as well as in the ferrites from which prototype magnets were built. Additionally, the outgassing rates of the ferrite material was measured to determine vacuum compatibility. The outcome of this work is a detailed specification of the electrical and mechanical details of the ferrite material required for this application.

43 PARTICLE ACCELERATORS↗

Developing Advanced Charge Readout Techniques for nEXO and Future Liquid Xenon OVBB Detectors (Final Report)

This award supported the Yale group’s efforts on nEXO, which included the following: 1) Developed techniques for measuring the outgassing of materials into liquid xenon (LXe) and a model for predicting the electron lifetime in nEXO and future LXe TPCs 2) Work to develop the conceptual design for the nEXO Photon Detector subsystem and TPC subsystem interconnections 3) Developed simulation of charge and light propagation and readout in nEXO.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗