Cleaning The Walls of A Silane Reactor
Scraper removes silicon deposits from inner walls of reactor vessel. Scraper supported by gas bearing. Scraper made of non-contaminating material such as quartz or silicon.
Yamakawa, K. A.↗
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Flat-plate solar array project: Experimental process system development unit for producing semiconductor-grade silicon using the silane-to-silicon process
The process technology for the manufacture of semiconductor-grade silicon in a large commercial plant by 1986, at a price less than $14 per kilogram of silicon based on 1975 dollars is discussed. The engineering design, installation, checkout, and operation of an Experimental Process System Development unit was discussed. Quality control of scaling-up the process and an economic analysis of product and production costs are discussed.
Source record↗
High-Purity Silicon Seeds for Silane Pyrolysis
Seed particles for fluidized-bed production of silicon made by new contamination-free, economical method. In new method, large particles of semiconductor-grade silicon fired at each other by high-speed streams of gas and thereby break up into particles of suitable size for fluidized bed. No foreign materials introduced, and leaching unnecessary. Method used to feed fluidized-bed reactor for continuous production of high-purity silicon.
Hsu, G. C.↗
Diagnostics of silane and germane radio frequency plasmas by coherent anti-Stokes Raman spectroscopy
In situ plasma diagnostics using coherent anti-Stokes Raman spectroscopy have shown different dissociation characteristics for GeH4 and SiH4 in radio frequency (rf) plasma-enhanced chemical vapor deposition of amorphous silicon germanium alloy (a-SiGe:H) thin films. The GeH4 dissociation rate in rf plasmas is a factor of about 3 larger than that of SiH4. Plasma diagnostics have revealed that the hydrogen dilution of the SiH4 and GeH4 mixed plasma plays a critical role in suppressing the gas phase polymerization and enhancing the GeH4 dissociation.
Perry, Joseph W.↗
Silane and germane plasma diagnostics for depositing photosensitive a-SiGe:H films
Highly photosensitive a-SiGe:H films with a light-to-dark conductivity ratio of 8 x 103 and an optical bandgap of 1.40 eV have been produced by RF glow discharge using hydrogen dilution of SiH4 and GeH4 mixed gas plasma. The critical role of hydrogen dilution in GeH4 containing plasmas is to suppress the gas-phase polymerization and promote the incorporation of Ge into the film. It is observed that inelastic laser light scattering of the RF plasma is a sensitive method for monitoring the onset of the gas-phase polymerization. In situ coherent anti-Stokes Raman spectroscopy measurements have shown that the dissociation rate of GeH4 is a factor of three larger than that of SiH4.
Shing, Y. H.↗
Counterflow diffusion flames of hydrogen, and hydrogen plus methane, ethylene, propane, and silane vs. air - Strain rates at extinction
Five coaxial tubular opposed jet burners (OJBs) with tube diameter D(T) of 1.8-10 mm and 5 mm conical nozzles were used to form dish-shaped counterflow diffusion flames centered by opposing laminar jets of nitrogen and hydrocarbon-diluted H2 versus air in an argon-purged chamber at 1 atm. Area-averaged air jet velocities at blowoff of the central flame, U(air), characterized extinction of the airside flame as functions of input H2 concentration on the fuelside. A master plot of extensive U(air) data at blowoff versus D(T) shows that U(air) varies linearly with D(T). This and other data sets are used to find that nozzle OJB results for U(air)/diameter average 4.24 + or - 0.28 times larger than tubular OJB results for the same fuel compositions. Critical radial velocity gradients consistent with one-dimensional stagnation point boundary theory and with plug flow inputs are estimated. The results compare favorably with published numerical results based only on potential flow.
Pellett, G. L.↗
Cross-sections for the formation of negative ions by electron impact on silane
Cross-sections and appearance potentials for the production of various negative ion species by electron impact on SiH4 have been measured. They are compared with two previous measurements which widely differ with each other. Hess' law has been applied to predict the various possible channels of dissociation.
Srivastava, S. K.↗
Kinetics and Structure of Superagglomerates Produced by Silane and Acetylene
The evolution of smoke in a laminar diffusion flame involves several steps. The first step is particle inception/nucleation in the high-temperature fuel-rich region of the flame followed by surface growth and coagulation/coalescence of the small particles. As the primary spheres grow in size and lose hydrogen, the colliding particles no longer coalesce but retain their identity as a cluster of primary spheres, termed an agglomerate. Finally, in the upper portion of the flame, the particles enter an oxidizing environment which may lead to partial or complete burnout of the agglomerates. Currently there is no quantitative model for describing the growth of smoke agglomerates up to superagglomerates with an overall dimension of 10 microns and greater. Such particles are produced during the burning of acetylene and fuels containing benzene rings such as toluene and polystyrene. In the case of polystyrene, smoke agglomerates in excess of 1 mm have been observed "raining" out from large fires. Evidence of the formation of superagglomerates in a laminar acetylene/air diffusion flame has been recently reported. Acetylene was chosen as the fuel since the particulate loading in acetylene/air diffusion flames is very high. Photographs were obtained by Sorensen using a microsecond xenon lamp of the "stream" of soot just above the flame. For low flow rates of acetylene, only submicrometer soot clusters are produced and they give rise to the homogeneous appearance of the soot stream. When the flow rate is increased to 1.7 cu cm/s, soot clusters up to 10 microns are formed and they are responsible for the graininess and at a flow rate of 3.4 cu cm/s, a web of interconnected clusters as large as the width of the flame is seen. This interconnecting web of superagglomerates is described as a gel state by Sorensen et al (1998). This is the first observation of a gel for a gas phase system. It was observed that this gel state immediately breaks up into agglomerates due to buoyancy induced turbulence and gravitational sedimentation.
Mulholland, G. W.↗
Particle Generation And Evolution In Silane (SiH4)/Acetylene (C2H2) Flames In Microgravity
The objective of this experimental program is to advance the understanding of the coupling of particle formation with gas phase combustion processes. The work utilizes the unique SiH4/C2H2 combustion system which generates particulate products ranging from high purity, white SiC to carbonaceous soot depending on equivalence ratio (Ref. 1). A goal of this work is to identify gas phase or particle formation processes that provide the enthalpy release needed to drive the combustion wave, and to locate the steps of the particle formation process that determine SiC stoichiometry and crystallinity. In a real sense, these SiH4/C2H2 flames act like highly sooty hydrocarbon flames, but with simpler chemistry. This simplification is expected to allow them to be used as surrogates to advance understanding of soot formation in such rich hydrocarbon flames. It is also expected that this improved understanding of SiC particle generation and evolution in these self-sustaining flames will advance the commercial potential of the flame process for the generation of high purity SiC powders.
Keil, D. G.↗
Novel Phenylethynyl Imide Silanes as Coupling Agents for Titanium Alloy
The durability of titanium (Ti) alloys bonded with high temperature adhesives such as polyimides has failed to attain the level of performance required for many applications. The problem to a large part is attributed to the instability of the surface treatment on the Ti substrate. Although Ti alloy adhesive specimens with surface treatments such as chromic acid anodization, Pasa-Jell, Turco, etc. have provided high initial mechanical properties, these properties have decreased as a function of aging at ambient temperature and faster, when aged at elevated temperatures or in a hot-wet environment. As part of the High Speed Civil Transport program where Ti honeycomb sandwich structure must perform for 60,000 hours at 177 C, work was directed to the development of environmentally safe, durable Ti alloy surface treatments.
Park, C.↗
Fluidized bed silicon deposition from silane
A process and apparatus for thermally decomposing silicon containing gas for deposition on fluidized nucleating silicon seed particles is disclosed. Silicon seed particles are produced in a secondary fluidized reactor by thermal decomposition of a silicon containing gas. The thermally produced silicon seed particles are then introduced into a primary fluidized bed reactor to form a fluidized bed. Silicon containing gas is introduced into the primary reactor where it is thermally decomposed and deposited on the fluidized silicon seed particles. Silicon seed particles having the desired amount of thermally decomposed silicon product thereon are removed from the primary fluidized reactor as ultra pure silicon product. An apparatus for carrying out this process is also disclosed.
Hsu, George C.↗
Fluidized bed silicon deposition from silane
A process and apparatus for thermally decomposing silicon containing gas for deposition on fluidized nucleating silicon seed particles is disclosed. Silicon seed particles are produced in a secondary fluidized reactor by thermal decomposition of a silicon containing gas. The thermally produced silicon seed particles are then introduced into a primary fluidized bed reactor to form a fludized bed. Silicon containing gas is introduced into the primary reactor where it is thermally decomposed and deposited on the fluidized silicon seed particles. Silicon seed particles having the desired amount of thermally decomposed silicon product thereon are removed from the primary fluidized reactor as ultra pure silicon product. An apparatus for carrying out this process is also disclosed.
Hsu, George↗
Process for selective monoaddition to silanes containing two silicon-hydrogen bonds and products thereof
A process for the selective monoadditon of an olefin or acetylene to a siloxane which contains two reactive Si--H bonds to produce a product in which only one of the two Si--H functions has added across the olefin or acetylene is disclosed. A process for making unsymmetrical siloxanes from symmetrical dihydrosiloxanes and products of both of these processes are also disclosed. Products are represented by the formula I in which R.sup.1 and R.sup.4 are different: ##STR1##.
Crivello, James V.↗
Durable low surface-energy surfaces
A formulation for forming a low surface-energy surface on a substrate having (i) a fluoroalkyl silane having a low surface energy part, (ii) a liquid crystal silane operable for enhancing the orientation of the molecules of the fluoroalkyl silane and for crosslinking with the fluoroalkyl silane, and, (iii) a transport medium for applying the fluoroalkyl silane and the liquid crystal silane to the surface of a substrate. In one embodiment the formulation can includes a crosslinking agent for crosslinking the fluoroalkyl silane. In another embodiment the formulation has a condensation catalyst for enhancing chemical bonding of the fluoroalkyl silane to the substrate. The transport medium can be an alcohol such as methanol or ethanol.
Willis, Paul B.↗
A New Antiwear Additive/Surface Pretreatment for PFPE Liquid Lubricants
Pin-on-disk tribology experiments were conducted on a perfluoroalkylelher (PFPE) liquid lubricant with and without a new PFPE lubricant antiwear additive material, a silane. It was found that the silane provided moderate improvement in the antiwear performance of the PFPE lubricant when applied to the metallic surface as a surface coating or when added to the PFPE as a dispersion (emulsion). Slightly better results were obtained by using the combination of a surface coating and an emulsion of the silane. The silane emulsions or coatings did not affect the friction properties of the lubricant. Micro-Fourier transformation infrared (muFTIR) spectroscopy analysis was performed to study silane transfer films and the degradation of the PFPE. The silane was found to mitigate degradation of the PFPE which may have been the major reason for the improved antiwear performance observed.
Morales, Wilfredo↗
Ignition of mixtures of SiH sub 4, CH sub 4, O sub 2, and Ar or N sub 2 behind reflected shock waves
Ignition delay times in mixtures of methane, silane, and oxygen diluted with argon and nitrogen were measured behind reflected shock waves generated in the chemical kinetic shock tube at Langley Research Center. The delay times were inferred from the rapid increase in pressure that occurs at ignition, and the ignition of methane was verified from the emission of infrared radiation from carbon dioxide. Pressures of 1.25 atm and temperatures from 1100 K to 1300 K were generated behind the reflected shocks; these levels are representative of those occurring within a supersonic Ramjet combustor. Expressions for the ignition delay time as a function of temperature were obtained from least squares curve fits to the data for overall equivalence ratios of 0.7 and 1.0. The ignition delay times with argon as the diluent were longer than those with nitrogen as the diluent. The infrared wavelength observations at 4.38 microns for carbon dioxide indicated that silane and methane ignited simultaneously (i.e., within the time resolution of the measurement). A combined chemical kinetic mechanism for mixtures of silane, methane, oxygen, and argon or nitrogen was assembled from one mechanism that accurately predicted the ignition of methane and a second mechanism that accurately predicted silane hydrogen ignition. Comparisons between this combined mechanism and experiment indicated that additional reactions, possibly between silyl and methyl fragments, are needed to develop a good silane methane mechanism.
Mclain, A. G.↗
Silicon production in an aerosol reactor
An aerosol reactor for the growth of large silicon particles by silane pyrolysis was shown to demonstrate the following properties: (1) generate seed particles by pyrolysis of a small amount of silane; (2) mix seed aerosol with primary silane flow, limiting number concentration such that the amount of silane is sufficient to grow the desired size of particles from the seed; and (3) react the silane at a rate which is controlled such that the seed particles scavenge the condensible vapors rapidly enough to inhibit further nucleation.
Wu, J. J.↗
Amorphous silicon deposition diagnostics using coherent anti-Stokes Raman spectroscopy
This paper reports on an in situ silicon deposition process diagnostics, using CARS performed at state-of-the-art a-Si:H film deposition conditions in a reactor designed for a-Si:H solar cell fabrication. The diagnostics procedure measures the silane depletion in an RF plasma as a function of the silane flow rate (where the relationship is linear between 50-percent depletion, at a flow rate of 5.6 sccm, and about 8-percent depletion, at 80 sccm) and the RF power (where the silane depletion is linearly dependent on the RF power in the region of 4 to 12 W). The linear RF power dependence of the silane depletion is considered to be consistent with the mechanism of silane decomposition primarily by electron impact dissociations, while the flow rate dependence is interpreted in terms of the residence time of the SiH4 molecules in the glow discharge region, where an increase of the residence time at a low flow rate results in a high depletion ratio.
Shing, Y. H.↗