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A sample system for handling powdered material under vacuum conditions is described. The system features linear motion of up to 0.25 m and the means for complete isolation of the sample and sample system from external apparatus. The system was designed for the measurement of thermophysical properties of lunar material from Apollo missions under thoroughest possible prevention of contamination.
Volume-ratio system for vacuum gage calibration from 10 to minus 8 to 10 torr
The ultimate utility of hydrogen masers as highly accurate clocks aboard navigation satellites depends on the feasibility of making the maser lightweight, compact, and capable of a 5 to 7 year unattended operation. A vacuum pumping system for the maser that is believed to meet these criteria was designed and fabricated. The pumping system was fabricated almost completely from 6Al-4V titanium alloy and incorporates two or four sintered zirconium carbon getter pumps with integral activation heaters. The manner in which the getter pumps were mounted to insure that they will stand both the activation and the shock of launch is illustrated. Data on the total hydrogen capacity and pumping of this system is also presented.
A UF6 handling system was designed for use in conjunction with the existing nuclear-pumped laser vacuum system at a nuclear reactor laboratory to perform the experiments described above. A modification to separate the gas fill system from the vacuum system and thus greatly reduce its volume is described as well as operating procedures for the first controlled nuclear pumping experiments with UF6 vapor contained in the laser cell.
A versatile, low-cost, easy to implement, microprocessor-based motorized positioning system (MPS) suitable for accurate sample manipulation in a Second Ion Mass Spectrometry (SIMS) system, and for other ultra-high vacuum (UHV) applications was designed and built at NASA LeRC. The system can be operated manually or under computer control. In the latter case, local, as well as remote operation is possible via the IEEE-488 bus. The position of the sample can be controlled in three linear orthogonal and one angular coordinates.
An apparatus is disclosed which includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a dc magnetron sputtering system. A gas inlet introduces various gases to the vacuum chamber and creates various gas plasma during the sputtering steps. The rotating turntables insure that the respective wafers are present under the sputtering guns for an average amount of time such that consistency in sputtering and deposition is achieved. By continuous and sequential processing of the wafers in a common vacuum chamber without removal, the adverse affects of exposure to atmospheric conditions are eliminated providing higher quality circuit contacts and functional device.
The processing of wafer devices to form multilevel interconnects for microelectronic circuits is described. The method is directed to performing the sequential steps of etching the via, removing the photo resist pattern, back sputtering the entire wafer surface and depositing the next layer of interconnect material under common vacuum conditions without exposure to atmospheric conditions. Apparatus for performing the method includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a DC magnetron sputtering system. A gas inlet is provided in the chamber for the introduction of various gases to the vacuum chamber and the creation of various gas plasma during the sputtering steps.
A system includes a collimated beam source within a vacuum chamber, a condensable barrier gas, cooling material, a pump, and isolation chambers cooled by the cooling material to condense the barrier gas. Pressure levels of each isolation chamber are substantially greater than in the vacuum chamber. Coaxially-aligned orifices connect a working chamber, the isolation chambers, and the vacuum chamber. The pump evacuates uncondensed barrier gas. The barrier gas blocks entry of atmospheric vapor from the working chamber into the isolation chambers, and undergoes supersonic flow expansion upon entering each isolation chamber. A method includes connecting the isolation chambers to the vacuum chamber, directing vapor to a boundary with the working chamber, and supersonically expanding the vapor as it enters the isolation chambers via the orifices. The vapor condenses in each isolation chamber using the cooling material, and uncondensed vapor is pumped out of the isolation chambers via the pump.
NASA Stennis Space Center's (SSC's) large rocket engine test facility requires the use of liquid propellants, including the use of cryogenic fluids like liquid hydrogen as fuel, and liquid oxygen as an oxidizer (gases which have been liquefied at very low temperatures). These fluids require special handling, storage, and transfer technology. The biggest problem associated with transferring cryogenic liquids is product loss due to heat transfer. Vacuum jacketed piping is specifically designed to maintain high thermal efficiency so that cryogenic liquids can be transferred with minimal heat transfer. A vacuum jacketed pipe is essentially two pipes in one. There is an inner carrier pipe, in which the cryogenic liquid is actually transferred, and an outer jacket pipe that supports and seals the vacuum insulation, forming the "vacuum jacket." The integrity of the vacuum jacketed transmission lines that transfer the cryogenic fluid from delivery barges to the test stand must be maintained prior to and during engine testing. To monitor the vacuum in these vacuum jacketed transmission lines, vacuum gauge readings are used. At SSC, vacuum gauge measurements are done on a manual rotation basis with two technicians, each using a handheld instrument. Manual collection of vacuum data is labor intensive and uses valuable personnel time. Additionally, there are times when personnel cannot collect the data in a timely fashion (i.e., when a leak is detected, measurements must be taken more often). Additionally, distribution of this data to all interested parties can be cumbersome. To simplify the vacuum-gauge data collection process, automate the data collection, and decrease the labor costs associated with acquiring these measurements, an automated system that monitors the existing gauges was developed by Invocon, Inc. For this project, Invocon developed a Wireless Integrated Microelectronic Vacuum Sensor System (WIMVSS) that provides the ability to gather vacuum-gauge measurements automatically and wirelessly, in near-real time - using a low-maintenance, lowpower sensor mesh network. The WIMVSS operates by using a self-configuring mesh network of wireless sensor units. Mesh networking is a type of networking where each sensor or node can capture and disseminate its own data, but also serve as a relay to receive and transmit data from other sensors. Each sensor node can synchronize with adjacent sensors, and propagate data from one sensor to the next, until the destination is reached. In this case, the destination is a Network Interface Unit (NIU). The WIMVSS sensors are mounted on the existing vacuum gauges. Information gathered by the sensors is sent to the NIU. Because of the mesh networking, if a sensor cannot directly send the data to the NIU, it can be propagated through the network of sensors. The NIU requires antenna access to the sensor units, AC power, and an Ethernet connection. The NIU bridges the sensor network to a WIMVSS server via an Ethernet connection. The server is configured with a database, a Web server, and proprietary interface software that makes it possible for the vacuum measurements from vacuum jacketed fluid lines to be saved, retrieved, and then displayed from any Web-enabled PC that has access to the Internet. Authorized users can then simply access the data from any PC with Internet connection. Commands can also be sent directly from the Web interface for control and maintenance of the sensor network. The technology enabled by the WIMVSS decreases labor required for gathering vacuum measurements, increases access to vacuum data by making it available on any computer with access to the Internet, increases the frequency with which data points can be acquired for evaluating the system, and decreases the recurring cost of the sensors by using off-the-shelf components and integrating these with heritage vacuum gauges.
Advantages and disadvantages of glass components in ultrahigh vacuum systems
A recent long-term comparison between the compensated multi-pole Linear Ion Trap Standard (LITS) and the laser-cooled primary standards via GPS carrier phase time transfer showed a deviation of less than 2.7x10(exp -17)/day. A subsequent evaluation of potential drift contributors in the LITS showed that the leading candidates are fluctuations in background gases and the neon buffer gas. The current vacuum system employs a "flow-through" turbomolecular pump and a diaphragm fore pump. Here we consider the viability of a "sealed" vacuum system pumped by a non-evaporable getter for long-term ultra-stable clock operation. Initial tests suggests that both further stability improvement and longer mean-time-between-maintenance can be achieved using this approach
Hot-cathode ionization gages used to measure high-vacuum pressures are subject to error when ionizing radiation is present. Because this radiation creates additional ions, a second ion gage is mounted near the pressure-measuring gage to detect and measure the radiation induced error.
The National Aeronautics and Space Administration (NASA) Glenn Research Center (GRC) Plum Brook Station (PBS) Space Propulsion Research Facility, commonly referred to as B-2, is NASA s third largest thermal vacuum facility. It is the largest designed to store and transfer large quantities of liquid hydrogen and liquid oxygen, and is perfectly suited to support developmental testing of chemical propulsion systems as well as fully integrated stages. The facility is also capable of providing thermal-vacuum simulation services to support testing of large lightweight structures, Cryogenic Fluid Management (CFM) systems, electric propulsion test programs, and other In-Space propulsion programs. A recently completed integrated system test demonstrated the refurbished thermal vacuum capabilities of the facility. The test used the modernized data acquisition and control system to monitor the facility during pump down of the vacuum chamber, operation of the liquid nitrogen heat sink (or cold wall) and the infrared lamp array. A vacuum level of 1.3x10(exp -4)Pa (1x10(exp -6)torr) was achieved. The heat sink provided a uniform temperature environment of approximately 77 K (140deg R) along the entire inner surface of the vacuum chamber. The recently rebuilt and modernized infrared lamp array produced a nominal heat flux of 1.4 kW/sq m at a chamber diameter of 6.7 m (22 ft) and along 11 m (36 ft) of the chamber s cylindrical vertical interior. With the lamp array and heat sink operating simultaneously, the thermal systems produced a heat flux pattern simulating radiation to space on one surface and solar exposure on the other surface. The data acquired matched pretest predictions and demonstrated system functionality.
Liquid propulsion systems operating in space and resulting problems of phase transformation, noting plug formation and flow stoppage
The second-generation 30 kW miniature Arc-jet Research Chamber (mARC II) at NASA Ames Research Center produces high enthalpy flows relevant for entry systems ground testing. The mARC II facility has recently undergone upgrades, including the installation of a new vacuum system to address the issues preventing it from maintaining underexpanded flow under test conditions. In this work, we present data obtained from an Integrated Systems Testing campaign and provide an initial assessment of arc-jet performance following the upgrades. Air is used as the working gas for the standard mARC II arc-heater configuration with two constrictor disks. Seven runs were investigated for five test conditions to assess the lowest achievable stagnation point heat fluxes for air flow rates of 0.15 or 0.25 g s −1 . The heat flux was measured using a water-cooled Gardon gauge (Ø4.76 mm, 3/16" hemispherical) at 70 mm from the nozzle exit plane. The new vacuum system produced test box pressures in the medium (fine) vacuum range (~0.03 torr, 4 Pa) prior to gas addition and successfully maintained underexpanded flow after gas addition. The upgrade yielded a ~4X reduction in heat flux relative to the previous system for the same set test conditions. We report the lowest heat fluxes measured in mARC II to date, ranging from 26 to 81 W cm −2 , for sonic flow enthalpies of 4–14 MJ kg −1 . Bulk enthalpies estimated using an energy balance method (EB 2 ) are reported for the first time using mARC II.Initial data suggests EB 2 generally estimates lower enthalpies than sonic flow methods for mARC II. Lastly, laminar axisymmetric Navier–Stokes simulations were performed using the NASA DPLR code. Numerical heat flux results show good agreement with experiments at low arc powers (3–15% difference at the minimum set arc current), but discrepancy increases with arc power (49% difference at the maximum set arc current).
The second-generation 30 kW miniature Arc-jet Research Chamber (mARC II) at NASA Ames Research Center produces high enthalpy flows relevant for entry systems ground testing. The mARC II facility has recently undergone upgrades, including the installation of a new vacuum system to address the issues preventing it from maintaining underexpanded flow under test conditions. In this work, we present data obtained from an Integrated Systems Testing campaign and provide an initial assessment of arc-jet performance following the upgrades. Air is used as the working gas for the standard mARC II arc-heater configuration with two constrictor disks. Seven runs were investigated for five test conditions to assess the lowest achievable stagnation point heat fluxes for air flow rates of 0.15 or 0.25 g s −1 . The heat flux was measured using a water-cooled Gardon gauge (Ø4.76 mm, 3/16" hemispherical) at 70 mm from the nozzle exit plane. The new vacuum system produced test box pressures in the medium (fine) vacuum range (~0.03 torr, 4 Pa) prior to gas addition and successfully maintained underexpanded flow after gas addition. The upgrade yielded a ~4X reduction in heat flux relative to the previous system for the same set test conditions. We report the lowest heat fluxes measured in mARC II to date, ranging from 26 to 81 W cm −2 , for sonic flow enthalpies of 4–14 MJ kg −1 . Bulk enthalpies estimated using an energy balance method (EB 2 ) are reported for the first time using mARC II.Initial data suggests EB 2 generally estimates lower enthalpies than sonic flow methods for mARC II. Lastly, laminar axisymmetric Navier–Stokes simulations were performed using the NASA DPLR code. Numerical heat flux results show good agreement with experiments at low arc powers (3–15% difference at the minimum set arc current), but discrepancy increases with arc power (49% difference at the maximum set arc current).
An experimental apparatus designed for studying drillability of hard volcanic rock in a simulated lunar vacuum of 5 x 10 to the minus 10th power torr is described. The engineering techniques used to provide suitable drilling torque inside the ultrahigh vacuum chamber while excluding all hydrocarbon are detailed. Totally unlubricated bearings and gears were used to better approximate the true lunar surface conditions within the ultrahigh vacuum system. The drilling system has a starting torque of 30 in-lb with an unloaded running torque of 4 in-lb. Nominal torque increase during drilling is 4.5 in-lb or a total drilling torque of 8.5 in-lb with a 100-lb load on the drill bit at 210 rpm. The research shows conclusively that it is possible to design operational equipment for moderate loads operating under UHV conditions without the use of sealed bearings or any need of lubricants whatsoever.