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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 919 records · Page 51
All sourcesNASA NTRSDOE OSTI
DOE OSTI2016

How does a probe inserted into the discharge influence the plasma structure?

Shielding the bias applied to the probe by the sheath formed around it and determination of parameters of unperturbed plasmas are in the basis of the probe diagnostics. The results from a two-dimensional model of a discharge with a probe inserted in it show that the probe influences the spatial distribution of the plasma parameters in the entire discharge. The increase (although slight) in the electron temperature, due to the increased losses of charged particles on the additional wall in the discharge (mainly the probe holder), leads to redistribution of the plasma density and plasma potential, as shown by the results obtained at the floating potential of the probe. The deviations due to the bias applied to the probe tip are stronger in the ion saturation region of the probe characteristics. The pattern of the spatial redistribution of the plasma parameters advances together with the movement of the probe deeper in the discharge. Although probe sheaths and probe characteristics resulting from the model are shown, the study does not aim at discussions on the theories for determination of the plasma density from the ion saturation current. Regardless of the modifications in the plasma behavior in the entire discharge, the deviations of the plasma parameters at the position of the probe tip and, respectively, the uncertainty which should be added as an error when the accuracy of the probe diagnostics is estimated do not exceed 10%. Consequently, the electron density and temperature obtained, respectively, at the position of the plasma potential on the probe characteristics and from its transition region are in reasonable agreement with the results from the model of the discharge without a probe. Being in the scope of research on a source of negative hydrogen ions with the design of a matrix of small radius inductive discharges, the model is specified for a low-pressure hydrogen discharge sustained in a small-radius tube.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2012

Direct determination of europium valence state by XANES in extraterrestrial merrillite: Implications for REE crystal chemistry and martian magmatism

The relative proportion of divalent and trivalent Eu has proven to be a useful tool for estimating f{sub O{sub 2}} in various magmatic systems. However, in most cases, direct determination of the Eu valence state has not been made. In this study, direct determination of Eu valence by XANES and REE abundance in merrillite provide insights into the crystal chemistry of these phosphates and their ability to record conditions of magmatism. Merrillite strongly prefers Eu{sup 3+} to Eu{sup 2+}, with the average valence state of Eu ranging between 2.9 and 3 over approximately six orders of magnitude in f{sub O{sub 2}}. The dramatic shift in the REE patterns of merrillite in martian basaltic magmas, from highly LREE-depleted to LREE-enriched, parallels many other trace element and isotopic variations and reflects the sources for these magmas. The behavior of REE in the merrillite directly reflects the relationship between the eightfold-coordinated Ca1 site and adjacent sixfold Na and tetrahedral P sites that enables charge balancing through coupled substitutions.

58 GEOSCIENCES↗
DOE OSTI2026

Proton-rich Production of Lanthanides: The vi Process

The astrophysical origin of the lanthanides is an open question in nuclear astrophysics. Besides the widely studied s, i, and r processes in moderately to strongly neutron-rich environments, an intriguing alternative site for lanthanide production could in fact be robustly proton-rich matter outflows from core-collapse supernovae under specific conditions—in particular, high-entropy winds with enhanced neutrino luminosity and fast dynamical timescales. In this environment, excess protons present after charged-particle reactions have ceased can continue to be converted to neutrons by (anti)neutrino interactions, producing a neutron-capture reaction flow up to A ∼ 200. This scenario, christened the νi process in a recent paper, has previously been discussed as a possibility. Here, we examine the prospects for the νi process through the lenses of stellar abundance patterns, bolometric light curves, and galactic chemical evolution models, with a particular focus on hypernovae as candidate sites. We identify specific lanthanide signatures for which the νi process can provide a credible supplement to the r/i processes.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
DOE OSTI2015

Catching the role of anisotropic electronic distribution and charge transfer in halogen bonded complexes of noble gases

The systems studied in this work are gas-phase weakly bound adducts of the noble-gas (Ng) atoms with CCl{sub 4} and CF{sub 4}. Their investigation was motivated by the widespread current interest for the intermolecular halogen bonding (XB), a structural motif recognized to play a role in fields ranging from elementary processes to biochemistry. The simulation of the static and dynamic behaviors of complex systems featuring XB requires the formulation of reliable and accurate model potentials, whose development relies on the detailed characterization of strength and nature of the interactions occurring in simple exemplary halogenated systems. We thus selected the prototypical Ng-CCl{sub 4} and Ng-CF{sub 4} and performed high-resolution molecular beam scattering experiments to measure the absolute scale of their intermolecular potentials, with high sensitivity. In general, we expected to probe typical van der Waals interactions, consisting of a combination of size (exchange) repulsion with dispersion/induction attraction. For the He/Ne-CF{sub 4}, the analysis of the glory quantum interference pattern, observable in the velocity dependence of the integral cross section, confirmed indeed this expectation. On the other hand, for the He/Ne/Ar-CCl{sub 4}, the scattering data unravelled much deeper potential wells, particularly for certain configurations of the interacting partners. The experimental data can be properly reproduced only including a shifting of the repulsive wall at shorter distances, accompanied by an increased role of the dispersion attraction, and an additional short-range stabilization component. To put these findings on a firmer ground, we performed, for selected geometries of the interacting complexes, accurate theoretical calculations aimed to evaluate the intermolecular interaction and the effects of the complex formation on the electron charge density of the constituting moieties. It was thus ascertained that the adjustments of the potential suggested by the analysis of the experiments actually reflect two chemically meaningful contributions, namely, a stabilizing interaction arising from the anisotropy of the charge distribution around the Cl atom in CCl{sub 4} and a stereospecific electron transfer that occurs at the intermolecular distances mainly probed by the experiments. Our model calculations suggest that the largest effect is for the vertex geometry of CCl{sub 4} while other geometries appear to play a minor to negligible role.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2021

Rapid failure mode classification and quantification in batteries: A deep learning modeling framework

Unique, rapid identification and quantification of the dominant aging modes in lithium-ion batteries (LiBs) with early and non-specialized test data is a significant scientific challenge. Leveraging synthetic-data, deep-learning (DL) techniques have great potential to enable fast and robust classification and quantification of battery aging modes that produce different patterns of cell aging. This study, for the first time, presents a synthetic–data-based DL modeling framework for rapid and automatic classification and quantification of battery-aging modes and resultant aging with experimental validation. Availing synthetic dQ.dV -1 curves for ~26000 initial conditions and aging modes, the framework classified the dominant aging modes, for cells undergoing fast charge, in fewer than 100 cycles. Upon classification, the framework quantified the evolution of the aging modes, which were often nonuniform with cycling, for 22 gr/NMC532 pouch cells tested up to 600 cycles at different charging rates (1C–9C).

25 ENERGY STORAGE↗
DOE OSTI2024

Nucleation mechanism of multiple-order parameter ferroelectric domain wall motion in hafnia

Ferroelectric hafnia exhibits promising robust polarization and silicon compatibility for ferroelectric devices. Unfortunately, it suffers from difficult polarization switching. Methods to enable easier polarization switching are needed, and the underlying reason for this switching difficulty is not understood. Here, we investigated the 180° domain walls of hafnia and their motion through nucleation. We found that the domains of multiple-order parameter hafnia possess complicated three-dimensional dipole patterns and lead to domain walls of different symmetry. The most common domain wall type is a complex domain wall involving reversal of both polarization and tetragonality order parameters. This domain wall symmetry ensures a good matching of the dipoles perpendicular to the domain wall, which leads to low domain wall energy. However, this ensures a sharp, high-energy, charged domain wall on the edges of nuclei that results in difficult nucleation. Thus, this domain wall is too stable to move, which explains the switching difficulty of hafnia. By contrast, another simple domain wall, involving only polarization reversal, has a poor matching of dipoles perpendicular to the domain wall. This leads to higher domain wall energy and ensures a diffusive and low-energy charged domain wall that enables easier nucleation. This simple domain wall is thus not too stable and easier to move. Our theory advances domain wall nucleation theory from the field of conventional single-order parameter to multiple-order parameters. We propose controlling the populations of different domain wall types in hafnia as a way to enable fast polarization switching and lower coercive fields.

36 MATERIALS SCIENCE↗
NASA NTRS1992

Transport of time-varying plasma currents by whistler wave packets

The relationship between pulsed currents and electromagnetic waves is examined in a regime characterized by electron MHD. Pulsed currents are generated by (1) collection/emission of charged particles by/from biased electrodes and (2) induction of currents by time-varying and moving magnetic fields. Pulsed currents are observed to propagate at the speed of whistler wave packets. Their field structure forms ropelike configurations which are electromagnetically force-free. Moving sources induce 'eddy' currents which excite waves and form Cerenkov-like whistler 'wings'. The radiation patterns of moving magnetic antennas and electrodynamic tethers are investigated. Nonlinear effects of large-amplitude, antenna-launched whistler pulses are observed. These involve a new modulational instability in which a channel of high conductivity which permits the wave/currents to penetrate deeply into a collisional plasma is formed.

Stenzel, R. L.↗
NASA NTRS1991

Hydride structures in Ti-aluminides subjected to high temperature and hydrogen pressure charging conditions

The distribution and chemistry of hydrides produced in single and dual phase alloys with a composition near TiAl have been investigated by using a combination of TEM and X-ray diffraction techniques. The alloys were exposed at 650 C to 13.8 MPa of gaseous H2 for 100 h. In the single-phase gamma alloy, large hydrides preferentially nucleated on the grain boundaries and matrix dislocations and a population of small hydrides was distributed throughout the matrix. X-ray and electron diffraction patterns from these hydrides indicated that they have an fcc structure with a lattice parameter of 0.45 nm. EDAX analysis of the hydrides showed that they were enriched in Ti. The hydrides were mostly removed by vacuum annealing at 800 C for 24 h. On dissolution of the hydrides, the chemistry of hydride-free regions of the grain boundary returned to the matrix composition, suggesting that Ti segregation accompanied the hydride formation rather than Ti enrichment causing the formation of the hydride.

Legzdina, D.↗
DOE OSTI2022

Modelling and Experimental Validation of Improved Performance of Lithium-Ion Batteries Having Thick Electrodes with Laser-Ablated Micro-Structures

For widespread adoption of electric vehicles, lithium-ion batteries (LiBs) need to achieve energy densities of >275 Wh/kg, cost less than $100/Wh, and charge to more than 80% capacity within 15 minutes. Increasing the battery electrode thicknesses is one way to increase cell energy densities while also saving on cell manufacturing cost by increasing the ratio of electrode active material to inactive material within each cell. However, increased electrode loading is often accompanied by decreased Li+-ion diffusion across the full thick electrodes. This leads to significant cell polarization that prevents full capacity utilization and accelerates cell degradation, especially at fast charging/discharging rates. The introduction of secondary pore networks in thick battery electrodes alleviates some of the trade-offs between energy and power performance. These microstructures provide low tortuosity pathways for facile Li+-ion diffusion deep into the thick electrodes, diminishing detrimental concentration gradients within the cell. Ultrafast-pulsed laser ablation is a promising method to introduce micro pores or channels in thick battery electrodes as it allows for precise control of pattern geometries, results in minimal damage to the electrode and can be introduced into existing roll-to-roll electrode manufacturing lines. Herein, the limitations of thick planer electrodes and the advanced predictive models to identify optimal electrode patterns for improved cycling performance will be presented. The impact of electrode laser patterning to create secondary pore networks also will be discussed. Materials characterization techniques (SEM-EDS, XRD) were used to explore the affect ultrafast laser ablation had on the electrode materials’ morphology and structure. The improvements in the patterned electrodes’ electrochemical cycling performances and degrees of wetting will be compared to a pristine baseline case. Finally, the discrepancies between experimentally obtained data and model predictions will be explained.

DIRECT ENERGY CONVERSION,ENERGY STORAGE↗
DOE OSTI2013

Direct numerical simulation of electrokinetic instability and transition to chaotic motion

A new type of instability—electrokinetic instability—and an unusual transition to chaotic motion near a charge-selective surface (semiselective electric membrane, electrode, or system of micro-/nanochannels) was studied by the numerical integration of the Nernst-Planck-Poisson-Stokes system and a weakly nonlinear analysis near the threshold of instability. A special finite-difference method was used for the space discretization along with a semi-implicit 31/3 -step Runge-Kutta scheme for the integration in time. Two kinds of initial conditions were considered: (a) white-noise initial conditions to mimic “room disturbances” and subsequent natural evolution of the solution, and (b) an artificial monochromatic ion distribution with a fixed wave number to simulate regular wave patterns. The results were studied from the viewpoint of hydrodynamic stability and bifurcation theory. The threshold of electroconvective movement was found by the linear spectral stability theory, the results of which were confirmed by numerical simulation of the entire system. Our weakly nonlinear analysis and numerical integration of the entire system predict possibility of both kinds of bifurcations at the critical point, supercritical and subcritical, depending on the system parameters. The following regimes, which replace each other as the potential drop between the selective surfaces increases, were obtained: one-dimensional steady solution, two-dimensional steady electroconvective vortices (stationary point in a proper phase space), unsteady vortices aperiodically changing their parameters (homoclinic contour), periodic motion (limit cycle), and chaotic motion. The transition to chaotic motion does not include Hopf bifurcation. The numerical resolution of the thin concentration polarization layer showed spike-like charge profiles along the surface, which could be, depending on the regime, either steady or aperiodically coalescent. The numerical investigation confirmed the experimentally observed absence of regular (near-sinusoidal) oscillations for the overlimiting regimes. There is a qualitative agreement of the experimental and the theoretical values of the threshold of instability, the dominant size of the observed coherent structures, and the experimental and theoretical volt–current characteristics.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2021

Searching for metastable particles using graph computing

The reconstruction of charged particle trajectories at the Large Hadron Collider and future colliders relies on energy depositions in sensors placed at distances ranging from a centimeter to a meter from the colliding beams. We propose a method of detecting charged particles that decay invisibly after traversing a short distance of about 25 cm inside the experimental apparatus. One of the decay products may constitute the dark matter known to be 84% of all matter at galactic and cosmological distance scales. Our method uses graph computing to cluster spacepoints recorded by two-dimensional silicon pixel sensors into mathematically-defined patterns. The algorithm may be implemented on silicon-based integrated circuits using field-programmable gate array technology to augment or replace traditional computing platforms.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
NASA NTRS1973

Evaluation of ERTS-1 imagery for mapping Quaternary deposits and landforms in the Great Plains and Midwest

The author has identified the following significant results. Maps at 1:1 million scale exemplifying the first phase of the investigation (which consists of the identification and mapping of landform and land use characteristics and surficial geologic materials directly from the ERTS-1 images without use of additional data) were prepared. For areas that have not been mapped at 1:500,000 or larger scales, maps will provide the first moderately detailed information on landform features and surficial materials. Much of the information mapped is significant for exploration and development of ground (and, locally, petroleum) and for applications in engineering and environmental geology, including land use planning. Analysis of drainage patterns, stream-divide relations and land use patterns has revealed several possible moraine-controlled divices of middle and early Pleistocene age. One is an extension of the Cedar Bluffs moraine of southeastern Nebraska. Another of these divides may correspond to the terminus of Nebraska drift in the Kansas City study area. The trends of parts of various ancient filled valleys also have been identified by analysis of charges in width of the present stream valleys. The alinements of certain segments of stream valleys in Kansas and Missouri appear to be controlled by regional faults or other structural features.

Morrison, R. B.↗
DOE OSTI2015

Photocatalytic property and structural stability of CuAl-based layered double hydroxides

Three types of CuMAl layered double hydroxides (LDHs, M=Mg, Zn, Ni) were successfully synthesized by coprecipitation. Powder X-ray diffraction (XRD), inductively coupled plasma atomic emission spectrometry (ICP-AES) and UV–Vis diffuse reflectance spectrum (UV–vis) were used to confirm the formation of as-synthesized solids with good crystal structure. The photocatalytic activity of those LDH materials for CO{sub 2} reduction under visible light was investigated. The experimental results show that CuNiAl-LDHs with narrowest band gap and largest surface areas behave highest efficiency for methanol generation under visible light compared with CuMgAl-LDHs and CuZnAl-LDHs. The CuNiAL-LDH showed high yield for methanol production i.e. 0.210 mmol/g h, which was high efficient. In addition, the influence of the different M{sup 2+} on the structures and stability of the CuMAl-LDHs was also investigated by analyzing the geometric parameters, electronic arrangement, charge populations, hydrogen-bonding, and binding energies by density functional theory (DFT) analysis. The theoretical calculation results show that the chemical stability of LDH materials followed the order of CuMgAl-LDHs>CuZnAl-LDHs>CuNiAl-LDHs, which is just opposite with the photocatalytic activity and band gaps of three materials. - Graphical abstract: The host–guest calculation models and XRD patterns of CuMAl-LDHs: CuMgAl-LDHs (a), CuZnAl-LDHs (b) and CuNiAl-LDHs (c). - Highlights: • Three types of CuMAl layered double hydroxides (LDHs, M=Mg, Zn, Ni) has been synthesized. • CuMgNi shows narrower band gap and more excellent textural properties than other LDHs. • The band gap: CuMgAl<CuZnAl<CuNiAl based on result from UV–vis analysis. • CuMgAl shows the highest stability and lowest photocatalytic activity, while CuNiAl just opposite.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2014

Combustion synthesis of MgFe{sub 2}O{sub 4}/graphene nanocomposite as a high-performance negative electrode for lithium ion batteries

We present a facile and cost-effective urea-assisted auto-combustion method for synthesizing pure MgFe{sub 2}O{sub 4} nanoparticle and MgFe{sub 2}O{sub 4}/graphene nanocomposite samples followed by annealing at 600 °C for 5 h under N{sub 2} atmosphere. The X-ray diffraction pattern confirmed the single phase formation for both samples. The obtained morphology of the nanocomposite sample shows that the MgFe{sub 2}O{sub 4} nanoparticles are highly dispersed on conductive graphene nanosheets with particle size in the range of 50–100 nm. When applied as an anode material, MgFe{sub 2}O{sub 4}/graphene nanocomposite electrode shows a high reversible charge capacity of 764.4 mAh g{sup −1} at 0.04 C over 60 charge/discharge cycles and in spite of that it also retained a capacity of 219.9 mAh g{sup −1} at high current rate of 4.2 C. The obtained result is much better than the synthesized pure MgFe{sub 2}O{sub 4} nanoparticle electrode. The excellent electrochemical performance of the MgFe{sub 2}O{sub 4}/graphene nanocomposite electrode can be attributed to the strong favorable synergistic interaction between MgFe{sub 2}O{sub 4} and reduced graphene nanosheets, which supplied a large number of accessible active sites for Li{sup +}-ion insertion and short diffusion length for both Li{sup +} ions and electrons. In addition, the graphene nanosheets in the nanocomposite electrode provide high conductivity and accommodate the large volume expansion/contraction during cycling, resulting in high capacity and long cycling stability. - Highlights: • MgFe{sub 2}O{sub 4}/graphene nanocomposite was synthesized by facile urea-assisted method. • Such well-designed structure results in fine and strong interfacial interaction. • Nanocomposite anode shows high rate capability and long cycling stability. • Better performance is due to synergistic effect between MgFe{sub 2}O{sub 4} and graphene. • Simple, low cost and fast synthesis is attractive for large scale applications.

36 MATERIALS SCIENCE↗
DOE OSTI2014

Effect of neodymium substitution on structural and ferroelectric properties of BNT ceramics

Graphical abstract: - Highlights: • First time, we synthesized (Bi{sub 1−x}Nd{sub x}){sub 0.5}Na{sub 0.5}TiO{sub 3} system by semi wet technique. • Grain size reduced with doping and Nd acts as an inhibitor in the grain growth. • Specimen with x = 0.02 exhibits excellent ferroelectric properties at RT. • P–E loops show the co-existence of polar and non polar regions around ‘T{sub d}’. - Abstract: Polycrystalline specimens of (Bi{sub 1−x}Nd{sub x}){sub 0.5}Na{sub 0.5}TiO{sub 3} (BNNT) ceramic system with compositions x ≤ 0.04 were synthesized by semi-wet technique using ethylene glycol precursor. Structural and electrical properties were investigated in detail to observe the effect of neodymium (Nd) substitution in BNT system. XRD patterns for all the specimens showed single phase formation with rhombohedral structure. Field emission scanning electron micrographs (FE-SEM) revealed that the grain growth was inhibited significantly with Nd content. The temperature dependence behaviour of dielectric constant revealed that the depolarisation temperature ‘T{sub d}’ decreases whereas temperature of maximum dielectric constant ‘T{sub m}’ increases with Nd concentration. The piezoelectric charge coefficient (d{sub 33}) showed maxima at x = 0.02 and well defined ferroelectric behaviour was observed for all the samples.

36 MATERIALS SCIENCE↗
DOE OSTI2022

The Relation of Environmental Conditions With Charge Structure in Central Argentina Thunderstorms

In this study we explored the environmental conditions hypothesized to induce a dominant charge structure in thunderstorms in the province of Cordoba, Argentina, during the RELAMPAGO-CACTI (Remote sensing of Electrification, Lightning, And Mesoscale/microscale Processes with Adaptive Ground Observations-Clouds, Aerosols, Complex Terrain Interactions) field campaigns. Hypothesized environmental conditions are thought to be related to small warm cloud residence time and warm rain growth suppression, which lead to high cloud liquid water contents in the mixed-phase zone, contributing to positive charging of graupel and anomalous charge structure storms. Data from radiosondes, a cloud condensation nuclei (CCN) ground-based instrument and reanalysis were used to characterize the proximity inflow air of storms with anomalous and normal charge structures. Consistent with the initial hypothesis, anomalous storms had small warm cloud depth caused by dry low-level humidity and low 0°C height. Anomalous storms were associated with lower CCN concentrations than normal storms, an opposite result to the initial expectation. High CAPE is not an important condition for the development of anomalous storms in Argentina, as no clear pattern could be found among the different parameters calculated for updraft proxy that would be consistent with the initial hypothesis.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2018

Inducing regioselective chemical reactivity in graphene with alkali metal intercalation

First principles calculations demonstrate that alkali metal atoms, intercalated between metal substrates and adsorbed graphene monolayers, induce localised regions of increased reactivity. The extent of this localisation is proportional to the size of the alkali atom and the strength of the graphene–substrate interaction. Thus, larger alkali atoms are more effective (e.g. K > Na > Li), as are stronger-interacting substrates (e.g. Ni > Cu). Despite the electropositivity of these alkali metal adsorbates, analysis of charge transfer between the alkali metal, the substrate and the adsorbed graphene layer indicates that charge transfer does not give rise to the observed regioselective reactivity. Instead, the increased reactivity induced in the graphene structure is shown to arise from the geometrical distortion of the graphene layer imposed by the intercalated adsorbed atom. Finally, we show that this strategy can be used with arbitrary adsorbates and substrate defects, provided such structures are stable, towards controlling the mesoscale patterning and chemical functionalisation of graphene structures.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2015

Sub-50 nm metrology on extreme ultra violet chemically amplified resist—A systematic assessment

With lithographic patterning dimensions decreasing well below 50 nm, it is of high importance to understand metrology at such small scales. This paper presents results obtained from dense arrays of contact holes (CHs) with various Critical Dimension (CD) between 15 and 50 nm, as patterned in a chemically amplified resist using an ASML EUV scanner and measured at ASML and TNO. To determine the differences between various (local) CD metrology techniques, we conducted an experiment using optical scatterometry, CD-Scanning Electron Microscopy (CD-SEM), Helium ion Microscopy (HIM), and Atomic Force Microscopy (AFM). CD-SEM requires advanced beam scan strategies to mitigate sample charging; the other tools did not need that. We discuss the observed main similarities and differences between the various techniques. To this end, we assessed the spatial frequency content in the raw images for SEM, HIM, and AFM. HIM and AFM resolve the highest spatial frequencies, which are attributed to the more localized probe-sample interaction for these techniques. Furthermore, the SEM, HIM, and AFM waveforms are analyzed in detail. All techniques show good mutual correlation, albeit the reported CD values systematically differ significantly. HIM systematically reports a 25% higher CD uniformity number than CD-SEM for the same arrays of CHs, probably because HIM has a higher resolution than the CD-SEM used in this assessment. A significant speed boost for HIM and AFM is required before these techniques are to serve the demanding industrial metrology applications like optical critical dimension and CD-SEM do nowadays.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗