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Chip-on-Board Technology 1996 Year-end Report (Design, Manufacturing, and Reliability Study)

The major impetus for flight qualifying Chip-On-Board (COB) packaging technology is the shift in emphasis for space missions to smaller, better, and cheaper spacecraft and satellites resulting from the NASA New Millenium initiative and similar requirements in DoD-sponsored programs. The most important benefit that can potentially be derived from miniaturizing spacecraft and satellites is the significant cost saving realizable if a smaller launch vehicle may be employed. Besides the program cost saving, there are several other advantages to building COB-based space hardware. First, once a well-controlled process is established, COB can be low cost compared to standard Multi-Chip Module (MCM) technology. This cost competitiveness is regarded as a result of the generally greater availability and lower cost of Known Good Die (KGD). Coupled with the elimination of the first level of packaging (chip package), compact, high-density circuit boards can be realized with Printed Wiring Boards (PWB) that can now be made with ever-decreasing feature size in line width and via hole. Since the COB packaging technique in this study is based mainly on populating bare dice on a suitable multi-layer laminate substrate which is not hermetically sealed, die coating for protection from the environment is required. In recent years, significant improvements have been made in die coating materials which further enhance the appeal of COB. Hysol epoxies, silicone, parylene and silicon nitride are desirable because of their compatible Thermal Coefficient of Expansion (TCE) and good moisture resistant capability. These die coating materials have all been used in the space and other industries with varying degrees of success. COB technology, specifically siliconnitride coated hardware, has been flown by Lockheed on the Polar satellite. In addition, DARPA has invested a substantial amount of resources on MCM and COB-related activities recently. With COB on the verge of becoming a dominant player in DoD programs, DARPA is increasing its support of the availability of KGDs which will help decrease their cost. Aside from the various major developments and trends in the space and defense industries that are favorable to the acceptance and widespread use of'COB packaging technology, implementing COB can be appealing in other aspects. Since the interconnection interface is usually the weak link in a system, the overall circuit or system reliability may actually be improved because of the elimination of a level of interconnect/packaging at the chip. With COB, mixing packaging technologies is possible. Because some devices are only available in commercial plastic packages, populating a multi-layer laminate substrate with both bare dice and plastic-package parts is inevitable. Another attractive feature of COB is that re-workability is possible if die coating is applied only on the die top. This method allows local replacement of individual dice that were found to be defective instead of replacing an entire board. In terms of thermal management, unpackaged devices offer a shorter thermal resistance path than their packaged counterparts thereby improving thermal sinking and heat removal from the parts.

Le, Binh Q.↗

Metallic Powder Core Tubular Wire (PCTW) Development for Additive Manufacturing

NASA Langley Research Center (LaRC) in Hampton, VA, and the Center for Welding, Joining, and Coating Research (CWJCR) in the Department of Metallurgical and Materials Engineering at the Colorado School of Mines (CSM) in Golden, CO, have collaborated for nearly fifteen years to develop metallic powder core tubular wire (PCTW) feedstock for additive manufacturing (AM) using electron beam deposition. The motivation for this development was to offset dealloying observed during deposition of titanium and aluminum alloy solid wire feedstock in the LaRC electron beam freeform fabrication (EBF3) system and to explore novel alloy compositions by tailoring the powder fill. EBF3 is a fusion-based AM process that is performed under vacuum and is consequently prone to vaporization loss of low vapor pressure alloying elements. Research spanning four graduate student research projects succeeded in developing the basic methodology to fabricate PCTW, the mass balance equations used to define the powder fill, microstructure control through particulate inoculation, and the feasibility of producing metal matrix composite materials. Metallic PCTW is comprised of a thin foil sheath wrapped around a powder blend. Fabrication of PCTW at CSM was accomplished using a tubular wire mill system to first bend a flat strip into a u-shaped cross section, deposit a powder fill, create a lap joint to seal the wire, and draw to final diameter. Powder management systems were developed to ensure uniform mixing of powder constituents and identify feed rates for optimum fill ratios. Processing parameters were successfully developed for titanium and aluminum alloy sheaths to account for material work hardening during drawing. Mass balance equations were developed to account for compositional contributions of the sheath and powder fill. PCTW composition can be adjusted through selection of the sheath or powder materials. PCTWs were successfully developed to offset Al loss in deposits of Ti-6-4 and Mg loss in Al 6061, resulting in deposits that were within the composition limits for each material. Ti-6-4 deposits were fabricated using PCTW comprised of commercially pure (CP) titanium sheath and a fill of pre-alloyed Ti-6-4 powder with additions of elemental Al and V powders. Additions of both elements were required to account for the CP Ti from the sheath, and Al was further enhanced to offset documented losses in EBF3 deposits. For Al 6061 deposits, composition was modulated through the choice of sheath material. The PCTW was made using an Al 5052 sheath to supplement Mg content and a fill composition of pre-alloyed 6061 powder with additions of Si and Cu.The slower solidification rate of the EBF3 process compared with laser powder bed fusion processes can lead to coarse-grained microstructures and mechanical property anisotropy. EBF3deposits of Ti-6-4 exhibited large epitaxially grown β grains, which result in degraded mechanical properties in the deposition direction. Microstructure refinement was achieved through a combination of electron beam modulation and the use of a PCTW designed for Ti-6-4 deposits and modified by the addition of powder made from Fe and B. Resulting deposits exhibited reductions in β grain size, α phase colony intercept length and lath width, and an increased volume fraction of β phase. The mechanism of microstructure refinement was related to precipitation of boride particles. Hardness testing confirmed that mechanical property anisotropy was reduced and an overall increase in hardness was achieved.Metal matrix composite (MMC) materials offer strength and stiffness benefits over unreinforced materials. Two methods were investigated using PCTW technology for producing Al 6061 basedMMC materials; the direct addition of SiC reinforcing particles and the in-situ generation of reinforcements through reaction synthesis of precursor powders. Al 6061 based MMCs reinforced with SiC exhibited particle clustering and formation of aluminum carbides during deposition. The application of a Ni coating to the SiC particles prior to incorporation into the powder fill eliminated aluminum carbide formation and aided particle distribution during deposition. Modulation of beam focus and power further reduced aluminum carbide formation and aided particle distribution. In reaction synthesis, precursor additions undergo an exothermic reaction during deposition to form new ceramic products, generally of finer scale than the initial precursor components. The product phases provide reinforcement in the MMC and act as nucleation sites during solidification, resulting in grain refinement, improved mechanical properties, and reduced susceptibility to solidification cracking. Higher tensile strength and stiffness were demonstrated in Al 6061 based MMCs with 2 vol% reinforcement. These combined research efforts demonstrate the potential of PCTW technology for customizing of alloy composition and achieving microstructure control. A manufacturing process for titanium- and aluminum-based PCTWs was developed based on iterative design, theoretical calculations, and empirical data. PCTW technology successfully mitigated Al loss from Ti-6-4 and Mg loss in Al 6061, resulted in grain refinement in Ti-6-4, and demonstrated fabrication of Al based MMCs

Marcia S Domack↗

Prototype acoustic positioning system for the Pacific Ocean Neutrino Experiment

We present the design and initial performance characterization of the prototype acoustic positioning system intended for the Pacific Ocean Neutrino Experiment. It comprises novel piezo-acoustic receivers with dedicated filtering- and amplification electronics installed in P-ONE instruments and is complemented by a commercial system comprised of cabled and autonomous acoustic pingers for sub-sea installation manufactured by Sonardyne Ltd. We performed an in-depth characterization of the acoustic receiver electronics and their acoustic sensitivity when integrated into P-ONE pressure housings. These show absolute sensitivities of up to -125 dB re V2/μPa2 in a frequency range of 10–40 kHz. We furthermore conducted a positioning measurement campaign in the ocean by deploying three autonomous acoustic pingers on the seafloor, as well as a cabled acoustic interrogator and a P-ONE prototype module deployed from a ship. Using a simple peak-finding detection algorithm, we observe high accuracy in the tracking of relative ranging times at approximately 230–280 μs at distances of up to 1600 m, which is sufficient for positioning detectors in a cubic-kilometer detector and which can be further improved with more involved detection algorithms. The tracking accuracy is further confirmed by independent ranging of the Sonardyne system and closely follows the ship's drift in the wind measured by GPS. The absolute positioning shows the same tracking accuracy with its absolute precision only limited by the large uncertainties of the deployed pinger positions on the seafloor.

Data analysis↗

Poster - 40: Treatment Verification of a 3D-printed Eye Phantom for Proton Therapy

Purpose: Ocular melanoma is a form of eye cancer which is often treated using proton therapy. The benefit of the steep proton dose gradient can only be leveraged for accurate patient eye alignment. A treatment-planning program was written to plan on a 3D-printed anatomical eye-phantom, which was then irradiated to demonstrate the feasibility of verifying in vivo dosimetry for proton therapy using PET imaging. Methods: A 3D CAD eye model with critical organs was designed and voxelized into the Monte-Carlo transport code FLUKA. Proton dose and PET isotope production were simulated for a treatment plan of a test tumour, generated by a 2D treatment-planning program developed using NumPy and proton range tables. Next, a plastic eye-phantom was 3D-printed from the CAD model, irradiated at the TRIUMF Proton Therapy facility, and imaged using a PET scanner. Results: The treatment-planning program prediction of the range setting and modulator wheel was verified in FLUKA to treat the tumour with at least 90% dose coverage for both tissue and plastic. An axial isotope distribution of the PET isotopes was simulated in FLUKA and converted to PET scan counts. Meanwhile, the 3D-printed eye-phantom successfully yielded a PET signal. Conclusions: The 2D treatment-planning program can predict required parameters to sufficiently treat an eye tumour, which was experimentally verified using commercial 3D-printing hardware to manufacture eye-phantoms. Comparison between the simulated and measured PET isotope distribution could provide a more realistic test of eye alignment, and a variation of the method using radiographic film is being developed.

60 APPLIED LIFE SCIENCES↗

The Second European Service Module (ESM-2) Evolutions, Production and Challenges

This paper presents an overview of the Second European Service Module (ESM-2), the second in a series of European Service Modules produced as part of the Barter agreement between NASA and ESA for the Orion Program. The European Industrial consortium is led by the ESA prime contractor Airbus Defence and Space in Bremen. ESA and Airbus signed the ESM-2 contract on 16 February 2017, for this key element of the Orion Exploration Mission 2 (EM-2). EM-2 is the first crewed mission for Orion and will take astronauts farther into the solar system than humanity has ever travelled. EM-2 will also be a historic mission for Europe, as the ESM-2 will be the first European spacecraft to be part of a human transportation system carrying humans beyond low Earth orbit. ESM-2 is mainly a recurring production following ESM-1. Nevertheless, there are a number of important changes being implemented, for example, to incorporate upgrades to further enhance safety and reliability. The challenging delivery schedule for ESM-2 has driven the need to commence manufacturing prior to completion of the qualification on ESM-1. In addition, some requirement deviations and non-compliances approved for ESM-1 have resulted in modifications for ESM-2. In order to manage the competing constraints effectively, the ESM-2 Team has put in place a number of novel approaches to manage schedule, risk, and technical changes. Airbus has set up multi-functional teams according to an approach known as "Major Spacecraft Deliveries" consisting of quality assurance, engineering and procurement. The risk of starting manufacturing prior to qualification is managed through a special risk share agreement. This agreement necessitates rigorous risk reviews across the board for all manufacturing, assembly, integration and test milestones. The ESM-2 changes are managed by Configuration Management, but Airbus has also introduced the Technical Baseline Matrix to provide a transparent top-level overview of the changes from ESM-1 to ESM-2. The tool provides the basis for ESM-2 design and development needs, decisions, as well as the input for the Orion EM-2 Critical Design Review (CDR). The main technical evolutions, status of the production and the novel management approaches for ESM-2 are presented and discussed in the paper.

Orion European Service Module Programme↗

Multiscale design of nonlinear materials using a Eulerian shape optimization scheme

Motivated by recent advances in manufacturing, the design of materials is the focal point of interest in the material research community. One of the critical challenges in this field is finding optimal material microstructure for a desired macroscopic response. This work presents a computational method for the mesoscale-level design of particulate composites for an optimal macroscale-level response. The method relies on a custom shape optimization scheme to find the extrema of a nonlinear cost function subject to a set of constraints. Three key “modules” constitute the method: multiscale modeling, sensitivity analysis, and optimization. Multiscale modeling relies on a classical homogenization method and a nonlinear NURBS-based generalized finite element scheme to efficiently and accurately compute the structural response of particulate composites using a nonconformal discretization. A three-parameter isotropic damage law is used to model microstructure-level failure. An analytical sensitivity method is developed to compute the derivatives of the cost/constraint functions with respect to the design variables that control the microstructure's geometry. The derivation uncovers subtle but essential new terms contributing to the sensitivity of finite element shape functions and their spatial derivatives. Several structural problems are solved to demonstrate the applicability, performance, and accuracy of the method for the design of particulate composites with a desired macroscopic nonlinear stress-strain response.

42 ENGINEERING↗

Flexible storage medium for write-once optical tape

A write-once data storage media was developed which is suitable for optical tape applications. The media is manufactured using a continuous film process to deposit a ternary alloy of tin, bismuth, and copper. This laser sensitive layer is sputter deposited onto commercial plastic web as a single-layer thin film. A second layer is sequentially deposited on top of the alloy to enhance the media performance and act as an abrasion resistant hard overcoat. The media was observed to have laser write sensitivities of less than 2.0 njoules/bit, carrier-to-noise levels of greater than 50dB's, modulation depths of approximately 100 percent, read-margins of greater than 35, uniform grain sizes of less than 200 Angstroms, and a media lifetime that exceeds 10 years. Prototype tape media was produced for use in the CREO drive system. The active and overcoat materials are first sputter deposited onto three mil PET film in a single pass through the vacuum coating system, and then converted down into multiple reels of 35mm x 880m tape. One mil PET film was also coated in this manner and then slit and packaged into 3480 tape cartridges.

Strandjord, Andrew J. G.↗

Orion Exploration Flight Test Post-Flight Inspection and Analysis

The multipurpose crew vehicle, Orion, is being designed and built for NASA to handle the rigors of crew launch, sustainment and return from scientific missions beyond Earth orbit. In this role, the Orion vehicle is meant to operate in the space environments like the naturally occurring meteoroid and the artificial orbital debris environments (MMOD) with successful atmospheric reentry at the conclusion of the flight. As a result, Orion's reentry module uses durable porous, ceramic tiles on almost thirty square meters of exposed surfaces to accomplish both of these functions. These durable, non-ablative surfaces maintain their surface profile through atmospheric reentry; thus, they preserve any surface imperfections that occur prior to atmospheric reentry. Furthermore, Orion's launch abort system includes a shroud that protects the thermal protection system while awaiting launch and during ascent. The combination of these design features and a careful pre-flight inspection to identify any manufacturing imperfections results in a high confidence that damage to the thermal protection system identified post-flight is due to the in-flight solid particle environments. These favorable design features of Orion along with the unique flight profile of the first exploration flight test of Orion (EFT-1) have yielded solid particle environment measurements that have never been obtained before this flight.

Miller, J. E.↗

High Reynolds Number Hybrid Laminar Flow Control (HLFC) Flight Experiment: Suction System Design and Manufacture - Report 4

This document describes the design of the leading edge suction system for flight demonstration of hybrid laminar flow control on the Boeing 757 airplane. The exterior pressures on the wing surface and the required suction quantity and distribution were determined in previous work. A system consisting of porous skin, sub-surface spanwise passages ("flutes"), pressure regulating screens and valves, collection fittings, ducts and a turbocompressor was defined to provide the required suction flow. Provisions were also made for flexible control of suction distribution and quantity for HLFC research purposes. Analysis methods for determining pressure drops and flow for transpiration heating for thermal anti-icing are defined. The control scheme used to observe and modulate suction distribution in flight is described.

Source record↗

Advanced Drying Process for Lower Manufacturing Cost of Electrodes

For this Vehicle Technologies Incubator/Energy Storage R&D topic, Lambda Technologies teamed with Navitas Systems and proposed a new advanced drying process that promised a 5X reduction in electrode drying time and significant reduction in the cost of large format lithium batteries used in PEV's. The operating principle of the proposed process was to use penetrating radiant energy source Variable Frequency Microwaves (VFM), that are selectively absorbed by the polar water or solvent molecules instantly in the entire volume of the electrode. The solvent molecules are thus driven out of the electrode thickness making the process more efficient and much faster than convective drying method. To evaluate the Advanced Drying Process (ADP) a hybrid prototype system utilizing VFM and hot air flow was designed and fabricated. While VFM drives the solvent out of the electrode thickness, the hot air flow exhausts the solvent vapors out of the chamber. The drying results from this prototype were very encouraging. For water based anodes there is a 5X drying advantage (time & length of oven) in using ADP over standard drying system and for the NMP based cathodes the reduction in drying time has 3X benefit. For energy savings the power consumption measurements were performed to ADP prototype and compared with the convection standard drying oven. The data collected demonstrated over 40% saving in power consumption with ADP as compared to the convection drying systems. The energy savings are one of the operational cost benefits possible with ADP. To further speed up the drying process, the ADP prototype was explored as a booster module before the convection oven and for the electrode material being evaluated it was possible to increase the drying speed by a factor of 4, which could not be accomplished with the standard dryer without surface defects and cracks. The instantaneous penetration of microwave in the entire slurry thickness showed a major advantage in rapid drying of the electrode materials. For the existing electrode materials, the material analysis and cell characterization data from ADP dried electrodes showed equivalent (or slightly better) performance. However, for high loading and thicker electrode materials (for high energy densities) the ADP advantages are more prominent. There was less binder migration, the resistance was lower hence the current capacities and retention of the battery cells were higher. The success of the project has enabled credible communications with commercial end users as well as battery coating line integrators. Goal is to scale ADP up for high volume manufacturing of Li-ion battery electrodes. The implementation of ADP in high volume manufacturing will reduce a high cost production step to bring the overall price of Li-ion batteries down. This will ultimately have a positive impact on the public by making electric and hybrid vehicles more affordable.

25 ENERGY STORAGE↗

Teaching Engineering Students Team Work

The purpose of this manual is to provide professor's in engineering classes which the background necessary to use student team projects effectively. This manual describes some of the characteristics of student teams and how to use them in class. It provides a set of class activities and films which can be used to introduce and support student teams. Finally, a set of teaching modules used in freshmen, sophomore, and senior aeronautical engineering classes are presented. This manual was developed as part of a NASA sponsored project to improve the undergraduate education of aeronautical engineers. The project has helped to purchase a set of team work films which can be checked out from Cal Poly's Learning Resources Center in the Kennedy Library. Research for this project has included literature reviews on team work and cooperative learning; interviews, observations, and surveys of Cal Poly students from Industrial and Manufacturing Engineering, Aeronautical Engineering and Psychology; participation in the Aeronautical Engineering senior design lab; and interviews with engineering faculty. In addition to this faculty manual, there is a student team work manual which has been designed to help engineering students work better in teams.

Levi, Daniel↗

Advanced Fuel-Cell Modules

Modules designed for long life, light weight, reliability, and low cost. Stack of alkaline fuel cells based on modules, consisting of three fuel cells and cooler. Each cell includes following components: ribbed carbon fine-pore anode electrolyte-reservoir plate; platinum-on-carbon catalyst anode; potassium titanate matrix bonded with butyl rubber; gold-plated nickel-foil electrode substrates; and silver plated, gold-flashed molded polyphenylene sulfide cell holder. Each cell has active area of 1ft to the 2nd power (0.09 m to the 2nd power). Materials and configurations of parts chosen to extend life expectancy, reduce weight and manufacturing cost, and increase reliability.

Bell, William F., III↗

The status of lightweight photovoltaic space array technology based on amorphous silicon solar cells

Ultralight, flexible photovoltaic (PV) array of amorphous silicon (a-Si) was identified as a potential low cost power source for small satellites. A survey was conducted of the status of the a-Si PV array technology with respect to present and future performance, availability, cost, and risks. For existing, experimental array blankets made of commercial cell material, utilizing metal foil substrates, the Beginning of Life (BOL) performance at Air Mass Zero (AM0) and 35 C includes total power up to 200 W, power per area of 64 W/sq m and power per weight of 258 W/kg. Doubling of power per weight occurs when polyimide substrates are used. Estimated End of Life (EOL) power output after 10 years in a nominal low earth orbit would be 80 pct. of BOL, the degradation being due to largely light induced effects (-10 to -15 pct.) and in part (-5 pct.) to space radiation. Predictions for the year 1995 for flexible PV arrays, made on the basis of published results for rigid a-Si modules, indicate EOL power output per area and per weight of 105 W/sq m and 400 W/kg, respectively, while predictions for the late 1990s based on existing U.S. national PV program goals indicate EOL values of 157 W/sq m and 600 W/kg. Cost estimates by vendors for 200 W ultralight arrays in volume of over 1000 units range from $100/watt to $125/watt. Identified risks include the lack of flexible, space compatible encapsulant, the lack of space qualification effort, recent partial or full acquisitions of US manufacturers of a-Si cells by foreign firms, and the absence of a national commitment for a long range development program toward developing of this important power source for space.

Hanak, Joseph J.↗

New Developments and Applications of Superheated Emulsions: Warhead Verification and Special Nuclear Material Interdiction

In recent years, neutron detection with superheated emulsions has received renewed attention thanks to improved detector manufacturing and read-out techniques, and thanks to successful applications in warhead verification and special nuclear material (SNM) interdiction. Detectors are currently manufactured with methods allowing high uniformity of the drop sizes, which in turn allows the use of optical read-out techniques based on dynamic light scattering. Furthermore, small detector cartridges arranged in 2D matrices are developed for the verification of a declared warhead without revealing its design. For this application, the enabling features of the emulsions are that bubbles formed at different times cannot be distinguished from each other, while the passive nature of the detectors avoids the susceptibility to electronic snooping and tampering. Large modules of emulsions are developed to detect the presence of shielded special nuclear materials hidden in cargo containers ‘interrogated’ with high energy X-rays. In this case, the enabling features of the emulsions are photon discrimination, a neutron detection threshold close to 3 MeV and a rate-insensitive read-out.

d’Errico, Francesco↗

PV Reference Cells for Outdoor Use: Stability Over Four Years of Deployment

Photovoltaic (PV) reference cells are frequently used to evaluate the performance of PV power plants. They provide a measure of irradiance that strongly correlates with the electrical output of PV modules, which makes them very useful for detecting short-term anomalies or long-term degradation in PV power plant output. One very important quality is long-term stability. This report presents observations about the stability of a set of 22 commercial reference cells that have been in continuous operation for a period of four years at the Solar Radiation Research Laboratory (SRRL) site at the National Renewable Energy Laboratory (NREL). The 22 reference cells at the SRRL represent 10 different models from 6 manufacturers.

14 SOLAR ENERGY↗

Effects of Contamination and Cleaning on Parachute Structural Textile Elements

Throughout their lifecycle, parachute textiles come into contact with various other substances. This contact may occur during manufacturing and repair, storage and transportation, packing, or actual use. While this interaction does not always result in negative repercussions, it may cause a loss in material strength. This paper examines the strength degradation due to several contaminants as well as the effects of cleaning agents on common parachute materials. Materials tested were: Kevlar cord and webbing, Nylon broadcloth and webbing, and Vectran cord; all of these constitute the major structural elements for CPAS (Capsule Parachute Assembly System), the parachute system for the NASA Orion Crew Module. Contaminants tested were: sewing machine oil, dried stamping ink, dirt, basting glue, Sergene, and rust. Recommendations for cleaning (or not cleaning) these materials with respect to each of the contaminants are given in this paper, as well as recommendations for future tests.

Mollmann, Catherine↗

MODEL DEVELOPMENT AND VERIFICATION OF A 1,350°C AIR RECEIVER TEST SYSTEM

Open-loop volumetric receivers work with air at atmospheric pressure and are suitable for single-cycle or multicycle power plants. A novel additively manufactured (AM) silicon carbide (SiC), ceramic matrix composite (CMC) volumetric receiver was developed that consisted of a lattice structure, which absorbs solar radiation and converts it into heat energy. Heat energy from the porous receiver was transferred to heated ambient air. The receiver acted as a convective heat exchanger, transferring heat to the fluid through convection. Engineering was facilitated to develop a high-temperature air receiver test bed at Sandia national Laboratories (SNL) capable of demonstrating a 50kWth open-loop volumetric SiC air receiver module developed by General Electric Aerospace Research (GE Aerospace). This paper presents the development of the high temperature AM SiC-CMC air receiver, the test bed, and the first testing operations of this device, which was experimentally demonstrated to achieve 1,350°C for over 3.5 hours of operation, based on input flux levels of 67–91 W/cm2 0.5-2.5 kg/s flow rates. From the test campaign results, based on the measured convective heat transfer to the airflow and bounded radiative-loss assumptions, the solar-thermal efficiency of HOTSSTAR test module was estimated to be approximately as high as 74% for representative test conditions.

14 SOLAR ENERGY↗

Highly Sensitive Bulk Silicon Chemical Sensors with Sub-5 nm Thin Charge Inversion Layers

There is an increasing demand for mass-producible, low-power gas sensors in a wide variety of industrial and consumer applications. In this work, we report chemical-sensitive field-effect-transistors (CS-FETs) based on bulk silicon wafers, wherein an electrostatically confined sub-5 nm thin charge inversion layer is modulated by chemical exposure to achieve a high-sensitivity gas-sensing platform. Using hydrogen sensing as a "litmus" test, we demonstrate large sensor responses (>1000%) to 0.5% H 2 gas, with fast response (<60 s) and recovery times (<120 s) at room temperature and low power (<50 μW). On the basis of these performance metrics as well as standardized benchmarking, we show that bulk silicon CS-FETs offer similar or better sensing performance compared to emerging nanostructures semiconductors while providing a highly scalable and manufacturable platform.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗