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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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All sourcesNASA NTRSDOE OSTI
NASA NTRS2006

Nondestructive Evaluation of Foam Insulation on the Space Shuttle External Tank

Foam loss on the External Tank (ET) during launch can be caused by a number of factors. Voids are the best understood mechanism of foam loss, although it is known that delaminations, cracks and crushed foam can also lead to liberation of foam. Shortly after the Columbia accident, work began on non-destructive evaluation of foam targeted at finding voids and delaminations. After several months of searching for candidate methods capable of inspecting ET foam, the five most promising techniques were taken through a blind test and narrowed down to two methods to develop and use for inspection of the ET. These methods were backscatter radiography and terahertz imaging. The backscatter radiography system measures a test part by detecting Compton backscattered x-ray energy generated by a collimated beam of x-rays directed at the test subject. This collimated beam is scanned across the subject, recording scatter intensity data one pixel at a time until the area of interest is covered. The resulting data can be used to generate an image similar to a radiograph. Some depth information can be gathered utilizing apertures or collimation on the detectors. The detectors are located around the collimated source, making this a single sided inspection. The void detection limit with the currently utilized system is around 0.5 inches in diameter by 0.2 inches high. The terahertz imaging system inspects a test part by utilizing a transceiver to emit a pulse focused at the aluminum skin of the ET, which reflects it back to the transceiver where it is analyzed. The transceiver is scanned across the area of interest until a measurement has been taken at every location. Amplitude, time delay and frequency content are examined to note any discontinuities which may be the result of a void or other type of defect. The pulse currently utilized is in the millimeter wave regime. The void detection limit with this system is around 0.5 inches in diameter by 0.2 inches high. With increased interest in other causes of foam loss following the flight of Discovery in July 2005, laser shearography was added to the techniques used for inspecting ET foam. The shearography method records a sheared image of a laser speckle pattern projected on a test part before And after some sort of excitation. The resultant fringe pattern allows the slope of the out of plane displacement to be measured. For crushed and delaminated foam applications, a non-contact air coupled acoustic force is used to excite the surface of the foam. Regions without defects tend to respond differently to the sound energy than do regions with defects, generating a map of the foam integrity. Foam crushed to a depth of about 0.1 inches is detectable with shearography even after it has relaxed to its original shape.

Richter, Joel↗
NASA NTRS2006

NASA Tech Briefs, March 2006

Topics covered include: Medical Signal-Conditioning and Data-Interface System; Instruments for Reading Direct-Marked Data-Matrix Symbols; Processing EOS MLS Level-2 Data; Ground Processing of Data From the Mars Exploration Rovers; Estimating Total Electron Content Using 1,000+ GPS Receivers; NASA Solar Array Demonstrates Commercial Potential; Improved Control of Charging Voltage for Li-Ion Battery; Programmable Pulse-Position-Modulation Encoder; Wavelength-Agile External-Cavity Diode Laser for DWDM; Pattern-Recognition Processor Using Holographic Photopolymer; Submicrosecond Power-Switching Test Circuit; Three-Function Logic Gate Controlled by Analog Voltage; Integrated System for Autonomous Science; Montage Version 3.0; Utilizing AI in Temporal, Spatial, and Resource Scheduling; Satellite Image Mosaic Engine; Architecture for Control of the K9 Rover; HFGMC Enhancement of MAC/GMC; Automated Activation and Deactivation of a System Under Test; Cleaning Carbon Nanotubes by Use of Mild Oxygen Plasmas; Generating Aromatics From CO2 on Mars or Natural Gas on Earth; Attaching Thermocouples by Peening or Crimping; Heat Treatment of Friction-Stir-Welded 7050 Aluminum Plates; Generating Breathable Air Through Dissociation of N2O; High-Performance Scanning Acousto-Ultrasonic System; Correction for Thermal EMFs in Thermocouple Feedthroughs; Using Quasiparticle Poisoning To Detect Photons; Estimating Resolution Lengths of Hybrid Turbulence Models; Education and Training Module in Alertness Management; Cargo-Positioning System for Next-Generation Spacecraft; Micro-Imagers for Spaceborne Cell-Growth Experiments; Holographic Solar Photon Thrusters; Plasma-Based Detector of Outer-Space Dust Particles; and Generation of Data-Rate Profiles of Ka-Band Deep-Space Links.

Source record↗
NASA NTRS2011

Carbon Nanofibers Synthesized on Selective Substrates for Nonvolatile Memory and 3D Electronics

A plasma-enhanced chemical vapor deposition (PECVD) growth technique has been developed where the choice of starting substrate was found to influence the electrical characteristics of the resulting carbon nanofiber (CNF) tubes. It has been determined that, if the tubes are grown on refractory metallic nitride substrates, then the resulting tubes formed with dc PECVD are also electrically conducting. Individual CNFs were formed by first patterning Ni catalyst islands using ebeam evaporation and liftoff. The CNFs were then synthesized using dc PECVD with C2H2:NH3 = [1:4] at 5 Torr and 700 C, and approximately equal to 200-W plasma power. Tubes were grown directly on degenerately doped silicon <100> substrates with resistivity rho approximately equal to 1-5 meterohm-centimeter, as well as NbTiN. The approximately equal to 200-nanometer thick refractory NbTiN deposited using magnetron sputtering had rho approximately equal to 113 microohm-centimeter and was also chemically compatible with CNF synthesis. The sample was then mounted on a 45 beveled Al holder, and placed inside a SEM (scanning electron microscope). A nanomanipulator probe stage was placed inside the SEM equipped with an electrical feed-through, where tungsten probes were used to make two-terminal electrical measurements with an HP 4156C parameter analyzer. The positive terminal nanoprobe was mechanically manipulated to physically contact an individual CNF grown directly on NbTiN as shown by the SEM image in the inset of figure (a), while the negative terminal was grounded to the substrate. This revealed the tube was electrically conductive, although measureable currents could not be detected until approximately equal to 6 V, after which point current increased sharply until compliance (approximately equal to 50 nA) was reached at approximately equal to 9.5 V. A native oxide on the tungsten probe tips may contribute to a tunnel barrier, which could be the reason for the suppressed transport at low biases. Currents up to approximately 100 nA could be cycled, which are likely to propagate via the tube surface, or sidewalls, rather than the body, which is shown by the I-V in figure (a). Electrical conduction via the sidewalls is a necessity for dc NEMS (nanoelectromechanical system) applications, more so than for the field emission applications of such tubes. During the tests, high conductivity was expected, because both probes were shorted to the substrate, as shown by curve 1 in the I-V characteristic in figure (b). When a tube grown on NbTiN was probed, the response was similar to the approximately equal to 100 nA and is represented by curve 2 in figure (b), which could be cycled and propagated via the tube surface or the sidewalls. However, no measureable currents for the tube grown directly on Si were observed as shown by curve 3 in figure (b), even after testing over a range of samples. This could arise from a dielectric coating on the sidewalls for tubes on Si. As a result of the directional nature of ion bombardment during dc PECVD, Si from the substrate is likely re-sputtered and possibly coats the sidewalls.

Kaul, Anupama B.↗
DOE OSTI2022

All-Ceramic Passive Wireless Temperature Sensor Realized by Tin-Doped Indium Oxide (ITO) Electrodes for Harsh Environment Applications

In this work, an all-ceramic passive wireless inductor–capacitor (LC) resonator was presented for stable temperature sensing up to 1200 °C in air. Instead of using conventional metallic electrodes, the LC resonators are modeled and fabricated with thermally stable and highly electroconductive ceramic oxide. The LC resonator was modeled in ANSYS HFSS to operate in a low-frequency region (50 MHz) within 50 × 50 mm geometry using the actual material properties of the circuit elements. The LC resonator was composed of a parallel plate capacitor coupled with a planar inductor deposited on an Al2O3 substrate using screen-printing, and the ceramic pattern was sintered at 1250 °C for 4 h in an ambient atmosphere. The sensitivity (average change in resonant frequency with respect to temperature) from 200–1200 °C was ~170 kHz/°C. The temperature-dependent electrical conductivity of the tin-doped indium oxide (ITO, 10% SnO2 doping) on the quality factor showed an increase of Qf from 36 to 43 between 200 °C and 1200 °C. The proposed ITO electrodes displayed improved sensitivity and quality factor at elevated temperatures, proving them to be an excellent candidate for temperature sensing in harsh environments. The microstructural analysis of the co-sintered LC resonator was performed using a scanning electron microscope (SEM) which showed that there are no cross-sectional and topographical defects after several thermal treatments.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
NASA NTRS1983

Analysis of multispectral data using an unsupervised classification technique: Application to VAS

A statistical classification method based on clustering of multidimensional histograms was applied to several channels of the VAS multispectral imagery. The method automatically discriminates and classifies atmospheric ground features such as cloud types, atmospheric moisture patterns, ocean, or ground. Such a clustering method has the advantage of forming natural data groupings, without a priori classification. Clusters are not limited by straight lines or plane surfaces as is the case in threshold methods. The method was applied to simultaneous full resolution images from channels 8 (11.2 micron), 10 (6.7 micron), and 12 (3.9 micron). Twenty image segments of 64 by 64, 12 image segments of 128 by 128, and 4 image segments of 254 by 254 picture elements were analyzed. In addition, normal VISSR mode images at 1800, 1830, and 2000 GMT were used to identify the classes. The gray levels measured along a scan line and the result of the classification scheme (dashed curves) for the three channels investigated are shown. Each point of the image is affected to a class. Each class is identified by a center of gravity that is represented by a vector in the three dimensional space of gray levels.

Szejwach, G.↗
NASA NTRS2005

Digital Equivalent Data System for XRF Labeling of Objects

A digital equivalent data system (DEDS) is a system for identifying objects by means of the x-ray fluorescence (XRF) spectra of labeling elements that are encased in or deposited on the objects. As such, a DEDS is a revolutionary new major subsystem of an XRF system. A DEDS embodies the means for converting the spectral data output of an XRF scanner to an ASCII alphanumeric or barcode label that can be used to identify (or verify the assumed or apparent identity of) an XRF-scanned object. A typical XRF spectrum of interest contains peaks at photon energies associated with specific elements on the Periodic Table (see figure). The height of each spectral peak above the local background spectral intensity is proportional to the relative abundance of the corresponding element. Alphanumeric values are assigned to the relative abundances of the elements. Hence, if an object contained labeling elements in suitably chosen proportions, an alphanumeric representation of the object could be extracted from its XRF spectrum. The mixture of labeling elements and for reading the XRF spectrum would be compatible with one of the labeling conventions now used for bar codes and binary matrix patterns (essentially, two-dimensional bar codes that resemble checkerboards). A further benefit of such compatibility is that it would enable the conversion of the XRF spectral output to a bar or matrix-coded label, if needed. In short, a process previously used only for material composition analysis has been reapplied to the world of identification. This new level of verification is now being used for "authentication."

Schramm, Harry F.↗
NASA NTRS1994

Orthopyroxene as a recorder of primitive achondrite petrogenesis: Major-, minor-, and trace-element systematics of orthopyroxene in Lodran

Considerable attention has been paid recently to the primitive achondrites because they may form a link between chondrites and more differentiated achondrite meteorites. A recent paper by Miyamoto and Takeda addresses the thermal history of lodranites Yamato 74357 and MAC 88177 as inferred from chemical zoning of pyroxene and olivine determined by electron microprobe analyses. Their results suggested that interstitial melt was present and then extracted. We have taken the analysis of Lodran-type meteorites one step further by incorporating the techniques of Electromagnetic Pulse/Wavelength Dispersive Spectroscopy (EMP/WDS) compositional imaging and scanning ion mass spectroscopy (SIMS) analysis. Orthopyroxene in Lodran is strongly zoned in CaO, Al2O3, TiO2, and Cr2O3 within the last 10-30 microns from the grain boundaries. The rims are reversely zoned in Mg-Fe, exhibiting Mg enrichment, and compositions change from a fairly uniform Wo3En94 within the grains to Wo1En96 at the rims. CaO drops from 1.6 to 0.6 wt% and Al2O3, TiO2, and Cr2O3 exhibit similar depletions. MnO is fairly uniform throughout the grains at around 0.5 wt%. Olivine is also reversely zoned with respect to not only grain boundaries but also to fractures within the grains, giving many olivine grains a complex, patchy zoning pattern. Some of the core-rim trace-element systematics for orthopyroxene are illustrated. Because of the rather narrow zoned rims in Lodran orthopyroxene and the low trace-element abundances, it is difficult to clearly resolve the trace-element systematics. Nevertheless it is evident that the cores are enriched in the incompatible trace elements Ce, Nd, Dy, Er, Yb, Y, and Zr relative to the rims.

Papike, J. J.↗
NASA NTRS2013

Estimating Root Mean Square Errors in Remotely Sensed Soil Moisture over Continental Scale Domains

Root Mean Square Errors (RMSE) in the soil moisture anomaly time series obtained from the Advanced Scatterometer (ASCAT) and the Advanced Microwave Scanning Radiometer (AMSR-E; using the Land Parameter Retrieval Model) are estimated over a continental scale domain centered on North America, using two methods: triple colocation (RMSETC ) and error propagation through the soil moisture retrieval models (RMSEEP ). In the absence of an established consensus for the climatology of soil moisture over large domains, presenting a RMSE in soil moisture units requires that it be specified relative to a selected reference data set. To avoid the complications that arise from the use of a reference, the RMSE is presented as a fraction of the time series standard deviation (fRMSE). For both sensors, the fRMSETC and fRMSEEP show similar spatial patterns of relatively highlow errors, and the mean fRMSE for each land cover class is consistent with expectations. Triple colocation is also shown to be surprisingly robust to representativity differences between the soil moisture data sets used, and it is believed to accurately estimate the fRMSE in the remotely sensed soil moisture anomaly time series. Comparing the ASCAT and AMSR-E fRMSETC shows that both data sets have very similar accuracy across a range of land cover classes, although the AMSR-E accuracy is more directly related to vegetation cover. In general, both data sets have good skill up to moderate vegetation conditions.

Remotely sensed soil moisture validation↗
NASA NTRSDate not supplied

Status of the Microwave Barometric Radar and Sounder (MBARS)

Atmospheric surface pressure and pressure profiles are essential variables in weather modeling and forecasting. Pressure gradients generate atmospheric motion and are essential to the air-sea heat exchange feedbacks within the planetary boundary layer (PBL) that lead to convective storms and heavy precipitation. Despite the importance of pressure and pressure gradients on meso-, synoptic-, and global-scale weather patterns, current technology relies almost entirely on buoy measurements over the majority of the ocean. These measurements are too sparse to capture pressure gradients of even many synoptic scale events, and leave models starved of information. NASA/Goddard Space Flight Center (GSFC), NASA/Langley Research Center (LaRC), and Tomorrow.io have begun development of the Microwave Barometric Radar and Sounder (MBARS), an airborne sensor to retrieve surface air pressure and vertical pressure profiles, especially over oceans. MBARS is a new combined active/passive microwave instrument in the O2 absorption V-band (64-70 GHz) funded by the NASA Earth Science Technology Office (ESTO) Instrument Incubator Program (IIP). This instrument consists of an innovative scanning multi-channel differential absorption radar (DAR) to provide an estimation of total atmospheric column oxygen content and thus the surface dry air pressure. MBARS also will provide hyperspectral radiometric temperature profiling to enables vertical pressure profiles using the hypsometric relationship between pressure and temperature. A co-located microwave radiometer will provide the integrated water vapor mass contribution to atmospheric pressure. This presentation will summarize the project, retrieval concept, and engineering status of the MBARS project.

Radar, Radiometer↗
DOE OSTI2022

Ingrained: An Automated Framework for Fusing Atomic-Scale Image Simulations into Experiments

To fully leverage the power of image simulation to corroborate and explain patterns and structures in atomic resolution microscopy, an initial correspondence between the simulation and experimental image must be established at the outset of further high accuracy simulations or calculations. Furthermore, if simulation is to be used in context of highly automated processes or high-throughput optimization, the process of finding this correspondence itself must be automated. In this work, "ingrained," an open-source automation framework which solves for this correspondence and fuses atomic resolution image simulations into the experimental images to which they correspond, is introduced. Here, the overall "ingrained" workflow, focusing on its application to interface structure approximations, and the development of an experimentally rationalized forward model for scanning tunneling microscopy simulation are described.

36 MATERIALS SCIENCE↗
DOE OSTI2019

Decimeter-scale mapping of carbonate-controlled trace element distribution in Neoarchean cuspate stromatolites

We present that ancient stromatolites can provide key insights into the early evolution of life on Earth. Neoarchean fenestrate stromatolites from the ~2520 Ma Upper Nauga Formation (Transvaal Supergroup, South Africa) preserve cuspate morphologies. They possess clearly delineated support and drape structures interpreted as dolomitized microbial mat material. Petrographic observations show that the biogenic structures are composed of planar-s to non-planar ferroan dolomite, encased in ferroan calcite, including herringbone calcite textures. The cuspate stromatolites were analyzed using Synchrotron Rapid Scanning X-Ray Fluorescence (SRS-XRF) and more conventional techniques to determine: (i) whether element distributions could be distinguished in ancient stromatolites at both cm to dm scales, (ii) whether element distributions show variation between biogenic and abiogenic textures, and (iii) the sample’s paragenesis. The distributions of Ca, Fe, Mn, Pb, Cu, As, Br, Al, Si, P, and S directly correspond to dolomitized stromatolitic structures and show trace element distributions are principally controlled by calcite and dolomite occurrence. Dolomite formation was mainly driven by seawater-derived fluids given the high concentrations of Fe and retention of marine shale-normalized rare earth element and yttrium (REY SN ) patterns, however the spatial association of dolomite to stromatolite structures may reflect microbially-influenced mineral nucleation. Lastly, given the complexity of this sample’s paragenetic evolution, trace metal distributions cannot be conclusively tied to specific metabolic pathways, bioaccumulation or passive binding, however, the results show SRS-XRF can be used for quantifiable, spatial, in-situ investigation of ancient microbialites.

58 GEOSCIENCES↗
DOE OSTI2025

Power balance and divertor asymmetries in the Super-X divertors of MAST-U using SOLPS-ITER

Spherical tokamaks (STs) present unique challenges and opportunities in the area of particle and power exhaust, intensified due to their more compact sizes. Substantial efforts are underway in STs to determine the limits in dissipative operational regimes and advanced divertor solutions, including at MAST-U which provides access to the Super-X divertor configuration. Power balance, and upper/lower divertor asymmetries have been studied using SOLPS-ITER simulations of the MAST-U Super-X divertor. A set of simulations with experimentally inferred transport coefficients with E x B and diamagnetic drifts activated, consisting of density and power scans, and high field side vs low field side gas puff locations, have been used for code experimentation to uncover trends beyond the current experimental parameter space. The upper biased asymmetry (U:L > 1) of the ratio of the peaks of the plasma energy flux densities at the outer targets increases with heating power and decreases with gas puff strength, going from symmetric to up to a factor of 15. The upper target electron temperature has been found to be a good ordering quantity for the magnitude of this asymmetry for all heating powers, gas puff strength, and gas puff locations. The lower divertor biased asymmetry (U:L < 1) of the radiation patterns processed through SOLPS-based bolometry synthetic diagnostics is in qualitative agreement with resistive bolometry experimental results, and it is in quantitative agreement with the trend of the total volume radiation within the divertors of SOLPS. However, radiation measurements alone are not sufficient to infer the magnitude of the asymmetry of the peaks of the power loads at the targets.

MAST-U↗
NASA NTRS1984

Secondary pattern computation of an arbitrarily shaped main reflector

The secondary pattern of a perfectly conducting offset main reflector being illuminated by a point feed at an arbitrary location was studied. The method of analysis is based upon the application of the Fast Fourier Transform (FFT) to the aperture fields obtained using geometrical optics (GO) and geometrical theory of diffraction (GTD). Key features of the reflector surface is completely arbitrary, the incident field from the feed is most general with arbitrary polarization and location, and the edge diffraction is calculated by either UAT or by UTD. Comparison of this technique for an offset parabolic reflector with the Jacobi-Bessel and Fourier-Bessel techniques shows good agreement. Near field, far field, and scan data of a large reflector are presented.

Lam, P. T. C.↗
NASA NTRS2003

Optical Tweezers Array and Nimble Tweezers Probe Generated by Spatial- Light Modulator

An optical tweezers is being developed at the NASA Glenn Research Center as a visiblelight interface between ubiquitous laser technologies and the interrogation, visualization, manufacture, control, and energization of nanostructures such as silicon carbide (SiC) nanotubes. The tweezers uses one or more focused laser beams to hold micrometer-sized particles called tools (sometimes called tips in atomic-force-microscope terminology). A strongly focused laser beam has an associated light-pressure gradient that is strong enough to pull small particles to the focus, in spite of the oppositely directed scattering force; "optical tweezers" is the common term for this effect. The objective is to use the tools to create carefully shaped secondary traps to hold and assemble nanostructures that may contain from tens to hundreds of atoms. The interaction between a tool and the nanostructures is to be monitored optically as is done with scanning probe microscopes. One of the initial efforts has been to create, shape, and control multiple tweezers beams. To this end, a programmable spatial-light modulator (SLM) has been used to modify the phase of a laser beam at up to 480 by 480 points. One program creates multiple, independently controllable tweezer beams whose shapes can be tailored by making the SLM an adaptive mirror in an interferometer (ref. 1). The beams leave the SLM at different angles, and an optical Fourier transform maps these beams to different positions in the focal plane of a microscope objective. The following figure shows two arrays of multiple beams created in this manner. The patterns displayed above the beam array control the intensity-to-phase transformation required in programming the SLM. Three of the seven beams displayed can be used as independently controllable beams.

Decker, Arthur J.↗
DOE OSTI2019

Serum tumor markers and testicular germ cell tumors: a primer for radiologists

Serum tumor markers (STMs) play a critical role in the diagnosis, staging and follow-up of both seminomatous and nonseminomatous testicular germ cell neoplasms. Levels of alpha-fetoprotein (AFP), human chorionic gonadotropin (HCG), and lactate dehydrogenase (LDH), especially those measured after orchiectomy, also have implications for patient prognosis. Given that testicular germ cell tumors represent the most common solid tumor in men aged 20–34, radiologists must have familiarity with the clinical utilization and implications of these STMs. This article will review the classical patterns of STM elevation most commonly seen in pure seminomatous and nonseminomatous germ cell tumors while also providing case-based examples highlighting the importance of STM correlation with imaging. The role of STMs in clinical staging and disease surveillance will also be discussed.

62 RADIOLOGY AND NUCLEAR MEDICINE↗
DOE OSTI2022

Damage of prismatic lithium‐ion cells subject to bending: Test, model, and detection

Abstract The mechanically induced internal short circuit (ISC) is one of the major safety concerns of lithium‐ion batteries. Mechanical abuse tests are often performed to evaluate the integrity and safety of lithium‐ion batteries under mechanical loadings. Except for the widely explored compression‐dominated indentation tests, bending is another typical real‐world loading condition that is tension‐dominated. To investigate the mechanical damage and ISC behavior of batteries under bending, we carried out controlled three‐point bending tests in four progressive steps on prismatic battery cells with maximum deflections ranging from 38% to 76% of the cell thickness. None of the tested cells experienced an ISC. We then conducted 3D X‐ray computed tomography (CT) scanning on the bent cells after unloading. X‐ray CT images showed three out of the four tested cells have extensive cracking in the electrode layers at the bottom side (opposite to the loading head). This indicates that cracking does not necessarily lead to an ISC under bending. Electrochemical impedance spectroscopy was also measured on the bent cells and substantial changes were observed. Both the bulk resistance and charge‐transfer resistance increased significantly after bending, which could influence the battery performance and lifespan. We then developed a detailed finite (FE) element model to further investigate the mechanical deformation and failure mechanisms. The FE model successfully predicts the load–displacement response and reproduces the deformation patterns. The findings and the FE model developed in the present study provide useful insights and tools for the battery structure and crash safety design. image

25 ENERGY STORAGE↗
DOE OSTI2022

Electron-Beam Induced Emergence of Mesoscopic Ordering in Layered MnPS 3

Ordered mesoscale structures in 2D materials induced by small misorientations have allowed for a wide variety of electronic, ferroelectric, and quantum phenomena to be explored. Until now, the only mechanism to induce this periodic ordering was via mechanical rotations between the layers, with the periodicity of the resulting moiré pattern being directly related to twist angle. Here we report a fundamentally distinct mechanism for emergence of mesoscopic periodic patterns in multilayer sulfur-containing metal phosphorus trichalcogenide, MnPS3, induced by the electron beam. The formation under the beam of periodic hexagonal patterns with several characteristic length scales, nucleation and transitions between the phases, and local dynamics are demonstrated. The associated mechanisms are attributed to the relative contraction of the layers caused by beam-induced sulfur vacancy formation with subsequent ordering and lattice parameter change. As a result, the plasmonic response of the system is locally altered, suggesting an element of control over plasmon resonances by electron beam patterning. To conclude, we pose that harnessing this phenomenon provides both insight into fundamental physics of quantum materials and enables device applications by enabling controlled periodic potentials on the atomic scale.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2019

X-ray characterization of contact holes for block copolymer lithography

The directed self-assembly (DSA) of block copolymers (BCPs) is a promising low-cost approach to patterning structures with critical dimensions (CDs) which are smaller than can be achieved by traditional photolithography. The CD of contact holes can be reduced by assembling a cylindrical BCP inside a patterned template and utilizing the native size of the cylinder to dictate the reduced dimensions of the hole. This is a particularly promising application of the DSA technique, but in order for this technology to be realized there is a need for three-dimensional metrology of the internal structure of the patterned BCP in order to understand how template properties and processing conditions impact BCP assembly. This is a particularly challenging problem for traditional metrologies owing to the three-dimensional nature of the structure and the buried features. By utilizing small-angle X-ray scattering and changing the angle between the incident beam and sample we can reconstruct the three-dimensional shape profile of the empty template and the residual polymer after self-assembly and removal of one of the phases. A two-dimensional square grid pattern of the holes results in scattering in both in-plane directions, which is simplified by converting to a radial geometry. The shape is then determined by simulating the scattering from a model and iterating that model until the simulated and experimental scattering profiles show a satisfactory match. Samples with two different processing conditions are characterized in order to demonstrate the ability of the technique to evaluate critical features such as residual layer thickness and sidewall height. It was found that the samples had residual layer thicknesses of 15.9 ± 3.2 nm and 4.5 ± 2.2 nm, which were clearly distinguished between the two different DSA processes and in good agreement with focused ion beam scanning transmission electron microscopy (FIBSTEM) observations. The advantage of the X-ray measurements is that FIBSTEM characterizes around ten holes, while there are of the order of 800,000 holes illuminated by the X-ray beam.

Sunday, Daniel F.↗