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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 1,009 records · Page 56
All sourcesNASA NTRSDOE OSTI
NASA NTRS1994

The chemical and radiative effects of the Mount Pinatubo eruption

To clarify the mechanisms leading to effects on stratospheric ozone, time-dependent stratospheric aerosol and gas experiment II (SAGE II) and cryogenic limb array elaton spectrometer (CLAES) aerosol optical extinction data and SAGE II surface area density are used as parameters in a two-dimensional (2-D) zonally averaged chemical radiative transport model. The model was integrated with time from before the eruption through December 1993. The modeled impact on global ozone results from increased rates of heterogeneous reactions on sulfate aerosols and from the increased radiative heating and scattering caused by these aerosols. When the aerosol heating is allowed to modify the temperature distribution, the maximum change calculated in equatorial column ozone is -1.6%. The calculated equatorial temperature change and peak local ozone change in October 1991 are +6K and -4%, respectively. When aerosol heating perturbs the circulation in the model, the maximum change in equatorial column ozone is -6%. Increased heterogeneous processing on sulfate aerosols is calculated to have changed equatorial column ozone in late 1991 by -1.5%. Global column ozone in the model in 1992 and 1993 changed by -2.8% and -2.4%, respectively. The relationship of ozone-controlling processes in the lower stratosphere is altered as well; HO(x) becomes the most important catalytic cycle, followed by ClO(x) and NO(x). This is driven by significant changes in trace gas concentrations. In October 1991, lower stratospheric, equatorial NO(x) decreased by 40%, ClO(x) increased by 60%, and HO(x) increased by 25%. When the effect of heterogeneous chemical processing on sulfate aerosols is combined with aerosol heating, modifying either circulation or temperature, dramatically different ozone fingerprints with time and latitude are predicted. Model-derived changes in the equatorial region in column ozone best represented the observed data when perturbed circulation was combined with heterogeneous chemical effects. However, at high latitudes, the increased ozone production from the strengthening of the mean circulation tends to cancel the heterogeneous reduction of ozone. This is not in good agreement with observed data, especially in 1992 and 1993. When the circulation is held fixed and the temperature allowed to change, and heterogeneous chemical effects are included, the equatorial ozone decrease predicted was too small for 1991. However, the mid- to high-latitude decrease in 1992 and 1993 is in better agreement with observed data.

Kinneson, Douglas E.↗
NASA NTRS2017

Modeling Pilot Pulse Control

In this study, behavioral models are developed that closely reproduced pulsive control response of two pilots from the experimental pool using markedly different control techniques (styles) while conducting a tracking task. An intriguing find was that the pilots appeared to: 1) produce a continuous, internally-generated stick signal that they integrated in time; 2) integrate the actual stick position; and 3) compare the two integrations to issue and cease pulse commands. This suggests that the pilots utilized kinesthetic feedback in order to perceive and integrate stick position, supporting the hypothesis that pilots can access and employ the proprioceptive inner feedback loop proposed by Hess' pilot Structural Model. The Pulse Models used in conjunction with the pilot Structural Model closely recreated the pilot data both in the frequency and time domains during closed-loop simulation. This indicates that for the range of tasks and control styles encountered, the models captured the fundamental mechanisms governing pulsive and control processes. The pilot Pulse Models give important insight for the amount of remnant (stick output uncorrelated with the forcing function) that arises from nonlinear pilot technique, and for the remaining remnant arising from different sources unrelated to tracking control (i.e. neuromuscular tremor, reallocation of cognitive resources, etc.).

workload↗
DOE OSTI2012

Probing electronic transport of individual nanostructures with atomic precision

Accessing individual nanostructures with atomic precision is an important process in the bottom-up fabrication and characterization of electronic nanodevices. Local electrical contacts, namely nanoelectrodes, are often fabricated by using top-down lithography and chemical etching techniques. These processes however lack atomic precision and introduce the possibility of contamination. Here, we review recent reports on the application of a field-induced emission process in the fabrication of local contacts onto individual nanowires and nanotubes with atomic spatial precision. In this method, gold nanoislands are deposited onto nanostructures precisely by using a scanning tunneling microscope tip, which provides a clean and controllable process to ensure both electrically conductive and mechanically reliable contacts. The applicability of the technique has been demonstrated in a wide variety of nanostructures, including silicide atomic wires, carbon nanotubes, and copper nanowires. These local contacts bridge the nanostructures and the transport probes, allowing for the measurements of both electrical transport and scanning tunneling microscopy on the same nanostructures in situ. The direct correlation between electronic and transport properties and atomic structures can be explored on individual nanostructures at the unprecedented atomic level.

77 NANOSCIENCE AND NANOTECHNOLOGY↗
DOE OSTI2012

Friction Stir Spot Welding (FSSW) of Advanced High Strength Steel (AHSS)

Friction stir spot welding (FSSW) is applied to join advanced high strength steels (AHSS): galvannealed dual phase 780 MPa steel (DP780GA), transformation induced plasticity 780 MPa steel (TRIP780), and hot-stamped boron steel (HSBS). A low-cost Si3N4 ceramic tool was developed and used for making welds in this study instead of polycrystalline cubic boron nitride (PCBN) material used in earlier studies. FSSW has the advantages of solid-state, low-temperature process, and the ability of joining dissimilar grade of steels and thicknesses. Two different tool shoulder geometries, concave with smooth surface and convex with spiral pattern, were used in the study. Welds were made by a 2-step displacement control process with weld time of 4, 6, and 10 seconds. Static tensile lap-shear strength achieved 16.4 kN for DP780GA-HSBS and 13.2kN for TRIP780-HSBS, above the spot weld strength requirements by AWS. Nugget pull-out was the failure mode of the joint. The joining mechanism was illustrated from the cross-section micrographs. Microhardness measurement showed hardening in the upper sheet steel (DP780GA or TRIP780) in the weld, but softening of HSBS in the heat-affect zone (HAZ). The study demonstrated the feasibility of making high-strength AHSS spot welds with low-cost tools.

36 MATERIALS SCIENCE↗
NASA NTRS2018

Optimization of Picosecond Laser Parameters for Surface Treatment of Composites Using a Design of Experiments (DOE) Approach

Based on guidelines from the Federal Aviation Administration, research supported by the NASA Advanced Composites Project is investigating methods to improve process control for surface preparation and pre-bond surface characterization on aerospace composite structures. The overall goal is to identify high fidelity, rapid, and reproducible surface treatments and surface characterization methods to reduce the uncertainty associated with the bonding process. The desired outcome is a more reliable bonded airframe structure, and to reduce time to achieve certification. In this work, a design of experiments (DoE) approach was conducted to determine optimum laser ablation conditions using a pulsed laser source with a nominal pulse width of 10 picoseconds. The laser power, frequency, scan speed, and number of passes (1 or 2) were varied within the laser system operating boundaries. Aerospace structural carbon fiber reinforced composites (Torayca® 3900-2/T800H) were laser treated, then characterized for contamination, and finally bonded for mechanical testing. Pre-bond characterization included water contact angle (WCA) using a handheld device, ablation depth measurement using scanning electron microscopy (SEM), and silicone contamination measurement using laser induced breakdown spectroscopy (LIBS). In order to accommodate the large number of specimens in the DoE, a rapid-screening, double cantilever beam (DCB) test specimen configuration was devised based on modifications to ASTM D5528. Specimens were tested to assess the failure modes observed under the various laser surface treatment parameters. The models obtained from this DoE indicated that results were most sensitive to variation in the average laser power. Excellent bond performance was observed with nearly 100% cohesive failure for a wide range of laser parameters. Below about 200 mW, adhesive failure was observed because contamination was left on the surface. For laser powers greater than about 600 mW, large amounts of fiber were exposed, and the failure mode was predominately fiber tear.

Palmieri, Frank L.↗
NASA NTRS1993

Using Manufacturing Message Specification for Monitor and Control at Venus

The flexibility and robustness of a monitor and control (M&C) system are a direct result of the underlying inter-processor communications architecture. A new architecture for M&C at the Deep Space Communications Complexes (DSCCs) has been developed based on the Manufacturing Message Specification (MMS) process control standard of the Open System Interconnection (OSI) suite of protocols. This architecture has been tested both in a laboratory environment and under operational conditions at the Deep Space Network (DSN) experimental Venus station (DSS-13). The Venus experience in the application of OSI standards to support M&C has been extremely successful. MMS meets the functional needs of the station and provides a level of flexibility and responsiveness previously unknown in that environment...

Stockett, Michael H.↗
NASA NTRS2018

Southeast Atmosphere Studies: Learning from Model-Observation Syntheses

Concentrations of atmospheric trace species in the United States have changed dramatically over the past several decades in response to pollution control strategies, shifts in domestic energy policy and economics, and economic development (and resulting emission changes) elsewhere in the world. Reliable projections of the future atmosphere require models to not only accurately describe current atmospheric concentrations, but to do so by representing chemical, physical and biological processes with conceptual and quantitative fidelity. Only through incorporation of the processes controlling emissions and chemical mechanisms that represent the key transformations among reactive molecules can models reliably project the impacts of future policy, energy and climate scenarios. Efforts to properly identify and implement the fundamental and controlling mechanisms in atmospheric models benefit from intensive observation periods, during which collocated measurements of diverse, speciated chemicals in both the gas and condensed phases are obtained. The Southeast Atmosphere Studies (SAS, including SENEX, SOAS, NOMADSS and SEAC4RS) conducted during the summer of 2013 provided an unprecedented opportunity for the atmospheric modeling community to come together to evaluate, diagnose and improve the representation of fundamental climate and air quality processes in models of varying temporal and spatial scales. This paper is aimed at discussing progress in evaluating, diagnosing and improving air quality and climate modeling using comparisons to SAS observations as a guide to thinking about improvements to mechanisms and parameterizations in models. The effort focused primarily on model representation of fundamental atmospheric processes that are essential to the formation of ozone, secondary organic aerosol (SOA) and other trace species in the troposphere, with the ultimate goal of understanding the radiative impacts of these species in the southeast and elsewhere. Here we address questions surrounding four key themes: gas-phase chemistry, aerosol chemistry, regional climate and chemistry interactions, and natural and anthropogenic emissions. We expect this review to serve as a guidance for future modeling efforts.

atmospheric chemistry↗
DOE OSTI2012

Agent-based Cyber Control Strategy Design for Resilient Control Systems: Concepts, Architecture and Methodologies

The implementation of automated regulatory control has been around since the middle of the last century through analog means. It has allowed engineers to operate the plant more consistently by focusing on overall operations and settings instead of individual monitoring of local instruments (inside and outside of a control room). A similar approach is proposed for cyber security, where current border-protection designs have been inherited from information technology developments that lack consideration of the high-reliability, high consequence nature of industrial control systems. Instead of an independent development, however, an integrated approach is taken to develop a holistic understanding of performance. This performance takes shape inside a multiagent design, which provides a notional context to model highly decentralized and complex industrial process control systems, the nervous system of critical infrastructure. The resulting strategy will provide a framework for researching solutions to security and unrecognized interdependency concerns with industrial control systems.

47 OTHER INSTRUMENTATION↗
DOE OSTI2012

Using a Research Simulator for Validating Control Room Modernization Concepts

The Light Water Reactor Sustainability Program is a research, development, and deployment program sponsored by the United States Department of Energy. The program is operated in close collaboration with industry research and development programs to provide the technical foundations for licensing and managing the long-term, safe, and economical operation of nuclear power plants that are currently in operation. Advanced instrumentation and control (I&C) technologies are needed to support the continued safe and reliable production of power from nuclear energy systems during sustained periods of operation up to and beyond their expected licensed lifetime. This requires that new capabilities to achieve process control be developed and eventually implemented in existing nuclear control rooms. It also requires that approaches be developed and proven to achieve sustainability of I&C systems throughout the period of extended operation. Idaho National Laboratory (INL) is working closely with nuclear utilities to develop technologies and solutions to help ensure the safe life extension of current reactors. One of the main areas of focus is control room modernization. Current analog control rooms are growing obsolete, and it is difficult for utilities to maintain them. Using its reconfigurable control room simulator adapted from a training simulator, INL serves as a neutral test bed for implementing new control room system technologies and assisting in control room modernization efforts across.

21 SPECIFIC NUCLEAR REACTORS AND ASSOCIATED PLANTS↗
DOE OSTI2023

Thermodynamic and Kinetic Barriers Limiting Solid-State Reactions Resolved through In Situ Synchrotron Studies of Lithium Halide Salts

Although halide salts such as LiCl and LiBr are routinely used as a source of Li ions during ion exchange reactions, a detailed understanding of the processes controlling the rates of these reactions is presently lacking. Recently, it has been discovered that the rate limiting barriers for ion exchange are commonly associated with these salts rather than the ceramic target of ion exchange, making it important to quantitatively understand of salt processes. Here it is demonstrated that in situ synchrotron studies of ion exchange reactions can be used to precisely quantify the thermodynamic activation energies associated with these solid state reactions in a manner that can be directly compared with predictions from density functional theory (DFT). While the temperature dependence of the LiCl reaction rate is found to be set by a barrier associated with ion hopping, it was discovered that for LiBr it is also affected by the defect formation energy – an energy found to be substantially lower than predicted by DFT. Furthermore, it is shown that when reaction rates for different relative amounts of reactants are varied, it is possible to identify the rate-limiting reagent and to elucidate an overall scaling relationship that controls the concentration-dependence of the reaction rate. Also, it is demonstrated that global fits across doped and undoped salts can be used to probe both intrinsic and extrinsic vacancy concentrations. This improved understanding of ion exchange mechanisms can be used to accelerate ion exchange reaction rates by orders of magnitude. In conclusion, the techniques demonstrated here can be broadly applied to probe the kinetics and thermodynamics of solid state reactions.

36 MATERIALS SCIENCE↗
DOE OSTI2014

Measurements of 222 Rn, 220 Rn, and CO 2 Emissions in Natural CO 2 Fields in Wyoming: MVA Techniques for Determining Gas Transport and Caprock Integrity

An integrated field-laboratory program evaluated the use of radon and CO 2 flux measurements to constrain source and timescale of CO 2 fluxes in environments proximate to CO 2 storage reservoirs. By understanding the type and depth of the gas source, the integrity of a CO 2 storage reservoir can be assessed and monitored. The concept is based on correlations of radon and CO 2 fluxes observed in volcanic systems. This fundamental research is designed to advance the science of Monitoring, Verification, and Accounting (MVA) and to address the Carbon Storage Program goal of developing and validating technologies to ensure 99 percent storage performance. Graduate and undergraduate students conducted the research under the guidance of the Principal Investigators; in doing so they were provided with training opportunities in skills required for implementing and deploying CCS technologies. Although a final method or “tool” was not developed, significant progress was made. The field program identified issues with measuring radon in environments rich in CO 2 . Laboratory experiments determined a correction factor to apply to radon measurements made in CO 2 -bearing environments. The field program also identified issues with radon and CO 2 -flux measurements in soil gases at a natural CO 2 analog. A systematic survey of radon and CO 2 flux in soil gases at the LaBarge CO 2 Field in Southwest Wyoming indicates that measurements of 222 Rn (radon), 220 Rn (thoron), and CO 2 flux may not be a robust method for monitoring the integrity of a CO 2 storage reservoir. The field program was also not able to correlate radon and CO 2 flux in the CO 2 -charged springs of the Thermopolis hydrothermal system. However, this part of the program helped to motivate the aforementioned laboratory experiments that determined correction factors for measuring radon in CO 2 -rich environments. A graduate student earned a Master of Science degree for this part of the field program; she is currently employed with a geologic consulting company. Measurement of radon in springs has improved significantly since the field program first began; however, in situ measurement of 222 Rn and particularly 220 Rn in springs is problematic. Future refinements include simultaneous salinity measurements and systematic corrections, or adjustments to the partition coefficient as needed for more accurate radon concentration determination. A graduate student earned a Master of Science degree for this part of the field program; he is currently employed with a geologic consulting company. Both graduate students are poised to begin work in a CCS technology area. Laboratory experiments evaluated important process-level fundamentals that effect measurements of radon and CO 2 . Laboratory tests established that fine-grained source minerals yield higher radon emissivity compared to coarser-sized source minerals; subtleties in the dataset suggest that grain size alone is not fully representative of all the processes controlling the ability of radon to escape its mineral host. Emissivity for both 222 Rn and 220Rn increases linearly with temperature due to reaction of rocks with water, consistent with faster diffusion and enhanced mineral dissolution at higher temperatures. The presence of CO 2 changes the relative importance of the factors that control release of radon. Emissivity for both 222 Rn and 220 Rn in CO 2 -bearing experiments is greater at all temperatures compared to the experiments without CO 2 , but emissivity does not increase as a simple function of temperature. Governing processes may include a balance between enhanced dissolution versus carbonate mineral formation in CO 2 -rich waters.

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗
DOE OSTI2021

SWIFT - Shaped-Waveform Interrogation of Fluids Technique

Researchers at Los Alamos have developed the Shaped-Waveform Interrogation of Fluids Technique (SWIFT), a technology enabling unprecedented process control capability. This technology provides important composition, flow rate, and pipe thickness measurements in real-time, at an extremely low cost and maintenance cycle. By utilizing a specialized shaped-waveform, as well as state-of-the-art signal processing, this information can be gathered without any frequency-domain signal processing, allowing for simplified electronics compared to nearly any other meter on the market. Since this technology is in expensive and non-invasive, with the capability of measuring liquids in both flow pipes and sealed containers, it is perfect for several industrial applications in the oil and gas, beverage, chemical, and pharmaceutical spaces. We are seeking a commercialization partner to license the technology or fund us through a Cooperative Research and Development Agreement (CRADA) to a further develop a usable product for commercial purposes.

47 OTHER INSTRUMENTATION↗
NASA NTRS1985

Expert systems for Space Station automation

The expert systems required for automating key functions of the Manned Space Station (MSS) are explored. It is necessary that the expert systems developed be flexible, degrade gracefully in the case of a failure, and be able to work with incomplete data. The AI systems will have to perform interpretation and diagnosis, design, prediction and induction, and monitoring and control functions. Both quantitative and qualitative reasoning capabilities need improvements, as do automatic verification techniques, explanation and learning capabilities, and the use of metaknowledge, i. e., knowledge about the knowledge contained in the knowledge base. Information retrieval, fault isolation and manufacturing process control demonstrations are needed to validate expert systems for the MSS.

Georgeff, M. P.↗
DOE OSTI2023

Planetary Boundary Layer Height (PBLH) over SGP from 1998 to 2023

PBLH is a critical parameter influencing weather phenomena, air quality, and various meteorological processes. However, accurately retrieving PBLH has been a challenging task due to limitations such as coarse temporal resolution and measurement drift in traditional radiosonde observations. To address these limitations, we have devised a lidar-based methodology that capitalizes on a newly developed algorithm for PBLH retrieval. This algorithm demonstrates enhanced capabilities in capturing diurnal fluctuations in PBLH compared to existing lidar-based methods (Su et al. 2020). In addition, we have refined this algorithm specifically for PBLH retrieval under cloudy conditions through a novel scheme (Su et al. 2022). To ensure data reliability, a quality-control process has been implemented to filter out questionable data points. Accompanying the data set is a quality-control flag for ease of reference. It should be noted that we have assimilated all available radiosonde observations to provide a more robust estimate of PBLH, making the data set valuable for a variety of related studies.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2025

Controlled electrochemical nutrient delivery to enhance marine primary productivity

Oceanic photosynthesis contributes to approximately half of the Earth’s net annual primary productivity. Marine photosynthetic productivity has a high degree of heterogeneity due to spatial and temporal co-limitations of light, temperature, and/or nutrients. Across coastal, near-shore, and open ocean regions, insufficient concentrations of key nutrients (e.g., N, P, Fe) can limit primary productivity. Although studies have shown a significant increase in primary productivity with the addition of low doses of trace nutrients, a sustainable approach to reliably deliver and maintain low doses of nutrients and ensure their bioavailability, remains a challenge. Chemical nutrient addition has relied on the use of chelating agents to ensure nutrient bioavailability, but synthetic chelators are persistent environmental pollutants. In this study, we demonstrate for the first time the use of a controlled electrochemical nutrient delivery (CEND) approach to accelerate the growth of phytoplankton without the need for such chelators. Our study uses commercial stainless-steel electrodes to deliver low concentrations of iron to enhance growth rates in the microalga Picochlorum celeri TG2. To demonstrate the process control offered by the CEND method, we evaluate iron delivery as a function of pulse time, pulse frequency, and rest time between pulses. Our data show that at the same total Fe dose of 163 ppb, electrochemical iron delivery can achieve 9.54 ± 0.58 mg biomass/µg Fe, which is comparable to 9.14 ± 0.17 mg biomass/µg Fe achieved with chemical iron additions that include the synthetic chelating agent ethylenediaminetetraacetic acid (EDTA). Further, when different total iron doses (163 ppb, 325 ppb, and 650 ppb) were delivered over 72 h using CEND, biomass yield per iron dose was higher at lower doses: 9.54 ± 0.58 mg biomass/µg Fe at 163 ppb vs. 4.32 ± 0.32 mg biomass/µg Fe at 650 ppb. This highlights the benefits of CEND in delivering frequent and low doses of nutrients for improved process efficiency. Preliminary assessments show both lower cost and reduced greenhouse gas emissions from electrochemical over chemical iron additions with EDTA. The CEND approach opens new pathways to enhance marine primary productivity, without the unintended environmental impacts of synthetic chelators.

analytical chemistry↗
DOE OSTI2025

Controls Status for Fermilab’s PIP-II Project

Testing of Cryomodule first articles at PIP-II's on-site Cryomodule Test Facility (CMTF), where EPICS based controls are already being used, has been invaluable to the project. In addition to validating hardware and controls components, it has provided opportunities to build buy-in and illicit meaningful feedback early-on. A device naming convention has also been significantly refined with an internal working group and the PIP-II integration team. Compressed air and Process Control Water (PCW) systems have been installed, and operations has been engaged in Phoebus display development in preparation for a transition to operations for these systems by 2026. Cryoplant hardware has been put in place, and collaboration between controls and PIP-IIs cryo group for IOC and display development is well underway for commissioning of cryoplant systems to begin early 2026. The project has also received beneficial occupancy of the High-Bay Building in October 2025, keeping us on schedule for Warm Front End commissioning to begin in 2027.

Crisp, Dan [Fermilab]↗
NASA NTRS1993

Freeze-Drying Makes Improved IPN And Semi-IPN Polymers

Novel process developed for production of interpenetrating polymer networks (IPN's) or semi-IPN's with greater fracture toughness and resistance to microcracks. Process controls degree of phase separation in IPN's. In experiment, IPN's and semi-IPN's formed by dissolving constituents in another common solvent in traditional method. Resins and composite materials produced were tested for both traditional and freeze-drying processes. Glass-transition temperatures and data from dynamic mechanical tests of freeze-dried IPN's and semi-IPN's demonstrated freeze-drying process provided much improved IPN's and semi-IPN's.

Pater, Ruth H.↗
NASA NTRS2003

A Reactive-Ion Etch for Patterning Piezoelectric Thin Film

Reactive-ion etching (RIE) under conditions described below has been found to be a suitable means for patterning piezoelectric thin films made from such materials as PbZr(1-x)Ti(x)O3 or Ba(x)Sr(1.x)TiO3. In the original application for which this particular RIE process was developed, PbZr(1-x)Ti(x)O3 films 0.5 microns thick are to be sandwiched between Pt electrode layers 0.1 microns thick and Ir electrode layers 0.1 microns thick to form piezoelectric capacitor structures. Such structures are typical of piezoelectric actuators in advanced microelectromechanical systems now under development or planned to be developed in the near future. RIE of PbZr(1-x)Ti(x)O3 is usually considered to involve two major subprocesses: an ion-assisted- etching reaction, and a sputtering subprocess that removes reactive byproducts. RIE is favored over other etching techniques because it offers a potential for a high degree of anisotropy, high-resolution pattern definition, and good process control. However, conventional RIE is not ideal for patterning PbZr(1-x)Ti(x)O3 films at a thickness as great as that in the original intended application. In order to realize the potential benefits mentioned above, it is necessary to optimize process conditions . in particular, the composition of the etching gas and the values of such other process parameters as radio-frequency power, gas pressure, gas-flow rate, and duration of the process. Guidelines for determining optimum conditions can be obtained from experimental determination of etch rates as functions of these parameters. Etch-gas mixtures of BCl3 and Cl2, some also including Ar, have been found to offer a high degree of selectivity as needed for patterning of PbZr(1-x)Ti(x)O3 films on top of Ir electrode layers in thin-film capacitor structures. The selectivity is characterized by a ratio of approx.10:1 (rate of etching PbZr(1-x)Ti(x)O3 divided by rate of etching Ir and IrO(x)). At the time of reporting the information for this article, several experiments on RIE in BCl3 and Cl2 (and sometimes Ar) had demonstrated the 10:1 selectivity ratio, and further experiments to enhance understanding and obtain further guidance for optimizing process conditions were planned.

Yang, Eui-Hyeok↗