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At least 1,027 records · Page 57

Interfacial defect reduction enhances universal power law response in Mo–SiNx granular metals

Granular metals (GMs), consisting of metal nanoparticles separated by an insulating matrix, frequently serve as a platform for fundamental electron transport studies. However, few technologically mature devices incorporating GMs have been realized, in large part because intrinsic defects (e.g., electron trapping sites and metal/insulator interfacial defects) frequently impede electron transport, particularly in GMs that do not contain noble metals. Here, we demonstrate that such defects can be minimized in molybdenum–silicon nitride (Mo–SiN x ) GMs via optimization of the sputter deposition atmosphere. For Mo–SiN x GMs deposited in a mixed Ar/N 2 environment, x-ray photoemission spectroscopy shows a 40%–60% reduction of interfacial Mo-silicide defects compared to Mo–SiN x GMs sputtered in a pure Ar environment. Electron transport measurements confirm the reduced defect density; the dc conductivity improved (decreased) by 10 4 –10 5 and the activation energy for variable-range hopping increased 10×. Since GMs are disordered materials, the GM nanostructure should, theoretically, support a universal power law (UPL) response; in practice, that response is generally overwhelmed by resistive (defective) transport. Here, the defect-minimized Mo–SiN x GMs display a superlinear UPL response, which we quantify as the ratio of the conductivity at 1 MHz to that at dc, Δσ ω ⁠. Remarkably, these GMs display a Δσ ω up to 10 7 , a three-orders-of-magnitude improved response than previously reported for GMs. By enabling high-performance electric transport with a non-noble metal GM, this work represents an important step toward both new fundamental UPL research and scalable, mature GM device applications.

36 MATERIALS SCIENCE↗

Structural characterization of highly alloyed (Al,Gd)N thin films

Highly alloyed (Al,Gd)N is of potential interest in a variety of applications, including neutron detection and in devices such as non-volatile memory. Gd has been shown to have very low equilibrium solubility in AlN at room temperature; however, non-equilibrium deposition techniques such as sputtering are able to deposit thin films, which incorporate large amounts of Gd. Here, we characterize a highly-alloyed (Al,Gd)N combinatorial thin film grown by RF sputtering on a GaN substrate, looking for any evidence of chemical or phase segregation or structural disorder in the films. Compositions with between 13% and 32% Gd (on a cation basis) were studied. No evidence was found for chemical or phase segregation in any studied composition. Higher degrees of Gd incorporation led to greater structural disorder in the film and a tendency toward amorphization; however, electron diffraction shows that the film does not become fully amorphous at any of the studied compositions, instead retaining textured local order even at 32% Gd. Electron energy loss spectra suggest that the material retains a locally wurtzite-like tetrahedral bonding environment at all studied compositions.

36 MATERIALS SCIENCE↗

Suppression of shear banding in high-strength Cu/Mo nanocomposites with hierarchical bicontinuous intertwined structures

The microstructures and mechanical behavior of high-temperature co-sputtered Cu/Mo nanocomposites were investigated and compared with Cu/Mo multilayers. The co-sputtered nanocomposites present hierarchical architectures with bicontinuous intertwined Cu/Mo phases, the feature size of which can be tuned from 35 to 3 nm by changing the deposition parameters. After indentation, shear bands were found in the multilayers but not in the hierarchical nanocomposites. In situ nanocompression tests in Transmission electron microscopy showed that the hierarchical nanocomposite containing fine-length-scale intertwined Cu/Mo phases has very high strength. Finally, the hierarchical structure is proposed to play an important role in suppressing shear band formation.

36 MATERIALS SCIENCE↗

Design and fabrication of a differential scanning nanocalorimeter

This paper describes the design, fabrication, and characterization of a differential scanning nanocalorimeter that significantly reduces the sample volume to microliters and can potentially improve the temperature sensitivity to 10 µK. The nanocalorimeter consists of a polymeric freestanding membrane, four high-sensitive low-noise thermistors based on silicon carbide (SiC), and a platinum heater and temperature sensor. With the integrated heater and sensors, temperature scanning and power compensation can be achieved for calorimetric measurement. Temperature sensing SiC film was prepared by using sintered SiC target and DC magnetron sputtering under different gas pressures and sputtering power. The SiC sensing material is characterized through the measurement of current–voltage curves and noise levels. The thermal performance of a fabricated nanocalorimeter is studied in simulation and experiment. The experiment results show the device has excellent thermal isolation to hold thermal energy. As a result, the noise test together with the simulation show the device is promising for micro 10 µK temperature sensitivity and nanowatt resolution which will lead to low-volume ultra-sensitive nanocalorimetry for biological processes, such as protein folding and ligand binding.

42 ENGINEERING↗

Fabrication of Freestanding Metallic Ni-Mo-W Microcantilever Beams With High Dimensional Stability

Recent studies have elucidated a promising balance of physical and mechanical properties of sputter deposited nickel-molybdenum-tungsten (Ni-Mo-W) films that have a unique nanotwinned microstructure and promising potential for use in high temperature microelectromechanical systems (MEMS). Here, the current study was undertaken to establish the feasibility of making nanotwinned Ni-Mo-W microcantilevers with standard micro- fabrication processing, to assess their dimensional stability, and to demonstrate the possibility of using nanotwinned Ni-Mo-W in metal MEMS devices. Deposition of Ni-Mo-W films in commercial sputtering chambers revealed a wide processing window for the formation of the requisite nanotwinned microstructure. Conventional photolithography and etchants were employed to shape blanket Ni-Mo-W films into freestanding microcantilever beams. Monitoring microcantilever deflections via interferometry provided a direct measure of residual stresses and overall dimensional stability. Heat treatments of 200° C and 400° C were used to mimic wafer bonding temperatures. At 400°C, microcantilevers exhibited modest stress relaxation, yielding beam deflection profiles on the nanometer scale and portending dimensional stability and control for future metal MEMS devices.

36 MATERIALS SCIENCE↗

Deposition and characterization of α-Fe 2 O 3 /Pd thin films for neutron reflectometry studies

Here, we report deposition of hematite/Pd thin films on silicon wafers via radio frequency (RF) magnetron sputtering and subsequent characterization for future in situ neutron reflectometry studies. Following deposition, the hematite/Pd thin films were characterized as prepared and after annealing in air for 2h at 400, 500, and 600 °C, respectively. Raman spectroscopy, grazing incidence x-ray diffraction, and neutron reflectometry (NR) were used to characterize the structure and chemical compositions of the thin films. The results indicate that pure α-Fe 2 O 3 (hematite) films were produced, free from other iron oxide phases and impurities. NR data reveal that one intermediate layer between the Pd layer and the hematite layer was formed during sputtering deposition processes. The fitted scattering length density (SLD) of the as-deposited hematite layer is 70% of the theoretical SLD value, indicating that the grains are loosely packed in the RF-deposited hematite films. After annealing at elevated temperatures, the hematite films show increased SLD values but remain comparable to that of preannealed.

36 MATERIALS SCIENCE↗

Rapid Preparation of Large-Area Densely Packed Plasmonic Hot-Spots for Reliable Sers Sensing

A facile, efficient and time-saving strategy is proposed to obtain large-area and reliable surface-enhanced Raman scattering (SERS) substrates via artificial heat-treatment of Au nanoparticles or ultrathin Au films sputtered on the silica substrates. Excellent Raman enhancements with the detection limitation down to 10{sup –9} mol/L are obtained due to the highly-dense plasmonic hot-spots and strong plasmons near-field coupling. Decreased intensity of Raman peaks with the increased sputtering time of Au nanoparticles or ultrathin films mainly originates from the excited and hybridized coupling of multiple surface plasmons. The simple fabrication strategy and superior performance make these substrates promising candidates for the development of inexpensive and reliable SERS substrates.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

Studying the Molecular Mechanisms of Interaction of Nanoaerosol Particles with a Model Membrane

An X-ray study of the interaction of Langmuir monolayers with nanoparticles under the conditions when nanoparticles arrive at the monolayer from the side of the air medium has been performed for the first time. Measurements by the X-ray standing-wave method and two-dimensional diffraction have made it possible to investigate the transport of nanoaerosol particles through a lipid monolayer and observe the structural changes occurring in it. Nanoaerosol particles were formed by electrohydrodynamic sputtering of desalted solutions of ferritin. It was shown that nanoaerosol particles pass through the monolayer without disrupting the two-dimensional packing of lipid molecules. The ferritin molecules penetrating the aqueous subphase after sputtering are found to be adsorbed under the monolayer.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Specific features of the ferroelectric state in two-layer barium strontium titanate-based heterostructures

The structural properties of one- and two-layer heterostructures based on the barium–strontium titanate of various compositions deposited by the Frank–Van der Merve on a magnesium oxide substrate have been studied. The heterostructures have been prepared by the rf sputtering of the stoichiometric ceramic targets in a Plazma 50 SE deposition system. The principal difference of this method of deposition from known analogs is that the growth of single-crystal films occurs from a disperse oxide phase formed in the plasma of a high-current rf discharge during the ceramic target sputtering at the cluster level. The peculiarities of the manifestation of the ferroelectric state in the two-layer heterostructures when changing the sequence order of the films with various compositions of barium–strontium titanate.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Electrical Conductivity and Barrier Properties of Lithium Niobate Thin Films

The thin-film structures made of LiNbO{sub 3} and obtained via laser ablation and magnetron sputtering are studied with volt-farad and volt-ampere characteristics. A potential barrier on the Si–LiNbO{sub 3} interface was found for both types of the films with the capacitance-voltage characteristics. The current-voltage characteristics showed that there are several conduction mechanisms in the structures studied. The Poole–Frenkel effect and the currents limited by a space charge mainly contribute to the electrical conductivity in the LiNbO{sub 3} film produced with the laser ablation method. The currents limited by a space charge contribute to the main mechanism in the film heterostructure obtained with the magnetron sputtering method.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Structural and Magnetic Characteristics of Nanogranular Co–Al{sub 2}O{sub 3} Single- and Multilayer Films Formed by the Solid-State Synthesis

The results of structural and magnetic investigations of nanogranular Co–Al{sub 2}O{sub 3} films formed from Co{sub 3}O{sub 4}/Al thin-film layered structures upon vacuum annealing are reported. The Co{sub 3}O{sub 4}/Al films have been obtained by sequential reactive magnetron sputtering of a metallic cobalt target in a medium consisting of the Ar + O{sub 2} gas mixture and magnetron sputtering of an aluminum target in the pure argon atmosphere. It is shown that such a technique makes it possible to obtain nanogranular Co–Al{sub 2}O{sub 3} single- and multilayer thin films with a well-controlled size of magnetic grains and their distribution over the film thickness.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

Sensitivity of WallDYN material migration modeling to uncertainties in mixed-material surface binding energies

The WallDYN package has recently been applied to a number of tokamaks to self-consistently modelthe evolution of mixed-material plasma facing surfaces. A key component of the WallDYN model is theconcentration-dependent surface sputtering rate, calculated using SDTRIM.SP. This modeled sputteringrate is strongly influenced by the surface binding energies (SBEs) of the constituent materials, whichare well known for pure elements but often are poorly constrained for mixed-materials. This work examinesthe sensitivity of WallDYN surface evolution calculations to different models for mixed-materialSBEs, focusing on the carbon/lithium/oxygen/deuterium system present in NSTX. A realistic plasma background is reconstructed from a high density, H-mode NSTX discharge, featuring an attached outer strikepoint with local density and temperature of 4e20 m^-3 and 4 eV, respectively. It is found that variousmixed-material SBE models lead to significant qualitative and quantitative changes in the surface evolutionprofile at the outer divertor, with the highest leverage parameter being the C-Li binding model.Uncertainties of order 50%, appearing on time scales relevant to tokamak experiments, highlight the importance of choosing an appropriate mixed-material sputtering representation when modeling the surfaceevolution of plasma facing components. These results are generalized to other fusion-relevant materialswith different ranges of SBEs.

Carbon↗

Quantum-Classical Science for the Plasma-Material Interface in NSTXU (Final Technical Report)

Plasma facing surfaces (PFS) have a profound influence on plasma performance and choice of material for PFSs is a burning issue for tokamak reactors. Using lithium wall conditioning in NSTX has resulted in a beneficial influence on plasma behavior including control of hydrogen recycling and improvements in energy confinement, longer confinement times, edge density control, and the elimination of Edge Localized Modes. A major challenge for the NSTX-U (increased power flux, increased campaign time) as well as for other magnetic fusion devices is to extend high-performance plasmas for very long durations, and to integrate this high performance with plasma facing components (PFCs) that can withstand very high heat and particle fluxes while maintaining structural integrity with minimal retention of fusion fuel. This project directly contributed to filling up the knowledge gaps and data for the dynamics of the plasma-facing interfaces in the NSTX-U at nano and nano-to-micro scales. This was achieved by both deciphering the poorly understood nanoscale phenomenology of plasma-surface interactions and providing the connection and comparison with the experiments which provide understanding at the mesoscopic scales. We modelled the dynamic response and evolution of a mixed material surfaces (D, Li, C, B, O) to bombardment by plasma particles, and investigated microstructure changes, erosion, surface chemistry, deuterium implantation and permeation. The main objectives of the project are i) a comparison of Li and B effects when deposited on carbon, and ii) the role of oxygen and other impurities (e.g. carbon, boron) in the lithium performance. In addition to predicting and understanding the phenomenology of the processes, the project achieved deliverables on the i) plasma induced erosion rates of PFCs (outer wall, divertor, etc.), including chemical and physical sputtering yields at various temperatures (300-700K), ii) deuterium uptake/recycling rates, and iii) accurate probability rates for the processes and reactions in i-ii which were used to understand the experimental results of the J.P. Allain and B. Koel NSTX-U projects. Lithium was a distinctive focus of the project. It easily charges in contact with other fusion material atoms, giving partially or fully its external electron cloud to other atoms in its vicinity and polarizing the mixed material. Our research strategy used experimentally validated multiscale theory applied to the large, multicomponent material surface systems. With the use of US supercomputing facilities we simulated evolution of atomic charges, chemistry, retention of deuterium, sputtering and morphology by introducing the corrections to the classical molecular dynamics, like are electronegativity equalization method (EEM) and quantum-classical molecular dynamics (QCMD). The goal was to understand and quantify the dynamics of the creation and evolution of the plasma-material interface under irradiation by atoms and molecules at boronized carbon, lithiated carbon, and boronized-lithiated carbon for both solid and self-healing liquid-metal divertor.

36 MATERIALS SCIENCE↗

Ion Gun for In Situ Resource Identification

Identification of surface resources localized to landing sites is a critical need for future lunar exploration. Crews will need small, lightweight instrumentation that can be easily carried to identify potential resources in situ without extraction of samples for testing. This project aimed to conduct a proof-of-concept of using ion sputtering coupled with mass spectroscopy to provide in situ composition analysis of surface materials with no need to collect and/or return samples. Ion beam sputtering is a mature ground-based technique that ablates material surfaces for analysis.

ion sputtering↗

Effects of the Chodura sheath on tungsten ionization and emission in tokamak divertors

The decay of the electric potential in the sheath region in tokamak divertors occurs on a scale length on the order of the main ion gyroradius (Chodura sheath) due to magnetic fields lines intersecting the divertor plates at grazing incidence. As a consequence, high-Z impurities like tungsten ionize within the sheath region in attached plasma conditions. The modification of the electron distribution in the sheath region must thus be taken into account to accurately model ionization and emission of impurities within the sheath region. To that end, an analytical expression of the distribution of the vertical ionization path for impurities sputtered from divertor plasma-facing components is derived. This expression is then used to estimate the fraction of neutral impurities ionizing within the sheath and the average vertical ionization path, and to derive an effective SXB (the number of ionizations per emitted photon) coefficient which includes the effects of the variation of the electron distribution in the sheath region. These results are applied to tungsten impurities sputtered from divertor plates. It is shown that the SXB coefficient for neutral tungsten is significantly reduced in high-density attached divertor plasma conditions (n e ≳ 5 × 10 13 cm -3 ) because of the ionization of neutral tungsten well within the sheath region.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Morphology, microstructure, and doping behaviour: A comparison between different deposition methods for poly-Si/SiO x passivating contacts

In this work, we study how crystallographic structures, optoelectronic properties, and nanoscale surface morphologies of ex situ phosphorus-doped polycrystalline silicon (poly-Si)/SiO x passivating contacts, formed by different deposition methods (sputtering, plasma-enhanced chemical vapour deposition [PECVD], and low-pressure chemical vapour deposition [LPCVD]), are investigated and compared. Across all these deposition technologies, we noted the same trend: higher diffusion temperatures yield films that are more crystalline but that have rougher surface morphologies due to bigger surface crystal grains. Also, the recrystallization process of the as-deposited Si films starts from the SiO x interface, rather than from the film surface and bulk. However, there are some distinct differences among these technologies. First, the LPCVD method yields the lowest deposition rate, roughest surfaces, and smallest degree of crystallinity on finished poly-Si films. In contrast, the PECVD method has the highest deposition rate and smoothest surfaces for both as-deposited Si and annealed poly-Si films. Second, as-deposited sputtered and PECVD Si films contain only an amorphous phase, whereas as-deposited LPCVD films already has some crystalline phase. Third, the LPCVD phosphorus in-diffusion into the substrate depends strongly on the initial film thickness, whereas for the other two methods, it is weakly dependent on thickness. Finally, the passivation quality of every poly-Si film type has different responses to the film thickness and diffusion temperature, suggesting that the ex situ doping optimization should be performed independently.

14 SOLAR ENERGY↗

Multilayered microstructures with shape memory effects for vertical deployment

This paper presents a fabrication and characterization of multilayered microstructures with shape memory effects enabling large vertical deployment under electro-thermal actuation. Our previous research demonstrated vertical deployment of such microstructures by the effect of thermal mismatch. Development of equiatomic NiTi layers in the multilayered microstructure is investigated further for shape memory effects. Multilayered microstructures are built by sputtered NiTi layers and a lift-off process. Negative photoresist ma-N1420 enables clean lift-off of 500 nm thick NiTi layers by forming a significant undercut profile after development. The parametric study on co-sputter powers for Ti and Ni 50 Ti 50 targets suggests that 100 W RF on Ti target and 200 W DC on Ni 50 Ti 50 target can deposit Ni 49.62 Ti 50.38 layers. X-Ray Diffraction (XRD) and Atomic Force Microscopy (AFM) were used to study the crystal structures and surface topography of NiTi layers. XRD results of post-annealed Ni 49.62 Ti 50.38 layers show coexistence of austenite and martensitic phases at room temperature, suggesting that the transformation temperature of such NiTi layers should be approximate 20 °C. The surface topography of Ni 49.62 Ti 50.38 layers reveals substantial increase of surface roughness at ambient conditions after the annealing. Experimental verification of the multilayered microstructure for vertical deployment was carried out by Signatone Probe Station and Dual Scanning Electron Microscope/Focused Ion Beam (SEM/FIB) system. Finally, a vertical deployment of the two-dimensional (2D) multilayered microstructures for three-dimensional (3D) can be detected by applying a constant voltage of 0.04 V, and the expected 3D deployment displacement is enlarged from 2 μm to 10 μm by introducing the shape memory effect.

42 ENGINEERING↗

Current divisions and distributed Joule heating of two-dimensional grid microstructures

This work presents current divisions and distributed Joule heating of two-dimensional (2D) grid microstructures. The current divisions on 2×2, 4×4, and n×n grid microstructures made of the same conductive beams are analyzed theoretically, and Kirchhoff's voltage law (KVL) and Kirchhoff's current law (KCL) are employed to determine the current division factors and directions under different voltage input cases. The equivalent resistances and Joule heating power are therefore derived. 2D 2×2 grid microstructures made of gold (60 nm in thickness) and those made of near-equiatomic NiTi (850 nm in thickness) for various independent voltage input cases are fabricated by electron-beam evaporation and co-sputtering, respectively. The equivalent resistances of these grid microstructures are measured by four-terminal resistance measurement at ambient conditions, which show a good agreement with the theoretical results. Further investigation on the electrical resistivities of evaporated gold layer (4.85 × 10 -8 Ω ∙ m) and co-sputtered NiTi (1.23 × 10 -5 Ω ∙ m) reveals that the influences of scale effect and fabrication process on the resistivity cannot be neglected. As such, it is found to be necessary to consider the materials' resistivity in the fabricated grid microstructures before their electro-thermal analysis.

25 ENERGY STORAGE↗