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At least 1,027 records · Page 57

Electroplated Au for conformal coating of high aspect ratio silicon structures

A method for electroplating a nonmetallic grating including providing a nonmetallic grating; performing an atomic layer deposition (ALD) reaction to form a seed layer on the nonmetallic grating; and electroplating a metallic layer on the seed layer such that the metallic layer uniformly and conformally coats the nonmetallic grating. An apparatus including a silicon substrate having gratings with an aspect-ratio of at least 20:1; a atomic layer deposition (ALD) seed layer formed on the gratings; and an electroplated metallic layer formed on the seed layer, wherein the electroplated metallic layer uniformly and conformally coats the gratings.

Rowen, Adam M.↗

Direct and precise measurement of displacement and velocity of flexible web in roll-to-roll manufacturing systems

Interest in the production of printed electronics using a roll-to-roll system has gradually increased due to its low mass-production costs and compatibility with flexible substrate. To improve the accuracy of roll-to-roll manufacturing systems, the movement of the web needs to be measured precisely in advance. In this paper, a novel measurement method is developed to measure the displacement and velocity of the web precisely and directly. The proposed algorithm is based on the traditional single field encoder principle, and the scale grating has been replaced with a printed grating on the web. Because a printed grating cannot be as accurate as a scale grating in a traditional encoder, there will inevitably be variations in pitch and line-width, and the motion of the web should be measured even though there are variations in pitch and line-width in the printed grating patterns. For this reason, the developed algorithm includes a precise method of estimating the variations in pitch. In addtion, a method of correcting the Lissajous curve is presented for precision phase interpolation to improve measurement accuracy by correcting Lissajous circle to unit circle. The performance of the developed method is evaluated by simulation and experiment. In the experiment, the displacement error was less than 2.5 μm and the velocity error of 1σ was about 0.25%, while the grating scale moved 30 mm.

36 MATERIALS SCIENCE↗

Multicolor multifocal 3D microscopy using in-situ optimization of a spatial light modulator

Abstract Multifocal microscopy enables high-speed three-dimensional (3D) volume imaging by using a multifocal grating in the emission path. This grating is typically designed to afford a uniform illumination of multifocal subimages for a single emission wavelength. Using the same grating for multicolor imaging results in non-uniform subimage intensities in emission wavelengths for which the grating is not designed. This has restricted multifocal microscopy applications for samples having multicolored fluorophores. In this paper, we present a multicolor multifocal microscope implementation which uses a Spatial Light Modulator (SLM) as a single multifocal grating to realize near-uniform multifocal subimage intensities across multiple wavelength emission bands. Using real-time control of an in-situ-optimized SLM implemented as a multifocal grating, we demonstrate multicolor multifocal 3D imaging over three emission bands by imaging multicolored particles as well as Escherichia coli ( E. coli ) interacting with human liver cancer cells, at $$\sim 2.5$$ ∼ 2.5 multicolor 3D volumes per second acquisition speed. Our multicolor multifocal method is adaptable across SLM hardware, emission wavelength band locations and number of emission bands, making it particularly suited for researchers investigating fast processes occurring across a volume where multiple species are involved.

47 OTHER INSTRUMENTATION↗

Non-diffusive thermal transport in GaAs at micron length scales

In this study, we use a transient thermal grating technique in reflection geometry to measure the effective thermal diffusivity in GaAs as a function of heat transfer distance at three temperatures. Utilizing heterodyne detection, we isolate the “amplitude” grating contribution of the transient grating signal, which encodes the thermal transport dynamics. As the thermal grating period decreases, and thus the heat-transfer distance, we observe a reduction in the effective thermal diffusivity, indicating a departure from diffusive behavior. Non-diffusive behavior is observed at room temperature, as well as low temperature (180 K) and high temperature (425 K). At the shortest thermal grating period measured corresponding to a heat transfer distance of approximately 1 μm, the effective diffusivity drops to a value roughly 50% of the bulk thermal diffusivity. These measurements show the utility of the reflection transient thermal grating technique to measure thermal transport properties of opaque materials.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Research directed toward improved echelles for the ultraviolet

Research was undertaken to demonstrate that improved efficiencies for low frequency gratings are obtainable with the careful application of present technology. The motivation for the study was the desire to be assured that the grating-efficiency design goals for potential Space Telescope spectrographs can be achieved. The work was organized to compare gratings made with changes in the three specific parameters: the ruling tool profile, the coating material, and the lubricants used during the ruling process. A series of coatings and test gratings were fabricated and were examined for surface smoothness with a Nomarski Differential Interference Microscope and an electron microscope. Photomicrographs were obtained to show the difference in smoothness of the various coatings and rulings. Efficiency measurements were made for those test rulings that showed good groove characteristics: smoothness, proper ruling depth, and absence of defects. The intuitive feeling that higher grating efficiency should be correlated with the degree of smoothness of both the coating and the grating is supported by the results.

Source record↗

Research directed toward improved echelles for the ultraviolet

Low frequency gratings obtainable with present technology, can meet the grating-efficiency design goals for potential space telescope spectrographs. Gratings made with changes in the three specific parameters: the ruling tool profile, the coating material, and the lubricants used during the ruling process were compared. A series of coatings and test gratings were fabricated and were examined for surface smoothness with a Nomarski differential interference microscope and an electron microsocope. Photomicrographs were obtained to show the difference in smoothness of the various coatings and rulings. Efficiency measurements were made for those test rulings that showed good groove characteristics: smoothness, proper ruling depth, and absence of defects (e.g., streaks, feathered edges and rough sides). Higher grating efficiency should be correlated with the degree of smoothness of both the coating and the grating groove.

Source record↗

Variable magnification variable dispersion glancing incidence imaging x ray spectroscopic telescope

A variable magnification variable dispersion glancing incidence x ray spectroscopic telescope capable of multiple high spatial revolution imaging at precise spectral lines of solar and stellar x ray and extreme ultraviolet radiation sources includes a primary optical system which focuses the incoming radiation to a primary focus. Two or more rotatable carriers each providing a different magnification are positioned behind the primary focus at an inclination to the optical axis, each carrier carrying a series of ellipsoidal diffraction grating mirrors each having a concave surface on which the gratings are ruled and coated with a multilayer coating to reflect by diffraction a different desired wavelength. The diffraction grating mirrors of both carriers are segments of ellipsoids having a common first focus coincident with the primary focus. A contoured detector such as an x ray sensitive photographic film is positioned at the second respective focus of each diffraction grating so that each grating may reflect the image at the first focus to the detector at the second focus. The carriers are selectively rotated to position a selected mirror for receiving radiation from the primary optical system, and at least the first carrier may be withdrawn from the path of the radiation to permit a selected grating on the second carrier to receive radiation.

Hoover, Richard↗

Human speed perception is contrast dependent

When two parallel gratings moving at the same speed are presented simultaneously, the lower-contrast grating appears slower. This misperception is evident across a wide range of contrasts (2.5-50 percent) and does not appear to saturate (e.g. a 50 percent contrast grating appears slower than a 70 percent contrast grating moving at the same speed). On average, a 70 percent contrast grating must be slowed by 35 percent to match a 10 percent contrast grating moving at 2 deg/sec (N = 6). Furthermore, the effect is largely independent of the absolute contrast level and is a quasi-linear function of log contrast ratio. A preliminary parametric study shows that, although spatial frequency has little effect, relative orientation is important. Finally, the misperception of relative speed appears lessened when the stimuli to be matched are presented sequentially.

Stone, Leland S.↗

Diffraction-Based Optical Switch

Method and system for controllably redirecting a light beam, having a central wavelength lambda, from a first light-receiving site to a second light-receiving site. A diffraction grating is attached to or part of a piezoelectric substrate, which is connected to one or two controllable voltage difference sources. When a substrate voltage difference is changed and the diffraction grating length in each of one or two directions is thereby changed, at least one of the diffraction angle, the diffraction order and the central wavelength is controllably changed. A diffracted light beam component, having a given wavelength, diffraction angle and diffraction order, that is initially received at a first light receiving site (e.g., a detector or optical fiber) is thereby controllably shifted or altered and can be received at a second light receiving site. A polynomially stepped, chirped grating is used in one embodiment. In another embodiment, an incident light beam, having at least one of first and second wavelengths, lambda1 and lambda2, is received and diffracted at a first diffraction grating to provide a first diffracted beam. The first diffracted beam is received and diffracted at a second diffraction grating to produce a second diffracted beam. The second diffracted beam is received at a light-sensitive transducer, having at least first and second spaced apart light detector elements that are positioned so that, when the incident light beam has wavelength lambda1 or lambda2 (lambda1 not equal to lambda2), the second diffracted beam is received at the first element or at the second element, respectively; change in a selected physical parameter at the second grating can also be sensed or measured. A sequence of spaced apart light detector elements can be positioned along a linear or curvilinear segment with equal or unequal spacing.

Stevan M Sperno↗

Variable magnification variable dispersion glancing incidence imaging x-ray spectroscopic telescope

A variable magnification variable dispersion glancing incidence x-ray spectroscopic telescope capable of multiple high spatial revolution imaging at precise spectral lines of solar and stellar x-ray and extreme ultraviolet radiation sources includes a pirmary optical system which focuses the incoming radiation to a primary focus. Two or more rotatable carries each providing a different magnification are positioned behind the primary focus at an inclination to the optical axis, each carrier carrying a series of ellipsoidal diffraction grating mirrors each having a concave surface on which the gratings are ruled and coated with a mutlilayer coating to reflect by diffraction a different desired wavelength. The diffraction grating mirrors of both carriers are segments of ellipsoids having a common first focus coincident with the primary focus. A contoured detector such as an x-ray sensitive photogrpahic film is positioned at the second respective focus of each diffraction grating so that each grating may reflect the image at the first focus to the detector at the second focus. The carriers are selectively rotated to position a selected mirror for receiving radiation from the primary optical system, and at least the first carrier may be withdrawn from the path of the radiation to permit a selected grating on the second carrier to receive radiation.

Hoover, Richard B.↗

Micro spectrometer for parallel light and method of use

A spectrometer system includes an optical assembly for collimating light, a micro-ring grating assembly having a plurality of coaxially-aligned ring gratings, an aperture device defining an aperture circumscribing a target focal point, and a photon detector. An electro-optical layer of the grating assembly may be electrically connected to an energy supply to change the refractive index of the electro-optical layer. Alternately, the gratings may be electrically connected to the energy supply and energized, e.g., with alternating voltages, to change the refractive index. A data recorder may record the predetermined spectral characteristic. A method of detecting a spectral characteristic of a predetermined wavelength of source light includes generating collimated light using an optical assembly, directing the collimated light onto the micro-ring grating assembly, and selectively energizing the micro-ring grating assembly to diffract the predetermined wavelength onto the target focal point, and detecting the spectral characteristic using a photon detector.

Park, Yeonjoon↗

Single-Mode, Distributed Feedback Interband Cascade Lasers

Single-mode, distributed feedback interband cascade lasers (ICLs) using distributed-feedback gratings (e.g., lateral Bragg gratings) and methods of fabricating such ICLs are provided. The ICLs incorporate distributed-feedback gratings that are formed above the laser active region and adjacent the ridge waveguide (RWG) of the ICL. The ICLs may incorporate a double-ridge system comprising an optical confinement structure (e.g., a RWG) disposed above the laser active region that comprises the first ridge of the double ridge system, a DFB grating (e.g., lateral Bragg grating) disposed above the laser active region and adjacent the optical confinement structure, and an electric confinement structure that passes at least partially through the laser active region and that defines the boundary of the second ridge comprises and the termination of the DFB grating.

Frez, Clifford F.↗

Optically transduced MEMS magnetometer

MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

47 OTHER INSTRUMENTATION↗

Textured micrometer scale templates as light managing fabrication platform for organic solar cells

A three-dimensional, microscale-textured, grating-shaped organic solar cell geometry. The solar cells are fabricated on gratings to give them a three-dimensional texture that provides enhanced light absorption. Introduction of microscale texturing has a positive effect on the overall power conversion efficiency of the devices. This grating-based solar cell having a grating of pre-determined pitch and height has shown improved power-conversion efficiency over a conventional flat solar cell. The improvement in efficiency is accomplished by homogeneous coverage of the grating with uniform thickness of the active layer, which is attributed to a sufficiently high pitch and low height of the underlying gratings. Also the microscale texturing leads to suppressed reflection of incident light due to the efficient coupling of the incident light into modes that are guided in the active layer.

14 SOLAR ENERGY↗

Diagnosis of gas temperature, electron temperature, and electron density in helium atmospheric pressure plasma jet

The optical emission spectra of helium atmospheric pressure plasma jet (APPJ) are captured with a three grating spectrometer. The grating primary spectrum covers the whole wavelength range from 200 nm to 900 nm, with the overlapped grating secondary spectrum appearing from 500 nm to 900 nm, which has a higher resolution than that of the grating primary spectrum. So the grating secondary spectrum of OH (A{sup 2}{Sigma} {sup +}({upsilon} Prime = 0) {yields} X{sup 2}{Pi}({upsilon} Double-Prime = 0)) is employed to calculate the gas temperature (T{sub g}) of helium APPJ. Moreover, the electron temperature (T{sub e}) is deduced from the Maxwellian electron energy distribution combining with T{sub g}, and the electron density (n{sub e}) is extracted from the plasma absorbed power. The results are helpful for understanding the physical property of APPJs.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Alignment of chirped-pulse compressor

An original method of alignment of grating compressors for ultrahigh-power CPA laser systems is proposed. The use of this method for adjustment of the grating compressor of a PEARL subpetawatt laser complex made it possible to align the diffraction gratings with a second accuracy in all three angular degrees of freedom, including alignment of the grooves, and to adjust the angles of beam incidence on the grating with a high accuracy. A simple method for measuring the difference in the groove densities of gratings with accuracy better than 0.005 lines mm{sup -1} is proposed and tested. (control of laser radiation parameters)

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Study of the formation of a microrelief on ZnSe- and CdSe-crystal surfaces ablated by excimer KrF-laser radiaton

One-dimensional gratings with a period of 0.5−2.3 μm are formed on the surfaces of CdSe and ZnSe crystals ablated by two interfering radiation beams of a nanosecond excimer KrF laser. Investigated are the dependences of the shape and depth of gratings on the energy density under irradiation by a single pulse, and on the number of pulses at a given energy density. The maximum grating depth is estimated as ∼0.57 of the period. By forming a one-dimensional grating with a period of 1.5 μm and a depth of 0.53 μm on the CdSe-crystal surface, this surface becomes antireflective at a wavelength of 4 μm. The surface reflectivity is reduced by 88 %. A possibility of forming two-dimensional gratings having periods of 1 and 1.5 μm is demonstrated. (paper)

77 NANOSCIENCE AND NANOTECHNOLOGY↗

Fabrication of high aspect ratio TiO{sub 2} and Al{sub 2}O{sub 3} nanogratings by atomic layer deposition

The authors report on the fabrication of TiO{sub 2} and Al{sub 2}O{sub 3} nanostructured gratings with an aspect ratio of up to 50. The gratings were made by a combination of atomic layer deposition (ALD) and dry etch techniques. The workflow included fabrication of a Si template using deep reactive ion etching followed by ALD of TiO{sub 2} or Al{sub 2}O{sub 3}. Then, the template was etched away using SF{sub 6} in an inductively coupled plasma tool, which resulted in the formation of isolated ALD coatings, thereby achieving high aspect ratio grating structures. SF{sub 6} plasma removes silicon selectively without any observable influence on TiO{sub 2} or Al{sub 2}O{sub 3}, thus revealing high selectivity throughout the fabrication. Scanning electron microscopy was used to analyze every fabrication step. Due to nonreleased stress in the ALD coatings, the top parts of the gratings were observed to bend inward as the Si template was removed, thus resulting in a gradual change in the pitch value of the structures. The pitch on top of the gratings is 400 nm, and it gradually reduces to 200 nm at the bottom. The form of the bending can be reshaped by Ar{sup +} ion beam etching. The chemical purity of the ALD grown materials was analyzed by x-ray photoelectron spectroscopy. The approach presented opens the possibility to fabricate high quality optical metamaterials and functional nanostructures.

36 MATERIALS SCIENCE↗