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At least 109 records · Page 6

Measurements of plasma parameters in the divertor island of Wendelstein 7-X through line-ratio spectroscopy on helium

We report electron temperature T e and density n e have been measured in the divertor island of Wendelstein 7-X by means of a new thermal He-beam system utilizing line-ratio spectroscopy. This system is equipped with a poloidal arrangement of five gas valves that allows to infer 2D plasma profiles T e ( R,Z ) and n e ( R,Z ) across the magnetic island forming the island divertor. A local maximum in T e ( R,Z ) was measured along the flux surfaces located between the island center and the outer separatrix. In the island center, characterized by closed field lines, a clear local minimum in T e was measured, indicating that no direct heat deposition occurs in this region and that the perpendicular heat flux from the core plasma into this domain is small. Increasing the island size leads to a reduction of the connection length in the scrape-off layer (SOL) and to a shift of the island center towards the divertor target. In this scenario, the T e ( R,Z ) are reduced in the entire island domain. Density profiles are found flat across the divertor island for both island size scenarios. These findings are supported by similar observations made with a reciprocating probe plunging through the same SOL island at the mid-plane of W7-X representing the upstream position in this 3D divertor geometry.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Direct internal recycling fractions approaching unity

Direct internal recycling (DIR) refers to the process of recovering pure hydrogen isotopes (D/T) from helium and other impurities in the fusion plasma exhaust and directing them back to the fuel injection system. Increasing the exhaust fraction purified through DIR significantly reduces the size and cost of the tritium plant and provides additional benefits including reduced requirements for both the tritium startup inventory and tritium breeding ratio. Metal foil pumps (MFPs) are the dominant technology for this separation, relying on the concept of superpermeation. We recently demonstrated that PdCu foils operated at low temperature provide both exceptional flux and resilience to helium absorption as the DIR fraction is increased. Herein we design and demonstrate continuous and semi-batch DIR processes using PdCu MFPs. Under continuous processing, stable performance was observed for DIR fractions up to 92 %. In addition, we demonstrate a semi-batch process capable of extending the DIR fraction to unity (> 99.8 %). Under the experimental conditions described within a PdCu MFP area of ~22 m 2 would be sufficient to process the fusion exhaust with 92 % DIR fraction at expected flowrates of 100 Pa·m 3 ·s -1 for a future fusion power plant.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Effects of transition metal carbide dispersoids on helium bubble formation in dispersion-strengthened tungsten

Abstract The formation of helium bubbles and subsequent property degradation poses a significant challenge to tungsten as a plasma-facing material in future long-pulse plasma-burning fusion reactors. In this study, we investigated helium bubble formation in dispersion-strengthened tungsten doped with transition metal carbides, including TaC, ZrC, and TiC. Of the three dispersoids, TaC exhibited the highest resistance to helium bubble formation, possibly due to the low vacancy mobility in the Group VB metal carbide and oxide phases. Under identical irradiation conditions, large helium bubbles formed at grain boundaries in tungsten, while no bubbles were observed at the interfaces between the carbide dispersoid and tungsten matrix. Moreover, our results showed the interfaces could suppress helium bubble formation in the nearby tungsten matrix, suggesting that the interfaces are more effective in trapping helium as tiny clusters. Our research provided new insights into optimizing the microstructure of dispersion-strengthened tungsten alloys to enhance their performance.

36 MATERIALS SCIENCE↗

Design of a Continuous Pellet Fueling System for Wendelstein 7-X

A continuous pellet fueling system (CPFS) is currently being designed at the Oak Ridge National Laboratory (ORNL) for the long pulse operation of the Wendelstein 7-X (W7-X) stellarator. The purpose of the CPFS is to provide deep continuous fueling for feedback-controlled high-density operation and mitigation of predicted hollow density profiles. As described here, the system will provide the capability to inject cylindrical pellets of solid hydrogen or deuterium into the plasma core, with flexibility to vary the pellet size, velocity, and injection frequency. Pellets are nominally of 3 mm in diameter and have a length between 1 and 4 mm. The heart of the CPFS is a vertically oriented, twin-screw extruder, cooled by three Gifford-McMahon cryocoolers in parallel, designed to form a continuous filament of hydrogen or deuterium. The filament width, which determines the pellet length, can be adjusted by means of a variable nozzle driven by a linear actuator at the base of the extruder. Coupled to the nozzle is a solenoid-operated gas gun and cutter assembly. A pneumatic propellant valve pulses a burst of ~60 bar helium to accelerate the cut pellet into W7-X. Three gaps in the guide tubes provide pumping locations to remove the helium propellant before it reaches the plasma. The maximum velocity of the pellet is limited by its ability to survive navigating the guide tube trajectory intact. A microwave cavity located within the guide tube provides the capability to measure the pellet size and velocity. The mechanical and thermal designs of the W7-X extruder, adjustable nozzle, and gun and cutter assembly design are described. A guide tube design and experimental pellet survivability test results are presented.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Diagnostics: Chapter 8 of the special issue: on the path to tokamak burning plasma operation

This chapter presents the activity conducted by the ITPA topical group (TG) on Diagnostics over about the last 15 years. Following a general introduction of the ITER Diagnostics led by their measurement roles, the document is organized in several subchapters detailing the design support, research and development activity conducted by each of the specialist working groups (WGs) of the TG. Please note that the magnetic diagnostics were supported at the TG without a specific WG. Their status is included in the general introduction. In the following some highlights of the subchapter’s contents are provided. Recent advances in ITER first wall (FW) diagnostics for the measurements of plasma-metallic wall interaction in support of the ITER research plan are reported. An InfraRed imaging Video Bolometer for ITER has been developed and tested on several tokamaks to measure the radiated power loss. A laser-induced breakdown spectroscopy (LIBS) technique which utilizes a pulsed laser beam to ablate locally by forming a crater, will measure local tritium inventory in the FW material. Real-time Residual Gas Analyzers will measure the neutral gas composition in a divertor port and an equatorial port during plasma operation. Due to the full metallic FW environment, the plasma-wall interaction in ITER will face several challenges such as the compromised radiated power and divertor heat flux measurements by reflection. Ray tracing and analysis codes have been developed to eliminate and correct the effects of reflection in the measurements. The characteristics of the reflecting surfaces depending on the roughness and angle of the incidence have been measured by dedicated experiments, and the results were applied to the reflection elimination. For the measurement of the metallic impurity radiation induced by eroded metallic atoms, a vacuum ultraviolet spectrometer has been developed and tested. An extensive thermonuclear diagnostic suite will be required to support the operation of ITER and the planned experimental program for future burning plasma experiments. Due to the harsh environmental conditions, the implementation of diagnostic systems in ITER is a major challenge. These conditions include high levels of neutron and gamma fluxes, neutron heating, particle bombardment. Therefore, the selection and design of diagnostic systems must take into account a number of phenomena previously unseen in diagnostic design. For this reason, the measurement of neutrons and confined or lost fast ions, with particular emphasis on alpha particles, is critical to ITER. The diagnostics associated with these measurements will be important for future plasma-burning experiments at ITER. The high neutron emission and very large plasma size in ITER make neutron diagnostics the main diagnostic method used to measure plasma parameters such as fusion power, fusion power density, ion temperature, energy of fast ions and their spatial distributions in the plasma core. Active spectroscopy techniques are methods where a neutral particle beam is injected into the plasma and information on plasma parameters is extracted from the measurement of line emission resulting from the beam-plasma interaction, either by plasma ions or by beam atoms. Spatial localization is achieved by crossing the beamline and multiple observation lines. The ITER plasma will be a high temperature, moderately dense, fully ionized collisional plasma. The plasma facing surfaces are principally metallic being fashioned from beryllium or tungsten but many other elements, arising from either structural or from operational needs, may enter this plasma. The energy range of the emitted photons range from meV (infra-red) to multi keV (x-rays) and originate from all areas of the plasma volume. The primary role of passive emission diagnostics is to identify what is in the plasma from spectral signatures. Extracting quantitative information from these measurements such as impurity content, ion temperature, rotation, degree of detachment and radiated power depends on calibrated instruments, a physics model of the atomic and molecular processes and plasma transport and an analysis workflow that takes into account environmental effects such as reflections. The particular needs for ITER have prompted a multi-machine, many-year effort to address all these aspects and this chapter reviews the work on diagnostic design, experiments and new analysis techniques. An overview of the laser diagnostics to be implemented on ITER is also provided in this paper. This includes descriptions of the Thomson scattering in the core, edge and divertor regions, polarimetry and interferometry diagnostics used for measuring plasma density and also measurements of helium density in the divertor using Laser Induced Flourescence. Techniques which can allow improvements on current measurements are also addressed in particular expanding poloidal polarimetry measurements to measure field fluctuations and proposed use of dispersion interferometery which has a number of advantages over existing methods. This paper identifies particular areas where further research and testing on existing tokamaks is useful even at this advanced stage to inform the design of diagnostics for ITER. Outstanding areas of concern for the implementation of laser diagnostics, in particular with a view to reliable operation are identified. An overview of the latest developments of microwave diagnostic systems and techniques is given. The primary focus is the contributions for ITER—the next step burning plasma experiment—which is supplemented by describing recent progress of techniques applicable for fusion experiments beyond ITER. The contributions are intentionally kept concise, and are being supplemented by a rich list of references for further studies. Radiation induced effects are receiving continuous and well-deserved attention of the ITER diagnostic community and they are in many cases one of the primary design drivers of the ITER diagnostic systems. The paper summarizes recent progress in this area focusing primarily on the ITER diagnostics but in some cases provides also outlook for the possible solutions for even more demanding radiation environment of fusion reactors beyond ITER. Despite advancements in the area of modeling and simulation of various radiation induced effects, experimental testing in a nuclear environment as close as possible to the target one is still seen as unavoidable for proper qualification of particular diagnostic functional elements. Recent advancement within three diagnostic areas: optical diagnostics, magnetics and bolometers is covered. Encouraging results on qualification of silica glass vacuum window assemblies are presented. In the area of magnetic sensors, progress of irradiation tests performed on ITER in-vessel LTCC inductive sensors is presented with outlook for novel technological approaches to inductive sensors utilizing thick printing and photolithography technologies being highlighted. Summary of advancements in the area of steady state magnetic field sensors based on Hall effect is given. New results of neutron irradiation test of the ITER borosilicate glass inserts for vacuum electrical feedthroughs are summarized finding negligible swelling at target level of neutron fluence. Off-line irradiation tests of fiber optic current sensors for plasma current measurement demonstrated that both for gamma doses up to 5 MGy and a total neutron fluence up to 10 15 cm −2 , radiation induced changes are still compatible with required measurement accuracy on ITER. The ITER bolometers are given as an example how considering radiation effects may influence the diagnostic design. Finally, outlook for future main R&D directions is outlined. All optical and laser-based diagnostics in ITER will be using mirrors to guide plasma radiation toward detectors, cameras and sensors. In the hostile plasma, radiation and particle environment the optical characteristics of diagnostic mirrors will degrade directly affecting the entire performance of involved diagnostic systems. An assessment of factors affecting mirror performance is provided. Among the prime adverse factors are deposition of plasma impurities, sputtering of mirror surface and steam ingress in the vicinity of mirrors. Within the International Tokamak Physics Activity with active support by ITER central team and domestic agencies, the structured research and development (R&D) program on mitigation of risks for diagnostic mirrors is underway. Within this program the mirror material development, the passive mitigation of mirror degradation by using diagnostic ducts and shutters along with an active mirror recovery program comprising the in-situ mirror cleaning and calibration is underway. Recent developments in diagnostic mirror R&D are described in this Chapter along with an example of their implementation of R&D solutions in ITER Infrared Thermography diagnostic. An assessment of still open engineering and physics questions, considerations on mirror risks during an early phase of ITER operation are given along with an overview of diagnostic mirror evolution in the late ITER operation stage toward the demonstration fusion power plant. Several crucial areas of diagnostic R&D outlined in ITER Research Plan are addressed. The basic control groups in a fusion reactor can be broken-down in five categories: (1) plasma position, magnetic configuration, and plasma current control, (2) profile control and confinement optimization, (3) MHD control and suppression, (4) edge dissipation control, radiation and plasma exhaust control and (5) break-down optimization. These categories are coupled via the physics (a control action in one domain will affect the other domains) and via shared actuators (e.g. ECRH for impurity accumulation avoidance, current density distribution control and MHD suppression). Consequently, a supervisory control system should determine the priority of the various control tasks, their couplings, and the interfaces with the safety and interlock system. For the systematic development of the various controllers taking the complexity of the plasma and the control system into account, a model-based approach is required. A short historical overview is given of the developments in systems and control theory and control engineering with special emphasis on those developments that are most relevant for Nuclear Fusion research and operation. An overview is given of the state of the field of fusion plasma control for the control categories. It will be shown how synthetic diagnostics are being developed in ITER and how they are used in diagnostic design and design validation and how they can be in model-based controller synthesis using relatively simple models. In modern control methods, multiple diagnostics are used to constrain relatively simple models. The constrained models provide an estimate for the state. This opens the route to state controllers, such as model predictive control. A major challenge in nuclear fusion research is the coherent combination of data from heterogeneous diagnostics and modeling codes for machine control and safety as well as physics studies. Measured data from different diagnostics often provide information about the same subset of physical parameters. Additionally, information provided by some diagnostics might be needed for the analysis of other diagnostics. A joint analysis of complementary and redundant data allows, e.g. to improve the reliability of parameter estimation, to increase the spatial and temporal resolution of profiles, to obtain synergistic effects, to consider diagnostics interdependencies and to find and resolve data inconsistencies. Physics-based modeling and parameter relationships provide additional information improving the treatment of ill-posed inversion problems. A coherent combination of all kind of available information within a probabilistic framework allows for improved data analysis results. The concept of integrated data analysis (IDA) in the framework of Bayesian probability theory is outlined and contrasted with conventional data analysis. Components of the probabilistic approach are summarized and specific ingredients beneficial for data analysis at fusion devices are discussed.

ITER↗

OH density, flux and loss probability measurements in a room temperature atmospheric pressure surface discharge by microscopic laser induced fluorescence

Many applications involving atmospheric pressure plasma-substrate interactions are enabled by the large fluxes of short-lived reactive species such as OH radicals to the substrate, nonetheless, the accurate measurement of radical densities and fluxes at substrates at atmospheric pressure has received little attention to date, particularly for surface ionization waves. We report the measurement of the OH density distribution in a surface discharge on a fused silica (quartz) substrate generated by an impinging atmospheric pressure plasma jet in dry and humid helium. The OH density is measured by microscopic laser induced fluorescence with a spatial resolution of 10 µm in the direction perpendicular to the quartz substrate. The measured OH diffusive flux varied for the investigated experimental conditions by almost three orders of magnitude and had a maximum value of 1.7 × 10 15 cm -2 s -1 . The corresponding surface loss probability of OH on the quartz surface was determined to be ~0.01. The high spatial resolution was required to accurately resolve the near surface gradient of OH radicals.

plasma-surface interactions↗

Elastic Properties of Plasma-Exposed Tungsten Predicted by Molecular-Dynamics Simulations

We report results of systematic molecular-dynamics computations of the elastic properties of single-crystalline tungsten containing structural defects, voids and overpressurized He nanobubbles, related to plasma exposure of tungsten serving as a plasma- facing component (PFC) in nuclear fusion devices. Our computations reveal that the empty voids are centers of dilatation resulting in development of tensile stress in the tungsten matrix, whereas He-filled voids (nanobubbles) introduce compressive stress in the plasma-exposed tungsten. We find that the dependence of the elastic moduli of plasma-exposed tungsten, namely, the bulk, Young, and shear modulus, on its void fraction follows a universal exponential scaling relation. We also find that the elastic moduli of plasma-exposed tungsten soften substantially as a function of He content in the tungsten matrix, following an exponential scaling relation; this He-induced exponential softening is in addition to the softening caused in the matrix with increasing temperature. A systematic characterization of the dependence of the elastic moduli on the He bubble size reveals that He bubble growth affects significantly both the bulk modulus and the Poisson ratio of plasma-exposed tungsten, while its effect on the Young and shear moduli of the plasma-exposed material is weak. Our findings contribute directly to the development of a structure-properties database that is required for the predictive modeling of the dynamical response of PFCs in nuclear fusion devices.

36 MATERIALS SCIENCE↗

Magnetic field properties in non-axisymmetric divertors

Stellarator power plants require a plan for the removal of the particles and the heat that are exhausted across the plasma edge. Unless a flowing liquid metal can be used to carry the helium exhaust to places where it can be removed from the plasma chamber, the particle exhaust must be magnetically diverted into pumping chambers. Studies are required to determine how magnetic features relate to the required divertor properties, how these magnetic features can be produced, and how they can be controlled. General studies are clarified and simplified by the use of the magnetic field line Hamiltonian $ψ_p(ψ,θ,φ)$ and a vector $\vec{x}(ψ,θ,φ)$ that gives the point in space associated with each point in the $(ψ,θ,φ)$ canonical coordinates, a flux and two angles. The non-resonant Fourier terms in ψp can be removed by a canonical transformation, so only resonant Fourier terms can determine the field line properties in the plasma edge and divertor. This paper discusses the important divertor properties and explains how $ψ_p(ψ,θ,φ)$ and $\vec{x}(ψ,θ,φ)$ can be obtained numerically in a special form for any stellarator magnetic field, $\vec{B}(\vec{x})$. This form holds between an arbitrary magnetic surface and the chamber walls with the non-resonant terms eliminated. Studies based on variations in the terms in such derived field-line Hamiltonians can determine what magnetic features are mathematically possible and how they could be produced and controlled by the external magnetic field coils.

Physics↗

Enhanced helium exhaust during edge-localized mode suppression by resonant magnetic perturbations at DIII-D

Effective helium confinement time, τ p * ,He , and its ratio with energy confinement time, τ p * ,He / τ E , are key metrics quantifying the suitability of fusion plasmas for a continuous burn. Comparisons in the DIII-D tokamak of discharges with suppression of edge localized modes (ELMs) by resonant magnetic field perturbations (RMPs) to the corresponding unperturbed ELMy discharges found that both of these metrics were strongly reduced, by a factor of approximately 2, after application of the RMPs. This reduction in τ p * ,He during RMP ELM suppression was observed in the plasma core, edge, and pumping plenum, where higher neutral helium concentration during RMPs was also measured. In conclusion, these findings provide evidence that future devices employing RMP ELM suppression may meet or even exceed the helium exhaust provided by the ELMs themselves, reducing helium ash, and thus maintaining high fusion gain.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Helium impurities and interactions in lithium

Here we investigate helium interactions with lithium using density functional theory. Like other body-centered cubic (bcc) metals, the lowest-energy site for interstitial helium is a tetrahedral site. However, helium in lithium shows a higher substitutional formation energy than either the tetrahedral or octahedral interstitial formation energies, which is unique. The calculated migration energies of helium in lithium are also very low ( ~ 1 meV), an order of magnitude lower than those in other bcc metals. We find an increase in the binding energy to a vacancy as the number of helium atoms bound to it increases. The extremely low migration energies suggest that helium transport in lithium will be very fast.

36 MATERIALS SCIENCE↗

Development and characterization of the flight model spectrometer onboard LuSEE-Night

The Lunar Surface Electromagnetics Experiment - Night, LuSEE-Night, is a low-frequency radio astronomy experiment that will explore the cosmic Dark Ages signal on the radio-quiet far side of the Moon. Here, the LuSEE-Night carries a radio frequency spectrometer consisting of a set of antennas, analog and digital processing electronics, and will be launched by NASA’s Commercial Lunar Payload Services in 2025. The spectrometer is designed to observe the spectrum of the radio sky in the 0.5-50MHz band. The flight model (FM) of the four-channel spectrometer has been developed. The FM has been characterized for linearity, gain, noise, and their temperature dependence, confirming that the FM meets all the requirements for LuSEE-Night.

47 OTHER INSTRUMENTATION↗

Power and particle exhaust for the ARC fusion power plant

To successfully show that fusion is an attractive energy source, the ARCTM fusion power plant will need to operate with a robust, integrated power and particle exhaust solution. To maximise ARC’s fusion power output while avoiding excessive erosion of the plasma-facing components, we will need to radiatively dissipate most of the power crossing the last-closed flux surface, injecting radiating impurities such as argon or neon to access divertor detachment. Divertor detachment will need to be integrated with a high-performance core plasma, and with efficient impurity pumping to prevent the accumulation of helium ash in the core. To access and control detachment in high-performance plasmas, we have designed ARC with up–down-symmetric divertors, with secondary X-points in long, tightly baffled outer legs. Using a core-edge modelling workflow, we predict that with this divertor design, ARC will access detachment with modest argon seeding in the divertor (c Ar,div ∼0.9%), which should have minimal impact on the core ( Z eff,core <0.5) for reasonable argon enrichment (c Ar,div /c Ar,core =6). Due to the high predicted divertor neutral pressure (p div ∼20 Pa), we predict that ARC will sufficiently pump helium to limit ash accumulation in the core (c He,core <2%) for a helium enrichment of c He,div /c He,core =0.4. ARC’s divertor design is expected to increase the stability of a detachment front in the outer divertor leg, helping to prevent divertor reattachment during smaller heat-flux transients such as scrape-off-layer filaments associated with the quasi-continuous exhaust regime. However, this buffering will not be sufficient to prevent divertor reattachment during large type-I edge-localised modes (ELMs), and as such these will need to be avoided on ARC. Experiments on SPARC will be used to select an integrated scenario which avoids or mitigates type-I-ELMs while maintaining access to detachment, good core fusion performance and sufficient impurity exhaust. SPARC experiments will also be used to finalise ARC’s divertor design, by studying the impact of magnetic and first-wall geometry on detachment stability, impurity enrichment and neutral baffling under conditions similar to those expected for ARC. In conclusion, our analysis finds that ARC will have a viable power and particle exhaust solution which is compatible with high-power operations, and this solution will be validated in experiments on SPARC.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Suppression of Helium Bubble Nucleation in Beryllium Exposed Tungsten Surfaces.

One of the most severe obstacles to increasing the longevity of tungsten-based plasma facing components, such as divertor tiles, is the surface deterioration driven by sub-surface helium bubble formation and rupture. Supported by experimental observations at PISCES, this work uses molecular dynamics simulations to identify the microscopic mechanisms underlying suppression of helium bubble formation by the introduction of plasma-borne beryllium. Simulations of the initial surface material (crystalline W), early-time Be exposure (amorphous W-Be) and final WBe 2 intermetallic surfaces were used to highlight the effect of Be. Significant differences in He retention, depth distribution and cluster size were observed in the cases with beryllium present. Helium resided much closer to the surface in the Be cases with nearly 80% of the total helium inventory located within the first 2 nm. Moreover, coarsening of the He depth profile due to bubble formation is suppressed due to a one-hundred fold decrease in He mobility in WBe2, relative to crystalline W. This is further evidenced by the drastic reduction in He cluster sizes even when it was observed that both the amorphous W-Be and WBe 2 intermetallic phases retain nearly twice as much He during cumulative implantation studies.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Qualification and Commissioning of Helium Flow Loop Experiment for Blanket Design Measurements

Sufficient cooling of plasma-facing materials remains an outstanding challenge in the design of fusion reactor blankets in commercial power demonstration plants. Due to its chemical inertness and low neutron interaction cross section, pressurized helium is a candidate coolant fluid for such systems; however, helium has a small thermal mass compared to liquid coolants, potentially reducing heat removal performance. To address this need, a number of heat transfer enhancements have been proposed to improve the cooling efficiency of such components, thereby decreasing pumping power needs and improving overall plant efficiency. Toward this end, a helium flow loop experiment (HFLE) has been designed and commissioned to test advanced passive heat transfer enhancements in unit-cell test sections, providing necessary data for model validation and subsequent system design. The HFLE is designed to provide flow of pressurized (up to 4 MPa) helium at flow rates up to 80 g/s, enabling heat transfer and pressure drop measurements in test pieces at Reynolds numbers in excess of 180 000. To explore the effects of novel and complex heat transfer enhancements, test sections are produced via additive manufacturing, providing geometries not typically obtainable by conventional machining. Here in this work, we present results from HFLE commissioning and the initial thermal-hydraulic tests of an additively manufactured rifled-rib test section. Results are compared to smooth pipe correlations, and plans are described for future HFLE measurements. These preliminary experiments indicate the utility of the HFLE for heat transfer enhancement testing and simulation validation activities.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Low thermal budget dopant activation in shallow junctions of implanted Si via Tunable plasma enhanced annealing

Low thermal budget (LTB) annealing has become increasingly critical for shallow junctions as semiconductor devices are scaled down. Plasma Enhanced Annealing (PEA) has emerged as a promising LTB annealing process, however its mechanisms remain unclear. In this study, arsenic and boron implanted silicon wafers were subjected to helium or argon ion bombardment generated by annealing plasmas under controlled ion energies and doses in a home-built annealing reactor. The structural and electrical changes were characterized by four-point probe measurements, secondary ion mass spectrometry, Raman spectroscopy and spectroscopic ellipsometry. A pronounced reduction in sheet resistance, accompanied by a decrease in the damage layer thickness demonstrates the surface selective annealing capability of PEA process. Comparative studies using He and Ar plasmas and related ion bombardment reveal a dependence of activation efficacy on both ion species and the dopant implantation profile. Furthermore, a multi-step annealing mechanism is proposed, consisting of an initial (low dose) structural recovery stage followed by the generation of “extended” defects and concluded at large doses by an enhanced dopant activation. The proposed annealing kinetics are thought to be controlled by ion flux, dose and energy. Finally, these results highlight PEA as an effective, surface-selective, LTB approach for shallow-dopant activation and near surface annealing, and provide mechanistic insights into PEA processes.

dopant activation↗

Experimental and Numerical Evaluation of the Thermal-Fluid Characteristics of the Helium-Cooled Modular Divertor with Multiple Jets Using a Reversed Heat Flux Approach

A single-finger unit of the Helium-Cooled Modular Divertor with Multiple Jets (HEMJ) with a plasma-facing surface (PFS) area of about 2 cm 2 has been studied in a helium (He) loop at He mass flow rates m˙ H ≤ 8 g/s and nearly prototypical conditions. Based on previous studies of the single finger of the HEMJ, our Georgia Institute of Technology group is planning to experimentally study larger divertors. Given that the HEMJ test section was heated with an induction heater and that it is impractical to scale this up to divertors with larger PFS areas, a reversed heat flux approach is being considered to measure heat transfer coefficients (HTCs). In this approach, the direction of the heat flux is reversed with water cooling and high-temperature He heating of the outer shell attached to the PFS. This work presents an initial experimental and numerical evaluation of this approach for a single HEMJ finger. Experiments with brass and copper-chromium-zirconium outer shells were conducted at dimensionless He mass flow rates or Reynolds numbers Re = 1 × 10 4 to 4.7 × 10 4 , an inlet pressure of 10 MPa, temperatures as great as 673 K, and maximum heat flux of 8.4 MW/m 2 . The experiments verify that the He-side HTCs are independent of the direction of the heat flux. Here, the results agree well with previous Nusselt number correlation and pressure loss coefficients for the HEMJ obtained using the normal heating approach.

42 ENGINEERING↗

Optical and mass-spectral characterization of mixed-gas flowing atmospheric-pressure afterglow sources

Plasma-based ambient desorption/ionization (ADI) sources for mass spectrometry (MS) often use helium as the primary discharge gas due to the large reaction cross section of excited helium species with atmospheric gases, which ultimately leads to efficient reagent-ion formation. However, some studies have shown that mixed-gas plasmas provide unique advantages. For instance, our group showed that a helium-oxygen flowing atmospheric-pressure afterglow (He:O 2 -FAPA) source yielded enhanced ion signals for small polar analytes, but compounds with aromatic rings underwent chemical modification to produce pyrylium species. Here, it is shown that the addition of H 2 to the helium FAPA gas significantly decreased the reagent-ion signals, but analyte-ion signal was not affected to the same degree. In addition, mass spectra obtained with He:H 2 -FAPA were chemically cleaner with fewer ions stemming from analyte species and produced less oxidation of analytes. Addition of nitrogen increased the abundance of negative reagent ions (e.g., NO 2 - and NO 3 - ) which led to enhanced ion signal for RDX. To better understand these unique advantages of a mixed-gas FAPA, the impact of molecular-gas (O 2 , N 2 , or H 2 ) addition on the optical-emission spectra from the discharge was also measured. Spatially resolved emission was obtained from the anode- and negative-glow regions. In general, addition of small fractions (~0.1%) of molecular gases decreased helium and OH emission intensities. Atomic oxygen and hydrogen emission increased with the addition of O 2 and H 2 , respectively. Furthermore, emission characteristics of N 2 , N 2 + , and NO with respect to molecular gas composition on He-FAPA were measured. Finally, fundamental plasma parameters, such as OH rotational temperature (T rot ), were also calculated for these mixed-gas systems.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

IN SITU PLASMA PROCESSING OF SUPERCONDUCTING CAVITIES AT JLAB, 2023 UPDATE

Jefferson Lab has an ongoing R&D program in plasma processing which just completed a round of production processing in the CEBAF accelerator. Plasma processing is a common technique for removing hydrocarbons from surfaces, which increases the work function and reduces the secondary emission coefficient. The initial focus of the effort was processing C100 cavities by injecting RF power into the higher order mode (HOM) coupler ports. Results from processing cryomodules in the CEBAF accelerator as well as vertical test results will be present-ed. The goal of in-situ processing is to improve the operational gradients and the energy margin of the linacs. This work will describe the systems and methods used at JLAB for processing cavities using an argon-oxygen gas mixture as well as a helium-oxygen gas mixture. Before and after plasma processing results will also be presented.

Powers, Thomas↗