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DOE OSTI2026

Toward the origins of binding energy shifts and “satellites” formation during plasma-XPS measurements

In-plasma x-ray photoelectron spectroscopy (plasma-XPS) emerges as a powerful platform for real-time, in situ chemical analysis under conditions relevant to semiconductor processing and other plasma-enabled technologies. This study investigates the origins of binding energy (BE) shifts and the formation of “satellite” peaks observed during plasma-XPS measurements across conductive, dielectric, and gas-phase systems. Using a standard laboratory-based ambient pressure XPS apparatus coupled with an alternating current (AC)-driven capacitively coupled plasma source, we demonstrate that metastable surface species, such as transient Au oxides, can be detected during plasma exposure, revealing chemical states that are hardly accessible using conventional ultrahigh vacuum (UHV) XPS. In dielectric samples (e.g., undoped diamond, sapphire), we observe pressure- and plasma-type-dependent BE shifts of more than 50 eV, attributed to x-ray-induced and plasma-mediated surface charging. These shifts are mitigated at higher pressures/plasmas or in electronegative plasmas (e.g., O 2 ), the latter due to enhanced charge compensation mechanisms involving slow negative ions. For gas-phase species, AC-plasma excitation leads to spectral broadening and the emergence of “satellite” peaks with energy separations of a few electron volts, linked to oscillating local plasma potentials in the probing volume. Furthermore, these findings highlight the complex and important interplay between plasma parameters, surface charging, and local electric fields in shaping XPS spectra. Overall, plasma-XPS emerges as a critical metrological tool for probing transient surface chemistry, with implications for semiconductor processing, material synthesis, and plasma diagnostics.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

NASA NTRS1997

Effects of Neutral Density on Energetic Ions Produced Near High-Current Hollow Cathodes

Energy distributions of ion current from high-current, xenon hollow cathodes, which are essential information to understand erosion phenomena observed in high-power ion thrusters, were obtained using an electrostatic energy analyzer (ESA). The effects of ambient pressure and external flow rate introduced immediately downstream of hollow cathode on ion currents with energies greater than that associated with the cathode-to-anode potential difference were investigated. The results were analyzed to determine the changes in the magnitudes of ion currents to the ESA at various energies. Either increasing the ambient pressure or adding external flow induces an increase in the distribution of ion currents with moderate energies (epsilon less than 25 to 35 eV) and a decrease in the distribution for high energies (epsilon greater than 25 to 35 eV). The magnitude of the current distribution increase in the moderate energy range is greater for a cathode equipped with a toroidal keeper than for one without a keeper, but the distribution in the high energy range does not seem to be affected by a keeper. An MHD model, which has been proposed to describe energetic-ion production mechanism in hollow cathode at high discharge currents, was developed to describe these effects. The results show, however, that this model involves no mechanism by which a significant increase of ion current could occur at any energy. It was found, on the other hand, that the potential-hill model of energetic ion production, which assumes existence of a local maximum of plasma potential, could explain combined increases in the currents of ions with moderate energies and decreases in high energy ions due to increased neutral atom density using a charge-exchange mechanism. The existing, simplified version of the potential-hill model, however, shows poor quantitative agreement with measured ion-current-energy-distribution changes induced by neutral density changes.

Kameyama, Ikuya↗

NASA NTRS2006

Plasma Characteristics Measured in the Plume of a NEXT Multi-Thruster Array

Plasma properties in the plume produced by a 3+1 NEXT thruster array operating at full power were mapped using a series of planar Langmuir probes. The Langmuir probes were swept across the diameters of each thruster as well as the centerline of the array at multiple downstream axial locations to produce a plasma map of the plume produced by the array. Such maps yielded the spatial distribution of the plasma density, the electron temperature and the plasma potential in the near field of the array. This spatial information provides insight into local plasma particle flow. Flow direction is particularly important from both an array lifetime and spacecraft-plume plasma interaction standpoint. The variation in the plume plasma parameters tended to vary in a manner consistent with both plume shape and overlap of adjacent plumes.

Foster, John E.↗

NASA NTRS2007

Large-Area Permanent-Magnet ECR Plasma Source

A 40-cm-diameter plasma device has been developed as a source of ions for material-processing and ion-thruster applications. Like the device described in the immediately preceding article, this device utilizes electron cyclotron resonance (ECR) excited by microwave power in a magnetic field to generate a plasma in an electrodeless (noncontact) manner and without need for an electrically insulating, microwave-transmissive window at the source. Hence, this device offers the same advantages of electrodeless, windowless design - low contamination and long operational life. The device generates a uniform, high-density plasma capable of sustaining uniform ion-current densities at its exit plane while operating at low pressure [<10(exp -4) torr (less than about 1.3 10(exp -2) Pa)] and input power <200 W at a frequency of 2.45 GHz. Though the prototype model operates at 2.45 GHz, operation at higher frequencies can be achieved by straightforward modification to the input microwave waveguide. Higher frequency operation may be desirable in those applications that require even higher background plasma densities. In the design of this ECR plasma source, there are no cumbersome, power-hungry electromagnets. The magnetic field in this device is generated by a permanent-magnet circuit that is optimized to generate resonance surfaces. The microwave power is injected on the centerline of the device. The resulting discharge plasma jumps into a "high mode" when the input power rises above 150 W. This mode is associated with elevated plasma density and high uniformity. The large area and uniformity of the plasma and the low operating pressure are well suited for such material-processing applications as etching and deposition on large silicon wafers. The high exit-plane ion-current density makes it possible to attain a high rate of etching or deposition. The plasma potential is <3 V low enough that there is little likelihood of sputtering, which, in plasma processing, is undesired because it is associated with erosion and contamination. The electron temperature is low and does not vary appreciably with power.

Foster, John E.↗

NASA NTRS1988

The virtual cathode as a transient double sheath

The two-dimensional plasma potential measurements are given of a space-charge dominated double sheath near a hot cathode. Laboratory data show that a virtual cathode is a self-consistent solution only for a transient cathode-plasma system. Slow charge exchange ions get trapped in the potential dip that forms the virtual cathode and eventually destroy it.

Intrator, T.↗

NASA NTRS1983

The expansion of a plasma into a vacuum - Basic phenomena and processes and applications to space plasma physics

In this review attention is called to basic phenomena and physical processes involved in the expansion of a plasma into a vacuum, or the expansion of a plasma into a more tenuous plasma, in particular the fact that upon the expansion, ions are accelerated and reach energies well above their thermal energy. Also, in the process of the expansion a rarefaction wave propagates into the ambient plasma, an ion front moves into the expansion volume, and discontinuities in plasma parameters occur. The physical processes which cause the above phenomena are discussed, and their possible application is suggested for the case of the distribution of ions and electrons (hence plasma potential and electric fields) in the wake region behind artificial and natural obstacles moving supersonically in a rarefied space plasma. To illustrate this, some in situ results are reexamined. Directions for future work in this area via the utilization of the Space Shuttle and laboratory work are also mentioned.

Wright, K. H., Jr.↗

NASA NTRS1988

Multichannel boxcar-averaged measurements of plasma parameters made using a digital storage scope

A technique for rapidly acquiring time-resolved, ensemble-averaged Langmuir probe characteristics is presented. Fifty probe characteristics are acquired using a digital storage oscilloscope in the time it would take to acquire a one-probe characteristic using a single-channel boxcar averager. A single Langmuir probe is used, and the probe bias is swept quite slowly, so that the probe is always in equilibrium with the plasma. A method for the automatic extraction of electron temperature, electron density, and the plasma potential from the acquired probe characteristics is described. This technique for acquisition and analysis is applied to the study of plasma decay and the effects of rf excitation in a pulsed, strongly magnetized plasma.

Sheridan, T. E.↗

NASA NTRS2006

High Power ECR Ion Thruster Discharge Characterization

Electron cyclotron resonance (ECR) based ion thrusters with carbon based ion optics can potentially satisfy lifetime requirements for long duration missions (approximately 10 years) because grid erosion and cathode insert depletion issues are virtually eliminated. Though the ECR plasma discharge has been found to typically operate at slightly higher discharge losses than conventional DC ion thrusters (for high total thruster power applications), the discharge power fraction is small (less than 1 percent at 25 kW). In this regard, the benefits of increased life, low discharge plasma potentials, and reduced complexity are welcome tradeoffs for the associated discharge efficiency decrease. Presented here are results from discharge characterization of a large area ECR plasma source for gridded ion thruster applications. These measurements included load matching efficacy, bulk plasma properties via Langmuir probe, and plasma uniformity as measured using current probes distributed at the exit plane. A high degree of plasma uniformity was observed (flatness greater than 0.9). Additionally, charge state composition was qualitatively evaluated using emission spectroscopy. Plasma induced emission was dominated by xenon ion lines. No doubly charged xenon ions were detected.

Foster, John E.↗

DOE OSTI2022

Relevance of E × B drifts for particle and heat transport in divertors

Radial electric fields up to ~4 kV m –1 are observed in the boundary between the private flux region (PFR) and the scrape-off layer (SOL) driving E × B drifts between the inner and outer targets at speeds up to 2.8 km s –1 in the Tokamak à configuration variable divertor. The resulting E × B fluxes, located in a narrow region ($\Delta {\rho _\Psi } < 0.012$ in normalized radius or $\Delta $ R – R sep <4 mm mapped to the outer midplane) are equivalent to around 20% of the total heat and particle flux to the divertor targets (inner + outer). At the peak E r , the E × B poloidal transport is equivalent to parallel flows with M ∥ ~ 3. In the snowflake divertor with a second X-point in the outer SOL, the drifts in the PFR-SOL boundary were equivalent to around 30% of the total heat and particle flux to the divertor targets and cover a region ~50% wider than in the single null ($\Delta {\rho _\Psi }$ ~ 0.018, $\Delta $R – R sep ~ 6 mm). Furthermore, the location of the PFR-SOL boundary drift shifts radially in the E ∥ × B direction when reversing the toroidal field direction. Peaks in density and electron pressure have been identified near the primary X-point along with large gradients in density, temperature, and potential, the latter resulting in a local electric field ~2.7 kV m –1 which drives a drift (1.9 km s –1 ) upwards towards the closed flux surfaces. Floating potential (V f ) magnitudes up to 75 V (~2 kT e ) were measured, indicating that V f and parallel currents should not be neglected when estimating plasma potential.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

NASA NTRS1982

Simulation of plasma double-layer structures

Electrostatic plasma double layers are numerically simulated by means of a magnetized 2 1/2 dimensional particle in cell method. The investigation of planar double layers indicates that these one dimensional potential structures are susceptible to periodic disruption by instabilities in the low potential plasmas. Only a slight increase in the double layer thickness with an increase in its obliqueness to the magnetic field is observed. Weak magnetization results in the double layer electric field alignment of accelerated particles and strong magnetization results in their magnetic field alignment. The numerical simulations of spatially periodic two dimensional double layers also exhibit cyclical instability. A morphological invariance in two dimensional double layers with respect to the degree of magnetization implies that the potential structures scale with Debye lengths rather than with gyroradii. Electron beam excited electrostatic electron cyclotron waves and (ion beam driven) solitary waves are present in the plasmas adjacent to the double layers.

Borovsky, J. E.↗

DOE OSTI2025

Azimuthal and axial structures in 3D particle-in-cell simulation of Penning discharge

We report the results of a 3D particle-in-cell simulation of cylindrical Penning discharge with the axial magnetic field in the so-called reflex configuration, where the cathode and anti-cathode are biased to the same negative potential. The discharge is supported by thermal electron emission from the cathode. Electron and ion collisions, including ionization, are fully accounted for. The emphasis is on a specific regime in which the plasma potential at the center of the discharge is positive with respect to the chamber walls, serving as an anode. Spatial and temporal scales of the observed azimuthal and axial fluctuations and structures are characterized. It is suggested that azimuthal structures are caused by the dissipative gradient-drift instability. We find that the axial fluctuations related to the plasma-beam instabilities are weakly correlated with the azimuthal perturbations of the density, so that the azimuthal modes rotate as a whole and do not show any axial shear. The behavior of the electric potential is more involved, demonstrating intermittent standing wave and propagating structures in the axial direction that modulate the electron transport, producing the standing wave pattern (along the z-direction) in the radial electron flux.

3D PIC simulation of discharge↗

DOE OSTI2025

Thermal and structural analysis of a new WEST reciprocating probe head with Titanium-Zirconium-Molybdenum armour material

The Tore Supra tokamak was transformed into an X-point divertor fusion device in the frame of the WEST (W-for tungsten-Environment in Steady-state Tokamak) project, launched in support of the ITER tungsten divertor strategy. WEST began operation in 2017. A new reciprocating probe head, equipped with a Titanium-Zirconium-Molybdenum (TZM) heat shield, was recently built and operated on WEST during the C9 Campaign in early 2024. TZM was chosen as armour material for its very good mechanical properties between 700 °C and 1400 °C. This material was already extensively used for probe heads and other plasma facing components on the Alcator C-Mod tokamak. Here, this paper presents the design of the new WEST probe head. It is equipped with tungsten filaments that can be heated to emit electrons and provide a direct measurement of the plasma potential in the scrape-off layer, and it is also equipped with a pair of Langmuir probes. The probe plunges vertically into the plasma, reaches its maximum dive depth, then returns to its protected resting position in about 0.25 s. Thermal loads are calculated using as input the thermal properties of TZM and radial profiles of the heat flux measured in the past by other reciprocating probes, and scaled upwards to the expected heat loads in the WEST scrape-off layer. An analytical estimation of Electromagnetic (EM) loads will also be presented, as well as a thermal and structural analysis of the probe for 15 cycles at maximum plunge depth. The probe is observed by an infrared camera. Comparisons between the heat flux deduced by the Langmuir probe and the infrared radiance of the probe housing during plasma exposure are finally presented.

Diagnostic↗

NASA NTRS1981

Additional application of the NASCAP code. Volume 2: SEPS, ion thruster neutralization and electrostatic antenna model

The interactions of spacecraft systems with the surrounding plasma environment were studied analytically for three cases of current interest: calculating the impact of spacecraft generated plasmas on the main power system of a baseline solar electric propulsion stage (SEPS), modeling the physics of the neutralization of an ion thruster beam by a plasma bridge, and examining the physical and electrical effects of orbital ambient plasmas on the operation of an electrostatically controlled membrane mirror. In order to perform these studies, the NASA charging analyzer program (NASCAP) was used as well as several other computer models and analytical estimates. The main result of the SEPS study was to show how charge exchange ion expansion can create a conducting channel between the thrusters and the solar arrays. A fluid-like model was able to predict plasma potentials and temperatures measured near the main beam of an ion thruster and in the vicinity of a hollow cathode neutralizer. Power losses due to plasma currents were shown to be substantial for several proposed electrostatic antenna designs.

Katz, I.↗

NASA NTRS1988

Electrostatic forces in planetary rings

The average charge on a particle in a particle-plasma cloud, the plasma potential inside the cloud, and the Coulomb force acting on the particle are calculated. The net repulsive electrostatic force on a particle depends on the plasma density, temperature, density of particles, particle size, and the gradient of the particle density. In a uniformly dense ring the electrostatic repulsion is zero. It is also shown that the electrostatic force acts like a pressure force, that even a collisionless ring can be stable against gravitational collapse, and that a finite ring thickness does not necessarily imply a finite velocity dispersion. A simple criterion for the importance of electrostatic forces in planetary rings is derived which involves the calculation of the vertical ring thickness which would result if only electrostatic repulsion were responsible for the finite ring thickness. Electrostatic forces are entirely negligible in the main rings of Saturn and the E and G rings. They may also be negligible in the F ring. However, the Uranian rings and Jupiter's ring seem to be very much influenced by electrostatic repulsion. In fact, electrostatic forces could support a Jovian ring which is an order of magnitude more dense than observed.

Goertz, C. K.↗

NASA NTRS2001

Langmuir Probe and Mass Spectroscopic Measurements in Inductively Coupled CF4 Plasmas

Abstract Electron and ion energy distribution functions and other plasma parameters such as plasma potential (V(sub p)) , electron temperature (T(sub e)), and electron and ion number densities (n (sub e) and n(sub i)) in low pressure CF4 plasmas have been measured. The experiments were conducted in a GEC cell using an inductively coupled plasma (ICP) device powered by a 13.56 MHz radio-frequency (rf) power source. The measurements were made at 300 W of input rf power at 10, 30 and 50 mTorr gas pressures. Langmuir probe measurements suggest that n(sub e), n(sub i) and V(sub p) remain constant over 60% of the central electrode area, beyond which they decrease. Within the limits of experimental error (+/- 0.25 eV), T(sub e) remains nearly constant over the electrode area. T(sub e) and V(sub p) increase with a decrease in pressure. n(sub e) and n(sub i) are not affected as significantly as T(sub e) or V(sub p) by variation in the gas pressure. The electron energy distribution function (EEDF) measurements indicate a highly non-Maxwellian plasma. CF3+ is the most dominant ion product of the plasma, followed by CF2+ and CF+. The concentrations of CF2+ and CF+ are much larger than that is possible from direct electron impact ionization of the parent gas. The cross-section data suggest that the direct electron impact ionization of fragment neutrals and negative ion production by electron attachment may be responsible for increase of the minor ions.

Rao, M. V. V. S.↗

NASA NTRS1985

Electrostatic wave observation during a space simulation beam-plasma discharge

ELF waves which were observed during beam-plasma discharge in the large vacuum chamber at Johnson Space Center are studied. Phase delays as a function of radius (obtained from cross-correlation measurements of density fluctuations) along with measurements of frequency and plasma potential, density, and temperature have been compared to a zero-order slab model of nonlocal azimuthal drift wave propagation. The inferred wave phase velocity in the plasma frame after Doppler correction is found to be near one half the electron diamagnetic drift velocity. Although the measurements presented do not uniquely define a propagation mode, a model of azimuthal drift wave propagation is found to be consistent with observations.

Walker, D. N.↗

NASA NTRS2016

Modeling an Iodine Hall Thruster Plume in the Iodine Satellite (ISAT)

An iodine-operated 200-W Hall thruster plume has been simulated using a hybrid-PIC model to predict the spacecraft surface-plume interaction for spacecraft integration purposes. For validation of the model, the plasma potential, electron temperature, ion current flux, and ion number density of xenon propellant were compared with available measurement data at the nominal operating condition. To simulate iodine plasma, various collision cross sections were found and used in the model. While time-varying atomic iodine species (i.e., I, I+, I2+) information is provided by HP Hall simulation at the discharge channel exit, the molecular iodine species (i.e., I2, I2+) are introduced as Maxwellian particles at the channel exit. Simulation results show that xenon and iodine plasma plumes appear to be very similar under the assumptions of the model. Assuming a sticking coefficient of unity, iodine deposition rate is estimated.

Iodine↗

NASA NTRS2016

Modeling an Iodine Hall Thruster Plume in the Iodine Satellite (ISAT)

An iodine-operated 200-W Hall thruster plume has been simulated using a hybrid-PIC model to predict the spacecraft surface-plume interaction for spacecraft integration purposes. For validation of the model, the plasma potential, electron temperature, ion current flux, and ion number density of xenon propellant were compared with available measurement data at the nominal operating condition. To simulate iodine plasma, various collision cross sections were found and used in the model. While time-varying atomic iodine species (i.e., I, I+, I2+) information is provided by HPHall simulation at the discharge channel exit, the molecular iodine species (i.e., I2, I2+) are introduced as Maxwellian particles at the channel exit. Simulation results show that xenon and iodine plasma plumes appear to be very similar under the assumptions of the model. Assuming a sticking coefficient of unity, iodine deposition rate is estimated.

Numerical Simulation↗