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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 109 records · Page 6
All sourcesNASA NTRSDOE OSTI
DOE OSTI2016

Nitrogen metastable (N 2 (A 3 $Σ$ $^{u}_{+}$)) in a cold argon atmospheric pressure plasma jet: Shielding and gas composition

N 2 (A 3 $Σ$ $^{u}_{+}$) metastable species are detected and measured in a non-equilibrium atmospheric pressure plasma jet by laser induced fluorescence. A shielding device is used to change the ambient conditions additionally to the feeding gas composition. Varying the amount of N 2 and air admixed to the feeding gas as well as changing the shielding gas from N 2 to air reveals that the highest N 2 (A 3 $Σ$ $^{u}_{+}$) is achieved in the case of air admixtures in spite of the enhanced collisional quenching due to the presence of O 2 . Here, the reasons for these observations are discussed in detail.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2019

Determination of nanoparticle collision cross section distribution functions in low pressure plasma synthesis reactors via ion mobility spectrometry

Low pressure (< 20 Torr) non-thermal plasma flow tube reactors are often used for the synthesis of high purity nanoparticles (NPs) via nucleation and subsequent growth from vapor phase precursors. In spite of their utility, process monitoring (i.e. output NP size characterization) in such reactors is difficult, as there is a dearth of techniques available for online nanoparticle size distribution function measurement. In this study, we developed and applied an ion mobility spectrometry (IMS) system consisting of a low pressure differential mobility analyzer (LPDMA) and electrical detector to determine the collision cross section distribution functions of Si NPs synthesized in a radiofrequency non-thermal SiH4-Ar plasma operated at ~2 Torr (266 Pa). The collision cross section, roughly proportional to projected area, is a parameter quantifying the size and structure of nanometer scale species in the vapor phase. We introduce the collision cross section distribution function as a metric for potential use in online process monitoring in NP synthesis. Proper inversion of the collision cross section distribution function requires a priori knowledge of the LPDMA transfer function. We utilized a tandem differential mobility analyzer approach, coupled with a Twomey-Markwoski based scheme to determine LPDMA transfer functions. Subsequent application of these transfer functions in collision cross section distribution function determination showed that at the outlet of the non-thermal plasma flow tube reactor, both negatively and positively charged Si NPs persisted with nearly identical collision cross section distribution functions. NPs were found to have mode “mobility equivalent” diameters near 10 nm, and via TEM analysis were found to persist at the reactor outlet as small aggregates composed of ~5 nm diameter primary particles. Size distributions functions inferred from collision cross section measurements were compared to size distribution functions inferred from TEM images; excellent agreement was found between IMS and TEM for both mean mobility equivalent diameter and distribution function width. In total, this study shows that (1) IMS is a viable approach for process monitoring in non-thermal plasma NP flow tube synthesis systems, (2) although NPs are modestly aggregated at low-pressure plasma reactor outlets, the extent of aggregation is considerably less than observed in most atmospheric pressure and equilibrium NP synthesis systems (e.g. flames), and (3) after exiting the plasma reactor, the decharging of NPs from highly negatively charge states to a bipolar charge distribution likely drives aggregation on the plasma boundary.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2015

Dual effects of atmospheric pressure plasma jet on skin wound healing of mice

ABSTRACT Cold plasma has become an attractive tool for promoting wound healing and treating skin diseases. This article presents an atmospheric pressure plasma jet (APPJ) generated in argon gas through dielectric barrier discharge, which was applied to superficial skin wounds in BALB/c mice. The mice ( n = 50) were assigned randomly into five groups (named A, B, C, D, E) with 10 animals in each group. Natural wound healing was compared with stimulated wound healing treated daily with APPJ for different time spans (10, 20, 30, 40, and 50 seconds) on 14 consecutive days. APPJ emission spectra, morphological changes in animal wounds, and tissue histological parameters were analyzed. Statistical results revealed that wound size changed over the duration of the experimental period and there was a significant interaction between experimental day and group. Differences between group C and other groups at day 7 were statistically significant ( p < 0.05). All groups had nearly achieved closure of the untreated control wounds at day 14. The wounds treated with APPJ for 10, 20, 30, and 40 seconds showed significantly enhanced daily improvement compared with the control and almost complete closure at day 12, 10, 7, and 13, respectively. The optimal results of epidermal cell regeneration, granulation tissue hyperplasia, and collagen deposition in histological aspect were observed at day 7. However, the wounds treated for 50 seconds were less well healed at day 14 than those of the control. It was concluded that appropriate doses of cold plasma could inactivate bacteria around the wound, activate fibroblast proliferation in wound tissue, and eventually promote wound healing. Whereas, over doses of plasma suppressed wound healing due to causing cell death by apoptosis or necrosis. Both positive and negative effects may be related to the existence of reactive oxygen and nitrogen species (ROS and RNS) in APPJ.

Xu, Gui‐Min↗
DOE OSTI2015

Atmospheric-pressure plasma jet characterization and applications on melanoma cancer treatment (B/16-F10)

A new approach in medicine is the use of cold plasma for various applications such as sterilization blood coagulation and cancer cell treatment. In this paper, a pin-to-hole plasma jet for biological applications has been designed and manufactured and characterized. The characterization includes power consumption via Lissajous method, thermal behavior of atmospheric-pressure plasma jet by using Infra-red camera as a novel method and using Speicair software to determine vibrational and transitional temperatures, and optical emission spectroscopy to determine the generated species. Treatment of Melanoma cancer cells (B16/F10) was also implemented, and tetrazolium salt dye (MTT assay) and flow cytometry were used to evaluate viability. Effect of ultraviolet photons on cancerous cells was also observed using an MgF{sub 2} crystal with MTT assay. Finally, in-vivo studies on C57 type mice were also done in order to have a better understanding of the effects in real conditions.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
DOE OSTI2023

Contrasting the characteristics of atmospheric pressure plasma jets operated with single and double dielectric material: physicochemical characteristics and application to bacterial killing

Abstract This study reports an experimental comparison of two types of atmospheric pressure plasma jets in terms of their fundamental plasma characteristics and efficacy in bacterial sterilization. The plasma jets are fabricated by inserting a high voltage electrode inside a one-end closed (double DBD plasma jet) or both ends open (single DBD plasma jet) quartz tubes which are further enclosed inside a second quartz tube containing a ground electrode. Both plasma jets are operated in contact with water surface by using a unipolar pulsed DC power supply with helium as the working gas. Results from electrical and time-resolved imaging show that the single DBD configuration induces 3–4 times higher accumulation of charges onto the water surface with significantly faster propagation of plasma bullets. These results are accompanied by the higher discharge intensity as well as stronger emissions from short-lived reactive species which were analyzed through optical emission spectroscopy at the plasma-water interface. The rotational temperature for the single DBD configuration was observed to be higher making it unsafe for direct treatments of sensitive biological targets. These characteristics of the single DBD configuration result in the production of more than two times higher concentration of H 2 O 2 in plasma activated water. Shielding of the HV electrode reduces the plasma potential which in turn reduces the electric field & electron energy at the plasma-water interface. The reduced electric field for the double DBD configuration was lower by ≈463 Td than the single DBD configuration. The bactericidal efficacy of the two configurations of the plasma jets were tested against Escherichia coli , a well studied Gram-negative bacterium that can be commensal and pathogenic in human body. Our results demonstrate that although single DBD plasma jet result in stronger antibacterial effects, the double DBD configuration could be safer.

Physics↗
NASA NTRS1972

Solar wind for a magnetized plasma with tensor plasma pressure.

A solar wind model for a magnetized solar wind is presented using one-fluid hydromagnetic equations with generalized polytrope equations of state for the two tensor components of the plasma pressure. Fluid and magnetic field variables are calculated at the Earth using certain boundary conditions at the Sun. The azimuthal velocity agrees with observed values and explains the considerable loss of angular momentum from the Sun by the solar wind. The results are good for most variables but suggest that a two-fluid model with electrons at higher temperatures and smaller temperature anisotropy ratios than the ions would give improved agreement for some quantities.

Tan, M.↗
DOE OSTI2025

Non-thermal atmospheric pressure plasma–liquid synthesis of organic acids in aqueous solution from carbon monoxide

This work aims at understanding the conversion of CO to organic acids, namely oxalic acid and formic acid, using non-thermal atmospheric pressure plasma over aqueous solutions. CO exhibited significantly higher conversion to organic acids (more than 15×) compared to CO 2 under the same reaction conditions. The result bolsters a proposed two-step process for CO 2 fixation, whereby CO 2 is first converted to CO, and then CO is converted to organic acids. The organic acids produced from CO are intermediates in the water–gas shift (WGS) reaction of CO in the presence of an aqueous solution to dissolved CO 2 and hydrogen gas. Based on a simple thermodynamic analysis, the organic acid yield was increased by lowering the plasma–liquid reaction temperature using an ice bath to cool the reaction flask. The composition of the organic acids could be varied by changing the pH of the solution. Oxalate was formed in higher concentrations with increasing solution pH above the pK a of the radical species (CO 2 )˙ − . Below the pK a value, formate was the exclusive organic acid formed. The production of formate has a rather weak pH dependence but is enhanced slightly at a basic pH above 10. Furthermore, at basic pH, the effect of electrolyte concentration comes into play. Higher electrolyte concentrations, leading to shorter electrolyte Debye lengths, resulted in lowered organic acid yields. The highest yields of organic acids obtained in our system were 122 mg L −1 for oxalate and 77 mg L −1 for formate at an optimum 1 mM NaOH concentration in the starting solution. This work is a successful pioneering example of CO to organic acids conversion using non-thermal plasmas, which opens the pathway for a promising two-step conversion process of CO 2 to organic acids.

Sudagar, Alcina Johnson [Washington University in ↗
DOE OSTI2020

Method for forming perovskite layers using atmospheric pressure plasma

Improved deposition of optoelectronically active perovskite materials is provided with a two step process. In the first step, precursors are deposited on a substrate. In the second step, the deposited precursors are exposed to an atmospheric pressure plasma which efficiently cures the precursors to provide the desired perovskite thin film. The resulting films can have excellent optical properties combined with superior mechanical properties.

36 MATERIALS SCIENCE↗
DOE OSTI2017

Atmospheric pressure plasma - $\mathrm{ARGET}$ $\mathrm{ATRP}$ modification of poly(ether sulfone) membranes: A combination attack

We report a novel surface modification technique for grafting alkyl methacrylate monomers from commercial poly(ether sulfone) (PES) nanofiltration membranes is developed through a combination of helium and oxygen atmospheric pressure plasma treatment followed by Activators Regenerated by Electron Transfer (ARGET) Atom Transfer Radical Polymerization (ATRP). The resulting membrane surfaces show degree of grafting increases of 28%, 94%, and 270% for methyl methacrylate (C1), hexyl methacrylate (C6), and stearyl methacrylate (C18), respectively, when characterized with Attenuated Total Reflectance Fourier Transform Infrared Spectroscopy. Scanning Electron Microscopy and Atomic Force Microscopy (AFM) show a rippled, fibrous morphology for the PES membranes grafted with C18 and reinforced through molecular dynamics simulations. AFM of the PES membranes grafted with C18 show an increase of ~ 23% in root-mean square (RMS) roughness as well as 4x higher adhesion force when probed with a hydrophobic gold cantilever tip when compared with the unmodified PES membranes, confirming a successful surface grafting reaction and increase in surface hydrophobicity, respectively. This technique allows enhanced synthesis of polymer grafted membranes using relatively green reaction solvent and enables “structure-by-design” surface morphology control with future applications in membrane separation processes such as organic solvent nanofiltration, gas separations, and desalination.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

Spatially resolved density measurements of singlet delta oxygen in a non-equilibrium atmospheric pressure plasma jet by molecular beam mass spectrometry

Singlet delta oxygen (O 2 (a 1 Δ g )), the first electronically excited state of O 2 , plays an important role in many applications. We report the first measurements of absolute densities of O 2 (a 1 Δ g ) in an atmospheric pressure plasma jet (APPJ) by molecular beam mass spectrometry (MBMS). The ability to measure axial and radial profiles of O 2 (a 1 Δ g ) impinging on a substrate in the effluent of the APPJ is a key advantage of the MBMS diagnostic method over previously reported optical methods. Here, the measured large O 2 (a 1 Δ g ) densities in the APPJ effluent, up to one order of magnitude higher than the O density, underline the potential importance of O 2 (a 1 Δ g ) in many applications using APPJs.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2023

Tomographic optical emission spectroscopy of atmospheric pressure plasma interacting with complex surfaces

Plasma distribution in 3D space is heavily influenced by complex surfaces and the coupling interactions between plasma properties and interfacing material properties. For example, guided streamers that transition to surface ionization waves (SIWs) and propagate over structured dielectrics experience field enhancements that can lead to localized increases in ionization rates and complex 3D configurations that are difficult to analyze. Investigating these configurations requires techniques than can provide a more complete 3D picture. To help address this capability gap, a tomographic optical emission spectroscopy (tomo-OES) diagnostic system has been developed at Sandia National Laboratories that can resolve SIWs. The system includes four intensified cameras that measure the angular projections of the plasma light emission through bandpass filters. A dot calibration target co-registers each angular projection to the same voxel grid and an algebraic reconstruction technique (ART) recovers the light intensity at each voxel. An atmospheric pressure plasma jet (APPJ), provided by Peter Bruggeman, has been investigated and representative results are shown in Figure 1. Here, a bandpass filter was used to isolate emission from the N 2 second positive system (SPS) at 337.1 nm to capture the transition of the streamer to SIW on a planar dielectric surface (relative permittivity 3.3) located 3 mm below the APPJ [3]. The surface wave velocity was 3.5x10 4 (m/s), consistent with measurements made by Steven Shannon. Characterization of this APPJ will support the group effort of standing up a reproducible APPJ across institutions for applications such as liquid treatment, catalysis, and plasma aided combustion. Future work will investigate non-planar surfaces and eventually develop tomographic laser-induced fluorescence (tomo-LIF) approaches.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2019

Multi-mode ionization instability induced striations in RF driven He/H 2 O atmospheric pressure plasma (APP) discharges

Previously [E. Kawamura et al., Plasma Sources Sci. Technol. 25, 054009 (2016) and E. Kawamura et al., J. Phys. D: Appl. Phys. 50, 145204 (2017)], one dimensional (1D) particle-in-cell (PIC) simulations of 1 to 4mm gap, He/2%H 2 O atmospheric pressure plasma discharges showed an ionization instability resulting in bulk striations. Assuming that the ionization rate coefficient K iz is related to the root mean square electric field E by K iz &prop; E q , a striation theory showed that q<0 is a necessary condition for the instability. A local calculation yielded q>0, implying that nonlocal electron kinetics are required for the instability. Wider gaps can fit in a wider range of wavelengths, resulting in multi-mode striations. Previously, we assumed a single mean q value for each discharge, and did not calculate q for each mode separately. Here, we develop a wavelength resolved global striation model and apply it to 1D PIC simulations of 4mm gap discharges with input currents J rf = 0.04 to 0.30A/cm 2 . We first examine a base case at 0.23A/cm 2 and observe a mixture of unstable modes within a window of wavelengths λ. At shorter λ, the modes are suppressed by diffusion. At longer λ, we observe a transition to locality in which q becomes less negative with increasing λ, approaching its local positive value and stabilizing the modes. The window of unstable modes shifts to shorter λ with increasing J rf , causing the modes to be suppressed by diffusion at higher J rf . At lower J rf , the decrease in bulk plasma density with decreasing J rf suppresses the striations.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2018

Ionization instability induced striations in low frequency and pulsed He/H 2 O atmospheric pressure plasmas

In previous work [Kawamura et al., Plasma Sources Sci. Technol. 25, 054009 (2016)] and [Kawamura et al., J. Phys. D: Appl. Phys. 50, 145204 (2017)], 1D kinetic particle-in-cell (PIC) simulations of narrow gap (1 to 4 mm), high frequency (27 MHz) or dc-driven, He/2%H 2 O atmospheric pressure plasmas (APPs) showed an ionization instability resulting in standing striations (spatial oscillations) in the bulk plasma. We developed a steady-state striation theory which showed that the striations are due to non-local electron kinetics. In both the high frequency and dc-driven cases, the equilibrium electron density n 0 in the plasma bulk was stationary. In this work, we first conduct 1D PIC simulations of a 1 mm gap He/2%H 2 O APP, driven by a sinusoidal current at a low frequency of f = 50 kHz such that ω = 2 πf is well below the ionization frequency ν iz . In this case, n 0 varies with time, and we observe a time-varying instability which quasistatically depends on n 0 ( t ). At each phase of the rf cycle, the discharge resembles a dc discharge at the same n 0 . At higher frequencies (200 kHz–1 MHz), ω approaches ν iz , and quasistatic equilibrium at each phase breaks down. The discharge is also driven with a 200 kHz, 50% duty cycle square wave pulse with a short rise and fall time of 0.1 μs in an attempt to directly measure the striation growth rate s during the on-cycle before it saturated. However, the spike in current during the rise time leads to a spike in electron temperature T e and hence ν iz and s at the beginning of the rise which saturated during the beginning of the on-cycle. To predict the instability growth rate and saturation during and after the current spike, we extend our striation theory to include time-varying n 0 , T e , ν iz , as well as terms for the nonlinear saturation and noise floor of the striation amplitude. Furthermore, the time-varying global model predictions are compared to the PIC simulations, showing reasonable agreement.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2025

Two-dimensional mapping of absolute OH densities in an atmospheric pressure plasma effluent via planar laser-induced fluorescence: effects of He/H 2 O and He/O 2 mixtures in N 2 and air, with and without solid targets

Planar laser-induced fluorescence (LIF) was employed to measure the absolute density of hydroxyl radicals (OH) in the effluent of the COST Reference Microplasma Jet for two feed gas mixtures: He/H 2 O and He/O 2 . Experiments were conducted with the effluent propagating into air and N 2 environments. For the He/H 2 O case, measurements were also performed with the effluent impinging on a solid target at varying distances from the jet nozzle. Calibration of the OH-LIF signal from the COST-Jet was achieved by comparing it to a reference signal generated by the photofragmentation of H 2 O 2 . Results demonstrated that OH densities were sustained longer when the effluent propagates in a nitrogen environment compared to air, particularly with water added to the feed gas. The broader OH distribution in N 2 suggests slower consumption due to the absence of oxygen, which accelerates OH depletion in air via reactions involving O 2 and HO 2 . Even when water was not added to the feed, as in the He/O 2 case, appreciable OH densities were observed, due to gas impurities and reactive species interactions with atmospheric humidity, forming reaction fronts that delineate the gas flow. Two-dimensional fluid dynamics simulations elucidated the influence of atmospheric gas entrainment and solid targets on the OH distribution. Experimental trends were further compared with a zero-dimensional chemistry model to explore OH production and consumption mechanisms in air and nitrogen environments.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS2005

Low Pressure Plasma Sprayed Overlay Coatings for GRCop-84 Combustion Chamber Liners for Reusable Launch Vehicles

An advanced Cu-8(at.%)Cr-4%Nb alloy developed at NASA's Glenn Research Center, and designated as GRCop-84, is currently being considered for use as combustor chamber liners and nozzle ramps in NASA s future generations of reusable launch vehicles (RLVs). However, past experience has shown that unprotected copper alloys undergo an environmental attack called "blanching" in rocket engines using liquid hydrogen as fuel and liquid oxygen as the oxidizer. Potential for sulfidation attack of the liners in hydrocarbon-fueled engines is also of concern. Protective overlay coatings alloys are being developed for GRCop-84. The development of this coatings technology has involved a combination of modeling, coatings development and characterization, and process optimization. Coatings have been low pressure plasma sprayed on GRCop-84 substrates of various geometries and shapes. Microstructural, mechanical property data and thermophysical results on the coated substrates are presented and discussed.

Raj, S. V.↗
DOE OSTI2022

Spatially enhanced electric field induced second harmonic (SEEFISH) generation for measurements of electric field distributions in high-pressure plasmas

Abstract The spatial resolution of the ps electric field induced second harmonic (EFISH) generation has been enhanced by using non-collinear pump laser beam arrangements. The pump laser beam (1064 nm, nominal pulse duration 150 ps, pulse energy 20–40 mJ) is separated into two coaxial or crossing beams, overlapping only near the focal point. The spatially enhanced EFISH (SEEFISH) signal is generated over a shorter beam overlap region compared to the collinear beam arrangement. Blocking of either of the two beams results in a complete suppression of the signal. The signal is spatially isolated from the ‘conventional’ EFISH signal and measured by a photomultiplier detector. Measurements of a known Laplacian field generated between two parallel cylinder electrodes in ambient air shows that SEEFISH improves the spatial resolution of the measurements by up to a factor of 2, such that the measurement results agree with the Laplacian field distribution. The spatial resolution is improved further by reducing the focal distance of the lens. The magnitude of the SEEFISH signal is significantly lower compared to that of the single-beam EFISH and decreases rapidly as the beam crossing angle is increased, due to the phase mismatch. This approach has a significant potential for measurements of electric field distributions in high-pressure plasmas, with an additional benefit of removing the stray second harmonic signal from the optical access windows.

Physics↗
DOE OSTI2023

Species, Pathways, and Timescales for NH 3 Formation by Low-Temperature Atmospheric Pressure Plasma Catalysis

Species, pathways, and timescales for NH3 production by plasma catalysis over transition-metal wools are determined by measuring plasma-derived species densities [N, H, and N 2 (v)], quantitatively correlating consumption of these species with NH 3 formation, and measuring consumption of plasma-derived species at different residence times. These findings are enabled by a capillary flow through Ar/N 2 /H 2 plasma jet reactor setup that allows for the measurement of gas-phase species densities by molecular beam mass spectrometry. Surface-mediated reactions involving N radicals are responsible for NH 3 formation over Fe, Ni, and Ag surfaces. N reacts to form NH 3 with ~100% selectivity over Ni and Ag when H/N > 3 and % H 2 ≥ 0.5. The selectivity to ammonia drops as H and H 2 densities decrease for each catalyst. A comparison between amounts of NH 3 formed and N consumed with and without catalysts present shows that surface reactions enable higher and more selective conversion of N to NH 3 than gas-phase reactions alone. The conversion of N to NH 3 is negligible in the absence of H, demonstrating that H is required to produce NH 3 at these operating conditions. The consumption of N occurs on the same timescale as NH 3 formation, further confirming that reactions involving N contribute to NH 3 formation. Though vibrationally excited N 2 [N 2 (v)] is produced in quantities exceeding N by 100-fold, consumption of N 2 (v) on the catalytic surface does not contribute to NH 3 formation. Furthermore, these findings show that for low-temperature atmospheric pressure plasma catalysis, surface- mediated reactions among radical N and H species drive NH 3 formation.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2016

“Virtual IED sensor” at an rf-biased electrode in low-pressure plasma

Energy distribution and the flux of the ions coming on a surface are considered as the key-parameters in anisotropic plasma etching. Since direct ion energy distribution (IED) measurements at the treated surface during plasma processing are often hardly possible, there is an opportunity for virtual ones. This work is devoted to the possibility of such indirect IED and ion flux measurements at an rf-biased electrode in low-pressure rf plasma by using a “virtual IED sensor” which represents “in-situ” IED calculations on the absolute scale in accordance with a plasma sheath model containing a set of measurable external parameters. The “virtual IED sensor” should also involve some external calibration procedure. Applicability and accuracy of the “virtual IED sensor” are validated for a dual-frequency reactive ion etching (RIE) inductively coupled plasma (ICP) reactor with a capacitively coupled rf-biased electrode. The validation is carried out for heavy (Ar) and light (H{sub 2}) gases under different discharge conditions (different ICP powers, rf-bias frequencies, and voltages). An EQP mass-spectrometer and an rf-compensated Langmuir probe (LP) are used to characterize plasma, while an rf-compensated retarded field energy analyzer (RFEA) is applied to measure IED and ion flux at the rf-biased electrode. Besides, the pulsed selfbias method is used as an external calibration procedure for ion flux estimating at the rf-biased electrode. It is shown that pulsed selfbias method allows calibrating the IED absolute scale quite accurately. It is also shown that the “virtual IED sensor” based on the simplest collisionless sheath model allows reproducing well enough the experimental IEDs at the pressures when the sheath thickness s is less than the ion mean free path λ{sub i} (s < λ{sub i}). At higher pressure (when s > λ{sub i}), the difference between calculated and experimental IEDs due to ion collisions in the sheath is observed in the low energy range. The effect of electron impact ionization in the sheath on the origin and intensity of low-energy peaks in IED is discussed compared to ion charge-exchange collisions. Obviously, the extrapolation of the “virtual IED sensor” approach to higher pressures requires developing some other sheath models, taking into account both ion and electron collisions and probably including even a model of the whole plasma volume instead of plasma sheath one.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗