Search NASA⌕ Search

SEARCH · Search NASA

Results for “SEM”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 109 records · Page 6

Use a SEM on a production line

Scanning electron microscope for poor metallization detection in manufacturing cycle of semiconductor devices

Adolphsen, J. W.↗

Examination of oxide scales in the SEM using backscattered electron images

The complementary use of the scanning electron microscope in the backscattered electron mode with the more usual secondary electron mode results in a significant increase in the versatility of the instrument, since regions of different chemical composition can be readily detected, and their morphology examined. The use of this technique to examine complex oxide scales formed on heat-resistant alloys is described, and in particular the location of thoria particles in the scale formed on a Ni-20 wt pct Cr-2.3 wt pct ThO2 alloy, and the examination of the behavior of yttrium during the high-temperature oxidation of a Co-Cr-Al-Y alloy are discussed.

Price, C. W.↗

Dynamic SEM wear studies of tungsten carbide cermets

Dynamic friction and wear experiments were conducted in a scanning electron microscope. The wear behavior of pure tungsten carbide and composite with 6 and 15 weight percent cobalt binder was examined, and etching of the binder was done to selectively determine the role of the binder in the wear process. Dynamic experiments were conducted as the tungsten carbide (WC) and bonded WC cermet surfaces were transversed by a 50 micron radiused diamond stylus. These studies show that the predominant wear process in WC is fracture initiated by plastic deformation, and the wear of the etched cermets is similar to pure WC. The presence of the cobalt binder reduces both friction and wear. The cementing action of the cobalt reduces granular separation, and promotes a dense polished layer because of its low shear strength film-forming properties. The wear debris generated from unetched surface is approximately the same composition as the bulk.

Brainard, W. A.↗

SEM evaluation of metallization on semiconductors

A test method for the evaluation of metallization on semiconductors is presented and discussed. The method has been prepared in MIL-STD format for submittal as a proposed addition to MIL-STD-883. It is applicable to discrete devices and to integrated circuits and specifically addresses batch-process oriented defects. Quantitative accept/reject criteria are given for contact windows, other oxide steps, and general interconnecting metallization. Figures are provided that illustrate typical types of defects. Apparatus specifications, sampling plans, and specimen preparation and examination requirements are described. Procedures for glassivated devices and for multi-metal interconnection systems are included.

Fresh, D. L.↗

Dynamic SEM wear studies of tungsten carbide cermets

Dynamic friction and wear experiments were conducted in a scanning electron microscope. The wear behavior of pure tungsten carbide and composite with 6 and 15 weight percent cobalt binder was examined. Etching of the binder was done to selectively determine the role of the binder in the wear process. Dynamic experiments were conducted as the WC and bonded WC cermet surfaces were transversed by a 50 micron radiused diamond stylus. These studies show that the predominant wear process in WC is fracture initiated by plastic deformation. The wear of the etched cermets is similar to pure WC. The presence of the cobalt binder reduces both friction and wear. The cementing action of the cobalt reduces granular separation and promotes a dense polished layer because of its low shear strength film-forming properties. The wear debris generated from unetched surface is approximately the same composition as the bulk.

Brainard, W. A.↗

Lithification of vitric- and clastic-matrix breccias - SEM petrography

A scanning electron microscope was used in a petrographic investigation of the matrix textures of 41 lunar breccias ranging from very friable soil clods through coherent microbreccias and tough vitric breccias to tough, fine-grained crystalline breccias. It was found that as their coherence increases, the matrices display a gradual increase in the content of glass from 1 or 2% as filaments less than 1 micron across through 5-50% as irregularly shaped patches up to 200 microns across to over 50% as continuous networks.

Phinney, W. C.↗

SEM analysis of ionizing radiation effects in an analog to digital converter /AD571/

The considered investigation is concerned with the study of the total-dose degradation mechanisms in an IIL analog to digital (A/D) converter. The A/D converter is a 10 digit device having nine separate functional units on the chip which encompass several hundred transistors and circuit elements. It was the objective of the described research to find the radiation sensitive elements by a systematic search of the devices on the LSI chip. The employed technique using a scanning electron microscope to determine the functional blocks of an integrated circuit which are sensitive to ionizing radiation and then progressively zeroing in on the soft components within those blocks, proved extremely successful on the AD571. Four functional blocks were found to be sensitive to radiation, including the Voltage Reference, DAC, IIL Clock, and IIL SAR.

Gauthier, M. K.↗

SEM, optical, and Moessbauer studies of submicrometer chromite in Allende

New scanning electron and optical microscope results are presented showing that sub-micrometer chromite is abundant along healed cracks and grain boundaries in Allende chondrule olivine. Some wider healed cracks also contain pentlandite and euhedral Ni3Fe grains. Also reported are Moessbauer measurements on Allende HF-HCl residues confirming a high Fe(+++)/Fe(++) ratio.

Housley, R. M.↗

TEM and SEM (EBIC) investigations of silicon bicrystals

The electrical and structural properties of low and medium angle tilt grain boundaries in silicon bicrystals were studied in order to obtain insight into the mechanisms determining the recombination activity. The electrical behavior of these grain boundaries was studied with the EBIC technique. Schottky barriers rather than p-n junctions were used to avoid annealing induced changes of the structure and impurity content of the as-grown crystals. Transmission electron spectroscopy reveals that the 20 deg boundary is straight, homogeneous, and free of extrinsic dislocations. It is concluded that, in the samples studied, the electrical effect of grain boundaries appears to be independent of the boundary misorientation. The dominant influence appears to be impurity segregation effects to the boundary. Cleaner bicrystals are required to study intrinsic differences in the electrical activity of the two boundaries.

Gleichmann, R.↗

Real-time SEM studies in controlled reactive atmospheres

A unique scanning electron accessory has been developed that allows the observation of specimens under partial pressures of any gas. The sample is placed in a metal support boat inside a special sample holder. The sample in the boat is imaged on a CRT and is simultaneously recorded on a videotape, allowing the reaction between the sample and the gas to be observed in real time. Sample changes can be seen continuously as the sample is being heated or cooled. This process allows the observation of material transformations such as phase changes as they happen. Temperatures as high as 1000 C have been used and are continuously monitored using a thermocouple with a digital display on the CRT and videotape. X-ray analyses can also be run before and after any reactions. In the study described here, thick-film screen-printing inks using molybdenum/tin compositions as a replacement for silver were developed to be used on terrestrial photovoltaic cells. Pieces were placed on the sample stage and heated in both O2 and H2 atmospheres. The results were used to determine the most effective frits to be used in the thick-film inks.

Gallagher, B. D.↗

An in-situ study in SEM of delamination in several graphite/epoxy composite material systems

A three point bend fixture compatible with the current loading stage for the Scanning Electron Microscope was designed and fabricated. End-notched flexure tests were run on several materials. Work to date was on AS4/3502, T6T145/F155, and T6T145/F185. Fracture toughness was measured. Fracture of neat resin specimens was begun. The decrease in delaminatin fracture toughness, compared to neat resin toughness, due to rigid fiber filler and interlaminar failure is addressed. An experimental program was designed to try to determine the proper interpretatin for apparent microcracking in neat resin specimens.

Bradley, W. L.↗

FE-SEM, FIB and TEM Study of Surface Deposits of Apollo 15 Green Glass Volcanic Spherules

Surface deposits on lunar pyroclastic green (Apollo 15) and orange (Apollo 17) glass spherules have been attributed to condensation from the gas clouds that accompanied fire-fountain eruptions. The fire fountains cast molten lava high above the lunar surface and the silicate melt droplets quenched before landing producing the glass beads. Early investigations showed that these deposits are rich in sulfur and zinc. The deposits are extremely fine-grained and thin, so that it was never possible to determine their chemical compositions cleanly by SEM/EDX or electron probe x-ray analysis because most of the excited volume was in the under-lying silicate glass. We are investigating the surface deposits by TEM, using focused ion beam (FIB) microscopy to extract and thin the surface deposits. Here we report on chemical mapping of a FIB section of surface deposits of an Apollo green glass bead 15401using the ultra-high resolution JEOL 2500 STEM located at NASA Johnson Space Center.

Ross, Daniel K.↗

SEM and TEM Observation of the Surfaces of the Fine-Grained Particles Retrieved from the Muses-C Regio on the Asteroid 25413 Itokawa

Surface materials on airless solar system bodies exposed to interplanetary space are gradually changed their visible to near-infrared reflectance spectra by the process called "space weathering", which makes the spectra darker and redder. Hapke et al. proposed a model of space weathering: vapor deposition of nanophase reduced iron (npFe(sup 0)) on the surfaces of the grains within the very surface of lunar regolith. This model has been proved by detailed observation of the surfaces of the lunar soil grains by transmission electron microscope (TEM). They demonstrated that npFe(sup 0) was formed by a combination of vapor deposition and irradiation effects. In other words, both micrometeorite impacts and irradiation by solar wind and galactic cosmic ray play roles on the space weathering on the Moon. Because there is a continuum of reflectance spectra from those of Q-type asteroids (almost the same as those of ordinary chondrites) to those of S-type asteroids, it is strongly suggested that reflectance spectra of asteroids composed of ordinary chondrite-like materials were modified over time to those of S-type asteroids due to space weathering. It is predicted that a small amount of npFe(sup 0) on the surface of grains in the asteroidal regolith composed of ordinary chondrite-like materials is the main agent of asteroidal space weathering.

Noguchi, T.↗