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At least 109 records · Page 6

Influence of Turbulence on the Restraint of Liquid Jets by Surface Tension in Microgravity Investigated

Microgravity poses many challenges to the designer of spacecraft tanks. Chief among these are the lack of phase separation and the need to supply vapor-free liquid or liquidfree vapor to the spacecraft processes that require fluid. One of the principal problems of phase separation is the creation of liquid jets. A jet can be created by liquid filling, settling of the fluid to one end of the tank, or even closing a valve to stop the liquid flow. Anyone who has seen a fountain knows that jets occur in normal gravity also. However, in normal gravity, the gravity controls and restricts the jet flow. In microgravity, with gravity largely absent, surface tension forces must contain jets. To model this phenomenon, a numerical method that tracks the fluid motion and the surface tension forces is required. Jacqmin has developed a phase model that converts the discrete surface tension force into a barrier function that peaks at the free surface and decays rapidly away. Previous attempts at this formulation were criticized for smearing the interface. This can be overcome by sharpening the phase function, double gridding the fluid function, and using a higher order solution for the fluid function. The solution of this equation can be rewritten as two coupled Poisson equations that also include the velocity. After the code was implemented in axisymmetric form and verified by several test cases at the NASA Glenn Research Center, the drop tower runs of Aydelott were modeled. Work last year with a laminar model was found to overpredict Aydelott's results, except at the lowest Reynolds number conditions of 400. This year, a simple turbulence model was implemented by adding a turbulent viscosity based on the mixing-length hypothesis and empirical measurements of previous works. Predictions made after this change was implemented have been much closer to experimentally observed flow patterns and geyser heights. Two model runs is shown. The first, without any turbulence correction, breaks through the free surface and strikes the far end of the tank. In the second, the turbulence spreads the jet momentum over more of the free surface, enabling the surface tension forces to turn the jet back into the bulk liquid. The model geyser height with the second model is 1.1 cm. This is quite close to the 1.5-cm geyser height measured by Aydelott.

Chato, David J.↗

Contact Angle Influence on Geysering Jets in Microgravity Investigated

Microgravity poses many challenges to the designer of spacecraft tanks. Chief among these are the lack of phase separation and the need to supply vapor-free liquid or liquid-free vapor to the spacecraft processes that require fluid. One of the principal problems of phase separation is the creation of liquid jets. A jet can be created by liquid filling, settling of the fluid to one end of the tank, or even closing a valve to stop the liquid flow. Anyone who has seen a fountain knows that jets occur in normal gravity also. However, in normal gravity, the gravity controls and restricts the jet flow. In microgravity, with gravity largely absent, surface tension forces must be used to contain jets. To model this phenomenon, a numerical method that tracks the fluid motion and the surface tension forces is required. Jacqmin has developed a phase model that converts the discrete surface tension force into a barrier function that peaks at the free surface and decays rapidly away. Previous attempts at this formulation were criticized for smearing the interface. This can be overcome by sharpening the phase function, double gridding the fluid function, and using a higher-order solution for the fluid function. The solution of this equation can be rewritten as two coupled Poisson equations that also include the velocity.

Chato, David J.↗

Learning Lessons from the X-37 Project

The X-37 was planned as an automated vehicle capable of flight-testing new aerospace technologies in combined environments that are beyond the capability of existing ground or flight platforms. Flight demonstration with the X-37 architecture and configuration in relevant environments was planned to reduce the risk of developing launch vehicle technologies for sustainable, affordable exploration and other aerospace applications. Current plans are for the X-37 Approach and Landing Test Vehicle (ALTV) to be atmospheric tested in 2005 from Scaled Composite s White Knight carrier aircraft at up to 40,000 feet over California's Mojave Spaceport, with landing and turnaround maintenance performed. The Flight Operations Control Center will conduct the mission, using a streamlined operations concept. Taxi-tow and captive-carry tests will be conducted prior to the atmospheric-test series. Sponsored by the Defense Advanced Research Projects Agency (DARPA) with NASA participation, technical objectives are to: (1) mature Computed Air Data System/Remote Pressure Sensor technology, (2) manage energy during Terminal Area Energy Management/Heading Alignment Cone maneuvers, and (3) validate the aerodatabase. The X-37 Project began in 1999 under a cooperative agreement as an element of NASA's Future X Program and transitioned to a NASA Research Announcement under the Space Launch Initiative. In mid-2004, NASA transferred ownership to DARPA, with its heritage of performing high-risk, high-payoff research and development (R&D). NASA contributes technical expertise, including risk analysis and system integration. The Boeing Company is the prime contractor, with nationwide suppliers. This partnership exemplifies the synergy attainable when NASA Centers, other Government agencies, and industry work together toward a common goal - contributing to the knowledge base for U.S. exploration and other aerospace endeavors. The X-37 team represents a range of space transportation disciplines - from engineering to management. Some members have been with the project since its inception. All have gained priceless experience during the design, manufacturing, and testing of the ALTV, as well as through developing advanced orbital flight technologies, such as state-of-the-art Thermal Protection Systems and hot structures. Throughout this process, the X-37 Project team captures lessons that are directly applicable to other such efforts. The upcoming ALTV flights offer another dimension of data and first-hand experience that will prove invaluable to those designing new generations of reusable spacecraft. And ongoing technology developments will expand the aerospace knowledge base. Delivering prototype hardware is always a risky proposition. During the course of this effort, the X-37 team has experienced many challenging opportunities, delivering significant accomplishments and learning numerous lessons in the process. The ability to manage the risk landscape is key to overcoming obstacles, especially technical hurdles that are encountered in progressing hardware from design to flight. The approach to managing risk under this partnership is evolving but, in general, the team allocates resources to reduce the likelihood of severe-consequence risks, thus maximizing mission success and ensuring that the X-37 Project delivers value to its stakeholders. As the team sharpens its focus on operations, it continues to contribute knowledge to those who would undertake high-risk, high-payoff R&D and provides valuable experience to implement the Vision for Space Exploration.

Turner, Susan↗

Assessing Hurricane Katrina Damage to the Mississippi Gulf Coast Using IKONOS Imagery

Hurricane Katrina hit southeastern Louisiana and the Mississippi Gulf Coast as a Category 3 hurricane with storm surges as high as 9 m. Katrina devastated several coastal towns by destroying or severely damaging hundreds of homes. Several Federal agencies are assessing storm impacts and assisting recovery using high-spatial-resolution remotely sensed data from satellite and airborne platforms. High-quality IKONOS satellite imagery was collected on September 2, 2005, over southwestern Mississippi. Pan-sharpened IKONOS multispectral data and ERDAS IMAGINE software were used to classify post-storm land cover for coastal Hancock and Harrison Counties. This classification included a storm debris category of interest to FEMA for disaster mitigation. The classification resulted from combining traditional unsupervised and supervised classification techniques. Higher spatial resolution aerial and handheld photography were used as reference data. Results suggest that traditional classification techniques and IKONOS data can map wood-dominated storm debris in open areas if relevant training areas are used to develop the unsupervised classification signatures. IKONOS data also enabled other hurricane damage assessment, such as flood-deposited mud on lawns and vegetation foliage loss from the storm. IKONOS data has also aided regional Katrina vegetation damage surveys from multidate Land Remote Sensing Satellite and Moderate Resolution Imaging Spectroradiometer data.

Spruce, Joseph↗

New Challenges in Model Checking

In the last 25 years, the notion of performing software verification with logic model checking techniques has evolved from intellectual curiosity to accepted technology with significant potential for broad practical application. In this paper we look back at the main steps in this evolution and illustrate how the challenges have changed over the years, as we sharpened our theories and tools. Next we discuss a typical challenge in software verification that we face today - and that perhaps we can look back on in another 25 years as having inspired the next logical step towards a broader integration of model checking into the software development process.

software verification↗

Image enhancement by non-linear extrapolation in frequency space

An input image is enhanced to include spatial frequency components having frequencies higher than those in an input image. To this end, an edge map is generated from the input image using a high band pass filtering technique. An enhancing map is subsequently generated from the edge map, with the enhanced map having spatial frequencies exceeding an initial maximum spatial frequency of the input image. The enhanced map is generated by applying a non-linear operator to the edge map in a manner which preserves the phase transitions of the edges of the input image. The enhanced map is added to the input image to achieve a resulting image having spatial frequencies greater than those in the input image. Simplicity of computations and ease of implementation allow for image sharpening after enlargement and for real-time applications such as videophones, advanced definition television, zooming, and restoration of old motion pictures.

Anderson, Charles H.↗

Composite prepreg application device

A heated shoe and cooled pressure roller assembly for composite prepreg application is provided. The shoe assembly includes a heated forward contact surface having a curved pressure surface. The following cooled roller provides a continuous pressure to the thermoplastic while reducing the temperature to approximately 5.degree. C. below glass transition temperature. Electric heating coils inside the forward portion of the shoe heat a thermoplastic workpiece to approximately 100.degree. C. above the glass transition. Immediately following the heated contact surface, a cooled roller cools the work. The end sharpened shape of the heated shoe trailing edge tends to prevent slag buildup and maintain a uniform, relaxed stress fabrication.

Sandusky, Donald A.↗

MISR Level 1B1 Local Mode Radiance Data (MIB1LM_V1)

The results of two types of processing are included in this product. First, the Radiance Scaling operation converts the camera's digital number output to a measure of energy incident on the front optical surface. The measurement is expressed in units called radiance (energy per unit area, wavelength, and solid angle) as defined by the International Standard (SI). Second, Radiance Conditioning modifies the radiances to remove instrument-dependent effects. Specifically, image sharpening is applied, and focal-plane scattering is removed. Additionally, all radiances are adjusted to remove slight spectral sensitivity differences among the 1504 detector elements of each spectral band and each camera. In addition to the Level 1B1 radiometric product for MISR's Global Mode imagery, there is a separate Level 1B1 product for each high-resolution Local Mode scene. The Radiometric Product contains spectral radiances for all MISR channels (four spectral bands and nine cameras). Each radiance value represents the incident radiance averaged over the sensor's total band response. Processing includes both radiance scaling and conditioning steps. Radiance scaling converts the Level 1A data from digital counts to radiances using coefficients derived in combination with the On-Board Calibrator (OBC) and vicarious calibrations. The OBC contains Spectralon calibration panels which are deployed monthly and reflect sunlight into the cameras. The OBC detector standards then measure this reflected light to provide the calibration. Vicarious field campaigns are conducted less frequently but provide an independent methodology useful for reducing systematic errors. Radiance conditioning removes undesirable instrument effects. Image enhancement is provided by deconvolving the scene with the sensor's point-spread-function. Additionally, in-band scaling adjusts the reported radiances to correspond to a nominal band response profile. This frees the Level 2 software from the need to correct for detector element non-uniformities. No out-of-band correction is done for this product, nor are the data geometrically corrected or resampled at this point. In summary, the Level 1B1 Product contains the Data Numbers (DNs) radiometrically-scaled to radiances with no geometric resampling. [Location=GLOBAL] [Temporal_Coverage: Start_Date=2000-02-24; Stop_Date=] [Spatial_Coverage: Southernmost_Latitude=-90; Northernmost_Latitude=90; Westernmost_Longitude=-180; Easternmost_Longitude=180] [Data_Resolution: Latitude_Resolution=275 m for red band only; Longitude_Resolution=275 m for red band only; Horizontal_Resolution_Range=250 km - < 500 km or approximately 2.5 degrees - < 5.0 degrees; Temporal_Resolution=about 15 orbits/day].

NEAR IR IMAGERY↗

MISR Level 1B1 Radiance Data (MI1B1_V1)

The results of two types of processing are included in this product. First, the Radiance Scaling operation converts the camera's digital number output to a measure of energy incident on the front optical surface. The measurement is expressed in units called radiance (energy per unit area, wavelength, and solid angle) as defined by the International Standard (SI). Second, Radiance Conditioning modifies the radiances to remove instrument-dependent effects. Specifically, image sharpening is applied, and focal-plane scattering is removed. Additionally, all radiances are adjusted to remove slight spectral sensitivity differences among the 1504 detector elements of each spectral band and each camera. The Radiometric Product contains spectral radiances for all MISR channels (four spectral bands and nine cameras). Each radiance value represents the incident radiance averaged over the sensor's total band response. Processing includes both radiance scaling and conditioning steps. Radiance scaling converts the Level 1A data from digital counts to radiances using coefficients derived in combination with the On-Board Calibrator (OBC) and vicarious calibrations. The OBC contains Spectralon calibration panels which are deployed monthly and reflect sunlight into the cameras. The OBC detector standards then measure this reflected light to provide the calibration. Vicarious field campaigns are conducted less frequently but provide an independent methodology useful for reducing systematic errors. Radiance conditioning removes undesirable instrument effects. Image enhancement is provided by deconvolving the scene with the sensor's point-spread-function. Additionally, in-band scaling adjusts the reported radiances to correspond to a nominal band response profile. This frees the Level 2 software from the need to correct for detector element non-uniformities. No out-of-band correction is done for this product, nor are the data geometrically corrected or resampled at this point. In summary, the Level 1B1 Product contains the Data Numbers (DNs) radiometrically-scaled to radiances with no geometric resampling. [Location=GLOBAL] [Temporal_Coverage: Start_Date=2000-02-24; Stop_Date=] [Spatial_Coverage: Southernmost_Latitude=-90; Northernmost_Latitude=90; Westernmost_Longitude=-180; Easternmost_Longitude=180] [Data_Resolution: Latitude_Resolution=275 m for red band only; Longitude_Resolution=275 m for red band only; Horizontal_Resolution_Range=250 meters - < 500 meters; Temporal_Resolution=about 15 orbits/day; Temporal_Resolution_Range=Daily - < Weekly, about 15 orbits/day, Daily - < Weekly].

EOSDIS↗

MISR Level 1B1 Radiance Data (MI1B1_V2)

The results of two types of processing are included in this product. First, the Radiance Scaling operation converts the camera's digital number output to a measure of energy incident on the front optical surface. The measurement is expressed in units called radiance (energy per unit area, wavelength, and solid angle) as defined by the International Standard (SI). Second, Radiance Conditioning modifies the radiances to remove instrument-dependent effects. Specifically, image sharpening is applied, and focal-plane scattering is removed. Additionally, all radiances are adjusted to remove slight spectral sensitivity differences among the 1504 detector elements of each spectral band and each camera. The Radiometric Product contains spectral radiances for all MISR channels (four spectral bands and nine cameras). Each radiance value represents the incident radiance averaged over the sensor's total band response. Processing includes both radiance scaling and conditioning steps. Radiance scaling converts the Level 1A data from digital counts to radiances using coefficients derived in combination with the On-Board Calibrator (OBC) and vicarious calibrations. The OBC contains Spectralon calibration panels which are deployed monthly and reflect sunlight into the cameras. The OBC detector standards then measure this reflected light to provide the calibration. Vicarious field campaigns are conducted less frequently but provide an independent methodology useful for reducing systematic errors. Radiance conditioning removes undesirable instrument effects. Image enhancement is provided by deconvolving the scene with the sensor's point-spread-function. Additionally, in-band scaling adjusts the reported radiances to correspond to a nominal band response profile. This frees the Level 2 software from the need to correct for detector element non-uniformities. No out-of-band correction is done for this product, nor are the data geometrically corrected or resampled at this point. In summary, the Level 1B1 Product contains the Data Numbers (DNs) radiometrically-scaled to radiances with no geometric resampling. [Temporal_Coverage: Start_Date=2000-02-24; Stop_Date=] [Spatial_Coverage: Southernmost_Latitude=-90; Northernmost_Latitude=90; Westernmost_Longitude=-180; Easternmost_Longitude=180] [Data_Resolution: Latitude_Resolution=1.1 km; Longitude_Resolution=1.1 km; Temporal_Resolution=about 15 orbits/day; Temporal_Resolution_Range=about 15 orbits/day].

AM-1↗

MISR Level 1B1 Local Mode Radiance Data (MIB1LM_V2)

The results of two types of processing are included in this product. First, the Radiance Scaling operation converts the camera's digital number output to a measure of energy incident on the front optical surface. The measurement is expressed in units called radiance (energy per unit area, wavelength, and solid angle) as defined by the International Standard (SI). Second, Radiance Conditioning modifies the radiances to remove instrument-dependent effects. Specifically, image sharpening is applied, and focal-plane scattering is removed. Additionally, all radiances are adjusted to remove slight spectral sensitivity differences among the 1504 detector elements of each spectral band and each camera. In addition to the Level 1B1 radiometric product for MISR's Global Mode imagery, there is a separate Level 1B1 product for each high-resolution Local Mode scene. The Radiometric Product contains spectral radiances for all MISR channels (four spectral bands and nine cameras). Each radiance value represents the incident radiance averaged over the sensor's total band response. Processing includes both radiance scaling and conditioning steps. Radiance scaling converts the Level 1A data from digital counts to radiances using coefficients derived in combination with the On-Board Calibrator (OBC) and vicarious calibrations. The OBC contains Spectralon calibration panels which are deployed monthly and reflect sunlight into the cameras. The OBC detector standards then measure this reflected light to provide the calibration. Vicarious field campaigns are conducted less frequently but provide an independent methodology useful for reducing systematic errors. Radiance conditioning removes undesirable instrument effects. Image enhancement is provided by deconvolving the scene with the sensor's point-spread-function. Additionally, in-band scaling adjusts the reported radiances to correspond to a nominal band response profile. This frees the Level 2 software from the need to correct for detector element non-uniformities. No out-of-band correction is done for this product, nor are the data geometrically corrected or resampled at this point. In summary, the Level 1B1 Product contains the Data Numbers (DNs) radiometrically-scaled to radiances with no geometric resampling. [Temporal_Coverage: Start_Date=2000-02-24; Stop_Date=] [Spatial_Coverage: Southernmost_Latitude=-90; Northernmost_Latitude=90; Westernmost_Longitude=-180; Easternmost_Longitude=180] [Data_Resolution: Latitude_Resolution=275 m for red band only; Longitude_Resolution=275 m for red band only; Temporal_Resolution=about 15 orbits/day].

AM-1↗

Initial On-Orbit Spatial Resolution Characterization of OrbView-3 Panchromatic Images

Characterization was conducted under the Memorandum of Understanding among Orbital Sciences Corp., ORBIMAGE, Inc., and NASA Applied Sciences Directorate. Acquired five OrbView-3 panchromatic images of the permanent Stennis Space Center edge targets painted on a concrete surface. Each image is available at two processing levels: Georaw and Basic. Georaw is an intermediate image in which individual pixels are aligned by a nominal shift in the along-scan direction to adjust for the staggered layout of the panchromatic detectors along the focal plane array. Georaw images are engineering data and are not delivered to customers. The Basic product includes a cubic interpolation to align the pixels better along the focal plane and to correct for sensor artifacts, such as smile and attitude smoothing. This product retains satellite geometry - no rectification is performed. Processing of the characterized images did not include image sharpening, which is applied by default to OrbView-3 image products delivered by ORBIMAGE to customers. Edge responses were extracted from images of tilted edges in two directions: along-scan and cross-scan. Each edge response was approximated with a superposition of three sigmoidal functions through a nonlinear least-squares curve-fitting. Line Spread Functions (LSF) were derived by differentiation of the analytical approximation. Modulation Transfer Functions (MTF) were obtained after applying the discrete Fourier transform to the LSF.

Blonski, Slawomir↗

The New Landsat Image Mosaic of Antarctica; A Part of Your World You've Never Seen Before

The first-ever true-color, high-resolution digital mosaic of Antarctica has been produced from nearly 11 00 Landsat-7 ETM+ images. This project is an early 1999-2001 benchmark data set of the International Polar Year and represents a close and successful collaboration between NASA, USGS, the British Antarctic Survey and the National Science Foundation. The production of the mosaic required the development of new procedures for treating sensor saturation, adjusting for non-diffusive reflectance and for balancing color between images to remove distracting image edges. All adjustments were physically based to achieve the goal that each pixel's value is surface reflectance. This makes this mosaic more than just a pretty picture to guide users to individual scenes, but one where the mosaics can be used directly for quantitative research. The 15-m resolution, pan-sharpened mosaic, numerous derivative mosaics that enhance various ice sheet features, and the individual scenes are all served to the public via a web site hosted by the USGS. This site also enables on-line exploration of the various mosaics, including panning and zooming functions. Datasets can be customized by the user and downloaded. An associated web site, hosted by NASA, uses the mosaic as a means to demonstrate the value of satellite imagery of Antarctica. It is hoped this data set will enable the public and researcher alike a new and realistic view of the seventh continent.

Bindschadler, Robert↗

An Ultrasonic Sampler and Sensor Platform for In-Situ Astrobiological Exploration

The search for existing or past life in the Universe is one of the most important objectives of NASA's mission. In support of this objective, ultrasonic based mechanisms are currently being developed at JPL to allow probing and sampling rocks as well as perform as a sensor platform for in-situ astrobiological analysis. The technology is based on the novel Ultrasonic/Sonic Driller/Corer (USDC), which requires low axial force, thereby overcoming one of the major limitations of planetary sampling in low gravity using conventional drills. The USDC was demonstrated to: 1) drill ice and various rocks including granite, diorite, basalt and limestone, 2) not require bit sharpening, and 3) operate at high and low temperatures. The capabilities that are being investigated including probing the ground to select sampling sites, collecting various forms of samples, and hosting sensors for measuring chemical/physical properties. A series of modifications of the USDC basic configuration were implemented leading an ultrasonic abrasion tool (URAT), Ultrasonic Gopher for deep Drilling, and the lab-on-a-drill.

robotics↗

Small Deflection Energy Analyzer for Energy and Angular Distributions

The development of the Small Deflection Energy Analyzer (SDEA) charged-particle spectrometer for energy and angle distributions responds to a longstanding need to measure the wind velocity vector in Earth s thermosphere, and to obtain the ion-drift vector in the ionosphere. The air and ions above 120 km are endowed with bulk velocities and temperatures just like air near the ground, but with separate spatial and temporal variations. It is important to understand these not only for study of the physics and chemistry of the Sun-Earth connection, but also for spacecraft orbit predictions, and communications through the ionosphere. The SDEA consists of a pair of parallel conducting plates separated by a small distance, with an entrance slit on one end, and an exit slit on the other. A voltage applied to these plates develops an electric field between the plates, and this field deflects ions passing through it. If an ion has too little energy, it will strike one of the plates. If it has too much, it will strike the back wall. An ion with the amount of energy being searched for will have its trajectory bent just enough to exit the back slit. The SDEA units are compact, rectangular, and operate with low voltages. The units can be built up into small arrays. These arrays could be used either to widen the field of view or to sharpen an existing one. This approach can also be used to obtain angular distributions in two planes simultaneously, thus cutting down the ion source power requirements in half. This geometry has enabled a new mass-spectrometer concept that can provide miniaturized mass spectrometers for use in industrial plants, air-pollution monitoring, and noxious-gas detection.

Herrero, Federico A.↗

Solar Polar Spicules Observed with Hinode

We examine solar polar region spicules using high-cadence Ca II data from the Solar Optical Telescope (SOT) on the Hinode spacecraft. We sharpened the images by convolving them with the inverse-point-spread function of the SOT Ca II filter, and we are able to see some of the spicules originating on the disk just inside the limb. Bright points are frequently at the root of the disk spicules. These "Ca II brightenings" scuttle around at approx.few x 10 km/s, live for approx.100 sec, and may be what are variously known as "H_{2V} grains," "K_{2V} grains," or "K_{2V} bright points." When viewed extending over the limb, some of the spicules appear to expand horizontally or split into two or more components, with the horizontal expansion or splitting velocities reaching approx.50 km/s. This work was funded by NASA's Science Mission Directorate through the Living With a Star Targeted Research and Technology Program, the Supporting Research and Program, the Heliospheric Guest Investigator Program, and the Hinode project.

Sterling, Alphonse C.↗

Validation of Model Forecasts of the Ambient Solar Wind

Independent and automated validation is a vital step in the progression of models from the research community into operational forecasting use. In this paper we describe a program in development at the CCMC to provide just such a comprehensive validation for models of the ambient solar wind in the inner heliosphere. We have built upon previous efforts published in the community, sharpened their definitions, and completed a baseline study. We also provide first results from this program of the comparative performance of the MHD models available at the CCMC against that of the Wang-Sheeley-Arge (WSA) model. An important goal of this effort is to provide a consistent validation to all available models. Clearly exposing the relative strengths and weaknesses of the different models will enable forecasters to craft more reliable ensemble forecasting strategies. Models of the ambient solar wind are developing rapidly as a result of improvements in data supply, numerical techniques, and computing resources. It is anticipated that in the next five to ten years, the MHD based models will supplant semi-empirical potential based models such as the WSA model, as the best available forecast models. We anticipate that this validation effort will track this evolution and so assist policy makers in gauging the value of past and future investment in modeling support.

Macneice, P. J.↗

A New Process for Fabricating Random Silicon Nanotips

An improved process for the fabrication of random arrays of silicon nanotips has been demonstrated to be feasible. Relative to other such processes, this process offers advantages of low cost and simplicity. Moreover, this process can readily be combined with other processes used to fabricate integrated circuits and other monolithic silicon structures. Arrays of silicon nanotips are subjects of research and development efforts directed toward utilizing them as field emitters in flat-panel displays, vacuum microelectronics, and microwave devices. Other silicon-nanotip-fabrication processes developed thus far predominantly include lithography, etching, and/or elaborate deposition steps followed by oxide sharpening steps and are both process intensive as well as expensive. In addition to being cheaper and simpler, the present process can efficiently produce silicon nanotips that range in height from a few microns to several tens of microns and are distributed over large areas. The process mentioned here can be summarized as consisting of (1) the growth of micro-etch masks on a silicon substrate, followed by (2) etching away of the masks, along with some of the substrate, to make an array of sharp tips. In the first step of the process, a cleaned silicon substrate is subjected to reactive ion etching (RIE) in a certain mixture of oxygen and carbon tetrafluoride under radio-frequency excitation. This process step results in the growth of fluorine based compounds in the form of stumps randomly distributed on the substrate. These stumps are known in the art as polymer RIE grass. The dimensions of these stumps are of the order of hundreds of nanometers, the exact values depending on process time and gas composition. The areal density of the stumps decreases with increasing process time as they grow and merge with neighboring stumps. These stumps constitute the micro-etch masks for the next step of the process. In the second step of the process, the substrate covered with the microetch masks is subjected to deep reactive ion etching (DRIE) process, which consists of cycles of reactive ion etching alternating with passivation (the Bosch process). The gas used in the etching substeps is sulfur hexafluoride (SF6); the gas used in the passivation substeps is octafluorocyclobutane (C4F8). The portions of the substrate directly under the RIE grass stubs are etched more slowly than are the portions between the stubs. Hence, what remains at the end of the process, after the stubs and parts of the substrate have been etched away, are silicon spikes where the stubs were (see figure). In a variation of the process, one starts with a silicon or silicon-on-insulator substrate with the intent to etch through the full thickness of the substrate. That is to say, one chooses the thickness so that the DRIE step releases individual nanotips. Such individual silicon nanotips may have utility as microscopic probes in biomedical applications.

Manohara, Harish↗