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MEMS Microshutter Arrays for James Webb Space Telescope

MEMS microshutter arrays are being developed at NASA Goddard Space Flight Center for use as an aperture array for a Near-Infrared Spectrometer (NirSpec). The instruments will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope after Hubble Space Telescope retires. The microshutter arrays are designed for the selective transmission of light with high efficiency and high contrast, Arrays are close-packed silicon nitride membranes with a pixel size of 100x200 microns. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are made on to each shutter for light leak prevention so to enhance optical contrast, Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS technologies.

Li, Mary J.↗

Radiation Test Results for a MEMS Microshutter Operating at 60 K

The James Webb Space Telescope (JWST), the successor to the Hubble Space Telescope, is due to be launched in 2013 with the goal of searching the very distant Universe for stars that formed shortly after the Big Bang. Because this occurred so far back in time, the available light is strongly red-shifted, requiring the use of detectors sensitive to the infrared portion of the electromagnetic spectrum. HgCdTe infrared focal plane arrays, cooled to below 30 K to minimize noise, will be used to detect the faint signals. One of the instruments on JWST is the Near Infrared Spectrometer (NIRSPEC) designed to measure the infrared spectra of up to 100 separate galaxies simultaneously. A key component in NIRSPEC is a Micro-Electromechanical System (MEMS), a two-dimensional micro-shutter array (MSA) developed by NASA/GSFC. The MSA is inserted in front of the detector to allow only the light from the galaxies of interest to reach the detector and to block the light from all other sources. The MSA will have to operate at 30 K to minimize the amount of thermal radiation emitted by the optical components from reaching the detector array. It will also have to operate in the space radiation environment that is dominated by the MSA will be exposed to a large total ionizing dose of approximately 200 krad(Si). Following exposure to ionizing radiation, a variety of MEMS have exhibited performance degradation. MEMS contain moving parts that are either controlled or sensed by changes in electric fields. Radiation degradation can be expected for those devices where there is an electric field applied across an insulating layer that is part of the sensing or controlling structure. Ionizing radiation will liberate charge (electrons and holes) in the insulating layers, some of which may be trapped within the insulating layer. Trapped charge will partially cancel the externally applied electric field and lead to changes in the operation of the MEMS. This appears to be a general principle for MEMS. Knowledge of the above principle has raised the concern at NASA that the MSA might also exhibit degraded performance because, i) each shutter flap is a multilayer structure consisting of metallic and insulating layers and ii) the movement of the shutter flaps is partially controlled by the application of an electric field between the shutter flap and the substrate (vertical support grid). The whole mission would be compromised if radiation exposure were to prevent the shutters from opening and closing properly. energetic ionizing particles. Because it is located A unique feature of the MSA is that, as outside the spacecraft and has very little shielding, previously mentioned, it will have to operate at temperatures near 30 K. To date, there are no published reports on how very low temperatures (- 30K) affect the response of MEMS devices to total ionizing dose. Experiments on SiO2 structures at low temperatures (80 K) indicate that the electrons generated by the ionizing radiation are mobile and will move rapidly under the application of an external electric field. Holes, on the other hand, that would normally move in the opposite direction through the SiO2 via a "thermal hopping" process, are effectively immobile at low electric fields as they are trapped close to their generation sites. However, for sufficiently large electric fields (greater than 3 MV/cm) holes are able to move through the SiO2. The larger the field, the more rapidly the holes move. The separation of the electrons and holes leads to a reduced electric field within the insulating layer. To overcome this reduction in electric field, a greater external voltage will have to be applied that alters the normal operation of the device. This report presents the results of radiation testing of the MSA at 60 K. The temperature was higher than the targeted temperature because of a faulty electrical interconnect on the test board. Specifically, our goal was to determine whether the MSA would function propey after a TID of 200 krad(Si).

Rapchun, David A.↗

Development and Operation of the Microshutter Array System

The microshutter array (MSA) is a key component in the James Webb Space Telescope Near Infrared Spectrometer (NIRSpec) instrument. The James Webb Space Telescope is the next generation of a space-borne astronomy platform that is scheduled to be launched in 2013. However, in order to effectively operate the array and meet the severe operational requirements associated with a space flight mission has placed enormous constraints on the microshutter array subsystem. This paper will present an overview and description of the entire microshutter subsystem including the microshutter array, the hybridized array assembly, the integrated CMOS electronics, mechanical mounting module and the test methodology and performance of the fully assembled microshutter subsystem. The NIRSpec is a European Space Agency (ESA) instrument requiring four fully assembled microshutter arrays, or quads, which are independently addressed to allow for the imaging of selected celestial objects onto the two 4 mega pixel IR detectors. Each microshutter array must have no more than approx.8 shutters which are failed in the open mode (depending on how many are failed closed) out of the 62,415 (365x171) total number of shutters per array. The driving science requirement is to be able to select up to 100 objects at a time to be spectrally imaged at the focal plane. The spectrum is dispersed in the direction of the 171 shutters so if there is an unwanted open shutter in that row the light from an object passing through that failed open shutter will corrupt the spectrum from the intended object.

Jhabvala, M. D.↗

FPGA Control System for the Automated Test of Microshutters

The James Webb Space Telescope, scheduled to replace the Hubble in 2013, must simultaneously observe hundreds of faint galaxies. This requirement has led to the development of a programmable transmission mask which can be adapted to admit light with arbitrary pattern of galaxies into its spectrograph. This programmable mask will contain a large array of micro-electromechanical (MEMs) devices called MicroShutters. These microscopic shutters physically open and close like the shutter on a camera, except each shutter is microscopic in size and an array 365 by 171 is used to select the objects under spectroscopic observation at a given time, and to block the unwanted background light from other areas. NASA developed and is currently refining the exceptionally difficult process of manufacturing these shutters. This paper describes how the authors used LabVIEW FPGA and a reconfigurable I/O board to control the shutters in a test chamber and how the flexibility of the system allows us to continue to modify the control algorithms as NASA optimizes the performance of the MicroShutter arrays.

Lyness, Eric↗

FPGA Control System for the Automated Test of MicroShutters

The James Webb Space Telescope, scheduled to replace the Hubble in 2013, must simultaneously observe hundreds of faint galaxies. This requirement has led to the development of a programmable transmission mask which can be adapted to admit light from an arbitrary pattern of galaxies into its spectrograph. This programmable mask will contain a large array of micro-electromechanical (MEMs) devices called MicroShutters. These microscopic shutters physically open and close like the shutter on a camera, except each shutter is microscopic in size and an array 365 by 171 is used to select the objects under spectroscopic observation at a given time, and to block the unwanted background light from other areas. NASA developed and is currently refining the exceptionally difficult process of manufacturing these shutters. This paper describes how the authors used LabVIEW FPGA and a reconfigurable I/O board to control the shutters in a test chamber and how the flexibility of the system allows us to continue to modify the control algorithms as NASA optimizes the performance of the MicroShutter arrays.

Lyness, Eric↗

Automatic lightning detection and photographic system

A system is presented for monitoring and recording lightning strokes within a predetermined area with a camera having an electrically operated shutter with means for advancing the film in the camera after activating the shutter. The system includes an antenna for sensing lightning strikes which, in turn, generates a signal that is fed to an electronic circuit which generates signals for operating the shutter of the camera. Circuitry is provided for preventing activation of the shutter as the film in the camera is being advanced.

Wojtasinski, R. J.↗

Development of a drive system for a sequential space camera

An electronically commutated dc motor is reported for driving the camera claw and magazine, and a stepper motor is described for driving the shutter with the two motors synchronized electrically. Subsequent tests on the breadboard positively proved the concept, but further development beyond this study should be done. The breadboard testing also established that the electronically commutated motor can control speed over a wide dynamic range, and has a high torque capability for accelerating loads. This performance suggested the possibility of eliminating the clutch from the system while retaining all of the other mechanical features of the DAC, if the requirement for independent shutter speeds and frame rates can be removed. Therefore, as a final step in the study, the breadboard shutter and shutter drive were returned to the original DAC configuration, while retaining the brushless dc motor drive.

Sharpsteen, J. T.↗

Thermal band characterization of LANDSAT-4 thematic mapper

The TM band 6 shutter background and the 34.7 C internal black body signal were measured over 50 day dates. Variability of the shutter background temperature was from 7 C to 11 C. For ten specific images, the digital counts of the calibration data were measured. The average pulse value of the black body peak decreased from 174 to 149 counts while the shutter background counts varied as a function of shutter temperature from 77 to 85. Relative internal gains between the four channels were calculated and compared to prelaunch values. They showed gains over 9 months of up to 5%. Frequency histograms of number of pixels vs. digital counts from a night scene were used to determine gain relative to the mean and to discern a systematic along-scan pattern in a difference between forward and reverse scan counts of up to 0.5. A corrected digital image was obtained. A temperature estimate for and area of Lake Erie of 18.5 C to 19.9 C was obtained. Local temperature records showed 21 C.

Lansing, J. C.↗

LANDSAT instruments characterization

The present CALDUMP tape consists of five calibration files and one reduced calibration file. The calibration files, each with data of 200 pixels, cover an entire calibration region starting from the 6251 minor frame (mf). Program LEE.FOR was developed to edit these five files into seven .CAL files in the TAE mode. Program PCAL.FOR reads the .CAL files and plots the 1000 pixels of any scan line in linear or log scale. The typical spectra of the calibration region of forward and reverse scans are shown. The positions of the start and the end of shutter obscuration and the calibration pulse are shifted increasingly or decreasingly from Channel 1 to Channel 16, due to the timing of data acquisition. To produce TRAPP usable input files are, the following procedures need to be taken: (1) determine the start of shutter obscuration position; (2) determine the calibration pulse and background region relative to the start of shutter obscuration; and (3) determine the end of shutter obscuration position.

Lee, Y.↗

Next-Generation Microshutter Arrays for Large-Format Imaging and Spectroscopy

A next-generation microshutter array, LArge Microshutter Array (LAMA), was developed as a multi-object field selector. LAMA consists of small-scaled microshutter arrays that can be combined to form large-scale microshutter array mosaics. Microshutter actuation is accomplished via electrostatic attraction between the shutter and a counter electrode, and 2D addressing can be accomplished by applying an electrostatic potential between a row of shutters and a column, orthogonal to the row, of counter electrodes. Microelectromechanical system (MEMS) technology is used to fabricate the microshutter arrays. The main feature of the microshutter device is to use a set of standard surface micromachining processes for device fabrication. Electrostatic actuation is used to eliminate the need for macromechanical magnet actuating components. A simplified electrostatic actuation with no macro components (e.g. moving magnets) required for actuation and latching of the shutters will make the microshutter arrays robust and less prone to mechanical failure. Smaller-size individual arrays will help to increase the yield and thus reduce the cost and improve robustness of the fabrication process. Reducing the size of the individual shutter array to about one square inch and building the large-scale mosaics by tiling these smaller-size arrays would further help to reduce the cost of the device due to the higher yield of smaller devices. The LAMA development is based on prior experience acquired while developing microshutter arrays for the James Webb Space Telescope (JWST), but it will have different features. The LAMA modular design permits large-format mosaicking to cover a field of view at least 50 times larger than JWST MSA. The LAMA electrostatic, instead of magnetic, actuation enables operation cycles at least 100 times faster and a mass significantly smaller compared to JWST MSA. Also, standard surface micromachining technology will simplify the fabrication process, increasing yield and reducing cost.

Moseley, Samuel↗

Fuse Protects Parabolic-Dish Solar Collector

Sliding barrel and shutter protect against overheating. Downward movement of shutter initiated by melting of fuse wire that suspends it. Shutter lowered or raised under operator's control by depressuring or pressurizing hydraulic cylinder.

Selcuk, M. K.↗

Solar concentrator protective system

A mechanism that blocks concentrated sunlight from reaching a receiver, in the event of a tracking failure or loss of coolant is described. Sunlight is normally concentrated by a dish reflector onto the opening of a receiver. A faceplate surrounds the opening, and coolant carrying tubes, line the receiver. If the concentrated sunlight wanders so it begins to fall on the faceplate, then the sunlight will melt a portion of a fuse wire portion will break. The wire is attached to a flange on a shutter frame, and breaking of the fuse wire allows the frame to fall. Normally, the shutter frame supports shutter elements that are held open by cam followers that bear against cams.

Selcuk, M. K.↗

High speed photography, videography, and photonics III; Proceedings of the Meeting, San Diego, CA, August 22, 23, 1985

Papers are presented on the picosecond electronic framing camera, photogrammetric techniques using high-speed cineradiography, picosecond semiconductor lasers for characterizing high-speed image shutters, the measurement of dynamic strain by high-speed moire photography, the fast framing camera with independent frame adjustments, design considerations for a data recording system, and nanosecond optical shutters. Consideration is given to boundary-layer transition detectors, holographic imaging, laser holographic interferometry in wind tunnels, heterodyne holographic interferometry, a multispectral video imaging and analysis system, a gated intensified camera, a charge-injection-device profile camera, a gated silicon-intensified-target streak tube and nanosecond-gated photoemissive shutter tubes. Topics discussed include high time-space resolved photography of lasers, time-resolved X-ray spectrographic instrumentation for laser studies, a time-resolving X-ray spectrometer, a femtosecond streak camera, streak tubes and cameras, and a short pulse X-ray diagnostic development facility.

Ponseggi, B. G.↗

Programmable 2-D Addressable Cryogenic Aperture Masks

We are developing a two-dimensional array of square microshutters (programmable aperture mask) for a multi-object spectrometer for the James Webb Space Telescope (JWST). This device will provide random access selection of the areas in the field to be studied. The device is in essence a close packed array of square slits, each of which can be opened independently to select areas of the sky for detailed study.The device is produced using a 100-micron thick silicon wafer as a substrate with 0.5-micron thick silicon nitride shutters on top of it. Silicon nitride has been selected as the blade and flexure material because its stiffness allows thinner and lighter structures than single crystal Si, the chief alternative, and because of its ease of manufacture. The 100 micron silicon wafer is backetched in a high aspect ratio Deep Reactive Ion Etching (Deep RIE) to leave only a support grid for the shutters and the address electronics. The shutter actuation is done magnetically whereas addressing is electrostatic. 128x128 format microshutter arrays have been produced. Their operation has been demostarted on 32x32 subarrays. Good reliability of the fabrication process and good quality of the microshutters has been achieved. The mechanical behavior and optical performance of the fabricated arrays at cryogenic temperature are being studied.

Kutyrev, A. S.↗

Growth and Properties of Lattice Matched GaAsSbN Epilayer on GaAs for Solar Cell Applications

The growth and properties of GaAsSbN single quantum wells (SQWs) are investigated in this work. The heterostructures were grown on GaAs substrates in an elemental solid source molecular beam epitaxy (MBE) system assisted with a RF plasma nitrogen source. A systematic study has been carried out to determine the influence of various growth conditions, such as the growth temperature and the source shutter-opening sequence, on the quality of the grown layers and the incorporation of N and Sb. The effects of ex situ and in situ annealing under As overpressure on the optical properties of the layers have also been investigated. Substrate temperature in the range of 450-470 C was found to be optimum. Simultaneous opening of the source shutters was found to yield sharper QW interfaces. N and Sb incorporations were found to depend strongly upon substrate temperatures and source shutter opening sequences. A significant increase in PL intensity with a narrowing of PL line shape and blue shift in emission energy were observed on annealing the GaAsSbN/GaAs SQW, with in situ annealing under As overpressure providing better results, compared to ex situ annealing.

Bharatan, Sudhakar↗

Multispectral Imager With Improved Filter Wheel and Optics

Figure 1 schematically depicts an improved multispectral imaging system of the type that utilizes a filter wheel that contains multiple discrete narrow-band-pass filters and that is rotated at a constant high speed to acquire images in rapid succession in the corresponding spectral bands. The improvement, relative to prior systems of this type, consists of the measures taken to prevent the exposure of a focal-plane array (FPA) of photodetectors to light in more than one spectral band at any given time and to prevent exposure of the array to any light during readout. In prior systems, these measures have included, variously the use of mechanical shutters or the incorporation of wide opaque sectors (equivalent to mechanical shutters) into filter wheels. These measures introduce substantial dead times into each operating cycle intervals during which image information cannot be collected and thus incoming light is wasted. In contrast, the present improved design does not involve shutters or wide opaque sectors, and it reduces dead times substantially. The improved multispectral imaging system is preceded by an afocal telescope and includes a filter wheel positioned so that its rotation brings each filter, in its turn, into the exit pupil of the telescope. The filter wheel contains an even number of narrow-band-pass filters separated by narrow, spoke-like opaque sectors. The geometric width of each filter exceeds the cross-sectional width of the light beam coming out of the telescope. The light transmitted by the sequence of narrow-band filters is incident on a dichroic beam splitter that reflects in a broad shorter-wavelength spectral band that contains half of the narrow bands and transmits in a broad longer-wavelength spectral band that contains the other half of the narrow spectral bands. The filters are arranged on the wheel so that if the pass band of a given filter is in the reflection band of the dichroic beam splitter, then the pass band of the adjacent filter is in the longer-wavelength transmission band of the dichroic beam splitter (see Figure 2). Each of the two optical paths downstream of the dichroic beam splitter contains an additional broad-band-pass filter: The filter in the path of the light transmitted by the dichroic beam splitter transmits and attenuates in the same bands that are transmitted and reflected, respectively, by the beam splitter; the filter in the path of the light reflected by the dichroic beam splitter transmits and attenuates in the same bands that are reflected and transmitted, respectively, by the dichroic beam splitter. In each of these paths, the filtered light is focused onto an FPA. As the filter wheel rotates at a constant angular speed, its shaft angle is monitored, and the shaft-angle signal is used to synchronize the exposure times of the two FPAs. When a single narrowband-pass filter on the wheel occupies the entire cross section of the beam of light coming out of the telescope, the spectrum of light that reaches the dichroic beam splitter lies entirely within the pass band of that filter. Therefore, the beam in its entirety is either transmitted by the dichroic beam splitter and imaged on the longer-wavelength FPA or reflected by the beam splitter and imaged onto the shorter-wavelength FPA.

Bremer, James C.↗

Stroboscopic Goggles for Reduction of Motion Sickness

A device built around a pair of electronic shutters has been demonstrated to be effective as a prototype of stroboscopic goggles or eyeglasses for preventing or reducing motion sickness. The momentary opening of the shutters helps to suppress a phenomenon that is known in the art as retinal slip and is described more fully below. While a number of different environmental factors can induce motion sickness, a common factor associated with every known motion environment is sensory confusion or sensory mismatch. Motion sickness is a product of misinformation arriving at a central point in the nervous system from the senses from which one determines one s spatial orientation. When information from the eyes, ears, joints, and pressure receptors are all in agreement as to one s orientation, there is no motion sickness. When one or more sensory input(s) to the brain is not expected, or conflicts with what is anticipated, the end product is motion sickness. Normally, an observer s eye moves, compensating for the anticipated effect of motion, in such a manner that the image of an object moving relatively to an observer is held stationary on the retina. In almost every known environment that induces motion sickness, a change in the gain (in the signal-processing sense of gain ) of the vestibular system causes the motion of the eye to fail to hold images stationary on the retina, and the resulting motion of the images is termed retinal slip. The present concept of stroboscopic goggles or eyeglasses (see figure) is based on the proposition that prevention of retinal slip, and hence, the prevention of sensory mismatch, can be expected to reduce the tendency toward motion sickness. A device according to this concept helps to prevent retinal slip by providing snapshots of the visual environment through electronic shutters that are brief enough that each snapshot freezes the image on each retina. The exposure time for each snapshot is less than 5 ms. In the event that a higher rate of strobing is necessary for adequate viewing of the changing scene during rapid head movements, the rate of strobing (but not the exposure time) can be controlled in response to the readings of rate-of-rotation sensors attached to the device.

Reschke, M. F.↗

Cryogenic Photogrammetry and Radiometry for the James Webb Space Telescope Microshutters

The James Webb Space Telescope (JWST) relies on several innovations to complete its five year mission. One vital technology is microshutters, the programmable field selectors that enable the Near Infrared Spectrometer (NIRSpec) to perform multi-object spectroscopy. Mission success depends on acquiring spectra from large numbers of galaxies by positioning shutter slits over faint targets. Precise selection of faint targets requires field selectors that are both high in contrast and stable in position. We have developed test facilities to evaluate microshutter contrast and alignment stability at their 35K operating temperature. These facilities used a novel application of image registration algorithms to obtain non-contact, sub-micron measurements in cryogenic conditions. The cryogenic motion of the shutters was successfully characterized. Optical results also demonstrated that shutter contrast far exceeds the NIRSpec requirements. Our test program has concluded with the delivery of a flight-qualified field selection subsystem to the NIRSpec bench.

Chambers, Victor J.↗