Investigation of Nitrogen Absorption Rate and Nitride Growth on SRF Cavity Grade RRR Niobium as a Function of Furnace Temperature
The current state of the art processing of niobium superconducting radio frequency cavities with nitrogen diffusion is performed at 800 C in a furnace with a partial pressure of approximately ~20 mTorr of nitrogen. Multiple studies have shown the bulk of the nitrogen absorbed by the niobium forms a thick (1-3 microns) non-superconducting nitride layer which must be removed to produce optimal RF results. The depth profiling of interstitial nitrogen and surface nitrides has already been probed using SIMS measurements for this recipe. These measurements have been successfully modelled by extrapolating data from nitride growth studies performed at atmospheric pressure and temperatures above 1000 C.1 One open question is whether there is a diffusion-only zone at lower temperature in the ~20 mTorr range in which the niobium will absorb nitrogen but not create a non-superconducting nitride layer; or is the absorption of nitrogen only possible by first forming a nitride buffer layer which then frees up nitrogen for absorption which is what has been shown down to 600 C at atmospheric pressures on long time scales. A systematic study of absorption vs. temperature and correlated SIMS measurements is required to answer this question. We report on measurements of the parabolic rate constant vs. temperature from 400 C to 900 C of cavity grade niobium with metallurgically flat witness samples. Depth profiles of witness samples using SIMS are presented together with SEM imaging for nitride crystals and correlated with N absorption.