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At least 127 records · Page 7

Miniature electrostatic accelerometer /MESA/.

Miniature electrostatic accelerometer featuring suspension and force rebalance systems, discussing performance, applications and accuracy acceleration measurement

ELECTROSTATIC INSTRUMENT↗

(abstract) A Miniature, High-Sensitivity, Electron-Tunneling Accelerometer

A prototype low-noise accelerometer has been fabricated with an electron-tunneling transducer. By measuring the tunneling current between an electrode on the proof mass and a feedback-controlled monitor electrode, very small accelerations can be detected with high responsivity. This particular prototype (10x10x1.5 mm) was designed for underwater acoustic measurement from a few hertz to 1 kHz. The measured responsivity below the fundamental device resonance at 100 Hz is roughly 1500 volts per m/s(sup 2) with a measured noise spectral density of 10(sup -6) m/s(sup 2) per root hertz or less between 30 and 300 Hz. The noise floor is controlled primarily by 1/f noise in the tunneling current although the noise floor reaches the theoretical molecular-agitation limit at 100 hertz. The responsivity and directivity of the device were measured in a standard gradient-hydrophone calibrator; the noise floor was determined in a vacuum-ionization chamber assembled from commercial off-the-shelf components; and the detailed dynamics of the proof-mass motion were examined using a heterodyne laser interferometer that was scanned across the surface and synchronously detected with respect to the excitation.

accelerometer electron tunneling acoustic measurem↗

A New Force Balanced Accelerometer Using Tunneling Tip Position Sensing

In this paper, we report the initial development of a single-axis bulk micromachined accelerometer. The device employs an electron tunneling tip as a position detector in a force feedback control system. Control electrodes are placed above and below the proof mass and act as electrostatic force plates. Using the force plates, the position of the proof mass relative to the tunneling tip can be controlled.

accelerometers sensors position detectors↗