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125 records · Page 7
All sourcesNASA NTRSDOE OSTI
NASA NTRS2011

Programmable Aperture with MEMS Microshutter Arrays

A microshutter array (MSA) has been developed for use as an aperture array for multi-object selections in James Webb Space Telescope (JWST) technology. Light shields, molybdenum nitride (MoN) coating on shutters, and aluminum/aluminum oxide coatings on interior walls are put on each shutter for light leak prevention, and to enhance optical contrast. Individual shutters are patterned with a torsion flexure that permits shutters to open 90 deg. with a minimized mechanical stress concentration. The shutters are actuated magnetically, latched, and addressed electrostatically. Also, micromechanical features are tailored onto individual shutters to prevent stiction. An individual shutter consists of a torsion hinge, a shutter blade, a front electrode that is coated on the shutter blade, a backside electrode that is coated on the interior walls, and a magnetic cobalt-iron coating. The magnetic coating is patterned into stripes on microshutters so that shutters can respond to an external magnetic field for the magnetic actuation. A set of column electrodes is placed on top of shutters, and a set of row electrodes on sidewalls is underneath the shutters so that they can be electrostatically latched open. A linear permanent magnet is aligned with the shutter rows and is positioned above a flipped upside-down array, and sweeps across the array in a direction parallel to shutter columns. As the magnet sweeps across the array, sequential rows of shutters are rotated from their natural horizontal orientation to a vertical open position, where they approach vertical electrodes on the sidewalls. When the electrodes are biased with a sufficient electrostatic force to overcome the mechanical restoring force of torsion bars, shutters remain latched to vertical electrodes in their open state. When the bias is removed, or is insufficient, the shutters return to their horizontal, closed positions. To release a shutter, both the electrode on the shutter and the one on the back wall where the shutter sits are grounded. The shutters with one or both ungrounded electrodes are held open. Sub-micron bumps underneath light shields and silicon ribs on back walls are the two features to prevent stiction. These features ensure that the microshutter array functions properly in mechanical motions. The MSA technology can be used primarily in multi-object imaging and spectroscopy, photomask generation, light switches, and in the stepper equipment used to make integrated circuits and MEMS (microelectromechanical systems) devices.

Moseley, Samuel↗
NASA NTRS1998

Overview of Active Flow Control at NASA Langley Research Center

The paper summarizes Active Flow Control projects currently underway at the NASA Langley Research Center. Technology development is being pursued within a multidisciplinary, cooperative approach, involving the classical disciplines of fluid mechanics, structural mechanics, material science, acoustics, and stability and control theory. Complementing the companion papers in this session, the present paper will focus on projects that have the goal of extending the state-of-the-art in the measurement, prediction, and control of unsteady, nonlinear aerodynamics. Toward this goal, innovative actuators, micro and macro sensors, and control strategies are considered for high payoff flow control applications. The target payoffs are outlined within each section below. Validation of the approaches range from bench-top experiments to wind-tunnel experiments to flight tests. Obtaining correlations for future actuator and sensor designs are implicit in the discussion. The products of the demonstration projects and design tool development from the fundamental NASA R&D level technology will then be transferred to the Applied Research components within NASA, DOD, and US Industry. Keywords: active flow control, separation control, MEMS, review

Pack, L. G.↗
NASA NTRS2017

Electrostatic Microshutter Arrays

Based on the Microshutter Array (MSA) subsystems developed at NASA Goddard Space Flight Center (GSFC) for the James Webb Space Telescope (JWST), Next Generation Microshutter Array (NGMSA) has been developed to be used as multi-object selectors for future telescopes in space applications. Microshutter arrays function as transmission devices. Selected shutters fully open at 90 degrees permitting income light going through, while the rest of shutters keep closed. The programmable microshutter open and close make the device perform as a multi object selector that can be used on space telescopes. Utilizing a multi object selector, the telescope efficiency can be increased to 100 times or more. Like JWST MSAs, NGMSA features torsion hinges, light shields, front and back electrodes for shutter actuation, latch, and closing. The difference is that JWST MSA utilized the magnetic actuation while NGMSA the electrostatic actuation.

Micro-electro-mechanical-system (MEMS)↗
NASA NTRS2006

Neuro-Prosthetic Implants With Adjustable Electrode Arrays

Brushlike arrays of electrodes packaged with application-specific integrated circuits (ASICs) are undergoing development for use as electronic implants especially as neuro-prosthetic devices that might be implanted in brains to detect weak electrical signals generated by neurons. These implants partly resemble the ones reported in Integrated Electrode Arrays for Neuro-Prosthetic Implants (NPO-21198), NASA Tech Briefs, Vol. 27, No. 2 (February 2003), page 48. The basic idea underlying both the present and previously reported implants is that the electrodes would pick up signals from neurons and the ASICs would amplify and otherwise preprocess the signals for monitoring by external equipment. The figure presents a simplified and partly schematic view of an implant according to the present concept. Whereas the electrodes in an implant according to the previously reported concept would be microscopic wires, the electrodes according to the present concept are in the form of microscopic needles. An even more important difference would be that, unlike the previously reported concept, the present concept calls for the inclusion of microelectromechanical actuators for adjusting the depth of penetration of the electrodes into brain tissue. The prototype implant now under construction includes an array of 100 electrodes and corresponding array of electrode contact pads formed on opposite faces of a plate fabricated by techniques that are established in the art of microelectromechanical systems (MEMS). A mixed-signal ASIC under construction at the time of reporting the information for this article will include 100 analog amplifier channels (one amplifier per electrode). On one face of the mixed-signal ASIC there will be a solder-bump/micro-pad array that will have the same pitch as that of the electrode array, and that will be used to make the electrical and mechanical connections between the electrode array and the ASIC. Once the electrode array and the ASIC are soldered together, the remaining empty space between them will be filled with a biocompatible epoxy, the remaining exposed portions of the ASIC will be covered with micromachined plates for protection against corrosive bodily fluids, and then the ASIC and its covering micromachined plates will be coated with parylene

Whitacre, Jay↗
NASA NTRS2017

Sample Processor for Life on Icy Worlds (SPLIce): Design and Test Results

We report the design, development, and testing of the Sample Processor for Life on Icy Worlds (SPLIce) system, a microfluidic sample processor to enable autonomous detection of signatures of life and measurements of habitability parameters in Ocean Worlds. This monolithic fluid processing-and-handling system (Figure 1; mass 0.5 kg) retrieves a 50-L-volume sample and prepares it to supply a suite of detection instruments, each with unique preparation needs. SPLIce has potential applications in orbiter missions that sample ocean plumes, such as found in Saturns icy moon Enceladus, or landed missions on the surface of icy satellites, such as Jupiters moon Europa. Answering the question Are we alone in the universe? is captivating and exceptionally challenging. Even general criteria that define life very broadly include a significant role for water [1,2]. Searches for extinct or extant life therefore prioritize locations of abundant water whether in ancient (Mars), or present (Europa and Enceladus) times. Only two previous planetary missions had onboard fluid processing: the Viking Biology Experiments [3] and Phoenixs Wet Chemistry Laboratory (WCL) [4]. SPLIce differs crucially from those systems, including its capability to process and distribute L-volume samples and the integration autonomous control of a wide range of fluidic functions, including: 1) retrieval of fluid samples from an evacuated sample chamber; 2) onboard multi-year storage of dehydrated reagents; 3) integrated pressure, pH, and conductivity measurement; 4) filtration and retention of insoluble particles for microscopy; 5) dilution or vacuum-driven concentration of samples to accommodate instrument working ranges; 6) removal of gas bubbles from sample aliquots; 7) unidirectional flow (check valves); 8) active flow-path selection (solenoid-actuated valves); 9) metered pumping in 100 nL volume increments. The SPLIce manifold, made of three thermally fused layers of precision-machined cyclo-olefin polymer, supports all fluidic components (Figure 1) and integrated microchannels (125 x 250 m). Fluid is pumped by a stepper-motor-driven pump (Lee Co.). The functionality of the integrated MEMS pressure sensor (Honeywell) and passive check valves (Figure 2) were tested in conjunction with our newly designed integral bubble traps (Figure 3) and hydrophobic membrane-based concentrator (Figure 4). The concentrator (initially tested as a standalone component) demonstrated 5-fold vacuum-evaporative concentration. Polyethylene fused bead beds (PEFBBs; 50 porosity) store drylyophilized buffers, calibrants, and fluorescent dyes, and also promote mixing of sample with calibrant, dye, or H2O. Software-controlled automated tests demonstrated successful 1) fluid delivery to each component 2) valve and pump synchronization 3) sample aliquot delivery to instrument interface ports, and 4) rehydration of vacuum-dried fluorescent dye. In Figure 5, fluorescein on PEFBBs was rehydrated for 15 min using a pump-delivered water aliquot; it is displaced as H2O enters the bottom of the channel and pushes the dye into a check valve. Ultimately, SPLIce will fluorescently label amino acids in the sample for microchip-based electrophoretic (MCE) chiral separation and detection to seek and quantify key organic bio-signatures [5]; it will also deliver sample to a microfluidic version of WCL (mWCL) to measure soluble ions and redox-active species.

Life detection↗
NASA NTRS2003

Wafer-Level Membrane-Transfer Process for Fabricating MEMS

A process for transferring an entire wafer-level micromachined silicon structure for mating with and bonding to another such structure has been devised. This process is intended especially for use in wafer-level integration of microelectromechanical systems (MEMS) that have been fabricated on dissimilar substrates. Unlike in some older membrane-transfer processes, there is no use of wax or epoxy during transfer. In this process, the substrate of a wafer-level structure to be transferred serves as a carrier, and is etched away once the transfer has been completed. Another important feature of this process is that two electrodes constitutes an electrostatic actuator array. An SOI wafer and a silicon wafer (see Figure 1) are used as the carrier and electrode wafers, respectively. After oxidation, both wafers are patterned and etched to define a corrugation profile and electrode array, respectively. The polysilicon layer is deposited on the SOI wafer. The carrier wafer is bonded to the electrode wafer by using evaporated indium bumps. The piston pressure of 4 kPa is applied at 156 C in a vacuum chamber to provide hermetic sealing. The substrate of the SOI wafer is etched in a 25 weight percent TMAH bath at 80 C. The exposed buried oxide is then removed by using 49 percent HF droplets after an oxygen plasma ashing. The SOI top silicon layer is etched away by using an SF6 plasma to define the corrugation profile, followed by the HF droplet etching of the remaining oxide. The SF6 plasma with a shadow mask selectively etches the polysilicon membrane, if the transferred membrane structure needs to be patterned. Electrostatic actuators with various electrode gaps have been fabricated by this transfer technique. The gap between the transferred membrane and electrode substrate is very uniform ( 0.1 m across a wafer diameter of 100 mm, provided by optimizing the bonding control). Figure 2 depicts the finished product.

Yang, Eui-Hyeok↗
NASA NTRS2001

Fabricating and using a micromachined magnetostatic relay or switch

A micromachined magnetostatic relay or switch includes a springing beam on which a magnetic actuation plate is formed. The springing beam also includes an electrically conductive contact. In the presence of a magnetic field, the magnetic material causes the springing beam to bend, moving the electrically conductive contact either toward or away from another contact, and thus creating either an electrical short-circuit or an electrical open-circuit. The switch is fabricated from silicon substrates and is particularly useful in forming a MEMs commutation and control circuit for a miniaturized DC motor.

Tai, Yu-Chong↗
NASA NTRS2004

Fabrication of Microshutter Arrays for James Webb Space Telescope

Two-dimensional MEMS microshutter arrays are being developed at NASA Goddard Space Flight Center for use in the near-infrared region on the Next Generation Space Telescope (NGST). The microshutter arrays are designed for the selective transmission of light with high efficiency and high contrast. The NGST environment requires cryogenic operation at 45K. Microshutter arrays are fabricated out of silicon-oxide-insulated (SOI) silicon wafers. Arrays are close-packed silicon nitride membranes with a pixel size of 100x100 microns. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. The mechanical shutter arrays are fabricated using MEMS technologies. The processing includes a multi-layer metal deposition and patterning of shutter electrodes and magnetic pads, reactive ion etching (RE) of the front side to form shutters out of the nitride membrane, an anisotropic back-etch for wafer thinning, followed by a deep RIE (DRIE) back-etch down to the nitride shutter membrane to form frames and relieve shutters from the silicon substrate. An additional metal deposition and patterning is used to form back electrodes. Shutters are actuated using a magnetic force and latched using an electrostatic force.

Li, Mary J.↗
NASA NTRS2004

Thermal-Stress Control of Microshutter Arrays in Cryogenic Applications for the James Webb Space Telescope

We report on methods to minimize thermally-induced deformation in a MEMS-based reconfigurable aperture. The device is an enabling component of the Near-Infrared Spectrometer, a principle instrument on NASA's James Webb Space Telescope. The Microshutter Array consists of 384 x 175 individually addressable shutters which can be magnetically rotated 90 deg into the plane of the array and electrostatically latched open. Each shutter is a 100 x 200 micron rectangular membrane suspended by a small neck region and torsion flexure. The primary materials in the shutter are a 5000A Si3N4 layer for mechanical rigidity, 2000A Al for opacity and electrostatic latching, and 2800A CoFe for magnetic actuation. This multi-layer stack presents a challenge due to the operating temperatures required for the device: both room temperature (300K) and cryogenic temperature (35K). Thermal expansion of the materials causes the shutters to bow out of plane excessively, which can prevent actuation of the shutters, cause damage to portions of the array, and allow light leakage around closed shutters. Here we present our investigation of several methods to prevent microshutter bowing including deposition of additional materials on the shutters to create a symmetrical layer stack and replacing the current stack with low-coefficient of thermal expansion materials. Using shutter-size suspended cantilever beams as a rapid-development test bed, we have reduced out-of-plane bowing between 300K and 35K to 10% or better. We are currently applying these results to microshutter arrays to develop shutters that remain flat from room temperature to cryogenic temperature while retaining the required mechanical, optical, and magnetic properties.

Kelly, Daniel P.↗
DOE OSTI2021

High-Performance Piezoelectric MEMS Manufacturing & Application on Micro Power Generators (CRADA Final Report)

This project aimed to develop and characterize a micro-fabrication technology for wafer-scale heterogeneous integration of bulk piezoelectric materials on silicon substrates that could enable manufacturing of high-performance micro transducers. Typical technical challenges for piezoelectric microfabrication technologies are high-temperature processing, non-uniform film quality, and low process repeatability, which will be addressed during this project. Progress was made on preliminary research towards development of a technology platform that will enable a new micro-fabrication process to provide the highest electromechanical coupling among any other thin/thick-film deposition methods available today. This work has tested and characterized samples that we hope will further our goal of refining and enabling existing micro transducers to achieve unprecedentedly high performance. This project focused solely on the characterization of the proposed microfabrication process technology, and it did not consist of design or manufacturing of new transducers, such as sensors, actuators or energy harvesters based on this fabrication process. Future work will be aimed at the research and development of process steps specifically to enable integration of on-chip electronics with piezoelectric materials.

36 MATERIALS SCIENCE↗
NASA NTRS2004

Fabrication of MEMS-Based Microshutter Arrays for Optical Transmission Selection

A MEMS-based programmable aperture mask is under development at the NASA Goddard Space Flight Center. Termed the Microshutter (u-shutter) Array, the device will be used to control the transmission of light, with both high efficiency and contrast, to a multi-object spectrometer on the James Webb Space Telescope. Fabrication of the p-shutter array employs several novel designs and processing techniques. The current generation of micro-shutters consists of 128x64 pixel arrays with unit cell dimensions of 100x200 microns. Shutters are patterned in silicon nitride and sit on a 100 micron silicon frame that is DRIE etched below each shutter. The front and back sides of the device are shown. A magnetic cobalt-iron alloy patterned on top of the shutter allows it to be actuated 90 degrees out-of-plane, into the frame, by an external magnetic field. An electrode on the shutter and a vertical electrode on the sidewall of the frame, approximately 90pm deep, allow them to be electrostatically latched in their rotated position. The vertical electrode is deposited and patterned on the backside of the frame in a single step using a directionally controlled evaporation. Individual addressing of shutters for electrostatic latching is accomplished via a crosspoint addressing scheme, with no on-chip active components. A portion of an array with shutters in the open, latched, and closed positions is shown. Light loss at shutter edges is minimized by an overhanging aluminum light-shield that is anchored to the frame. A photoresist sacrificial layer is used to raise the light-shield up and over the 2 micron gap that surrounds each pixel. After completion, arrays are subjected to life cycle, environmental and optical testing. Fabricated devices have survived 10(exp 6) actuation cycles at both room and cryogenic temperatures and a 14g rms launch-simulation test. Optical testing has shown contrast measurements between open and closed shutters up to 10000:1.

Lynch, Bernard A.↗
NASA NTRS1995

Silicon Micromachined Sensor for Broadband Vibration Analysis

The development of a family of silicon based integrated vibration sensors capable of sensing mechanical resonances over a broad range of frequencies with minimal signal processing requirements is presented. Two basic general embodiments of the concept were designed and fabricated. The first design was structured around an array of cantilever beams and fabricated using the ARPA sponsored multi-user MEMS processing system (MUMPS) process at the Microelectronics Center of North Carolina (MCNC). As part of the design process for this first sensor, a comprehensive finite elements analysis of the resonant modes and stress distribution was performed using PATRAN. The dependence of strain distribution and resonant frequency response as a function of Young's modulus in the Poly-Si structural material was studied. Analytical models were also studied. In-house experimental characterization using optical interferometry techniques were performed under controlled low pressure conditions. A second design, intended to operate in a non-resonant mode and capable of broadband frequency response, was proposed and developed around the concept of a cantilever beam integrated with a feedback control loop to produce a null mode vibration sensor. A proprietary process was used to integrat a metal-oxide semiconductor (MOS) sensing device, with actuators and a cantilever beam, as part of a compatible process. Both devices, once incorporated as part of multifunction data acquisition and telemetry systems will constitute a useful system for NASA launch vibration monitoring operations. Satellite and other space structures can benefit from the sensor for mechanical condition monitoring functions.

Gutierrez, Adolfo↗
NASA NTRS2011

Design and Performance Evaluation of Sensors and Actuators for Advanced Optical Systems

Current state-of-the-art commercial sensors and actuators do not meet many of NASA s next generation spacecraft and instrument needs. Nor do they satisfy the DoD needs for satellite missions, especially micro/nano satellite missions. In an effort to develop advanced optical devices and instruments that meet mission requirements, NASA Langley recently completed construction of a new cleanroom housing equipment capable of fabricating high performance active optic and adaptive optic technologies including deformable mirrors, reconfigurable lenses (both refractive and diffractive), spectrometers, spectro-polarimeters, tunable filters and many other active optic devices. In addition to performance, these advanced optic technologies offer advantages in speed, size, weight, power consumption, and radiation tolerance. The active optic devices described in this paper rely on birefringent liquid crystal materials to alter either the phase or the polarization of the incoming light. Design considerations and performance evaluation results for various NASA applications are presented. Applications presented will include large space telescopes, optical communications, spacecraft windows, coronagraphs, and star trackers. Keywords: Photonics, Adaptive Optics, Tunable Filters, MEMs., MOEMs, Coronagraph, Star Tracker

Clark, Natalie↗
NASA NTRS2006

NASA Tech Briefs, July 2006

Topics covered include: Airport Remote Tower Sensor Systems; Implantable Wireless MEMS Sensors for Medical Uses; Embedded Sensors for Measuring Surface Regression; Coordinating an Autonomous Earth-Observing Sensorweb; Range-Measuring Video Sensors; Stability Enhancement of Polymeric Sensing Films Using Fillers; Sensors for Using Times of Flight to Measure Flow Velocities; Receiver Would Control Phasing of a Phased-Array Antenna; Modern Design of Resonant Edge-Slot Array Antennas; Carbon-Nanotube Schottky Diodes; Simplified Optics and Controls for Laser Communications; Coherent Detection of High-Rate Optical PPM Signals; Multichannel Phase and Power Detector; Using Satellite Data in Weather Forecasting: I; Using Dissimilarity Metrics to Identify Interesting Designs; X-Windows PVT Widget Class; Shuttle Data Center File-Processing Tool in Java; Statistical Evaluation of Utilization of the ISS; Nanotube Dispersions Made With Charged Surfactant; Aerogels for Thermal Insulation of Thermoelectric Devices; Low-Density, Creep-Resistant Single-Crystal Superalloys; Excitations for Rapidly Estimating Flight-Control Parameters; Estimation of Stability and Control Derivatives of an F-15; Tool for Coupling a Torque Wrench to a Round Cable Connector; Ultrasonically Actuated Tools for Abrading Rock Surfaces; Active Struts With Variable Spring Stiffness and Damping; Multiaxis, Lightweight, Computer-Controlled Exercise System; Dehydrating and Sterilizing Wastes Using Supercritical CO2; Alpha-Voltaic Sources Using Liquid Ga as Conversion Medium; Ice-Borehole Probe; Alpha-Voltaic Sources Using Diamond as Conversion Medium; White-Light Whispering-Gallery-Mode Optical Resonators; Controlling Attitude of a Solar-Sail Spacecraft Using Vanes; and Wire-Mesh-Based Sorber for Removing Contaminants from Air.

Source record↗
NASA NTRS2005

NASA Tech Briefs, February 2005

Topics discussed include: Instrumentation for Sensitive Gas Measurements; Apparatus for Testing Flat Specimens of Thermal Insulation; Quadrupole Ion Mass Spectrometer for Masses of 2 to 50 Da; Miniature Laser Doppler Velocimeter for Measuring Wall Shear; Coherent Laser Instrument Would Measure Range and Velocity; Printed Microinductors for Flexible Substrates; Digital Receiver for Microwave Radiometry; Printed Antennas Made Reconfigurable by Use of MEMS Switches; Traffic-Light-Preemption Vehicle-Transponder Software Module; Intersection-Controller Software Module; Central-Monitor Software Module; Estimating Effects of Multipath Propagation on GPS Signals; Parallel Adaptive Mesh Refinement Library; Predicting Noise From Aircraft Turbine-Engine Combustors; Generating Animated Displays of Spacecraft Orbits; Diagnosis and Prognosis of Weapon Systems; Training Software in Artificial-Intelligence Computing Techniques; APGEN Version 5.0; Single-Command Approach and Instrument Placement by a Robot on a Target; Three-Dimensional Audio Client Library; Isogrid Membranes for Precise, Singly Curved Reflectors; Nickel-Tin Electrode Materials for Nonaqueous Li-Ion Cells; Photocatalytic Coats in Glass Drinking-Water Bottles; Fast Laser Shutters With Low Vibratory Disturbances; Series-Connected Buck Boost Regulators; Space Physics Data Facility Web Services; Split-Resonator, Integrated-Post Vibratory Microgyroscope; Blended Buffet-Load-Alleviation System for Fighter Airplane; Gifford-McMahon/Joule-Thomson Refrigerator Cools to 2.5 K; High-Temperature, High-Load-Capacity Radial Magnetic Bearing; Fabrication of Spherical Reflectors in Outer Space; Automated Rapid Prototyping of 3D Ceramic Parts; Tissue Engineering Using Transfected Growth-Factor Genes; Automation of Vapor-Diffusion Growth of Protein Crystals; Atom Skimmers and Atom Lasers Utilizing Them; Gears Based on Carbon Nanotubes; Patched Off-Axis Bending/Twisting Actuators for Thin Mirrors; and Improving Control in a Joule-Thomson Refrigerator.

Source record↗
DOE OSTI2020

AFM Microcantilever With a Collocated AlN Sensor-Actuator Pair: Enabling Efficient Q-Control for Dynamic Imaging

This manuscript presents a novel microcantilever with an embedded piezoelectric sensor-actuator pair for dynamic atomic force microscopy (AFM). The transducer pair is constructed from a two-layered AlN stack. Stacking the piezoelectric transducers in this manner leads to a minimal feedthrough from actuation to sense electrode, granting a high dynamic range frequency response for dynamic mode AFM. The cantilever's design allows for dual mode operation at 1 st and 2 nd resonance modes. High resolution tapping mode imaging results are reported, while the cantilever is operated at these modes. A feedback control loop is used to modify quality factor of the 1 st mode of the cantilever, using a positive position feedback (PPF) controller. Here, a faster response time is achieved by reducing the Q-factor, enabling the cantilever to track the topography at a higher scan rate. Results of bimodal AFM imaging are reported, using amplitude changes of the 1 st mode for surface topography, while material properties are encoded in phase changes of the 2 nd mode.

47 OTHER INSTRUMENTATION↗