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Wafer-Level Membrane-Transfer Process for Fabricating MEMS

A process for transferring an entire wafer-level micromachined silicon structure for mating with and bonding to another such structure has been devised. This process is intended especially for use in wafer-level integration of microelectromechanical systems (MEMS) that have been fabricated on dissimilar substrates. Unlike in some older membrane-transfer processes, there is no use of wax or epoxy during transfer. In this process, the substrate of a wafer-level structure to be transferred serves as a carrier, and is etched away once the transfer has been completed. Another important feature of this process is that two electrodes constitutes an electrostatic actuator array. An SOI wafer and a silicon wafer (see Figure 1) are used as the carrier and electrode wafers, respectively. After oxidation, both wafers are patterned and etched to define a corrugation profile and electrode array, respectively. The polysilicon layer is deposited on the SOI wafer. The carrier wafer is bonded to the electrode wafer by using evaporated indium bumps. The piston pressure of 4 kPa is applied at 156 C in a vacuum chamber to provide hermetic sealing. The substrate of the SOI wafer is etched in a 25 weight percent TMAH bath at 80 C. The exposed buried oxide is then removed by using 49 percent HF droplets after an oxygen plasma ashing. The SOI top silicon layer is etched away by using an SF6 plasma to define the corrugation profile, followed by the HF droplet etching of the remaining oxide. The SF6 plasma with a shadow mask selectively etches the polysilicon membrane, if the transferred membrane structure needs to be patterned. Electrostatic actuators with various electrode gaps have been fabricated by this transfer technique. The gap between the transferred membrane and electrode substrate is very uniform ( 0.1 m across a wafer diameter of 100 mm, provided by optimizing the bonding control). Figure 2 depicts the finished product.

Yang, Eui-Hyeok↗

Deep Etching Process Developed for the Fabrication of Silicon Carbide Microsystems

Silicon carbide (SiC), because of its superior electrical and mechanical properties at elevated temperatures, is a nearly ideal material for the microminiature sensors and actuators that are used in harsh environments where temperatures may reach 600 C or greater. Deep etching using plasma methods is one of the key processes used to fabricate silicon microsystems for more benign environments, but SiC has proven to be a more difficult material to etch, and etch depths in SiC have been limited to several micrometers. Recently, the Sensors and Electronics Technology Branch at the NASA Glenn Research Center at Lewis Field developed a plasma etching process that was shown to be capable of etching SiC to a depth of 60 mm. Deep etching of SiC is achieved by inductive coupling of radiofrequency electrical energy to a sulfur hexafluoride (SF6) plasma to direct a high flux of energetic ions and reactive fluorine atoms to the SiC surface. The plasma etch is performed at a low pressure, 5 mtorr, which together with a high gas throughput, provides for rapid removal of the gaseous etch products. The lateral topology of the SiC microstructure is defined by a thin film of etch-resistant material, such as indium-tin-oxide, which is patterned using conventional photolithographic processes. Ions from the plasma bombard the exposed SiC surfaces and supply the energy needed to initiate a reaction between SiC and atomic fluorine. In the absence of ion bombardment, no reaction occurs, so surfaces perpendicular to the wafer surface (the etch sidewalls) are etched slowly, yielding the desired vertical sidewalls.

Beheim, Glenn M.↗

Diagnostics: Chapter 8 of the special issue: on the path to tokamak burning plasma operation

This chapter presents the activity conducted by the ITPA topical group (TG) on Diagnostics over about the last 15 years. Following a general introduction of the ITER Diagnostics led by their measurement roles, the document is organized in several subchapters detailing the design support, research and development activity conducted by each of the specialist working groups (WGs) of the TG. Please note that the magnetic diagnostics were supported at the TG without a specific WG. Their status is included in the general introduction. In the following some highlights of the subchapter’s contents are provided. Recent advances in ITER first wall (FW) diagnostics for the measurements of plasma-metallic wall interaction in support of the ITER research plan are reported. An InfraRed imaging Video Bolometer for ITER has been developed and tested on several tokamaks to measure the radiated power loss. A laser-induced breakdown spectroscopy (LIBS) technique which utilizes a pulsed laser beam to ablate locally by forming a crater, will measure local tritium inventory in the FW material. Real-time Residual Gas Analyzers will measure the neutral gas composition in a divertor port and an equatorial port during plasma operation. Due to the full metallic FW environment, the plasma-wall interaction in ITER will face several challenges such as the compromised radiated power and divertor heat flux measurements by reflection. Ray tracing and analysis codes have been developed to eliminate and correct the effects of reflection in the measurements. The characteristics of the reflecting surfaces depending on the roughness and angle of the incidence have been measured by dedicated experiments, and the results were applied to the reflection elimination. For the measurement of the metallic impurity radiation induced by eroded metallic atoms, a vacuum ultraviolet spectrometer has been developed and tested. An extensive thermonuclear diagnostic suite will be required to support the operation of ITER and the planned experimental program for future burning plasma experiments. Due to the harsh environmental conditions, the implementation of diagnostic systems in ITER is a major challenge. These conditions include high levels of neutron and gamma fluxes, neutron heating, particle bombardment. Therefore, the selection and design of diagnostic systems must take into account a number of phenomena previously unseen in diagnostic design. For this reason, the measurement of neutrons and confined or lost fast ions, with particular emphasis on alpha particles, is critical to ITER. The diagnostics associated with these measurements will be important for future plasma-burning experiments at ITER. The high neutron emission and very large plasma size in ITER make neutron diagnostics the main diagnostic method used to measure plasma parameters such as fusion power, fusion power density, ion temperature, energy of fast ions and their spatial distributions in the plasma core. Active spectroscopy techniques are methods where a neutral particle beam is injected into the plasma and information on plasma parameters is extracted from the measurement of line emission resulting from the beam-plasma interaction, either by plasma ions or by beam atoms. Spatial localization is achieved by crossing the beamline and multiple observation lines. The ITER plasma will be a high temperature, moderately dense, fully ionized collisional plasma. The plasma facing surfaces are principally metallic being fashioned from beryllium or tungsten but many other elements, arising from either structural or from operational needs, may enter this plasma. The energy range of the emitted photons range from meV (infra-red) to multi keV (x-rays) and originate from all areas of the plasma volume. The primary role of passive emission diagnostics is to identify what is in the plasma from spectral signatures. Extracting quantitative information from these measurements such as impurity content, ion temperature, rotation, degree of detachment and radiated power depends on calibrated instruments, a physics model of the atomic and molecular processes and plasma transport and an analysis workflow that takes into account environmental effects such as reflections. The particular needs for ITER have prompted a multi-machine, many-year effort to address all these aspects and this chapter reviews the work on diagnostic design, experiments and new analysis techniques. An overview of the laser diagnostics to be implemented on ITER is also provided in this paper. This includes descriptions of the Thomson scattering in the core, edge and divertor regions, polarimetry and interferometry diagnostics used for measuring plasma density and also measurements of helium density in the divertor using Laser Induced Flourescence. Techniques which can allow improvements on current measurements are also addressed in particular expanding poloidal polarimetry measurements to measure field fluctuations and proposed use of dispersion interferometery which has a number of advantages over existing methods. This paper identifies particular areas where further research and testing on existing tokamaks is useful even at this advanced stage to inform the design of diagnostics for ITER. Outstanding areas of concern for the implementation of laser diagnostics, in particular with a view to reliable operation are identified. An overview of the latest developments of microwave diagnostic systems and techniques is given. The primary focus is the contributions for ITER—the next step burning plasma experiment—which is supplemented by describing recent progress of techniques applicable for fusion experiments beyond ITER. The contributions are intentionally kept concise, and are being supplemented by a rich list of references for further studies. Radiation induced effects are receiving continuous and well-deserved attention of the ITER diagnostic community and they are in many cases one of the primary design drivers of the ITER diagnostic systems. The paper summarizes recent progress in this area focusing primarily on the ITER diagnostics but in some cases provides also outlook for the possible solutions for even more demanding radiation environment of fusion reactors beyond ITER. Despite advancements in the area of modeling and simulation of various radiation induced effects, experimental testing in a nuclear environment as close as possible to the target one is still seen as unavoidable for proper qualification of particular diagnostic functional elements. Recent advancement within three diagnostic areas: optical diagnostics, magnetics and bolometers is covered. Encouraging results on qualification of silica glass vacuum window assemblies are presented. In the area of magnetic sensors, progress of irradiation tests performed on ITER in-vessel LTCC inductive sensors is presented with outlook for novel technological approaches to inductive sensors utilizing thick printing and photolithography technologies being highlighted. Summary of advancements in the area of steady state magnetic field sensors based on Hall effect is given. New results of neutron irradiation test of the ITER borosilicate glass inserts for vacuum electrical feedthroughs are summarized finding negligible swelling at target level of neutron fluence. Off-line irradiation tests of fiber optic current sensors for plasma current measurement demonstrated that both for gamma doses up to 5 MGy and a total neutron fluence up to 10 15 cm −2 , radiation induced changes are still compatible with required measurement accuracy on ITER. The ITER bolometers are given as an example how considering radiation effects may influence the diagnostic design. Finally, outlook for future main R&D directions is outlined. All optical and laser-based diagnostics in ITER will be using mirrors to guide plasma radiation toward detectors, cameras and sensors. In the hostile plasma, radiation and particle environment the optical characteristics of diagnostic mirrors will degrade directly affecting the entire performance of involved diagnostic systems. An assessment of factors affecting mirror performance is provided. Among the prime adverse factors are deposition of plasma impurities, sputtering of mirror surface and steam ingress in the vicinity of mirrors. Within the International Tokamak Physics Activity with active support by ITER central team and domestic agencies, the structured research and development (R&D) program on mitigation of risks for diagnostic mirrors is underway. Within this program the mirror material development, the passive mitigation of mirror degradation by using diagnostic ducts and shutters along with an active mirror recovery program comprising the in-situ mirror cleaning and calibration is underway. Recent developments in diagnostic mirror R&D are described in this Chapter along with an example of their implementation of R&D solutions in ITER Infrared Thermography diagnostic. An assessment of still open engineering and physics questions, considerations on mirror risks during an early phase of ITER operation are given along with an overview of diagnostic mirror evolution in the late ITER operation stage toward the demonstration fusion power plant. Several crucial areas of diagnostic R&D outlined in ITER Research Plan are addressed. The basic control groups in a fusion reactor can be broken-down in five categories: (1) plasma position, magnetic configuration, and plasma current control, (2) profile control and confinement optimization, (3) MHD control and suppression, (4) edge dissipation control, radiation and plasma exhaust control and (5) break-down optimization. These categories are coupled via the physics (a control action in one domain will affect the other domains) and via shared actuators (e.g. ECRH for impurity accumulation avoidance, current density distribution control and MHD suppression). Consequently, a supervisory control system should determine the priority of the various control tasks, their couplings, and the interfaces with the safety and interlock system. For the systematic development of the various controllers taking the complexity of the plasma and the control system into account, a model-based approach is required. A short historical overview is given of the developments in systems and control theory and control engineering with special emphasis on those developments that are most relevant for Nuclear Fusion research and operation. An overview is given of the state of the field of fusion plasma control for the control categories. It will be shown how synthetic diagnostics are being developed in ITER and how they are used in diagnostic design and design validation and how they can be in model-based controller synthesis using relatively simple models. In modern control methods, multiple diagnostics are used to constrain relatively simple models. The constrained models provide an estimate for the state. This opens the route to state controllers, such as model predictive control. A major challenge in nuclear fusion research is the coherent combination of data from heterogeneous diagnostics and modeling codes for machine control and safety as well as physics studies. Measured data from different diagnostics often provide information about the same subset of physical parameters. Additionally, information provided by some diagnostics might be needed for the analysis of other diagnostics. A joint analysis of complementary and redundant data allows, e.g. to improve the reliability of parameter estimation, to increase the spatial and temporal resolution of profiles, to obtain synergistic effects, to consider diagnostics interdependencies and to find and resolve data inconsistencies. Physics-based modeling and parameter relationships provide additional information improving the treatment of ill-posed inversion problems. A coherent combination of all kind of available information within a probabilistic framework allows for improved data analysis results. The concept of integrated data analysis (IDA) in the framework of Bayesian probability theory is outlined and contrasted with conventional data analysis. Components of the probabilistic approach are summarized and specific ingredients beneficial for data analysis at fusion devices are discussed.

ITER↗

Avoiding fusion plasma tearing instability with deep reinforcement learning

For stable and efficient fusion energy production using a tokamak reactor, it is essential to maintain a high-pressure hydrogenic plasma without plasma disruption. Therefore, it is necessary to actively control the tokamak based on the observed plasma state, to manoeuvre high-pressure plasma while avoiding tearing instability, the leading cause of disruptions. This presents an obstacle-avoidance problem for which artificial intelligence based on reinforcement learning has recently shown remarkable performance. However, the obstacle here, the tearing instability, is difficult to forecast and is highly prone to terminating plasma operations, especially in the ITER baseline scenario. Previously, we developed a multimodal dynamic model that estimates the likelihood of future tearing instability based on signals from multiple diagnostics and actuators. Here we harness this dynamic model as a training environment for reinforcement-learning artificial intelligence, facilitating automated instability prevention. We demonstrate artificial intelligence control to lower the possibility of disruptive tearing instabilities in DIII-D, the largest magnetic fusion facility in the United States. The controller maintained the tearing likelihood under a given threshold, even under relatively unfavourable conditions of low safety factor and low torque. In particular, it allowed the plasma to actively track the stable path within the time-varying operational space while maintaining H-mode performance, which was challenging with traditional preprogrammed control. This controller paves the path to developing stable high-performance operational scenarios for future use in ITER.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

An optical-input Maximum Likelihood Estimation feedback system demonstrated on tokamak horizontal equilibrium control

A readily parallelized Maximum Likelihood Estimation (MLE) algorithm with linear computational complexity is demonstrated in real time using only measurements from an extreme ultraviolet (EUV) diagnostic to control the horizontal position of a tokamak plasma. A set of trial emissivity profiles are parameterized by the control quantity of interest (R m ), and the MLE is identified from the profile which minimizes the signal reconstruction residual. The algorithm depends on an empirically determined likelihood function with exponential form. EUV emission (λ ≈ 15eV-1keV) is captured in a poloidal plane by four 16-channel AXUV diodes mounted at different poloidal angles with radial and angular resolution sufficient to discern plasma equilibrium evolution in HBT-EP. Calculations of the plasma major radius by the system are consistent within diagnostic uncertainty for the majority of the discharge with those of: a weighted average of vertical soft X-ray or EUV chords, magnetic sensors, and an equilibrium reconstruction. The feedback system corrects for a horizontal displacement of the major radius equal to 20% of the plasma minor radius by adjusting the vertical field produced from 40 in-vessel control coils in real time. The MLE calculation is performed on a GPU in a 15 μs cycle, with similar performance in this application to a simple weighted average of vertical chords. Finally, results demonstrate horizontal position control using magnetic actuators and an optical observer.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

High Field Side Launch of RF Waves: A New Approach to Reactor Actuators

Launching radio frequency (RF) waves from the high field side (HFS) of a tokamak offers significant advantages over low field side (LFS) launch with respect to both wave physics and plasma material interactions (PMI). For lower hybrid (LH) waves, the higher magnetic field opens the window between wave accessibility and the condition for strong electron Landau damping, allowing LH waves from the HFS to penetrate into the core of a burning plasma, while waves launched from the LFS are restricted to the periphery of the plasma. The lower of waves absorbed at higher yields a higher current drive efficiency as well. In the ion cyclotron range of frequencies (ICRF), HFS launch allows for direct access to the mode conversion layer where mode converted waves absorb strongly on thermal electrons and ions, thus avoiding the generation of energetic minority ion tails. The absence of turbulent heat and particle fluxes on the HFS, particularly in double null configuration, makes it the ideal location to minimize PMI damage to the antenna structure. The quiescent SOL also eliminates the need to couple LH waves across a long distance to the separatrix, as the antenna can be located close to plasma without risking damage to the structure. Improved impurity screening on the HFS will help eliminate the long-standing issues of high Z impurity accumulation with ICRF.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Impact of gas injection location and divertor surface material on ITER fusion power operation phase divertor performance assessed with SOLPS-ITER *

Abstract The ITER divertor design and performance assessment, primarily based on the SOLPS-4.3 burning plasma database (Pitts R. et al 2019 Nucl. Mater. Energy 20 100696), assumes the use of beryllium (Be) as the divertor surface material and the injection of gas from the main chamber top. However, the current ITER baseline favors gas injection from the more toroidally symmetric sub-divertor region. This paper evaluates the implications of these assumptions for divertor performance in the ITER fusion power operation phase. The impact of the divertor surface material and the gas injection location on the main ions mirrors the hydrogen only low power phase scenario shown in Park J.-S. et al (2020 Nucl. Fusion 61 016021). However, during burning plasma operation, extrinsic impurity seeding will be required. In the case of neon (Ne), studied here, impurity retention is influenced by both the divertor surface material and the fueling location. Neon leakage increases due to more energetic reflection from tungsten than beryllium, but equivalent divertor performance can be achieved by adjusting the neon seeding rate. While the impurity seeding location does not affect the distributions of impurity or radiation, the fueling location does. Top fueling provides local ionization sources mainly in the mid-SOL under detached conditions, enhancing divergences of the flux there (source-driven flow), bringing stagnation points close to the fueling location, and equilibrating flows towards both targets. In contrast, the global flow pattern (in the absence of fluid drifts) in the case of sub-divertor fueling is biased towards the inner target. Impurity flows, driven by force balance, largely mirror those of the main ion flow, including the stagnation point. The case with top fueling enhances Ne retention and corresponding radiation in the outer divertor, effectively reducing the total and peak target heat fluxes by 20%–40%, compared to the case with divertor fueling. Meanwhile, the case with outer target fueling also achieves similar reductions by enhancing plasma-neutral interactions. These results suggest the possibility that the selection of the fueling location and throughput can be used as an actuator to control impurity divertor retention and divertor radiation asymmetry.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

Spray Forming of NiTi and NiTiPd Shape-Memory Alloys

In the work to be presented, vacuum plasma spray forming has been used as a process to deposit and consolidate prealloyed NiTi and NiTiPd powders into near net shape actuators. Testing showed that excellent shape memory behavior could be developed in the deposited materials and the investigation proved that VPS forming could be a means to directly form a wide range of shape memory alloy components. The results of DSC characterization and actual actuation test results will be presented demonstrating the behavior of a Nitinol 55 alloy and a higher transition temperature NiTiPd alloy in the form of torque tube actuators that could be used in aircraft and aerospace controls.

Mabe, James↗

Wide-Bandgap Semiconductor Amplifiers for Fusion Plasma Heating and Control

This paper discusses power electronics developed under the ARPA-E GAMOW program to support nuclear fusion power production. The goal of this project was to develop and assess the potential for wide-bandgap (WBG) semiconductor devices in power electronics to enable high-efficiency and high-voltage solid-state systems for fusion plasma generation, heating, and control. The power electronics use an architecture in which multiple high-power boards can be combined to produce megawatt-level power, where using multiple boards provides high reliability. Two main areas of power electronics boards are developed in this project for fusion plasma heating and control applications: (1) pulse generation and control and (2) radiofrequency generation. The first area is for boards capable of driving high-voltage millisecond pulses at high duty cycles. The envisioned application of these pulses is in plasma control of magnetohydrodynamic instabilities, plasma position, and edge-localized modes. Pulse-width modulation allows for the implementation of a wide variety of linear and nonlinear control systems. The boards developed for this project could actuate control coils based on digital input signals and can be parallelized to provide megawatts of output power. The design of the pulse generator is a low-side load switch. A load switch was designed and constructed that utilized 2-kV-rated field-effect transistor (FET)-based cascodes developed by Qorvo under this project to perform initial testing of these cascodes. The second area is being implemented using class E amplifiers with WBG devices and a reactance steering network to handle inductive or capacitive plasma loads. Applications include ion cyclotron resonance heating (ICRH) and high-harmonic fast-wave (HHFW) heating. A class E reactance steering network is demonstrated in modeling and experiment with a resistive-inductive load that models an inductively-coupled plasma. Power combining of boards with class E reactance steering networks is also simulated and demonstrated experimentally, to enable scaling up to high power. Modeling of high-power-density cooling and remaining useful life is conducted to enable reliable, effectively cooled high-power electronics for fusion applications.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

Results and lessons learned from accelerating radio frequency modeling using machine learning [slides]

The “advanced tokamak” reactor concept is a leading candidate for a steady state fusion pilot plant. An advanced tokamak (AT) sustains a majority of the required plasma current with effects resulting from maintenance of the peaked pressure at the device center. This current is augmented by auxiliary current drive sources. These auxiliary actuators may consist of neutral particle beams and/or radio frequency (RF) systems such as lower hybrid current drive (LHCD) and high harmonic fast wave (HHFW) current drive using radio and microwaves from antennas. The primary focus of this work is to develop models of RF current profile control suitable for use in integrated modeling frameworks and for real-time control in experiments. Direct physics models of RF current drive can be computationally intensive. In order to achieve predictive times appropriate for the thousands of calls needed in real-time control of experiments and for use in integrated models, we will apply modern machine learning (ML) techniques to accelerate these models and interpolate their results. To generate the fast and accurate models for use in control level algorithms and integrated modeling we need to replace present models with high dimensional interpolation of their results. We will perform additional simulations across a broader parameter range for EAST and other tokamaks in different physics regimes (Alcator C-Mod, DIII-D, WEST, CFETR, ARC, ITER) and combine them into a larger database for training and testing of the ML models. Further testing of the control level models with experimental current profile data from EAST and C-Mod tokamaks will provide additional confirmation of the control level model before integration in a tokamak control system or integrated modeling suite. ML will be used to optimize the selection of training data consisting of RF current driven at different values of density profile, temperature profile, plasma current, and wavenumber. ML will also be used to facilitate classification of current drive from these input data. The output of this effort will be a validated classifier capable of determining the current drive profiles for HHFW CD and LHCD on a mille-second timescale. This will provide a breakthrough capability enabling real-time control of RF driven current profiles in experiments including ITER ICRF and use integrated modeling frameworks requiring thousands of current profile calculations in discharge simulations.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Use of differential plasma rotation to prevent disruptive tearing mode onset from 3-wave coupling

Abstract Plasma differential rotation is found to be capable of preventing disruptive neoclassical tearing modes (NTMs) seeded by nonlinear three-wave coupling. As tearing modes degrade confinement and can lead to disruptions, stabilization strategies are crucial to the successful operation of future devices. In ITER-relevant scenarios on DIII-D, rotationally coupled m / n = 1/1 and 3/2 modes have been observed to drive 2/1 islands through three-wave coupling. The frequency of the driven 2/1 mode is set by matching conditions and the frequencies of the driving modes. When the driven mode frequency matches the local plasma rotation frequency, e.g. at low differential rotation, the driven 2/1 island can grow into a disruptive NTM. Using neutral beam torque as an actuator to scan the differential rotation, these experiments demonstrate that a sufficiently large frequency mismatch prevents destabilization of disruptive 2/1 NTMs by three-wave coupling. This work indicates that differential rotation can be used as an actuator to prevent NTMs seeded by three-wave coupling.

Richner, N. J. (ORCID:0000000155443915)↗

Design and analysis of actively-cooled, edge-transport diagnostic for long-pulsed operation in WEST

Next step fusion devices that will operate in steady-state will require complex plasma-facing components (PFCs) that can survive the harsh environment over long timescales not common in current devices. This will require robust plasma facing surfaces that are integrated with active cooling systems. In a collaboration between CEA and ORNL, a plasma-interacting diagnostic is being designed for the W Environment in Steady-state Tokamak (WEST) in Cadarache, France which requires plasma-facing protection like those needed for steady-state PFCs. This integrated diagnostic studies edge transport and impurity migration within WEST, and is planned to include imbedded temperature Langmuir probe sensors, as well as removeable sample slots for ex-situ surface analysis of plasma-material interactions. The entire assembly is expected to move into the plasma edge for periods up to 1000 s having an energy removeable capability of ∼6 kW and seeing a peak heat flux of more than 7 MW/m2. The assembly compliments WEST high fluence campaigns that plan for multiple 1000 s pulses. Within these specifications, the assembly will require a refractory metal plasma facing surface and integral cooling in order to function within the limited space allotted for such diagnostics. Because of the limited space and linear actuator needs, additive manufacturing of the high heat flux working end of the assembly is being considered which could allow for precision cooling-channels and lighter weight designs. Conceptual design along with simulation and analysis results will be presented for this complex diagnostic with novel PFCs.

Lumsdaine, Arnold↗

Plasma flux expansion control on the DIII-D tokamak

A new controller has been developed with help of the flexible divertor poloidal-field coil set of the DIII-D tokamak, to aid in the precise control of the flux expansion in the scrape-off layer (SOL). Here, the single-input multiple-output (SIMO) architecture ensures flexibility through a complementary set of orthogonal actuator direction to guarantee minimum effect on existing controlled variables, e.g. radial and vertical position control of the X-point. A non-linear free-boundary simulation code (GSevolve) is used for simulating the closed-loop response and for verifying the implementation of the control algorithm on the DIII-D plasma control system (PCS). First results of the experimental commissioning of the new controller during 2020 DIII-D campaign are also presented.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Development of compact tokamak fusion reactor use cases to inform future transport studies

The OMFIT STEP (Meneghini et al. , Nucl. Fusion , vol. 10, 2020, p. 1088) workflow has been used to develop inductive and steady-state H-mode core plasma scenario use cases for a $B_0 = 8 \, {\rm T}$ , $R_0 = 4 \, {\rm m}$ machine to help guide and inform future higher-fidelity studies of core transport and confinement in compact tokamak reactors. Both use cases are designed to produce 200 MW or more of net electric power in an up-down symmetric plasma with minor radius $a = 1.4 \, {\rm m}$ , elongation $\kappa = 2.0$ , triangularity $\delta = 0.5$ and effective charge $Z_{{\rm eff}} \simeq 2$ . Additional considerations based on the need for compatibility of the core with reactor-relevant power exhaust solutions and external actuators were used to guide and constrain the use case development. An extensive characterization of core transport in both scenarios is presented, the most important feature of which is the extreme sensitivity of the results to the quantitative stiffness level of the transport model used as well as the predicted critical gradients. This sensitivity is shown to arise from different levels of transport stiffness exhibited by the models, combined with the gyroBohm-normalized fluxes of the predictions being an order of magnitude larger than other H-mode plasmas. Additionally, it is shown that although heating in both plasmas is predominantly to the electrons and collisionality is low, the plasmas remain sufficiently well coupled for the ions to carry a significant fraction of the thermal transport. As neoclassical transport is negligible in these conditions, this situation inherently requires long-wavelength ion gyroradius-scale turbulence to be the dominant transport mechanism in both plasmas. These results are combined with other basic considerations to propose a simple heuristic model of transport in reactor-relevant plasmas, along with simple metrics to quantify coupling and core transport properties across burning and non-burning plasmas.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Pop-up Langmuir probe diagnostic in the water cooled divertor of Wendelstein 7-X

The design, development, and successful implementation of pop-up Langmuir probes installed in the water-cooled divertor of W7-X are described. The probes are controlled by drive coils (actuators) installed behind the divertor plates. These drive coils make use of the magnetic field in W7-X to move the probe tips into and out of the plasma. The drive coils were installed in the vacuum vessel after extensively testing the durability of the coils and analyzing the criteria for safe operation. The probe design is carefully tailored for each of the 36 probe tips in order to be suitable for the different magnetic field configurations used in W7-X and ensure that the probes do not present leading edges to the magnetic flux tubes. An electronic bridge circuit is used for measurement to compensate for the effects of signal propagation time on the long cable lengths used. The diagnostic is integrated with the segment control of W7-X for automated operation and control of the diagnostic. The evaluation of the results from the plasma operation is presented after accounting for appropriate sheath expansion for negative bias voltage on the probes.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

A Comparison of Thruster Implementation Strategies for a Deep Space Nanosatellite

Attitude control for very small spacecraft, commonly referred to as nanosatellites or CubeSats, has traditionally been carried out using reaction wheels and magnetic torquers as the primary actuators. However, as these spacecraft begin to be considered for a broader range of scientific applications, including some beyond low Earth orbit, it has become necessary to also consider thruster systems for actuation. In recent years a number of thruster designs that conform to the mass, volume, and power constraints of nanosatellites have become commercially available, including cold gas systems, pulsed plasma thrusters (PPTs), and micro-electrospray propulsion (MEP) systems. The challenge now facing the nanosatellite community is to determine which thruster solutions are appropriate for a particular application, and what the best method of control might be. This paper will compare the implementation of a cold gas system with that of an MEP or PPT system for an upcoming nanosatellite mission using a previously reported saturation-restricted control law. Results are presented for this controller both with and without a fuel-optimal thruster allocation scheme, and an assessment on incorporating these technologies in an upcoming NASA mission is offered.

Nehrenz, Matt↗

Uniform Whole Wafer Anisotropic Etching of Structural Ta Thin Films

Tantalum (Ta) has promise as a structural material for micromechanical sensors and actuators. Anisotropic etching of alpha (α) phase Ta is required for micromachining applications. Uniform thickness and etch across a full wafer are desirable features. An experimental investigation is conducted to study plasma etching rate and anisotropy in etching α -Ta in relation to pressure and gas flow ratio. A comparatively low toxicity gas, carbon tetrafluoride (CF4), and argon (Ar) are used. Spectrometry by optical emission spectrometry (OES) and residual gas analysis (RGA) are employed to characterize the plasma to gain insight into the etch mechanisms. At low flow, the etch rate is slow due to an inadequate supply of the etching gas, CF4. The etch rate is also slowed at high flow due to a reduced CF4 residence time. Flow and pressure conditions to achieve a good etch rate and vertical sidewalls are identified and explained by means of a full factorial experiment coupled with emission spectra. Finally, with these conditions, uniform etching of 2.5 μm thick α-Ta across a 4-inch wafer is demonstrated.

36 MATERIALS SCIENCE↗

Downhole Elemental Analysis with LIBS

In this paper we discuss a novel instrument, currently under development at Honeybee Robotics with SBIR funding from NASA. The device is designed to characterize elemental composition as a function of depth in non-terrestrial geological formations. The instrument consists of a miniaturized laser-induced breakdown spectrometer (LIBS) analyzer integrated in a 2" diameter drill string. While the drill provides subsurface access, the LIBS analyzer provides information on the elemental composition of the borehole wall. This instrument has a variety of space applications ranging from exploration of the Moon for which it was originally designed, to Mars, as well as a variety of terrestrial applications. Subsurface analysis is usually performed by sample acquisition through a drill or excavator, followed by sample preparation and subsequent sample presentation to an instrument or suite of instruments. An alternative approach consisting in bringing a miniaturized version of the instrument to the sample has many advantages over the traditional methodology, as it allows faster response, reduced probability of cross-contamination and a simplification in the sampling mechanisms. LIBS functions by focusing a high energy laser on a material inducing a plasma consisting of a small fraction of the material under analysis. Optical emission from the plasma, analyzed by a spectrometer, can be used to determine elemental composition. A triangulation sensor located in the sensor head determines the distance of the sensor from the borehole wall. An actuator modifies the position of the sensor accordingly, in order to compensate for changes due to the profile of the borehole walls. This is necessary because LIBS measurements are negatively affected by changes in the relative position of the focus of the laser with respect to the position of the sample (commonly referred to as the "lens to sample distance"). Profiling the borehole is done by adjusting the position of the sensor with a vertical stage; a second actuator at the top of the downhole probe allows radial scanning of the borehole. Analysis of iron and titanium in lunar simulant with LIBS was performed in air using the method of standard addition. The results for lunar simulant NU-LHT-2M show a value for the concentration of iron ranging between 2.29% and 3.05% depending on the atomic line selected. The accepted value for the sample analyzed is 2.83%, showing the capability for the system in development to provide qualitative and semi-quantitative analysis in real-time.

Moreschini, Paolo↗