Search NASA⌕ Search

SEARCH · Search NASA

Results for “electron beam generated plasma”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 127 records · Page 7
All sourcesNASA NTRSDOE OSTI
DOE OSTI2023

Neural network model of neutral beam injection in the EAST tokamak to enable fast transport simulations

The neutral beam injection (NBI) system in EAST produces energetic neutral particles, which collide with electrons and ions in tokamak plasmas and heat the plasmas through Coulomb collisions. Moreover, it drives a non-inductive source of current, due to the charge-exchange collision between neutral particles and ions, and injects toroidal torque, which generates a toroidal rotation of the plasma. The effect caused by the NBI system, such as plasma heating, current drive, total neutron rate, momentum transfer, and shine-through, are modeled by a comprehensive module called NUBEAM. However, NUBEAM is computationally intensive since it relies on Monte Carlo methods. In this work, a neural network model has been developed as a surrogate model for NUBEAM in EAST. The database for neural-network model training, validation and testing is generated by running TRANSP for experimental discharges from recent EAST campaigns (after the latest NBI upgrade) while using the NUBEAM module. Simulation results illustrate that the trained neural network has the capability of replicating the predictions made by NUBEAM while demanding a significantly shorter execution time. Finally, these results indicate that surrogate models like the one proposed in this work could enable fast transport simulations for EAST after integrating them into a control-oriented predictive code such as COTSIM.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2022

Characterization of self-magnetic pinch radiographic diode performance on RITS-6 at Sandia National Laboratories. II. Coupling between the inductive voltage adder and the SMP load

The self-magnetic pinch (SMP) diode is a type of radiographic diode used to generate an intense electron beam for radiographic applications. At Sandia National Laboratories, SMP was the diode load for the six-cavity radiographic integrated test stand inductive voltage adder (IVA) driver operated in a magnetically insulated transmission line (MITL). The MITL contributes a flow current in addition to the current generated within the diode itself. Extensive experiments with a MITL of 40Ω load impedance [T. J. Renk et al., Phys. Plasmas 29, 023105 (2022)] indicate that the additional flow current leads to results similar to what might be expected from a conventional high-voltage interface driver, where flow current is not present. However, when the MITL flow impedance was increased to 80 Ω, qualitatively different diode behavior was observed. This includes large retrapping waves suggestive of an initial coupling to low impedance as well as diode current decreasing with time even as the total current does not. A key observation is that the driver generates total current (flow + diode) consistent with the flow impedance of the MITL used. The case is made in this paper that the 80Ω MITL experiments detailed here can only be understood when the IVA-MITL-SMP diode is considered as a total system. Additionally, the constraint of fixed total current plus the relatively high flow impedance limits the ability of the diode (whether SMP or other type) to act as an independent load. An unexpected new result is that in tracking the behavior of the electron strike angle on the converter as a function of time, we observed that the conventional cIV x “Radiographic” radiation scaling (where x~2.2) begins to break down for voltages above 8 MV, and cubic scaling is required to recover accurate angle tracking.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2021

Isotope effects on transport in LHD

Abstract Isotope effects are one of the most important issues for predicting future reactor operations. Large helical device (LHD) is the presently working largest stellarator/helical device using super conducting helical coils. In LHD, deuterium experiments started in 2017. Extensive studies regarding isotope effects on transport have been carried out. In this paper, the results of isotope effect studies in LHD are reported. The systematic studies were performed adjusting operational parameters and nondimensional parameters. In L mode like normal confinement plasma, where internal and edge transport barriers are not formed, the scaling of global energy confinement time ( τ E ) with operational parameters shows positive mass dependence ( M 0.27 ; where M is effective ion mass) in electron cyclotron heating plasma and no mass dependence ( M 0.0 ) in neutral beam injection heating plasma. The non-negative ion mass dependence is anti-gyro-Bohm scaling. The role of the turbulence in isotope effects was also found by turbulence measurements and gyrokinetic simulation. Better accessibility to electron and ion internal transport barrier (ITB) plasma is found in deuterium (D) plasma than in hydrogen (H). Gyro kinetic non-linear simulation shows reduced ion heat flux due to the larger generation of zonal flow in deuterium plasma. Peaked carbon density profile plays a prominent role in reducing ion energy transport in ITB plasma. This is evident only in plasma with deuterium ions. New findings on the mixing and non-mixing states of D and H particle transports are reported. In the mixing state, ion particle diffusivities are higher than electron particle diffusivities and D and H ion density profiles are almost identical. In the non-mixing state, ion particle diffusivity is much lower than electron diffusivity. Deuterium and hydrogen ion profiles are clearly different. Different turbulence structures were found in the mixing and non-mixing states suggesting different turbulence modes play a role.

Physics↗
DOE OSTI2020

A Case Study of Nonresonant Mode 3-s ULF Waves Observed by MMS

The nature of the 3-s ultralow frequency (ULF) wave in the Earth's foreshock region and the associated wave-particle interaction are not yet well understood. In this work, we investigate the 3-s ULF waves using Magnetospheric Multiscale (MMS) observations. By combining the plasma rest frame wave properties obtained from multiple methods with the instability analysis based on the velocity distribution in the linear wave stage, the ULF wave is determined to be due to the ion/ion nonresonant mode instability. The interaction between the wave and ions is analyzed using the phase relationship between the transverse wave fields and ion velocities and using the longitudinal momentum equation. During the stage when ULF waves have sinusoidal waveforms up to |dB|/|B 0 | ~ 3, where dB is the wave magnetic field and B0 is the background magnetic field, the wave electric fields perpendicular to B 0 do negative work to solar wind ions; along B 0 , a longitudinal electric field develops, but the V × B force is stronger and leads to solar wind ion deceleration. During the same wave stage, the backstreaming beam ions gain energy from the transverse wave fields and get deceleration along B 0 by the longitudinal electric field. The ULF wave leads to electron heating, preferentially in the direction perpendicular to the local magnetic field. Secondary waves are generated within the ULF waveforms, including whistler waves near half of the electron cyclotron frequency, high-frequency electrostatic waves, and magnetosonic whistler waves. The work improves the understanding of the nature of 3-s ULF waves and the associated wave-particle interaction.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2026

Fundamental chemical physics revealed by scattering reactive open-shell atoms from surfaces

The dynamics of reactive atoms at surfaces are centrally important to areas such as heterogeneous catalysis, corrosion, materials degradation in extreme environments, and plasma etching. Remarkably detailed understanding of dynamical processes at surfaces has been extracted from scattering molecules and inert atoms under well-defined conditions. However, traditional techniques for generating beams of reactive atoms often result in impure mixtures, broad energy distributions, and poorly defined contributions of metastable electronically excited atoms. In this perspective article, we review the state-of-the-art in reactive atom surface scattering with a focus on experiments performed under controlled conditions on well-defined surfaces. We highlight a new technique for controlled state-to-state scattering of polyelectronic atoms from surfaces, based on vacuum ultraviolet photolysis and state-selective ion imaging. The new capabilities provide an avenue for research into the underexplored area of excited state and spin selective chemical dynamics at surfaces.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2023

Ion Channel Laser Based on Direct Laser Acceleration of a Shaped Beam Driver (Final Technical Report)

The main focus of our research was to understand the synergies between an electron bunch and a laser pulse when the two co-propagate through the plasma. We have clearly demonstrated using theoretical and computational modeling that the propagation distance of both the bunch and the laser pulse could be extended. The ability of the combined bunch/pulse system to extend the propagation distance and the size of the plasma bubble enables highly-efficient sources of relativistic electrons. As pointed out by the Plasma Decadal Study, such electron sources can be used for generating extremely bright x-rays for a variety of applications can serve as probes and diagnostics for other plasma experiments: high energy density (HED) sciences, inertial confinement fusion (ICF), and potentially Fusion Materials and Technology (FM&T). Development of advanced diagnostics of plasma-based accelerators is yet another key area identified by recent reports. Even broader security and medical applications of compact accelerator-based radiation sources, such as very high energy electron (VHEE) sources for FLASH radiobiology, have been identified by a recent multi-agency panel. A number of key technical issues were considered and successfully resolved during the course of the grant. Those include: beam loading effect of both the driver and witness bunches on the wake, laser channeling by the bunch, and the direct laser acceleration (DLA) of the driver bunch by the laser pulse. To demonstrate clear synergy, we were able to ascertain that the total energy gain of a witness bunch in the wake of the combined bunch/laser complex is large than the sum of the energy gains in the wake of the laser pulse alone, and the driver bunch alone. We have also demonstrated that not only the energy gain is improved, but the energy spread is not sacrificed. To carry out these simulations, we have to develop a range of in-house computational tools, including a fully-3D code WAND-PIC.

43 PARTICLE ACCELERATORS↗
DOE OSTI2025

Design workflow of a symmetric traveling wave antenna for fast ion production on DD tokamaks

Initial computational plasma physics scoping and a finite element method antenna modeling design workflow for a symmetric center-fed high-field side high harmonic fast wave traveling wave array (TWA) antenna are reported here. The TWA is designed to generate a test population of fast deuterium ions in an existing D–D tokamak by heating neutral beam deuterium ions, accelerating them from 80 keV to several hundred keV. The resulting fast particles are tailored to mimic key reactor energetic particle parameters with regards to exciting Alfven eigenmode instabilities, allowing for a D–D tokamak like DIII-D or ASDEX-U to replicate reactor-relevant conditions experimentally. Initial scenario scoping for high single-pass absorption as well as good preferential fast ion damping relative to electron damping was completed using the ray-tracing/Fokker–Planck codes GENRAY and CQL3D. Python RF network analysis packages were used to create a custom TWA optimization tool to inform a COMSOL flat antenna design, and Petra-M was used to study cold plasma effects. The TWA produced by this workflow has several novel features when compared to previous TWA studies, including symmetric center feeding, and passive end straps for image current cancellation for reduced impurity production. We show here that the antenna design workflow can readily produce TWA antennas optimized for reflection coefficient, image current cancellation, and launched power spectrum shape; and that a population of fast ions can be generated in the correct region of parameter space, warranting future more detailed studies.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2025

A future of inertial confinement fusion without laser-plasma instabilities

From the beginning of inertial confinement fusion (ICF) research, laser-plasma instabilities excited by narrowband lasers have limited the hydrodynamic design space of all laser-based approaches to inertial fusion energy (IFE). With advances in broadband laser technologies, the next generation of ICF drivers will likely have large bandwidth that is engineered to mitigate laser-plasma instabilities, thereby expanding the hydrodynamic design space to include both robust high yields (>200−MJ) with large-energy laser systems (>4 MJ) and high gains (>10) with moderate-energy laser facilities (<2 MJ). State-of-the-art simulations indicate that laser bandwidths of a few percent are required to mitigate instabilities for IFE-relevant conditions. To test these models and demonstrate that high-bandwidth lasers mitigate laser-plasma instabilities, the Fourth-generation Laser for Ultrabroadband eXperiments will be used with the OMEGA Laser System. The goal is to provide the community with the confidence to invest in a multiple-beam high-bandwidth laser facility that will demonstrate the necessary ablation pressures for robust direct-drive ignition without detrimental levels of hot electrons that degrade the implosion performance. It is important to recognize that the highest performing ICF implosions will likely never be completely LPI free because of the significant advantages to maximizing the laser intensity.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2024

Wall heating by subcritical energetic electrons generated by the runaway electron avalanche source *

Abstract Subcritical energetic electrons (SEEs) produced by the runaway electron (RE) avalanche source at energies below the runaway threshold are found to be the primary contributor to surface heating of plasma-facing components (PFCs) during final loss events. This finding is supported by theoretical analysis, computational modeling with the Kinetic Orbit Runaway electrons Code (KORC), and qualitative agreement with DIII-D experimental observations. The avalanche source generates significantly more secondary electrons below the runaway threshold, which thermalize rapidly when well-confined. However, during a final loss event, the RE beam impacts the first wall, and SEEs are deconfined before they can thermalize. Additionally, because the energy deposition length decreases faster than energy, the deposited energy density, and thus the maximum PFC surface temperature change, is larger for SEEs than REs. KORC simulations employ an analytic first wall to model particle deconfinement onto a non-axisymmetric wall composed of individual tiles. PFC surface heating is calculated using a 1D model extended to include an energy-dependent deposition length scale. Simulations of DIII-D qualitatively agree with infrared (IR) imaging only when SEEs from the avalanche source are included. These results demonstrate that SEEs are the dominant contributor to PFC surface heating and indicate that the avalanche source plays a critical role in the PFC damage caused during final loss events. The prominence of SEEs also has important implications for interpreting IR imaging, one of the primary diagnostics for RE-wall interaction diagnosis, despite REs dominating the energy and current density. This result improves predictions of wall damage due to post-disruption REs to estimate material lifetime and design RE mitigation systems for ITER and future reactors.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2021

Study of Ion Generation by a ps-laser for External Injection into Electron Beam Ion Source

We investigated ion generation from Al, Ti, Cu, Nb and Ta target elements by a picosecond-laser in the range of 10 11 – 10 13 W/cm 2 power densities at the target surface. A ps-laser with 1.27 mJ maximum energy within a 8 ps pulse and repetition rate up to 400 Hz has been used to generate a laser-ablated plasma. Dependencies of ion current vs time, total charge of registered ions as well as ion kinetic energy distributions are characterized using a Faraday cup. Significant difference in ion current dynamics between first, second and following shots onto the same target spot was found for all five target elements. The total charge of ions registered by the Faraday cup increase linearly with increasing laser pulse energy and are almost independent on the target element and number of shots onto the same target spot for all five target elements studied. Target craters have been examined using a commercially available microscope (Nikon Eclipse LV150) and crater cross section areas were found to be in the range of 0.0076 – 0.0172 mm 2 within the first five shots onto the same target spot for different target elements. A linear dependence of crater cross section square on laser pulse energy has been observed for the Ta target. Ion energy distributions for all target elements have a plateau or a slight peak in the energy range of 10 - 100 eV and long low-intensity energy tail up to tens of keV.

43 PARTICLE ACCELERATORS↗
DOE OSTI2025

MPEX AI Digital Twins

All magnetically confined plasma fusion power plant concepts (Tokamak, Spherical Tokamak, Stellarator, Mirror, ...) must exhaust the heat and plasma from the core confinement region to the material walls. The primary channel for this exhaust is through a plasma divertor which directs plasma along open magnetic field lines to a material target. The Material Plasma Exposure eXperiment (MPEX) illustrated in Figure 1, is a high-power, steady-state linear plasma device designed to produce the plasma material interaction (PMI) conditions of the divertor of future magnetic confinement fusion power plants: energy flux 20MW/m 2 , ion fluence 1031/m 2 , pulse duration 106 sec. These goals of plasma exposure in MPEX are well beyond those achieved in magnetic fusion experimental devices. Successfully achieving these high power steady state conditions for long pulses requires operational control of the heating and particle sources and the plasma flux to the walls and target. The MPEX AI Hot Spot Controller, proposed in this project, will help achieve the operational milestones of MPEX. The MPEX device will begin commissioning at the end of FY26. A smaller proto-MPEX was operated for 14,666 plasma discharges and will resume operation in September of 2025 as proto-MPEX-lite, with reduced capability, to test a new window for the Helicon plasma source. The proto-MPEX data has undergone surrogate modeling with machine learning methods (R. Archibald, 2022 IEEE International Conference on Big Data). This proto-MPEX data will be used to begin development of the AI digital twins described in this white paper. The scientific mission of MPEX is to qualify materials of different composition for use in the high energy and plasma flux conditions of a fusion power plant. The materials exposed in MPEX will in some cases be exposed to high neutron fluxes at other ORNL facilities to measure the changes to their PMI properties. The targets exposed in MPEX will be transported under vacuum to a Surface Analysis Station (SAS). The SAS will be equipped with the following diagnostics: Focused Ion Beam (FIB) for trench milling, 100-400 angstrom resolution scanning electron microscope (SEM), surface mapping x-ray spectrometer, high resolution camera, and a future upgrade to a laser induced breakdown spectroscopy quadruple mass spectrometer (LIBS-QMS). The MPEX experiments will generate diverse pre- and post-exposure measurement data of detailed material properties down to the crystal grain level in 3D for post-exposure assessment of PMI damage (e.g. cracking, melting, erosion and redeposition of the material). Physics models for the PMI, and how the material composition and manufacturing impact its performance under high energy plasma exposure, need to be validated with MPEX data to guide the selection of new candidate materials. Our vision for the MPEX AI Digital Twins project is to supply experimental and physics model simulation data to train Artificial Intelligence (AI) models for data processing, analysis, operational control, PMI and materials simulation to maximize the scientific output of the MPEX device. Ultimately, an AI digital twin of MPEX material assessment metrics for tested and synthetic material types with simulated PMI will be trained by the AI Modeling Teams on the experimental and physics simulation data submitted to the American Science Cloud by this project. A purely empirical search for the best material is inefficient given the finite number of samples that can be tested on MPEX. In order to expand the material properties database for training the MPEX Material Assessment AI Digital Twin, and to gain physics understanding of the PMI processes, physics models of the material properties and PMI processes are required. The physics simulations provide detailed simulation data, like impact angles for plasma ions, sputtering yields, transport of the ionized sputtered target material in the plasma, and redeposition locations. This simulation data expands the measurement data for deeper physics understanding. The experimental data is essential to validate the PMI and material structure simulation models. The validated models can then be used to generate new simulation data of MPEX material assessments for synthetic material compositions that have not been exposed in MPEX. These predictive simulations, plus the whole experimental dataset, will be used to train the MPEX Material Assessment AI Digital Twin allowing a rapid generative AI search for new materials with reduced PMI damage by interpolating the domain of the training set. These new optimum materials can be simulated with the physics codes and/or tested in MPEX. The ability of AI neural networks to interpolate multi-dimensional parameter spaces and generate virtual data is exploited for a more efficient search for optimum materials. The advent of the Transformational AI Models Consortium (TAIMC) is an opportunity to engage with state of the art private and public AI developers to achieve the goals of the AI digital twins and AI accelerated physics models proposed in this project. Our partners at ORNL from the Advance Scientific Computing Research (ASCR) organization will collaborate in accelerating the integrated plasma material interaction simulation framework. This simulation framework will provide a platform for generating simulation data across a range of physical fidelities, including hybrid methods that produce multi-fidelity results. This data will be leveraged for AI model development, both for generation of surrogates and the automation of simulation campaigns. A part of the research below will include collaborative efforts with the TAIMC to (i) adapt data storage approaches to ensure AI-readiness, (ii) provide a protypical exemplar to inform and exercise constructed workflows, and (iii) generate and share data, using the TAIMC unified AI data standard, for foundational models that will be trained from multiple sources across the DOE complex. We will also collaborate with the TAIMC, as well as the planned AI modeling teams, to develop approaches for reducing the cost of data generation. These include tailored multi-fidelity approaches as well as fine-tuning strategies to augment general, large-scale foundational models.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2021

Direct comparison of wire, foil, and hybrid X-pinches on a 200 kA, 150 ns current driver

Wire X-pinches (WXPs) have been studied comprehensively as fast (~1 ns pulse width), small (~1 μm) x-ray sources, created by twisting two or more fine wires into an “X” to produce a localized region of extreme magnetic pressure at the cross-point. Recently, two alternatives to the traditional WXP have arisen: the hybrid X-pinch (HXP), composed of two conical electrodes bridged by a thin wire or capillary, and the laser-cut foil X-pinch (LCXP), cut from a thin foil using a laser. We present a comparison of copper wire, hybrid, and laser-cut foil X-pinches on a single experimental platform: UC San Diego’s ~200 kA, 150 ns rise time GenASIS driver. All configurations produced 1–2 ns pulse width, ≤5 μm soft x-ray (Cu L-shell, ~1 keV) sources (resolutions diagnostically limited) with comparable fluxes. WXP results varied with linear mass and wire count, but consistently showed separate pinch and electron-beam-driven sources. LCXPs produced the brightest (~1 MW), smallest (≤5 μm) Cu K-shell sources, and spectroscopic data showed both H-like Cu K α lines indicative of source temperatures ≥2 keV, and cold K α (~8050 eV) characteristic of electron beam generated sources, which were not separately resolved on other diagnostics (within 1–2 ns and ≤200 μm). HXPs produced minimal K-shell emission and reliably single, bright, and small L-shell sources after modifications to shape the early current pulse through them. Benefits and drawbacks for each configuration are discussed to provide potential X-pinch users with the information required to choose the configuration best suited to their needs.

42 ENGINEERING↗
DOE OSTI2021

Free electron lasers driven by plasma accelerators: status and near-term prospects

Owing to their ultra-high accelerating gradients, combined with injection inside micrometer-scale accelerating wakefield buckets, plasma-based accelerators hold great potential to drive a new generation of free-electron lasers (FELs). Indeed, the first demonstration of plasma-driven FEL gain was reported recently, representing a major milestone for the field. Several groups around the world are pursuing these novel light sources, with methodology varying in the use of wakefield driver (laser-driven or beam-driven), plasma structure, phase-space manipulation, beamline design, and undulator technology, among others. This paper presents our best attempt to provide a comprehensive overview of the global community efforts towards plasma-based FEL research and development.

47 OTHER INSTRUMENTATION↗
DOE OSTI2025

Plasma-wakefield accelerator simultaneously boosts electron beam energy and brightness

High-energy particle colliders and X-ray free-electron lasers demand electron beams with qualities currently achieved only in kilometer-scale radio-frequency accelerators. Plasma accelerators promise a compact alternative but have faced challenges in delivering the needed beam quality at relevant energies. Here, we demonstrate that a plasma-wakefield accelerator operating in the nonlinear regime acts as a transformer to simultaneously boost the energy and brightness of an electron bunch injected from the plasma. Using a 10-GeV drive bunch and a three-stage meter-scale plasma source, we generated electron bunches exceeding 20 GeV with sub-percent energy spread, 2 mm·mrad normalized emittance, and multi-kA peak current. A significant number of drive-bunch electrons lost over 90% of their energy, a prerequisite for high energy-conversion efficiency. This demonstration of an energy transformer ratio exceeding two and a brightness enhancement over an order of magnitude opens a path towards cost-effective accelerators for future colliders and light sources.

experimental particle physics↗
DOE OSTI2021

The interplay between laser focusing conditions, expansion dynamics, ablation mechanisms, and emission intensity in ultrafast laser-produced plasmas

The interplay between ultrafast laser focusing conditions, emission intensity, expansion dynamics, and ablation mechanisms is critical to the detection of light isotopes relevant to nuclear energy, forensics, and geochemistry applications. Here, we study deuterium (2Hα) emission in plasmas generated from femtosecond laser ablation of a Zircaloy-4 target with a deuterium concentration of ≈37 at. %. Changes in emission intensity, plume morphology, crater dimensions, and surface modifications were investigated for varying focusing lens positions, where the laser was focused behind, at, and in front of the target. Spatially resolved optical emission spectroscopy and spectrally integrated plasma imaging were performed to investigate emission spectral features and plume morphology. Laser ablation crater dimensions and morphology were analyzed via optical profilometry and scanning electron microscopy. The 2Hα emission intensity showed significant reduction at the geometrical focal point or when the focal point is in front of the target. For all laser spot sizes, a two-component plume was observed but with different temporal histories. At the best focal point, the plume was spherical. When the laser was focused behind the target, the plume was elongated and propagated to farther distances than for the best focal position. In contrast, when the laser was focused in front of the target, filaments were generated in the beam path, and filament-plasma coupling occurred. By focusing the laser behind the target, the amount of material removal in the laser ablation process can be significantly reduced while still generating a plasma with a sufficient 2Hα emission signal for analysis.

Kautz, Elizabeth J. (ORCID:0000000263389223)↗
DOE OSTI2025

Molecular Layer Deposited Aluminum‐Based Hybrid Resist for High‐Resolution Nanolithography and Direct Ultra‐High Aspect Ratio Pattern Transfer

Inorganic-containing hybrid photoresists are critical for next-generation extreme ultraviolet (EUV) lithography and angstrom-era semiconductor miniaturization. However, associated conventional solution processing struggles to achieve ultrathin, uniform films with high conformality and compositional control, limiting overall patterning performance. Here, this study reports the systematic lithographic patterning characterization of an Al-based hybrid resist synthesized via vapor-phase molecular layer deposition (MLD), using the trimethylaluminum (TMA) metal precursor and the hydroquinone (HQ) aromatic organic linker. The resist supports both sub-20 nm high-resolution nanolithography and virtually infinite silicon plasma etch selectivity. Lithographic performance studied using electron beam lithography (EBL) as a proxy for EUV shows that, under an optimized process adopting post-exposure bake, the resist achieves the best resolution of 15.4 nm linewidth under stringent 1:1 line-space high-density patterning—limited only by the minimum beam size of the EBL system. The resist also shows wide dose latitude and balanced performance in resolution, roughness, and sensitivity. The infinite silicon etch selectivity, stemming from spontaneous aluminum oxyfluoride passivation layer formation, enables fabrication of micrometer-tall, 40 nm-wide silicon nanofin structures using only a ≈30 nm-thick resist layer, without no hard mask. These results highlight the potential of MLD-based hybrid resists for developing next-generation resist materials for micro/nanoelectronics manufacturing.

36 MATERIALS SCIENCE↗
DOE OSTI2026

Fluid-kinetic modeling of a high power density radio frequency inductively coupled positive hydrogen ion source

High power density radio-frequency (RF) inductively coupled positive ion sources are attractive candidates for next-generation neutral beam injection (NBI) systems, where higher injected power and longer pulse lengths are desired without sacrificing source reliability. Operating at absorbed power densities of order $\gt 1~\mathrm{W\,cm}^{-3}$ places these sources in a regime with stronger gas heating, higher dissociation, and non-Maxwellian electron energy distributions. The Large Uniform Plasma for Ionizing Neutrals (LUPIN) is an RF inductively coupled plasma source designed to explore this high power density regime and to provide guidance for a positive ion source upgrade for the DIII-D NBI system. LUPIN is designed to operate at up to 20 kW of RF power at 2 MHz, coupling energy through a cylindrical quartz vessel to achieve target ion current densities of $2100\,\mathrm{A\,m}^{-2}$ . This paper presents fluid-kinetic modeling of LUPIN using the hybrid plasma equipment model where electrons are treated kinetically, and the simulations reveal that electron energy distribution function transitions from nearly Maxwellian in the core to bi-Maxwellian towards the edge. Parametric simulations investigate the effects of RF power, gas pressure, and frequency on plasma density, ion flux, and uniformity. Parametric sweeps reveal that increasing power shifts the primary ionization channel from molecular to atomic with diminishing flux gains due to skin-depth contraction and gas rarefaction. Higher frequency localizes heating and increases $\mathrm{H}_2^+$ and $\mathrm{H}_3^+$ delivery to the grid, while elevated pressure boosts ionization yet hinders ion transport due to increase in collisionality.

inductively coupled plasma↗
DOE OSTI2021

A drift kinetic model for the expander region of a magnetic mirror

Here, we present a drift kinetic model for the free expansion of a thermal plasma out of a magnetic nozzle. This problem relates to plasma space propulsion systems, natural environments such as the solar wind, and end losses from the expander region of mirror magnetically confined fusion concepts such as the gas dynamic trap. The model incorporates trapped and passing orbit types encountered in the mirror expander geometry and maps to an upstream thermal distribution. This boundary condition and quasineutrality require the generation of an ambipolar potential drop of ~5T e /e, forming a thermal barrier for the electrons. The model for the electron and ion velocity distributions and fluid moments is confirmed with data from a fully kinetic simulation. Finally, the model is extended to account for a population of fast sloshing ions arising from neutral beam heating within a magnetic mirror, again resulting in good agreement with a corresponding kinetic simulation.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗