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458 records · Page 7

How Proton Incorporation Reshapes Lattice Dynamics In BaSnO 3 ‐Type Proton Conductors

Proton conduction in acceptor-doped perovskites is fundamentally a vibronic process: mobile H + and D + do not move independently, but dynamically co-vibrate with the surrounding oxygen–metal framework. Direct experimental evidence for this behavior is presented using in situ 119⁢ 𝑆⁢𝑛 nuclear resonance vibrational spectroscopy (NRVS) on hydrated, deuterated, and dry 𝐵⁢𝑎⁢𝑆⁢𝑛 1−𝑥⁢ 𝑌 𝑥 ⁢𝑂 3−𝛿 . Hydration induces systematic redistributions in the Sn-projected phonon density of states (PDOS), including an upshift of the first spectral moment by about 0.4 meV, indicating a stiffening of the extended Sn–O network. H/D isotopic substitution leaves the Sn-projected PDOS largely unchanged, with only subtle isotope-dependent spectral reweighting, demonstrating that protonic degrees of freedom are not localized oscillators but are embedded in collective lattice modes. These results are rationalized using a classical coupled proton–phonon oscillator model that links the observed PDOS variations to changes in effective force constants and vibrational mass terms. The model captures how H + and D + participate in cooperative lattice dynamics rather than forming isolated OH/OD entities. Overall, NRVS probes proton–lattice coupling in ceramic proton conductors and quantitatively describes how protonic defects modulate host lattice dynamics to enable phonon-assisted long-range proton transport.

36 MATERIALS SCIENCE

Returning an Entire Near-Earth Asteroid in Support of Human Exploration Beyond Low-Earth Orbit

This paper describes the results of a study into the feasibility of identifying, robotically capturing, and returning an entire Near-Earth Asteroid (NEA) to the vicinity of the Earth by the middle of the next decade. The feasibility of such an asteroid retrieval mission hinges on finding an overlap between the smallest NEAs that could be reasonably discovered and characterized and the largest NEAs that could be captured and transported in a reasonable flight time. This overlap appears to be centered on NEAs roughly 7 m in diameter corresponding to masses in the range of 250,000 kg to 1,000,000 kg. The study concluded that it would be possible to return a approx.500,000-kg NEA to high lunar orbit by around 2025. The feasibility is enabled by three key developments: the ability to discover and characterize an adequate number of sufficiently small near-Earth asteroids for capture and return; the ability to implement sufficiently powerful solar electric propulsion systems to enable transportation of the captured NEA; and the proposed human presence in cislunar space in the 2020s enabling exploration and exploitation of the returned NEA. Placing a 500-t asteroid in high lunar orbit would provide a unique, meaningful, and affordable destination for astronaut crews in the next decade. This disruptive capability would have a positive impact on a wide range of the nation's human space exploration interests. It would provide a high-value target in cislunar space that would require a human presence to take full advantage of this new resource. It would offer an affordable path to providing operational experience with astronauts working around and with a NEA that could feed forward to much longer duration human missions to larger NEAs in deep space. It represents a new synergy between robotic and human missions in which robotic spacecraft would retrieve significant quantities of valuable resources for exploitation by astronaut crews to enable human exploration farther out into the solar system. The capture, transportation, examination, and dissection of an entire NEA would provide valuable information for planetary defense activities that may someday have to deflect a much larger near-Earth object. Transportation of the NEA to lunar orbit with a total flight time of 6 to 10 years would be enabled by a ~40-kW solar electric propulsion system with a specific impulse of 3,000 s. The flight system could be launched to low-Earth orbit (LEO) on a single Atlas V-class launch vehicle, and return to lunar orbit a NEA with at least 28 times the mass launched to LEO. Longer flight times, higher power SEP systems, or a target asteroid in a particularly favorable orbit could increase the mass amplification factor from 28-to-1 to 70-to-1 or greater. The NASA GRC COMPASS team estimated the full life-cycle cost of an asteroid capture and return mission at approx.$2.6B.

asteroid mining

In-Flight Calibration of ESA Hera’s Hyperscout-H Imager

ESA’s Hera space mission is on its way to the mission target, the binary asteroid (65803) Didymos. HyperScout-H, one of the instruments onboard Hera, is a hyperspectral imager operating in the visible and near-infrared regions between 0.65 and 0.95 μm. HyperScout-H will enable a detailed assessment of the composition of both objects, Didymos and its satellite Dimorphos, the characterization of space weathering effects, and the possible presence of exogenous material on their surfaces. To monitor instrument functionality, calibration exposures are acquired regularly. This article describes the in-flight calibrations carried out for HyperScout-H during the commissioning and cruise phases. Bias and dark exposures, as well as stellar field observations, were acquired several times after launch. We update the calibration data and monitor instrument performance in the space environment. In addition, images of Earth and Moon were acquired from distances of 1.5 × 10 6 to 2.0 × 10 6 km, and Mars and its satellite were imaged during the flyby. In five images, the surface of Mars fills the entire field of view, enabling cross-validation of HyperScout-H results with those reported by other Mars missions. We characterize the detector under in-flight operational conditions. The calibration data indicate that the bias pattern is stable, the dark current remains negligible for short exposures, and the detector response is highly linear. We quantify the field-of-view alignment and geometric distortion, and evaluate the point spread function based on the stellar field observations. Stellar observations and Mars swing-by data provide updated radiometric calibration constants, suggesting that in-flight conditions have slightly modified the detector’s spectral response. In-flight calibrations are essential to ensure data quality and reliability.

Image Processing

MEAD In-situ Sampling and Testing at Haughton Crater

The Mars Exploration through Analog-site Drilling (MEAD) project is designed to demonstrate the feasibility and scientific value of robotic drilling missions to Mars in the search for evidence of past or extant life. MEAD conducts high-fidelity field simulations integrating drilling, autonomous operations, and in-situ life-detection and mineralogical instruments. The project tests the Signs of Life Detector (SOLID), proposed for the 2019 Discovery Mars Icebreaker mission, and ARIA (Astronaut Raman Instrument for ISRU and Astrobiology), which provides mineral identification and detects trace organics and volatiles, including indicators of organic thermal maturity. Because current and planned Mars drilling missions operate largely “blind,” MEAD also evaluates the use of drill-induced vibrations recorded by deployed geophones to enable local subsurface mapping for improved targeting of drilling and sampling. In August 2025, MEAD completed its first-year field deployment to Haughton Crater in the Canadian High Arctic, an established Mars impact-crater terrestrial analog site, bringing a Honeybee Robotics TRIDENT drill with applied automation, alongside ARIA, SOLID, and FleetSpace geophones.

Haughton Crater

Characterization of a New Phase and Its Effect on the Work Characteristics of a Near-Stoichiometric Ni30Pt20Ti50 High-Temperature Shape Memory Alloy (HTSMA)

A new phase observed in a nominal Ni 30 Pt 20 Ti 50 (at.%) high temperature shape memory alloy has been characterized using transmission electron microscopy and 3-D atom probe tomography. This phase forms homogenously in the B2 austenite matrix by a nucleation and growth mechanism and results in a concomitant increase in the martensitic transformation temperature of the base alloy. Although the structure of this phase typically contains a high density of faults making characterization difficult, it appears to be trigonal (-3m point group) with a o ~1.28 nm and c o ~1.4 nm. Precipitation of this phase increases the microhardness of the alloy substantially over that of the solution treated and quenched single-phase material. The effect of precipitation strengthening on the work characteristics of the alloy has been explored through load-biased strain-temperature testing in the solution-treated condition and after aging at 500 ºC for times ranging from 1 to 256 hours. Work output was found to increase in the aged alloy as a result of an increase in transformation strain, but was not very sensitive to aging time. The amount of permanent deformation that occurred during thermal cycling under load was small but increased with increasing aging time and stress. Nevertheless, the dimensional stability of the alloy at short aging times (1-4 hours) was still very good making it a potentially useful material for high-temperature actuator applications.

A Garg

A Panchromatic View of the Restless SN 2009ip Reveals the Explosive Ejection of a Massive Star Envelope

The double explosion of SN 2009ip in 2012 raises questions about our understanding of the late stages of massive star evolution. Here we present a comprehensive study of SN 2009ip during its remarkable rebrightenings. High-cadence photometric and spectroscopic observations from the GeV to the radio band obtained from a variety of ground-based and space facilities (including the Very Large Array, Swift, Fermi, Hubble Space Telescope, and XMM) constrain SN 2009ip to be a low energy (E (is) approximately 10(exp 50) erg for an ejecta mass approximately 0.5 solar mass) and asymmetric explosion in a complex medium shaped by multiple eruptions of the restless progenitor star. Most of the energy is radiated as a result of the shock breaking out through a dense shell of material located at approximately 5 × 10( exp 14) cm with M approximately 0.1 solar mass, ejected by the precursor outburst approximately 40 days before the major explosion. We interpret the NIR excess of emission as signature of material located further out, the origin of which has to be connected with documented mass-loss episodes in the previous years. Our modeling predicts bright neutrino emission associated with the shock break-out if the cosmic-ray energy is comparable to the radiated energy. We connect this phenomenology with the explosive ejection of the outer layers of the massive progenitor star, which later interacted with material deposited in the surroundings by previous eruptions. Future observations will reveal if the massive luminous progenitor star survived. Irrespective of whether the explosion was terminal, SN 2009ip brought to light the existence of new channels for sustained episodic mass loss, the physical origin of which has yet to be identified.

view

AT2025ulz and S250818k: Leveraging DESI Spectroscopy in the Hunt for a Kilonova Associated with a Subsolar-mass Gravitational-wave Candidate

On 2025 August 18, the LIGO–Virgo–KAGRA collaboration reported a subthreshold gravitational-wave candidate detection consistent with a subsolar-mass neutron star merger, denoted S250818k. An optical transient, AT2025ulz, was discovered within the localization region. AT2025ulz initially appeared to meet the expected behavior of kilonova emission, the telltale signature of a binary neutron star merger. The transient subsequently rebrightened after ∼5 days and was classified as a Type IIb supernova. In this work, we analyze the observations of its host galaxy obtained by the Dark Energy Spectroscopic Instrument (DESI). From the DESI spectrum, we obtain a secure redshift of z = 0.084840 ± 0.000006. If S250818k has an astrophysical origin, this places the transient within 2σ of the gravitational-wave distance and results in an integral overlap between the gravitational-wave alert and the transient location of log 10 $\mathcal{I} ≈ 3.9 - 4.2$. Our analysis of the host galaxy’s spectral energy distribution reveals a star-forming, dusty galaxy with stellar mass ∼10 10 M ⊙ , broadly consistent with the population of both short gamma-ray bursts and core-collapse supernova host galaxies. We also present our follow-up of DESI-selected candidate host galaxies using the Fraunhofer Telescope at the Wendelstein Observatory, and show the promise of DESI for associating or rejecting candidate electromagnetic counterparts to gravitational-wave alerts. These results emphasize the value of DESI’s extensive spectroscopic dataset in rapidly characterizing host galaxies, enabling spectroscopic host subtraction, and guiding targeted follow-up.

Hall, Xander J. [Carnegie Mellon University, Pitts

In Situ Tracking of Nonthermal Plasma Etching of ZIF-8 Films

Surface characterization is critical for understanding the processes used for preparing catalysts, sorbents, and membranes. Nonthermal plasma (NTP) is a process that achieves high reactivity at low temperatures and is used to tailor the surface properties of materials. In this work, we combine the capabilities of infrared reflection absorption spectroscopy (IRRAS) with NTP for the in situ interrogation of zeolitic imidazolate framework-8 (ZIF-8) thin films to probe modifications in the material induced by oxygen and nitrogen plasmas. The IRRAS measurements in oxygen plasma reveal etching of organic ligands with sequential removal of the methyl group and imidazole ring and with the formation of carbonyl moieties (C═O). In contrast, nitrogen plasma induces mild etching and grafting of nitrile groups (−C≡N). Scanning electron microscopy imaging shows that oxygen plasma, at prolonged times, significantly degrades the ZIF-8 film at the grain boundaries. Treatment of ZIF-8 membranes using mild plasma conditions yields a fivefold enhancement for H 2 /N 2 and CO 2 /CH 4 ideal selectivities and an eightfold enhancement for CO 2 /N 2 ideal selectivity. Additionally, the new tools described here can be used for spectroscopic in situ tracking of plasma-induced chemistry on thin films in general.

IRRAS

Tunable Metasurface External-Cavity Quantum Cascade Lasers up to 5.74 THz

Vertical-external-cavity surface-emitting lasers based on amplifying quantum-cascade metasurfaces are demonstrated in the 5–6 THz range for the first time. Enhanced parasitic coupling to lossy surface modes requires updated design guidelines, while elevated losses and lower available material gain limit the scaling of the metasurface period from previous designs. A series of metasurface devices with varying periods employing both uniform and focusing metasurfaces is fabricated and characterized. Reducing the metasurface period below 70% of the free-space wavelength enables devices with superior performance, achieving pulsed operation up to 5.74 THz with peak output powers of 1.3 mW, maximum operating temperatures up to 83 K, and continuous-wave operation up to 54 K with 23 μW of output power. In the best case, single-mode tuning from 5.23–5.73 THz, which corresponds to a 9.1% fractional tuning, is realized with near-Gaussian far-field profiles maintained across the entire range. Finally, these results establish quantum cascade vertical-external-cavity surface-emitting lasers as promising candidates for high-frequency local oscillator applications in heterodyne spectroscopy.

gallium arsenide

NOx mediated formation of ε – UO 3 during thermal decomposition of uranyl nitrate hexahydrate under static air conditions

The thermal decomposition of uranyl nitrate hexahydrate in air at temperatures of 650 – 800 °C is expected to yield α – U 3 O 8 through intermediate UO 3 phases. Here, n this study, Raman spectroscopy complimented by powder X-ray diffraction revealed the unexpected formation of ε – UO 3 as an accompanying phase during thermal decomposition of UNH at 700 °C under static air conditions. Experiments demonstrated that ε – UO 3 does not form during the initial ramp up stage nor during the high temperature heating period; but instead forms during the cooling stage between 250 – 400 °C. Additional experiments revealed that UNH initially decomposes through an amorphous UO 3 intermediate prior to α – U 3 O 8 formation. Attempts to bypass the U 3 O 8 precursor in the formation of ε – UO 3 were unsuccessful, supporting the necessity of U 3 O 8 (α – U 3 O 8 in this study) in the formation of ε – UO 3 . The observed phase evolution is proposed to result from the NOx species generated during UNH thermal decomposition, which create localized oxidizing conditions within the furnace under static air conditions. Furthermore, a predominantly phase pure ε – UO 3 was synthesized under static air conditions through the addition of an extra plateau at 250 °C during the cooling step. These findings demonstrate the importance of gas-phase chemistry and cooling conditions in uranium oxide phase evolution and provide additional insight into ε – UO 3 formation pathways.

Epsilon uranium trioxide

Revealing key structures for reversible sulfur redox in amorphous polymeric sulfur

Amorphous polymeric sulfur cathodes, such as sulfurized polyacrylonitrile (SPAN), enable high-energy lithium-sulfur batteries without cobalt or nickel, leveraging abundant sulfur. However, the limited in situ understanding of their synthesis and electrochemistry has impeded targeted optimization. Here, in this study, we integrate operando high-energy total scattering with sulfur K-edge X-ray absorption spectroscopy to monitor SPAN's formation and cycling in real time. Our results show that S-C bond formation halts further fusion of cyclized polyacrylonitrile, fostering π-π stacking and a transition from long-chain to short-chain sulfur-critical for reversible sulfur redox. These features synergistically minimize polysulfide dissolution and charge-transfer resistance, enabling optimized SPAN to achieve high capacity retention over 1,000 cycles. Operando X-ray absorption spectroscopy reveals that residual protons drive thiol-thione tautomerism, with lithium replacement during the first discharge causing ~20% irreversible capacity loss. To enhance performance, minimizing -NH groups and expanding pyridine networks are key. These findings transform SPAN optimization from empirical tuning to mechanism‑guided engineering and point the way towards sulfur loadings and energy densities competitive with state‑of‑the‑art Li‑ion cathodes.

25 ENERGY STORAGE

Reconstruction and Dissolution of Copper Catalysts during Electrocatalytic Nitrate Reduction

Copper-based electrocatalysts are widely explored for electrochemical nitrate remediation, yet their stability under operating conditions remains poorly understood. While nanoscale and subnanoscale Cu motifs are known to restructure during the nitrate reduction reaction (NO 3 RR), how these transformations translate into irreversible material loss remains unclear. Here, we quantify Cu dissolution during NO 3 RR as a function of catalyst architecture and electrolyte chemistry using two model systems: single-atom Cu (Cu 1 ) and Cu nanoparticles (Cu NP ). Time-resolved leaching measurements, integrated with in situ X-ray absorption spectroscopy (XAS), reveal measurable Cu loss for both catalysts during NO 3 RR. Dissolution is concentrated at the initiation of electrolysis, coinciding with rapid restructuring, and depends strongly on morphology, with Cu NP consistently exhibiting greater Cu loss than Cu 1 . In situ XAS reveals that Cu 1 forms transient metallic clusters under reduction that largely redisperse upon returning to open-circuit voltage, whereas Cu NP undergoes reduction of an oxidized surface layer accompanied by sustained Cu loss during electrolysis. Notably, the presence of nitrate significantly intensifies restructuring and Cu loss, highlighting the critical role of electrolyte composition. Furthermore, these findings establish a direct link between electrochemical restructuring and Cu dissolution, unveiling electrolyte-dependent interactions as key determinants of catalyst durability in electrochemical nitrate conversion.

36 MATERIALS SCIENCE

The U.S. Fusion Materials Community Roadmap: Near-term research priorities for the development of plasma-facing and structural materials for fusion power plants

In response to the needs of a rapidly growing private fusion industry, the U.S. Fusion Materials Coordinating Committee (FMCC) and the broader U.S. fusion materials research community undertook an extensive effort to create a comprehensive roadmap for fusion materials development. The result of this effort was the U.S. Fusion Materials Community Roadmap (US-FMCR), which describes the steps needed to advance the technical maturity of leading candidates for plasma-facing materials and structural materials for fusion power plants from laboratory-scale experiments to a point of sufficient technological readiness for industrial adoption and implementation. However, researchers face significant resource constraints as well as very aggressive pilot plant development timelines. Thus, the research strategies detailed in the US-FMCR require further assessment to downselect the specific tasks that must be prioritized within the next two to three years, in order to make the most efficient use of funding, human resources, and experimental facilities. This paper presents an overview of the US-FMCR and its development process. We also present the subset of research objectives that the FMCC identified as the most urgent research priorities for the U.S. fusion materials research community. The state-of-the-art of materials research is also highlighted for each class of materials considered in the US-FMCR. The recommendations presented here integrate an extensive evaluation of the current status of fusion materials research with a broad cross-section of opinion from the wider U.S. fusion community.

Ferry, Sara [Massachusetts Institute of Technology

Speciation of Transition Metal Dissolution in Electrolyte from Common Cathode Materials

Significant capacity loss has been observed across extended cycling of lithium-ion batteries cycled to high potential. One of the sources of capacity fade is transition metal dissolution from the cathode active material, ion migration through the electrolyte, and deposition on the solid-electrolyte interphase on the anode. While much research has been conducted on the oxidation state of the transition metal in the cathode active material or deposited on the anode, there have been limited investigations of the oxidation state of the transition metal ions dissolved in the electrolyte. Here, in this work, X-ray absorption spectroscopy has been performed on electrolytes extracted from cells built with four different cathode active materials (LiMn 2 O 4 (LMO), LiNi 0.5 Mn 1.5 O 4 (LNMO), LiNi 0.8 Mn 0.1 Co 0.1 O 2 (NMC811), and (x Li 2 MnO 3 *(1-x) LiNi a Mn b Co c O 2 , with a+b+c=1) (LMRNMC)) that were cycled at either high or standard potentials to determine the oxidation state of Mn and Ni in solution. Inductively coupled plasma-mass spectrometry has been performed on the anodes from these cells to determine the concentration of deposited transition metal ions. While transition metal ions were found dissolved in all electrolytes, the oxidation state(s) of Mn and Ni were determined to be dependent on the cathode material and independent of cycling potential.

25 ENERGY STORAGE

Landmark Publications in Analytical Atomic Spectrometry: Fundamentals and Instrumentation Development

The almost-two-centuries history of spectrochemical analysis has generated a body of literature so vast that it has become nearly intractable for experts, much less for those wishing to enter the field. Authoritative, focused reviews help to address this problem but become so granular that the overall directions of the field are lost. This broader perspective can be provided partially by general overviews but then the thinking, experimental details, theoretical underpinnings, and instrumental innovations of the original work must be sacrificed. In the present compilation, this dilemma is overcome by assembling the most impactful publications in the area of analytical atomic spectrometry. Each entry was proposed by at least one current expert in the field and supported by a narrative that justifies its inclusion. The entries were then assembled into a coherent sequence and returned to contributors for a round-robin review. A total of 48 scientists participated in this endeavor, contributing a combined list of 1055 individual articles spanning 17 sub-disciplines of spectrochemical analysis into what the current community views as “key” publications. Of these cited articles, 60 received nominations from four or more scientists, establishing them as the most indispensable reading materials. The outcome of this collaborative effort is intended to serve as a valuable resource not only for current practitioners in atomic spectroscopy but also for present and future students who represent coming generations of analytical atomic spectroscopists.

Instruments & Instrumentation

Stoichiometric effects on grain growth in zirconium carbide coatings for high-temperature nuclear fuel

Interest in coated particle fuel for space nuclear propulsion (SNP) has expanded in recent years due to successful demonstrations of the resiliency of the coatings to extreme environments. For SNP applications, the coating layer for the particle design needs to be able to withstand exposure to high temperature hydrogen during operating conditions. ZrC has been proposed as a protective layer, however, it is important to understand the high temperature behavior to ensure adequate protection to this fuel. In this study, surrogate ZrC coated particles were heat treated at 1900 °C up to 300 min, to examine how the microstructure evolves when exposed to high temperature. Scanning electron microscopy and electron backscatter diffraction (EBSD) were conducted to determine grain size and grain boundary character and orientation to determine the degree of change in the ZrC layer post heat treatment. Raman spectroscopy provided insight to understand how the as-fabricated stoichiometry of each sample contributed to the differences in grain growth behavior. Despite the as-fabricated samples showing a similar initial grain size and grain boundary character, the samples with a higher amount of excess carbon exhibited smaller grain areas and slower growth rates when exposed to 1900 °C. In conclusion, this investigation details the as-fabricated microstructure of the ZrC layer, specifically grain size, evolved under high temperature as this can impact the performance of the fuel under operating conditions.

EBSD

Aliovalent gallium dopants remove Ti 3+ defects and improve photocatalytic and photoelectrochemical water oxidation properties of LaTiO 2 N

LaTiO 2 N is a promising semiconductor for the water splitting reaction due to its 2.1 eV band gap and stability against corrosion. However, its solar energy conversion is limited by Ti 3+ recombination defects introduced during ammonolysis. Here we show for the first time that Ti 3+ defects in LaTiO 2 N can be suppressed with incorporation of 2, 5, and 10% aliovalent gallium (Ga 3+ ) dopants during synthesis via the layered La 2 Ti 2 O 7 intermediate. Electron paramagnetic resonance (EPR) spectroscopy on the solid powders confirms a reduction in the Ti 3+ donor density from 2.97 × 10 17 cm −3 for the non-doped material to ∼6.24 × 10 16 cm −3 for 5% Ga-doped LaTiO 2 N. The remaining Ti 3+ defects are concentrated near the LaTiO 2 N surface, according to X-ray photoelectron spectroscopy. The defect reduction shifts the optical absorption edge from 2.02 to 2.09 eV and eliminates a broad absorption band at 1050 nm from the optical absorption spectra. It also removes a 1.0–1.7 eV sub-band gap photovoltage signal from surface photovoltage spectra. This suggests that empty Ti 3+ d-orbitals are located 1.0–1.7 eV above the LaTiO 2 N valence band edge. Removing these recombination states with increasing Ga 3+ content enhances the photoconversion efficiency of LaTiO 2 N during water oxidation. The optimized 2 wt% CoO x -loaded 5% Ga-doped LaTi O2 N material has a 16% AQE (400 nm) for O 2 production from aqueous silver nitrate solution and a ∼2.1 mA cm −2 water oxidation photocurrent at 1.23 V under 100 mW cm −2 Xe arc lamp illumination. The water oxidation photocurrent is stable during a 50 min test, and the Faraday efficiency for O 2 generation is 97%, confirming short-term corrosion stability of LaTiO 2 N. Altogether, these results provide a better understanding of the distribution, concentration, and impact of Ti 3+ defects on the optical, photovoltage, and photoelectrochemical properties of LaTiO 2 N. In combination with other defect control strategies, aliovalent Ga 3+ doping can help bring the solar energy conversion efficiency of LaTiO 2 N closer to the theoretical limit.

Wang, Li [University of California, Davis, CA (Uni

Low thermal budget dopant activation in shallow junctions of implanted Si via Tunable plasma enhanced annealing

Low thermal budget (LTB) annealing has become increasingly critical for shallow junctions as semiconductor devices are scaled down. Plasma Enhanced Annealing (PEA) has emerged as a promising LTB annealing process, however its mechanisms remain unclear. In this study, arsenic and boron implanted silicon wafers were subjected to helium or argon ion bombardment generated by annealing plasmas under controlled ion energies and doses in a home-built annealing reactor. The structural and electrical changes were characterized by four-point probe measurements, secondary ion mass spectrometry, Raman spectroscopy and spectroscopic ellipsometry. A pronounced reduction in sheet resistance, accompanied by a decrease in the damage layer thickness demonstrates the surface selective annealing capability of PEA process. Comparative studies using He and Ar plasmas and related ion bombardment reveal a dependence of activation efficacy on both ion species and the dopant implantation profile. Furthermore, a multi-step annealing mechanism is proposed, consisting of an initial (low dose) structural recovery stage followed by the generation of “extended” defects and concluded at large doses by an enhanced dopant activation. The proposed annealing kinetics are thought to be controlled by ion flux, dose and energy. Finally, these results highlight PEA as an effective, surface-selective, LTB approach for shallow-dopant activation and near surface annealing, and provide mechanistic insights into PEA processes.

dopant activation