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A piezoelectric microvalve employs a valve element formed of hermetically sealed and opposed plates flexed together by a cross axis piezoelectric element. Large flow modulation with small piezoelectric actuator displacement is obtained by perimeter augmentation of the valve seat which dramatically increases the change in valve flow area for small deflections.
Modules of additional drive circuitry have been developed to enhance the functionality of a family of commercially available positioning motors (Picomotor . or equivalent) that provide linear motion controllable, in principle, to within increments .30 nm. A motor of this type includes a piezoelectric actuator that turns a screw. Unlike traditional piezoelectrically actuated mechanisms, a motor of this type does not rely on the piezoelectric transducer to hold position: the screw does not turn except when the drive signal is applied to the actuator.
A piezoelectrically actuated shutter is undergoing development for use in experiments on laser cooling of atoms. The shutter is required to be compatible with ultrahigh vacuum [pressure of 10(exp -9) torr (.1.3 x 10(exp -7) Pa) or less] and to be capable of performing reliably in the vacuum for at least one year. In operation, the shutter would enable the collection and launch of successive samples of cold atoms and would enable the interrogation of the immediately preceding sample while preventing disturbance of the atoms of that sample by light from the collection region. A major constraint is imposed on the design and operation of the shutter by a requirement that it not generate a magnetic field large enough to perturb an atomic clock. An electromagnetically actuated shutter could satisfy all requirements except this one. Hence, it was decided to use piezoelectric instead of electromagnetic actuation. The shutter (see figure) includes two commercial piezoelectrically driven flexure stages that produce a travel of 0.5 mm. Levers mechanically amplify the travel to the required level of 1 cm. Problems that remained to be addressed at the time of reporting the information for this article included lifetime testing and correction of a tendency for shutter blades to bounce open.
Modifications have been proposed to effect further improvement of the device described in Improved Piezoelectrically Actuated Microvalve (NPO-30158), NASA Tech Briefs, Vol. 26, No. 1 (January 2002), page 29. To recapitulate: What is being developed is a prototype of valves for microfluidic systems and other microelectromechanical systems (MEMS). The version of the valve reported in the cited previous article included a base (which contained a seat, an inlet, and an outlet), a diaphragm, and a linear actuator. With the exception of the actuator, the parts were micromachined from silicon. The linear actuator consisted of a stack of piezoelectric disks in a rigid housing. To make the diaphragm apply a large sealing force on the inlet and outlet, the piezoelectric stack was compressed into a slightly contracted condition during assembly of the valve. Application of a voltage across the stack caused the stack to contract into an even more compressed condition, lifting the diaphragm away from the seat, thereby creating a narrow channel between the inlet and outlet. The positions of the inlet and outlet, relative to the diaphragm and seat, were such that the inlet flow and pressure contributed to sealing and thus to a desired normally-closed mode of operation.
Reactive-ion etching (RIE) under conditions described below has been found to be a suitable means for patterning piezoelectric thin films made from such materials as PbZr(1-x)Ti(x)O3 or Ba(x)Sr(1.x)TiO3. In the original application for which this particular RIE process was developed, PbZr(1-x)Ti(x)O3 films 0.5 microns thick are to be sandwiched between Pt electrode layers 0.1 microns thick and Ir electrode layers 0.1 microns thick to form piezoelectric capacitor structures. Such structures are typical of piezoelectric actuators in advanced microelectromechanical systems now under development or planned to be developed in the near future. RIE of PbZr(1-x)Ti(x)O3 is usually considered to involve two major subprocesses: an ion-assisted- etching reaction, and a sputtering subprocess that removes reactive byproducts. RIE is favored over other etching techniques because it offers a potential for a high degree of anisotropy, high-resolution pattern definition, and good process control. However, conventional RIE is not ideal for patterning PbZr(1-x)Ti(x)O3 films at a thickness as great as that in the original intended application. In order to realize the potential benefits mentioned above, it is necessary to optimize process conditions . in particular, the composition of the etching gas and the values of such other process parameters as radio-frequency power, gas pressure, gas-flow rate, and duration of the process. Guidelines for determining optimum conditions can be obtained from experimental determination of etch rates as functions of these parameters. Etch-gas mixtures of BCl3 and Cl2, some also including Ar, have been found to offer a high degree of selectivity as needed for patterning of PbZr(1-x)Ti(x)O3 films on top of Ir electrode layers in thin-film capacitor structures. The selectivity is characterized by a ratio of approx.10:1 (rate of etching PbZr(1-x)Ti(x)O3 divided by rate of etching Ir and IrO(x)). At the time of reporting the information for this article, several experiments on RIE in BCl3 and Cl2 (and sometimes Ar) had demonstrated the 10:1 selectivity ratio, and further experiments to enhance understanding and obtain further guidance for optimizing process conditions were planned.
High-temperature piezoelectrics are a key technology for aeronautics and aerospace applications such as fuel modulation to increase the engine efficiency and decrease emissions. The principal challenge for the insertion of piezoelectric materials is the limitation on upper use temperature which is due to low Curie-Temperature (TC) and increasing electrical conductivity. BiScO3-PbTiO3 (BS-PT) system is a promising candidate for improving the operating temperature for piezoelectric actuators due to its high TC (greater than 400 C). Bi2O3 was shown to be a good sintering aid for liquid phase sintering resulting in reduced grain size and increased resistivity. Zr doped and liquid phase sintered BS-PT ceramics exhibited saturated and square hysteresis loops with enhanced remenant polarization (37 microC per square centimeter) and coercive field (14 kV/cm). BS-PT doped with Mn showed enhanced field induced strain (0.27% at 50kV/cm). All the numbers indicated in parenthesis were collected at 100 C.
Piezoelectric actuators are used in many manipulation, movement, and mobility applications as well as transducers and sensors. When used at the resonance frequencies of the piezoelectric stack, the actuator performs at its maximum actuation capability. In this Space Grant internship, three applications of piezoelectric actuators were investigated including hammering augmenters of rotary drills, energy harvesters, and piezo-motors. The augmenter shows improved drill performance over rotation only. The energy harvesters rely on moving fluid to convert mechanical energy into electrical power. Specific designs allow the harvesters more freedom to move, which creates more power. The motor uses the linear movement of the actuator with a horn applied to the side of a rotor to create rotational motion. Friction inhibits this motion and is to be minimized for best performance. Tests and measurements were made during this internship to determine the requirements for optimal performance of the studied mechanisms and devices.
A flow energy harvesting device having a harvester pipe includes a flow inlet that receives flow from a primary pipe, a flow outlet that returns the flow into the primary pipe, and a flow diverter within the harvester pipe having an inlet section coupled to the flow inlet, a flow constriction section coupled to the inlet section and positioned at a midpoint of the harvester pipe and having a spline shape with a substantially reduced flow opening size at a constriction point along the spline shape, and an outlet section coupled to the constriction section. The harvester pipe may further include a piezoelectric structure extending from the inlet section through the constriction section and point such that the fluid flow past the constriction point results in oscillatory pressure amplitude inducing vibrations in the piezoelectric structure sufficient to cause a direct piezoelectric effect and to generate electrical power for harvesting.
There is a need for sample verification and mass quantification of rock, soil and/or ice obtained by sample acquisition mechanisms on extraterrestrial bodies. For many scientific instruments information about the mass of the sample would aid in the interpretation of the data and help prevent the portioning system from overloading instrument ports. Additionally, on a potential sample return mission it is likely that a sample confirmation or mass determination requirement would be implemented before the spacecraft would be commanded to return to Earth or Lunar orbit. In an effort to meet these potential requirements, a piezoelectric resonance balance is being developed to measure a frequency change proportional to the sample mass change. In previous work1 we developed a resonance balance which produced large non-linear frequency changes due to the addition of a large mass. In this study we have looked at a variety of resonator geometries in an effort to linearize the frequency shift with mass. In addition, we have investigated the use of oscillator/counter circuitry to track the frequency shift of the piezoelectric mass balance. In this new design the frequency shifts automatically when a mass is placed on the balance and the counter circuit calculates the frequency shift. This frequency is then converted to a mass using calibration tables determined previously. An additional feature we have implemented is the use of a high frequency thickness mode piezoelectric resonator to mix the sample and a reactant or solvent. This allows for measuring both sample and reagent prior to ingestion by the instrument. This paper will focus on the design requirements and how they are affected by the local gravity and acoustic properties of the sample. Designs which allow for easy loading and unloading of the balance will also be discussed.
There is a high demand for high-performance and low-cost uncooled infrared (IR) detectors. In order to meet this need we are investigating the use of MEMS piezoelectric resonator technology using aluminum nitride (AlN) thin films. Recent research has shown that piezoelectric resonators have the potential to be used as a core element for highly sensitive, low-noise, and low-power uncooled IR detectors. A novel design of an AlN IR sensor based on piezoelectric bending resonator is described and analyzed in this paper. The detector is constructed by using thermally mismatched materials which stress the resonator and shift the resonance frequency. The IR thermal input is sensed by monitoring the frequency shift induced by the in-plan thermal stress. These designs have the potential for very high sensitivity and are compatible with commercially viable CMOS fabrication technology.
Two elements are essential in structural health monitoring utilizing dynamic responses: response measurement with high-frequency contents, i.e., small characteristic wavelengths, that can adequately reflect damage features, and effective inverse identification analysis that is however oftentimes under-determined. The advancement of smart structure integration has led to active interrogation through frequency-sweeping piezoelectric impedance measurement at high frequency range. In this research we develop a multi-objective optimization formulation for the identification of damage location and severity utilizing piezoelectric impedance. While one optimization objective is to match the response measurement with finite element model prediction in the damage parametric space, the other is the number of locations of damage, i.e., the sparsity of damage index as the solution vector, since damage usually occurs within a small number of locations. This multi-objective formulation fits well the under-determined nature of damage identification, as it naturally provides multiple solutions as basis for further elucidation. The challenge remaining is how to find a small solution set that can include the actual damage scenario. Here we develop a novel inverse identification framework utilizing the intelligent swarm optimizer which possesses flexibility for enhancement. We first embed a sparsity enforcement process into the population generation of the optimizer, which yields a solution repository intrinsically possessing sparsity. We then apply reinforcement learning so the agents can adaptively opt for local strategies with the aim of enriching the searching patterns to diversify the solutions. Through the incorporation of a Q-table, searching toward more promising directions will be rewarded. Our case analyses employing experimental data indicate that this sparsity-conscious multi-objective particle swarm optimization technique can lead to a small solution set which generally encompasses the true damage scenario. This effectively solves the structural damage identification problem with piezoelectric impedance measurement.
Venus is one of the planets in the solar systems that are considered for potential future exploration missions. It has extreme environment where the average temperature is 460 deg C and its ambient pressure is about 90 atm. Since the existing actuation technology cannot maintain functionality under the harsh conditions of Venus, it is a challenge to perform sampling and other tasks that require the use of moving parts. Specifically, the currently available electromagnetic actuators are limited in their ability to produce sufficiently high stroke, torque, or force. In contrast, advances in developing electro-mechanical materials (such as piezoelectric and electrostrictive) have enabled potential actuation capabilities that can be used to support such missions. Taking advantage of these materials, we developed a piezoelectric actuated drill that operates at the temperature range up to 500 deg C and the mechanism is based on the Ultrasonic/Sonic Drill/Corer (USDC) configuration. The detailed results of our study are presented in this paper
Multi-Fiber CompositesTM (MFC's) produced by Smart Materials Corp behave essentially like thin planar stacks where each piezoelectric layer is composed of a multitude of fibers. We investigate the suitability of using previously published inversion techniques for the impedance resonances of monolithic co-fired piezoelectric stacks to the MFCTM to determine the complex material constants from the impedance data. The impedance equations examined in this paper are those based on the derivation. The utility of resonance techniques to invert the impedance data to determine the small signal complex material constants are presented for a series of MFC's. The technique was applied to actuators with different geometries and the real coefficients were determined to be similar within changes of the boundary conditions due to change of geometry. The scatter in the imaginary coefficient was found to be larger. The technique was also applied to the same actuator type but manufactured in different batches with some design changes in the non active portion of the actuator and differences in the dielectric and the electromechanical coupling between the two batches were easily measureable. It is interesting to note that strain predicted by small signal impedance analysis is much lower than high field stains. Since the model is based on material properties rather than circuit constants, it could be used for the direct evaluation of specific aging or degradation mechanisms in the actuator as well as batch sorting and adjustment of manufacturing processes.
The circular piezoelectric bender laser tuner to replace conventional laser tuners when mirror diameters up to 0.50 inch are sufficient is described. The circular piezoelectric bender laser tuner offers much higher displacements per applied volt and permits laser control circuits to be fabricated using standard operational amplifiers, rather than the expensive high-voltage amplifiers required by conventional tuners. The cost of the device is more than one order of magnitude lower than conventional tuners and the device is very rugged with all mechanical resonances easily designed to be greater than 3kHz. In addition to its use as a laser frequency tuner, the circular bender tuner should find many applications in interferometers and similar devices.
The design of a prototype piezoelectric shaker and its development to date is described. Although certain design problems remain to be solved, the piezoelectric system shows promise for adaptation to a larger payload system, such as the proposed geotechnical centrifuge at the Ames Research Center.
Piezoelectric and pyroelectric responses of beta-phase (Phase I) polyvinylidene fluoride are predicted for a model system of polarizable point dipoles. The model incorporates the influence of the orthorhombic crystal structure by including the dependence of the internal electric field on the lattice parameters. Strong anisotropy in the piezoelectric response under uniaxial stress is predicted as a consequence of the orthorhombic lattice structure. Predictions are found to be in reasonable agreement with room-temperature experimental data.
Vibrating device containing two piezoelectric ceramic slabs acts as mechanical driver. Eventually substitutes for small continuous or stepping electric motors of slow to moderate speeds. Piezoelectric driver simple in construction, requires no precise dimensions, inexpensive to make, and needs no lubrication. Not damaged by stalling or overloads and safe for use in explosive atmospheres; Motion controllable in micron-size increments, and holds position when power turned off. Potential applications as positioner or mover. Used to position instrument pointers, antennas, or solar panels; to focus lenses; or operate tuners, recording instruments, or valves.
The active control of rotordynamic vibrations and stability by magnetic bearings and electromagnetic shakers have been discussed extensively in the literature. These devices, though effective, are usually large in volume and add significant weight to the stator. The use of piezoelectric pushers may provide similar degrees of effectiveness in light, compact packages. Tests are currently being conducted with piezoelectric pusher-based active vibration control. Results from tests performed on NASA test rigs as preliminary verification of the related theory are presented.